CN102606622A - Pre-pressed type air bearing - Google Patents

Pre-pressed type air bearing Download PDF

Info

Publication number
CN102606622A
CN102606622A CN201110021691XA CN201110021691A CN102606622A CN 102606622 A CN102606622 A CN 102606622A CN 201110021691X A CN201110021691X A CN 201110021691XA CN 201110021691 A CN201110021691 A CN 201110021691A CN 102606622 A CN102606622 A CN 102606622A
Authority
CN
China
Prior art keywords
pneumatic bearing
platform
type pneumatic
prepressing type
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201110021691XA
Other languages
Chinese (zh)
Inventor
张维麟
何长政
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hiwin Mikrosystem Corp
Hiwin Technologies Corp
Original Assignee
Hiwin Mikrosystem Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hiwin Mikrosystem Corp filed Critical Hiwin Mikrosystem Corp
Priority to CN201110021691XA priority Critical patent/CN102606622A/en
Publication of CN102606622A publication Critical patent/CN102606622A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention provides a pre-pressed type air bearing, which is arranged on a platform and comprises a base piece, at least one air path, at least one containing part, at least one magnetic piece and an elastic part, wherein the base piece comprises a base body and an adjusting part; the adjusting part extends outwards from the connection end surface at one side of the base body along a geometric center shaft direction of the base body, and enables the extending tail end to be slidably connected on the platform; the air path is arranged inside the base body and forms at least one air outlet on the working end surface of the base body, back to the connection end surface of the base body; the containing part is concavely arranged on the working end surface; the magnetic piece is contained in the containing part; and the elastic part is slidably arranged on the adjusting part, is arranged between the base body and the platform and is used for supplying elastic force so as to enable a buffer distance to be kept between the base body and the platform. The pre-pressed type air bearing disclosed by the invention has the advantages of saving space, simplifying manufacturing process, and being free from moment formed in a process of generating pre-pressing force, and easy for controlling the pre-pressing force and the like.

