CN102601019B - Spin-coating device with cylindrical surface - Google Patents
Spin-coating device with cylindrical surface Download PDFInfo
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- CN102601019B CN102601019B CN201210083957.8A CN201210083957A CN102601019B CN 102601019 B CN102601019 B CN 102601019B CN 201210083957 A CN201210083957 A CN 201210083957A CN 102601019 B CN102601019 B CN 102601019B
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- face
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Abstract
The invention relates to a spin-coating device with a cylindrical surface, which comprises a right-angled rack. The horizontal part of the rack is provided with a linear slide bench vertical to the vertical part of the rack, the linear slide bench is vertically provided with a spin-coating unit which can move along the linear slide bench, the vertical part of the rack is provided with a workpiece clamping unit and an adhesive drying device, and an adhesive bin is arranged on the workpiece clamping unit; the spin-coating unit comprises a drag plate arranged on the linear slide bench, the drag plate is provided with two columns, a rotary spin-coating roller is arranged between the two columns, and a shaft at one end of the spin-coating roller is provided with a spin-coating roller rotation driving component; and the workpiece clamping unit comprises a head frame and a tail frame which are arranged vertical to the vertical part of the rack, a workpiece clamping rotary shaft is arranged between the head frame and the tail frame, one end of the workpiece clamping rotary shaft is provided with a workpiece rotation driving component, and the head frame or the tail frame is provided with an adhesive thickness control caliper. A photosensitive adhesive layer of any thickness, particularly large thickness, can be efficiently formed on external cylindrical surfaces of different specifications and cannot be limited by the viscosity of photosensitive adhesive, and the consumption of the photosensitive adhesive can be reduced.
Description
Technical field
The present invention relates to the even adhesive dispenser in a kind of face of cylinder.
Background technology
Application practice shows, the fine structure on axial workpiece external cylindrical surface is obvious to promoting the serviceability effect of part.For example, fine pit, the groove on cylinder head, bearing roller can be stored lubricating fluid, holds abrasive dust, reduce adsorption power, thereby reduces to rub, avoid the heat transfer property of surface adhesion, enhancing heat exchanger channels; The armature on external cylindrical surface with micro-printed circuit is compared traditional armature, can significantly reduce the rotary inertia of armature, thereby reduces motor inertia, reduces motor commutation time, the significantly precision of lifting motor.Electrolysis and electroforming are high with its working (machining) efficiency, the advantages such as structure graph is unrestricted become one of important processing method of these surface fine structures, but adopt the method for electrolysis or electroforming must first on the external cylindrical surface of workpiece, form screened film that one deck and workpiece fit tightly to mask non-machining area.
At present, the screened film on external cylindrical surface is mainly to form by the method for photoetching after pad pasting or coating photoresists.Pad pasting is that the insulation mantle of making is attached on cylinder to form screened film, this method cannot form graphic structure in the junction of screened film, and the associativity of mantle and workpiece is poor, in electrolysis (or electroforming), is easily rushed to open, comes off, thereby cause processing unsuccessfully; After coating photoresists, the method for photoetching can overcome the deficiency of pad pasting to the full extent, and structure graph is unrestricted, and application potential is huge.But, on cylinder, being coated with at present photoresists is to realize by spray-bonding craft mostly, as disclosed in number of patent application 01209937.6 " preparing printing screen glue sprayer " provides a kind of device that sprays photoresists on external cylindrical surface, and spray-bonding craft photoresists viscosity used is lower, the glue-line forming is thinner, be subject to the restriction of photoresists viscosity to be difficult to form the required thickening bondline of the large depth-to-width ratio fine structure of electroforming, be of limited application, also have larger photoresists wasting phenomenon simultaneously.Therefore, be necessary to provide a kind of photoresists viscosity limitation that is not subject to, the controlled even adhesive dispenser of thickening bondline of coating thickness on external cylindrical surface.
Summary of the invention
The object of the invention is to provide a kind of face of cylinder even adhesive dispenser, can not be subject to photoresists viscosity limitation, forms particularly large thickness photosensitive layer of any thickness on external cylindrical surface.
