CN102601019A - Spin-coating device with cylindrical surface - Google Patents
Spin-coating device with cylindrical surface Download PDFInfo
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- CN102601019A CN102601019A CN2012100839578A CN201210083957A CN102601019A CN 102601019 A CN102601019 A CN 102601019A CN 2012100839578 A CN2012100839578 A CN 2012100839578A CN 201210083957 A CN201210083957 A CN 201210083957A CN 102601019 A CN102601019 A CN 102601019A
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Abstract
The invention relates to a spin-coating device with a cylindrical surface, which comprises a right-angled rack. The horizontal part of the rack is provided with a linear slide bench vertical to the vertical part of the rack, the linear slide bench is vertically provided with a spin-coating unit which can move along the linear slide bench, the vertical part of the rack is provided with a workpiece clamping unit and an adhesive drying device, and an adhesive bin is arranged on the workpiece clamping unit; the spin-coating unit comprises a drag plate arranged on the linear slide bench, the drag plate is provided with two columns, a rotary spin-coating roller is arranged between the two columns, and a shaft at one end of the spin-coating roller is provided with a spin-coating roller rotation driving component; and the workpiece clamping unit comprises a head frame and a tail frame which are arranged vertical to the vertical part of the rack, a workpiece clamping rotary shaft is arranged between the head frame and the tail frame, one end of the workpiece clamping rotary shaft is provided with a workpiece rotation driving component, and the head frame or the tail frame is provided with an adhesive thickness control caliper. A photosensitive adhesive layer of any thickness, particularly large thickness, can be efficiently formed on external cylindrical surfaces of different specifications and cannot be limited by the viscosity of photosensitive adhesive, and the consumption of the photosensitive adhesive can be reduced.
Description
Technical field
The present invention relates to the even adhesive dispenser in a kind of face of cylinder.
Background technology
Application practice shows that the fine structure on the axial workpiece external cylindrical surface is obvious to the serviceability effect that promotes part.For example, fine pit, the groove on cylinder head, the bearing roller can be stored lubricating fluid, holds abrasive dust, reduce surface adsorption power, thus the heat transfer property that reduces to rub, avoid surface adhesion, strengthens heat exchanger channels; The armature that has little printed circuit on the external cylindrical surface is compared traditional armature, can significantly reduce the rotary inertia of armature, thereby reduces motor inertia, reduces the motor commutation time, significantly promotes the precision of motor.Electrolysis and electroforming are high with its working (machining) efficiency; Advantages such as structure graph is unrestricted become one of important processing method of these surface fine structures, but adopt the method for electrolysis or electroforming must be at first on the external cylindrical surface of workpiece, to form screened film that one deck and workpiece fit tightly to mask non-machining area.
At present, the screened film on the external cylindrical surface mainly is the method formation through photoetching behind pad pasting or the coating photoresists.Pad pasting is that the insulation mantle of making is attached on the cylinder to form screened film; This method can't form graphic structure in the junction of screened film; And the associativity of mantle and workpiece is relatively poor, in electrolysis (or electroforming), is prone to washed open, come off, thereby causes the processing failure; The method of photoetching can overcome the deficiency of pad pasting to the full extent behind the coating photoresists, and structure graph is unrestricted, and application potential is huge.But; The coating photoresists are to realize through spray-bonding craft mostly on cylinder at present, as number of patent application 01209937.6 disclosed " preparing printing screen glue sprayer " provide a kind of on external cylindrical surface the device of spraying photoresists, and the used photoresists viscosity of spray-bonding craft is lower; The glue-line that forms is thinner; Receive the restriction of photoresists viscosity to be difficult to form the required thickening bondline of the big depth-to-width ratio fine structure of electroforming, be of limited application, also have bigger photoresists wasting phenomenon simultaneously.Therefore, be necessary to provide a kind of photoresists viscosity limitation that do not receive, the controlled even adhesive dispenser of thickening bondline of coating thickness on external cylindrical surface.
Summary of the invention
The object of the invention is to provide a kind of face of cylinder to spare adhesive dispenser, can not receive the photoresists viscosity limitation, on external cylindrical surface, forms the particularly big thickness photosensitive layer of any thickness.
To achieve these goals; The present invention adopts following technical scheme: adhesive dispenser is spared on a kind of face of cylinder; Comprise the perpendicular type frame, the frame horizontal component is provided with the straight line slide unit perpendicular to the vertical part of frame, and vertically being provided with on the straight line slide unit can be along the even glue unit that the straight line slide unit moves; Frame vertically part is provided with clamping workpiece unit and drying glue device, and top, clamping workpiece unit is provided with and can be parallel to the Jiao Cang that axis of workpiece moves back and forth; Said even glue unit comprises the planker that is arranged on the straight line slide unit slide block, and planker is provided with smoothing roller, and smoothing roller one end axle is provided with the smoothing roller rotary driving part; Said clamping workpiece unit comprises two headstock and tailstocks perpendicular to the vertical part setting of frame, is provided with the clamping workpiece rotating shaft between the headstock and the tailstock, and an end of clamping workpiece rotating shaft is provided with the workpiece rotary driving part, and the headstock or tailstock are provided with the thick control slide calliper rule of glue.