Description

The prepressing type pneumatic bearing
Technical field
The present invention adjusts element relevant for platform, is meant a kind of prepressing type pneumatic bearing especially.
Background technique
Along with the march toward trend of precise treatment, microminiaturization of the part of high-tech product, relatively also increasingly high for the positioning accuracy request of working platform.In order to reach high precision, be directly to drive a working platform at present mostly through a linear motor, in order to the lifting machining accuracy, and can reach the location apace.Yet during owing to this working platform displacement of this linear motor driven, in the start process, can receive the interference of frictional force between this working platform and a guide rail junction plane, and global stability and precision are descended.
See also shown in Figure 1; Existing technology is that a pneumatic bearing 1 is located on the working platform 2 at present, the linear motor start of directly arranging in pairs or groups again, wherein; This pneumatic bearing 1 and 3 of guide rail junction planes have an air gap 4; 1 of this pneumatic bearing is floated on it, and this working platform 2 does not need directly to contact with this guide rail junction plane 3, in order to reduce the frictional force of 3 of this working platform 2 and this guide rail junction planes effectively.Moreover, because 4 nothings of this pneumatic bearing 1 and this guide rail junction plane directly contact, promptly need not lubricate, the surface can not produce abrasion yet, can increase working life, and the noise and vibration that produces during start is little, also can significantly promote the stability in the use.
Though use pneumatic bearing to have above-mentioned some advantages; But must stablize air-gap separation; Make it increase rigidity, so the pneumatic bearing design must combine the precompressed mode to control this air gap, adjust air gap to reach optimum value through the pneumatic bearing Vertical direction again; The mode of existing at present control air gap is in external magnet precompressed to be provided, and combines the ball connecting type pneumatic bearing with the rotation adjustment.Yet above-mentioned existing mode still can produce following disappearance: one of which, need provide exceptional space in order to design magnet precompressed, make on whole the manufacturing comparatively complicated; Two, precompressed magnet can form moment when the pneumatic bearing precompression is provided, and reduces whole stability.
Summary of the invention
Main purpose of the present invention is to provide a kind of prepressing type pneumatic bearing, and it is directly to provide precompressed in pneumatic bearing, can not form moment.
Another object of the present invention is to provide a kind of prepressing type pneumatic bearing, it does not need the extra space placement magnet that provides that precompressed is provided, in order to simplify production method.
For realizing above-mentioned purpose, the present invention adopts following design proposal:
A kind of prepressing type pneumatic bearing, in order to be arranged on the platform, it includes:
A seat spare has a seat body, and extend from the connection end face of this body one side along the geometrical center axle direction of this body outward adjustment part, and extending end is slidably connected on this platform; At least one air flue is located at this body inside, and on the operative end surface of this connection end face, forms at least one air outlet in this body is opposing;
At least one holding part is arranged with on this operative end surface;
At least one magnetic part is located in this holding part;
A spring section is slidedly arranged on this adjustment part, and between this body and this platform, keeps a buffering spacing between this body and this platform in order to provide elastic force to make.
Aforesaid prepressing type pneumatic bearing, wherein, said adjustment part is a screw rod, with an end and the said seat body bolt of shaft major axis.
Aforesaid prepressing type pneumatic bearing, wherein, the geometrical central axis of said holding part is coaxial in the geometrical central axis of said seat body.
Aforesaid prepressing type pneumatic bearing, wherein, said seat part also includes at least one first positioning part, and in order to said adjustment part is positioned this body, at least one second positioning part is in order to be positioned said magnetic in the holding part.
Aforesaid prepressing type pneumatic bearing, wherein, said each first positioning part is a set screw.
Aforesaid prepressing type pneumatic bearing, wherein, said each second positioning part is a set screw.
Aforesaid prepressing type pneumatic bearing, wherein, said elastomer is a cup spring.
Aforesaid prepressing type pneumatic bearing, wherein, said holding part is a screw, with said magnetic part bolt.
Aforesaid prepressing type pneumatic bearing, wherein, said magnetic part also includes a volumetric cylinder, and spiral shell is located in the said holding part, and a magnet is set and is located in this volumetric cylinder.
The invention has the beneficial effects as follows:
Prepressing type pneumatic bearing of the present invention is that this magnetic part directly is installed in this part, can controlled precompression in order to provide one, and through spring section adjustment pneumatic bearing rotary freedom, thereby have the following advantages:
One of which, do not need in pneumatic bearing exterior design one space, in order to put the magnetic part that precompression is provided.
Two,, simplify manufacture process because this magnetic part directly is arranged in this body.
Three, owing to directly contain this magnetic part in the pneumatic bearing, the precompression that is provided is the direction perpendicular to horizontal plane, and can not form moment.
Four, the user must directly adjust position or the position of this magnetic part in this holding part that this body and this adjustment part are spirally connected along with demand, and the control precompression.
Description of drawings
Fig. 1 is the sectional view of existing technology.
Fig. 2 is the top view of preferred embodiment of the present invention.
Fig. 3 is the sectional view of 3-3 direction in Fig. 2.
Fig. 4 is the use schematic representation of preferred embodiment of the present invention.
Embodiment
Embodiment 1
See also Fig. 2 to shown in Figure 3, the prepressing type pneumatic bearing 10 that provides in a preferred embodiment of the present invention in order to be arranged on the platform (not shown), mainly is by a part 20, one holding parts, 30, one magnetic parts 40 and 50 compositions of a spring section, wherein:
This part 20 has one square body 21; An adjustment part 22 of forming by screw rod; Make the shaft major axis coaxial corresponding, and be bolted in one with an end of shaft major axis and be arranged with in the screw 212 of the connection end face 211 of this body 21 bottom sides, and the shaft major axis the other end extends predetermined length outward from the connection end face 211 of these body 21 1 sides with the geometrical central axis of this body 21; And extending end is slidably connected on this platform; At least one air flue 23 is located at this body 21 inside, and on this connects an operative end surface 213 of end face 211, forms at least one air outlet 231 in that this body 21 is opposing.
This holding part 30 is for to be arranged with the screw on the operative end surface 213 of this body 21, and down is arranged with proper depth coaxially along the geometrical central axis of this body 21.
This magnetic part 40 has a top and passes through empty circular volumetric cylinder 41, and all side rings are provided with screw thread, and coaxial spiral shell is located in this holding part 30, and a magnet 42 is embedded the inside that is contained in this volumetric cylinder 41.
This spring section 50 is slidedly arranged on this adjustment part 22; And between between this body 21 and this platform; It includes two cup springs 51, wears respectively privately mutually coaxially to each other and with Pan Kou to be slidedly arranged on this adjustment part 22, and the spacer 52 of a suitable thickness is slidedly arranged on this adjustment part and between respectively between this cup spring 51; In view of the above, this spring section 50 can provide elastic force to make and keep a buffering spacing between this body 21 and this platform.
Further, this part 20 also includes at least one first positioning part 24 and at least one second positioning part 25, wherein:
Respectively this first positioning part 24 is made as the set screw of two predetermined lengths; Axis is in the geometrical central axis of this body 21 and be arranged in this body 21; And be connected on the shaft of this adjustment part 22 with major axis one end, in order to this adjustment part 22 is positioned in this body 21.
Respectively this second positioning part 25 is made as the set screw of two predetermined lengths; Axis is in the geometrical central axis of this body 21 and be arranged in this body 21; And on the stack shell 41 all sides with major axis one end butt magnetic part 40, in order to this magnetic part 40 is positioned in this holding part 30.
Composition through said elements; Prepressing type pneumatic bearing 10 provided by the present invention can be applicable on the board of various high precision, see also shown in Figure 4, wherein; One guide rail platform 60; Slip mutually with the end in addition of these adjustment part 20 shaft major axis, one makes moving platform 70, must do linear displacement and be located at this part 30 tops with respect to this guide rail platform 60.Because gas constantly discharges from this air outlet 231 respectively, and this is done in the moving platform start process, and 20 of this parts have an air gap 80, and this is made moving platform 70 and is suspended in this air gap 80 top offsets.
The magnetic force that utilizes this magnetic part 40 to be provided; Make 70 of moving platforms and the rightabout precompression of buoyancy as this part 20 and this; In order to control this air gap 80; And the elastic force that utilizes this spring section 50 to provide, adjustment pneumatic bearing rotary freedom, the stability when doing moving platform 70 displacements to keep this.In addition, the user can change the position of this magnetic part 40 according to different demands, in order to the control precompression, for example: adjust the depth location of this magnetic part 40 in this holding part 30; Or, change the position of this body 21 through this adjustment part 22 of rotation; And can be bolted in the degree of depth on this body 21 through changing this adjustment part 22, change according to this and should cushion spacing d, to adjust the scope of this spring section 50 elastic buffer that provided.
Prepressing type pneumatic bearing 10 provided by the present invention; Its major technology is characterised in that this magnetic part 40 directly is installed in this part 20; One can controlled precompression in order to provide, and through spring section 50 adjustment pneumatic bearing rotary freedoms, and have the following advantages:
One of which, do not need in pneumatic bearing exterior design one space, in order to put the magnetic part that precompression is provided.
Two,, simplify manufacture process because this magnetic part directly is arranged in this body.
Three, owing to directly contain this magnetic part in the pneumatic bearing, the precompression that is provided is the direction perpendicular to horizontal plane, and can not form moment.
Four, the user must directly adjust position or the position of this magnetic part in this holding part that this body and this adjustment part are spirally connected along with demand, and the control precompression.
In addition; What must explain in addition is; Prepressing type pneumatic bearing provided by the present invention, except as above-mentioned embodiment in this adjustment part with this guide rail platform slips mutually, also can this adjustment part and this be made moving platform and slip mutually; Make this air gap between this guide rail platform and this part, also the effect of attainable cost invention.
Below only be to specify the present invention by preferred embodiment, for any simple modification or the variation that this embodiment did, for example the change of this adjustment part or this cup spring kenel etc. all should be within the claim of the present invention.