To achieve these goals, the present invention adopts following technical scheme: the even adhesive dispenser in a kind of face of cylinder, comprise perpendicular type frame, frame horizontal component is provided with the straight line slide unit perpendicular to frame vertical portion, on straight line slide unit, be vertically provided with the even glue unit that can move along straight line slide unit, frame vertical portion is provided with clamping workpiece unit and drying glue device, and top, clamping workpiece unit is provided with and can be parallel to the Jiao Cang that axis of workpiece moves back and forth; Described even glue unit comprises the planker being arranged on straight line slide unit slide block, and planker is provided with smoothing roller, and smoothing roller one end axle is provided with smoothing roller rotary driving part; Described clamping workpiece unit comprises two headstock and the tailstocks that perpendicular to frame vertical portion, arrange, is provided with clamping workpiece rotating shaft between the headstock and tailstock, and one end of clamping workpiece rotating shaft is provided with workpiece rotary driving part, and the headstock or tailstock are provided with the thick control slide calliper rule of glue.
Between two columns and above being positioned at smoothing roller, by blade shaft, be provided with the scraper that length is longer than smoothing roller length, between scraper front end and column, be provided with the spring that scraper front end and smoothing roller cylinder are fitted tightly, low after high before scraper, the top of scraper rear end between smoothing roller and workpiece, scraper is longer than smoothing roller 1～2cm.
Described planker is provided with two can move along planker length direction the column of adjusting, between two columns, is provided with rotating smoothing roller; Described column coordinates by bolt assembly with the T-shaped groove arranging on planker, and the headstock and tailstock coordinate by bolt assembly with the T-shaped groove arranging in frame.
Described straight line slide unit is electric linear slide unit, and planker is provided with for collecting the catch tray of the unnecessary liquid photosensitive glue of drippage, and catch tray is below between smoothing roller and workpiece.
Described drying glue device is electric heating drying glue device or far infrared drying glue device, is fixedly mounted in the frame between the headstock and tailstock, and drying glue device length is greater than Workpiece length 2～3cm.
The thick control slide calliper rule of described glue are radially fixed on tailstock along workpiece rotary driving part, and the thick control slide calliper rule of glue can radially regulate, slide calliper rule precision 1 μ m.
Described Jiao Cang is provided with arrangement for adjusting height, and Jiao Cang bottom is provided with valve, and the gum outlet of Jiao Cang is apart from excircle of workpiece cylinder vertical height 1～2cm.
Described smoothing roller is the cylinder of any surface finish, and smoothing roller surface is provided with high-hydrophobic material layer.
Described smoothing roller rotary driving part and workpiece rotary driving part form by servomotor, built-up shaft bearing, shaft coupling.
Described smoothing roller turns clockwise, and workpiece is rotated counterclockwise, and smoothing roller linear velocity is more than or equal to workpiece alignment speed, keeps the gap of 5～15 μ m between smoothing roller surface and surface of the work.
The present invention sets bondline thickness by the thick control slide calliper rule of glue, utilizes the smoothing roller of any surface finish and the reverse rotation between workpiece that photoresists are coated on excircle of workpiece cylinder, and drying glue device is dried photoresists, raises the efficiency; Electric linear slide unit drives the setback of smoothing roller continuous micro in even glue process, by the photosensitive layer progressive additive on workpiece, can form the controlled thickening bondline of thickness; Scraper scrapes the photoresists that adhere on smoothing roller and sends back to surface of the work, guarantees that smoothing roller has reduced the waste of photoresists in the time of clean.In addition, the headstock of the present invention, tailstock, two columns are any adjustable structure of spacing, can meet the even glue demand of different size workpiece.In sum, the even adhesive dispenser in the face of cylinder of the present invention can efficiently form the particularly photosensitive plastic coating of large thickness of any thickness on the external cylindrical surface of plurality of specifications, and is not subject to the viscosity limitation of photoresists, reduces the consumption of photoresists.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is principle schematic of the present invention.