Be provided with the scraper that length is longer than smoothing roller length through blade shaft between two columns and above being positioned at smoothing roller; Be provided with the spring that scraper front end and smoothing roller cylinder are fitted tightly between scraper front end and the column; High back is low before the scraper; The scraper rear end is in the top between smoothing roller and the workpiece, and scraper is longer than smoothing roller 1~2cm.
Said planker is provided with two can move the column of adjusting along the planker length direction, is provided with rotating smoothing roller between two columns; The T type groove that is provided with on said column and the planker cooperates through bolt assembly, and the T type groove that is provided with on the headstock and tailstock and the frame cooperates through bolt assembly.
Described straight line slide unit is the electric linear slide unit, and planker is provided with the catch tray of the unnecessary liquid photosensitive glue that is used to collect drippage, and catch tray is below between smoothing roller and the workpiece.
Said drying glue device is electric heating drying glue device or far infrared drying glue device, is fixedly mounted on the frame between the headstock and tailstock, and drying glue device length is greater than Workpiece length 2~3cm.
The thick control slide calliper rule of said glue radially are fixed on the tailstock along the workpiece rotary driving part, and the thick control slide calliper rule of glue can radially be regulated, slide calliper rule precision 1 μ m.
Said Jiao Cang is provided with arrangement for adjusting height, and the Jiao Cang bottom is provided with valve, and the gum outlet of Jiao Cang is apart from excircle of workpiece cylinder vertical height 1~2cm.
Said smoothing roller is the cylinder of any surface finish, and the smoothing roller surface is provided with the high-hydrophobic material layer.
Said smoothing roller rotary driving part and workpiece rotary driving part are formed by servomotor, built-up shaft bearing, shaft coupling.
Said smoothing roller turns clockwise, and workpiece is rotated counterclockwise, and the smoothing roller linear velocity keeps the gap of 5~15 μ m more than or equal to workpiece alignment speed between smoothing roller surface and surface of the work.
The present invention sets bondline thickness through the thick control slide calliper rule of glue, utilizes the smoothing roller of any surface finish and the reverse rotation between workpiece that photoresists are coated on the excircle of workpiece cylinder, and the drying glue device is dried photoresists, raises the efficiency; The electric linear slide unit drives the continuous micro-setback of smoothing roller in even glue process, with the photosensitive layer progressive additive on the workpiece, can form the thickening bondline of controllable thickness; Scraper then scrapes the photoresists that adhere on the smoothing roller and sends back to surface of the work, has reduced the waste of photoresists when guaranteeing the smoothing roller cleaning.In addition, the headstock of the present invention, tailstock, two columns are any adjustable structure of spacing, can satisfy the even glue demand of different size workpiece.In sum, the even adhesive dispenser in the face of cylinder of the present invention can efficiently form the particularly photosensitive plastic coating of big thickness of any thickness on the external cylindrical surface of plurality of specifications, and does not receive the viscosity limitation of photoresists, reduces the consumption of photoresists.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a principle schematic of the present invention.
The specific embodiment
Embodiment: like Fig. 1, shown in Figure 2, adhesive dispenser is spared on a kind of face of cylinder, comprises perpendicular type frame 1; Frame 1 horizontal component is provided with the straight line slide unit 2 perpendicular to frame 1 vertical part; Straight line slide unit 2 is the electric linear slide unit, and vertically being provided with on the straight line slide unit 2 can be along the even glue unit that straight line slide unit 2 moves, and frame 1 vertically part is provided with clamping workpiece unit and drying glue device 10; Drying glue device 10 is electric heating drying glue device or far infrared drying glue device, is fixedly mounted on the frame of 7 of the headstock 12 and tailstocks.Top, clamping workpiece unit is provided with and can be parallel to the glue storehouse 9 that workpiece 11 axis move back and forth, and glue storehouse 9 is provided with arrangement for adjusting height, and 9 bottoms, glue storehouse are provided with valve 9-1.Even glue unit comprises the planker 3 that is arranged on straight line slide unit 2 slide blocks; Planker 3 is provided with two can move the column 4 of adjusting along planker 3 length directions; The T type groove that is provided with on column 4 and the planker 3 cooperates through bolt assembly; Two 4 on columns are provided with rotating smoothing roller 5, and smoothing roller 5 one end axles are provided with smoothing roller rotary driving part 15; The clamping workpiece unit comprises two headstocks 12 and tailstock 7 perpendicular to frame 1 vertical part setting; The T type groove of setting cooperates through bolt assembly on the headstock 12 and tailstock 7 and the frame 1; Be provided with the clamping workpiece rotating shaft between the headstock 12 and the tailstock 7; One end of clamping workpiece rotating shaft is provided with workpiece rotary driving part 14, and the headstock 12 or tailstock 7 are provided with the thick control slide calliper rule 8 of glue, and the thick control slide calliper rule 8 of glue can radially be regulated.Planker 3 is provided with the catch tray 16 of the unnecessary liquid photosensitive glue that is used to collect drippage, and catch tray 16 is below between smoothing roller 5 and the workpiece 11.Smoothing roller 5 turns clockwise, and workpiece 11 is rotated counterclockwise, and smoothing roller 5 linear velocities are optimum state when both are equal more than or equal to workpiece 11 linear velocities.