Claims (9)

1. prepressing type pneumatic bearing, is characterized in that it includes in order to be arranged on the platform:
A seat spare has a seat body, and extend from the connection end face of this body one side along the geometrical center axle direction of this body outward adjustment part, and extending end is slidably connected on this platform; At least one air flue is located at this body inside, and on the operative end surface of this connection end face, forms at least one air outlet in this body is opposing;
At least one holding part is arranged with on this operative end surface;
At least one magnetic part is located in this holding part;
A spring section is slidedly arranged on this adjustment part, and between this body and this platform, keeps a buffering spacing between this body and this platform in order to provide elastic force to make.
2. prepressing type pneumatic bearing according to claim 1 is characterized in that, said adjustment part is a screw rod, with an end and the said seat body bolt of shaft major axis.
3. prepressing type pneumatic bearing according to claim 1 is characterized in that, the geometrical central axis of said holding part is coaxial in the geometrical central axis of said seat body.
4. prepressing type pneumatic bearing according to claim 2; It is characterized in that said seat part also includes at least one first positioning part, in order to said adjustment part is positioned this body; At least one second positioning part is in order to be positioned said magnetic in the holding part.
5. prepressing type pneumatic bearing according to claim 4 is characterized in that, said each first positioning part is a set screw.
6. prepressing type pneumatic bearing according to claim 4 is characterized in that, said each second positioning part is a set screw.
7. prepressing type pneumatic bearing according to claim 1 is characterized in that, said elastomer is a cup spring.
8. prepressing type pneumatic bearing according to claim 1 is characterized in that, said holding part is a screw, with said magnetic part bolt.
9. prepressing type pneumatic bearing according to claim 8 is characterized in that, said magnetic part also includes a volumetric cylinder, and spiral shell is located in the said holding part, and a magnet is set and is located in this volumetric cylinder.
CN201110021691XA 2011-01-19 2011-01-19 Pre-pressed type air bearing Pending CN102606622A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110021691XA CN102606622A (en) 2011-01-19 2011-01-19 Pre-pressed type air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201110021691XA CN102606622A (en) 2011-01-19 2011-01-19 Pre-pressed type air bearing