The specific embodiment
Embodiment: as shown in Figure 1 and Figure 2, the even adhesive dispenser in a kind of face of cylinder, comprise perpendicular type frame 1, frame 1 horizontal component is provided with the straight line slide unit 2 perpendicular to frame 1 vertical portion, straight line slide unit 2 is electric linear slide unit, is vertically provided with the even glue unit that can move along straight line slide unit 2 on straight line slide unit 2, and frame 1 vertical portion is provided with clamping workpiece unit and drying glue device 10, drying glue device 10 is electric heating drying glue device or far infrared drying glue device, is fixedly mounted in the frame of 7 of the headstock 12 and tailstocks.Top, clamping workpiece unit is provided with and can be parallel to the glue storehouse 9 that workpiece 11 axis move back and forth, and glue storehouse 9 is provided with arrangement for adjusting height, and 9 bottoms, glue storehouse are provided with valve 9-1.Even glue unit comprises the planker 3 being arranged on straight line slide unit 2 slide blocks, planker 3 is provided with two can move along planker 3 length directions the column 4 of adjusting, column 4 coordinates by bolt assembly with the T-shaped groove arranging on planker 3, two 4, columns are provided with rotating smoothing roller 5, and smoothing roller 5 one end axles are provided with smoothing roller rotary driving part 15; Clamping workpiece unit comprises two headstock 12 and the tailstocks 7 that perpendicular to frame 1 vertical portion, arrange, the headstock 12 and tailstock 7 coordinate by bolt assembly with the T-shaped groove arranging in frame 1, between the headstock 12 and tailstock 7, be provided with clamping workpiece rotating shaft, one end of clamping workpiece rotating shaft is provided with workpiece rotary driving part 14, the headstock 12 or tailstock 7 are provided with the thick control slide calliper rule 8 of glue, and the thick control slide calliper rule 8 of glue can radially regulate.Planker 3 is provided with for collecting the catch tray 16 of the unnecessary liquid photosensitive glue of drippage, and catch tray 16 is below between smoothing roller 5 and workpiece 11.Smoothing roller 5 turns clockwise, and workpiece 11 is rotated counterclockwise, and smoothing roller 5 linear velocities are more than or equal to workpiece 11 linear velocities, is optimum state when both are equal.
Between two columns 4 and be positioned at smoothing roller 5 tops and be provided with by blade shaft the scraper 6 that length is longer than smoothing roller 5 length, between scraper 6 front ends and column 4, be provided with the spring 13 that scraper 6 front ends and smoothing roller 5 cylinders are fitted tightly, low after the front height of scraper 6, the top of scraper 6 rear ends between smoothing roller 5 and workpiece 11.
The cylinder that smoothing roller 5 is any surface finish, smoothing roller 5 surfaces are provided with high-hydrophobic material layer.Smoothing roller rotary driving part 15 and workpiece rotary driving part 14 form by servomotor, built-up shaft bearing, shaft coupling.Smoothing roller 5 turns clockwise, and workpiece 11 is rotated counterclockwise, and the linear velocity of smoothing roller 5 and workpiece 11 equates.
Operation principle of the present invention is: utilize liquid photosensitive glue in the adhesiveness difference of smoothing roller 5 surfaces and surface of the work, liquid photosensitive glue is arrived to high-adhesiveness workpiece 11 surfaces by the continuous roller coating of low-adhesion smoothing roller 5, the device 10 of drying glue is simultaneously by the continuous baking and curing of liquid photosensitive glue of workpiece 11 surface adhesion, fixed, from level to level smoothing roller 5 surface is upper and and workpiece between the photoresists in gap to be coated to workpiece 11 surfaces upper, until desired thickness.
During concrete enforcement, perpendicular type frame 1 vertically end is provided with the T-shaped groove of twice, vertical frames 1 is vertically held the electric linear slide unit 2 that is fixed on frame 1 horizontal ends, be arranged on the even glue unit on electric linear slide unit, be arranged on frame vertically clamping workpiece unit, the drying glue device 10 of end, the thick control slide calliper rule 8 of glue, are positioned at the glue storehouse 9 of clamping workpiece unit top.
Even glue unit comprises the planker 3 that is provided with T-shaped groove, two columns 4, surfacing is polytetrafluoroethylene (PTFE) and bright and clean cylindrical smoothing roller 5, bearing assembly, smoothing roller driver element 15, spring 13, scraper 6, catch tray 16, planker 3 is fixed on the slide block of electric linear slide unit 2, two columns 4 are connected and can be fixed on arbitrary spacing position by the T-shaped groove on planker 3 and bolt assembly and planker 3 are vertical, the smoothing roller 5 that two ends are provided with bearing assembly is arranged on two columns 4 middle parts, by servomotor, built-up shaft bearing, the smoothing roller driver element 15 that shaft coupling forms is fixed on column 4, its output is connected to drive smoothing roller 5 to turn clockwise with smoothing roller 5 coaxial transmissions, slightly being longer than the spring 13 that the scraper 6 of smoothing roller 5 is fixed on column 4 is pressed on the cylinder of smoothing roller 5, scraper is longer than smoothing roller 1～2cm, for scraping the photoresists that adhere on smoothing roller 5 and sending back to even Jiao Chu, catch tray 16 is fixed on planker 3, for collecting the unnecessary liquid photosensitive glue of drippage, the gap that keeps 5～15 μ m between smoothing roller 5 surfaces and workpiece 11 surfaces, be convenient to successively gluing.
Clamping workpiece unit comprises the headstock 12, tailstock 7, workpiece rotary driving part 14, by the T-shaped groove in frame 1, vertically vertical being connected of end also can be fixed on arbitrary spacing position to the headstock 12 in the length range that is less than smoothing roller 5 with frame 1 with bolt assembly with tailstock 7, to meet the clamping demand of different size workpiece, the workpiece rotary driving part 14 being comprised of servomotor, built-up shaft bearing, shaft coupling is fixed on the headstock 12, and its output is connected to drive clamping to be rotated counterclockwise at the workpiece 11 of 7 of the headstock 12 and tailstocks with workpiece 11 coaxial transmissions.
Drying glue device 10 is far infrared drying glue device, is located between the headstock 12 and tailstock 7, and drying glue device length is greater than Workpiece length 2～3cm, for drying the photosensitive layer of surface of the work.
In the present embodiment, the thick control slide calliper rule 8 of glue are radially fixed on tailstock 7 along workpiece 11 rotary driving parts, and slide calliper rule precision 1 μ m, can set bondline thickness.
Working method of the present invention: first workpiece 11 be fixed on to 7 of the headstock 12 and tailstocks and with bolt assembly, the headstock 12 and tailstock 7 be fixed in frame, then by being longer than the smoothing roller 5 that workpiece 11 is 1～2cm, being fixed on 4, two column and column 4 use bolt assemblies are fixed on planker 3, regulate glue storehouse 9 level altitudes to make gum outlet apart from workpiece 11 face of cylinder vertical height 1cm, regulate the vernier of the thick control slide calliper rule 8 of glue to set bondline thickness, open the valve 9-1 under glue storehouse 9 and make glue storehouse 9 be parallel to smoothing roller 5 axis with the speed of 0.1m/s and move back and forth, liquid photosensitive glue 16 is dripped to workpiece 11 surfaces along workpiece 11 axis, opening smoothing roller rotary driving part 15 and workpiece rotary driving part 14 makes smoothing roller 5 and workpiece 11 all with the linear velocity of 0.2m/s, counter-rotate roll extrusion, liquid photosensitive glue 17 is applied on the face of cylinder of workpiece, far infrared drying glue device 10 is dried into solid-state photoresists 18 by the photoresists that are attached to workpiece 11 surfaces, simultaneously, electronic slide unit 2 also drives smoothing roller 5 continuous micro feeding backward with the speed of 5 μ m/s, by the photosensitive layer progressive additive on workpiece 11 surfaces, until reach required bondline thickness while adhering to photoresists on the vernier of the thick control slide calliper rule 8 of glue, can stop retreating feeding, after the photoresists sclerosis of surface of the work, take off workpiece and complete even glue process.In whole even glue process, scraper 6 scrapes the liquid photosensitive glue 17 adhering on smoothing roller 5 and sends back to workpiece 11 surfaces, reduces the waste of photoresists when keeping smoothing roller 5 surface cleaning.
Claims (10)
1. the even adhesive dispenser in the face of cylinder, it is characterized in that: comprise perpendicular type frame, frame horizontal component is provided with the straight line slide unit perpendicular to frame vertical portion, on straight line slide unit, be vertically provided with the even glue unit that can move along straight line slide unit, frame vertical portion is provided with clamping workpiece unit and drying glue device, and top, clamping workpiece unit is provided with and can be parallel to the Jiao Cang that axis of workpiece moves back and forth; Described even glue unit comprises the planker being arranged on straight line slide unit slide block, and planker is provided with smoothing roller, and smoothing roller one end axle is provided with smoothing roller rotary driving part; Described clamping workpiece unit comprises two headstock and the tailstocks that perpendicular to frame vertical portion, arrange, is provided with clamping workpiece rotating shaft between the headstock and tailstock, and one end of clamping workpiece rotating shaft is provided with workpiece rotary driving part, and the headstock or tailstock are provided with the thick control slide calliper rule of glue.