Publications (1)

Publication Number Publication Date
CN102606622A true CN102606622A (en) 2012-07-25

Family

ID=46524280

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110021691XA Pending CN102606622A (en) 2011-01-19 2011-01-19 Pre-pressed type air bearing

Country Status (1)

Country Link
CN (1) CN102606622A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103811880A (en) * 2013-09-12 2014-05-21 江苏中远电气设备有限公司 Connection structure for pipe bus and terminal
CN104454985A (en) * 2013-09-24 2015-03-25 大银微系统股份有限公司 Keeping structure between air bearing and adjusting member

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US5098203A (en) * 1991-03-11 1992-03-24 Contraves Goerz Corporation Bearing system
US5141337A (en) * 1991-12-06 1992-08-25 Hanaway Ronald L Guide post, guide sleeve and air impulse rotary ball cage
CN101670836A (en) * 2009-10-09 2010-03-17 友达光电股份有限公司 Guide magnetic point, walkway, unmanned handling system and assembly method of walkway

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US5098203A (en) * 1991-03-11 1992-03-24 Contraves Goerz Corporation Bearing system
US5141337A (en) * 1991-12-06 1992-08-25 Hanaway Ronald L Guide post, guide sleeve and air impulse rotary ball cage
CN101670836A (en) * 2009-10-09 2010-03-17 友达光电股份有限公司 Guide magnetic point, walkway, unmanned handling system and assembly method of walkway

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103811880A (en) * 2013-09-12 2014-05-21 江苏中远电气设备有限公司 Connection structure for pipe bus and terminal
CN104454985A (en) * 2013-09-24 2015-03-25 大银微系统股份有限公司 Keeping structure between air bearing and adjusting member

Similar Documents

Publication Publication Date Title
CN101839280B (en) Combined air flotation device unaffected by disturbance of air pipes
CN104362228B (en) The high-accuracy motion platform of marble
CN102145456B (en) Tabletop milling machine, gantry tabletop milling machine and combined motion platform
CN101318292A (en) Linear electric motor driven four-shaft linkage numerical control machine
CN102606622A (en) Pre-pressed type air bearing
CN202207902U (en) V-type iron capable of adjusting supporting height
CN201208696Y (en) Following support for vibration reduction
CN201632914U (en) Double-endsurface sanding belt beveler of air door barstock
CN201446403U (en) L-shaped beam guide rail structure of gantry machining centre and gantry engraving and milling machine
CN1714961A (en) Die cushion control device and die cushion control method
CN108337872A (en) A kind of high-precision minitype suction nozzle module and its design method
CN103786037B (en) Oblique beam off-load composite guide rail structure
CN201950511U (en) Rolling ball screw rod bracket
CN208073437U (en) A kind of oil kowtowing machine with stroke regulating structure
CN201979356U (en) Grinding head used for end face grinding
CN104690559A (en) Horizontal boring spindle tail support double-line-rail supporting structure and installation method
CN203541609U (en) Multi-shaft device supporting structure of horizontal drilling machine
CN102528191A (en) Simple, three-dimensional and adjustable electrode shaking mechanism for processing inverted cone of precise electric spark micro hole
CN203726143U (en) Oblique transverse beam unloading composite guide rail structure
CN2930960Y (en) Grinding head column mechanism for flat grinder
CN202132391U (en) Air suspension shaft sleeve
CN207133039U (en) A kind of spring pressure life test machine
CN201627889U (en) Wear resistant support device for ball screw
CN202278624U (en) Drilling head
TWI429501B (en) Pre-stressed air bearing

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120725