2. the even adhesive dispenser in the face of cylinder according to claim 1, is characterized in that: described planker is provided with two can move along planker length direction the column of adjusting, between two columns, is provided with rotating smoothing roller; Described column coordinates by bolt assembly with the T-shaped groove arranging on planker, and the headstock and tailstock coordinate by bolt assembly with the T-shaped groove arranging in frame.
3. the even adhesive dispenser in the face of cylinder according to claim 2, it is characterized in that: between two columns and above being positioned at smoothing roller, by blade shaft, be provided with the scraper that length is longer than smoothing roller length, between scraper front end and column, be provided with the spring that scraper front end and smoothing roller cylinder are fitted tightly, low after high before scraper, the top of scraper rear end between smoothing roller and workpiece, scraper is longer than smoothing roller 1～2cm.
4. the even adhesive dispenser in the face of cylinder according to claim 3, is characterized in that: described straight line slide unit is electric linear slide unit, and planker is provided with for collecting the catch tray of the unnecessary liquid photosensitive glue of drippage, and catch tray is below between smoothing roller and workpiece.
5. the even adhesive dispenser in the face of cylinder according to claim 4, is characterized in that: described drying glue device is electric heating drying glue device or far infrared drying glue device, is fixedly mounted in the frame between the headstock and tailstock, and drying glue device length is greater than Workpiece length 2～3cm.
6. the even adhesive dispenser in the face of cylinder according to claim 5, is characterized in that: the thick control slide calliper rule of described glue are radially fixed on tailstock along workpiece rotary driving part, and the thick control slide calliper rule of glue can radially regulate, slide calliper rule precision 1 μ m.
7. the even adhesive dispenser in the face of cylinder according to claim 6, is characterized in that: described Jiao Cang is provided with arrangement for adjusting height, and Jiao Cang bottom is provided with valve, and the gum outlet of Jiao Cang is apart from excircle of workpiece cylinder vertical height 1～2cm.
8. the even adhesive dispenser in the face of cylinder according to claim 7, is characterized in that: the cylinder that described smoothing roller is any surface finish, smoothing roller surface is provided with high-hydrophobic material layer.
9. the even adhesive dispenser in the face of cylinder according to claim 8, is characterized in that: described smoothing roller rotary driving part and workpiece rotary driving part form by servomotor, built-up shaft bearing, shaft coupling.
10. the even adhesive dispenser in the face of cylinder according to claim 9, is characterized in that: described smoothing roller turns clockwise, and workpiece is rotated counterclockwise, and smoothing roller linear velocity is more than or equal to workpiece alignment speed, keeps the gap of 5～15 μ m between smoothing roller surface and surface of the work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210083957.8A CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210083957.8A CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102601019A CN102601019A (en) | 2012-07-25 |
| CN102601019B true CN102601019B (en) | 2014-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210083957.8A Expired - Fee Related CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
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| CN (1) | CN102601019B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104216231B (en) * | 2013-06-05 | 2019-02-12 | 中芯国际集成电路制造(上海)有限公司 | Apparatus for coating and coating method |
| CN104614943B (en) * | 2013-11-05 | 2019-03-12 | 中芯国际集成电路制造(上海)有限公司 | The apparatus for coating and coating method of cylinder-shaped mask plate |
| CN112705424A (en) * | 2021-01-23 | 2021-04-27 | 朱进军 | Protective film gluing device for automobile accessory glass |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2489875Y (en) * | 2001-03-01 | 2002-05-08 | 绍兴县轻纺科技中心有限公司 | Device for spraying photoresists to sprinting rotary screen |
| JP4155800B2 (en) * | 2002-11-11 | 2008-09-24 | 株式会社リコー | Coating film forming apparatus and fixing roller |
| DE102006051360A1 (en) * | 2006-10-27 | 2008-05-21 | Khs Ag | gluing |
| CN201231200Y (en) * | 2008-07-21 | 2009-05-06 | 镇江鼎胜铝业有限公司 | Film thickness control device of coating device |
| CN101947504B (en) * | 2010-07-06 | 2012-06-27 | 杭州浙大精益机电技术工程有限公司 | Steel tube UV-curing color-painting mechanism |
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- 2012-03-27 CN CN201210083957.8A patent/CN102601019B/en not_active Expired - Fee Related
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| CN102601019A (en) | 2012-07-25 |
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Granted publication date: 20140312 Termination date: 20170327 |