Between two columns 4 and be positioned at smoothing roller 5 tops and be provided with the scraper 6 that length is longer than smoothing roller 5 length through blade shaft; Be provided with the spring 13 that scraper 6 front ends and smoothing roller 5 cylinders are fitted tightly between scraper 6 front ends and the column 4; High back is low before the scraper 6, and scraper 6 rear ends are in the top between smoothing roller 5 and the workpiece 11.
Operation principle of the present invention is: utilize the adhesiveness difference of liquid photosensitive glue at smoothing roller 5 surfaces and surface of the work; Liquid photosensitive glue is arrived high-adhesiveness workpiece 11 surfaces through the 5 continuous roller coating of low-adhesion smoothing roller; Simultaneously drying glue device 10 is with the continuous baking and curing of liquid photosensitive glue of workpiece 11 surface adhesion, fixed; Go up smoothing roller 5 surface from level to level and and workpiece between the photoresists in gap be coated on workpiece 11 surfaces, until desired thickness.
During practical implementation; Perpendicular type frame 1 vertically end is provided with twice T type groove; Vertical frames 1 is vertically held the electric linear slide unit 2 that is fixed on frame 1 horizontal ends, is installed in the even glue unit on the electric linear slide unit, is installed in frame vertically clamping workpiece unit, the drying glue device 10 of end; The thick control slide calliper rule 8 of glue are positioned at the glue storehouse 9 of clamping workpiece unit top.
Even glue unit comprises that the planker 3, two column 4, the surfacing that are provided with T type groove are polytetrafluoroethylene (PTFE) and bright and clean cylindrical smoothing roller 5, bearing assembly, smoothing roller driver element 15, spring 13, scraper 6, catch tray 16; Planker 3 is fixed on the slide block of electric linear slide unit 2; Two columns 4 also can be fixed on arbitrary spacing position through the T type groove on the planker 3 and bolt assembly and 3 vertical linking to each other of planker; The smoothing roller 5 that two ends are equipped with bearing assembly is arranged on two column 4 middle parts; The smoothing roller driver element of being made up of servomotor, built-up shaft bearing, shaft coupling 15 is fixed on the column 4, and its output and smoothing roller 5 coaxial being in transmission connection turn clockwise to drive smoothing roller 5, is longer than the spring 13 that the scraper 6 of smoothing roller 5 is fixed on the column 4 slightly and is pressed on the cylinder of smoothing roller 5; Scraper is longer than smoothing roller 1~2cm; Be used to scrape the photoresists that adhere on the smoothing roller 5 and send back to even Jiao Chu, catch tray 16 is fixed on the planker 3, is used to collect the unnecessary liquid photosensitive glue of drippage; Gluing successively is convenient in the gap that keeps 5~15 μ m between smoothing roller 5 surfaces and workpiece 11 surfaces.
The clamping workpiece unit comprises the headstock 12, tailstock 7, workpiece rotary driving part 14; Vertically vertical linking to each other of end also can be fixed on arbitrary spacing position to the headstock 12 in the length range less than smoothing roller 5 with frame 1 with bolt assembly through the T type groove on the frame 1 with tailstock 7; To satisfy the clamping demand of different size workpiece; The workpiece rotary driving part of being made up of servomotor, built-up shaft bearing, shaft coupling 14 is fixed on the headstock 12, and its output and workpiece 11 be coaxial to be in transmission connection and to be rotated counterclockwise at the workpiece 11 of 7 of the headstock 12 and tailstocks to drive clamping.
In the present embodiment, the thick control slide calliper rule 8 of glue radially are fixed on the tailstock 7 along workpiece 11 rotary driving parts, and slide calliper rule precision 1 μ m can set bondline thickness.
Working method of the present invention: at first workpiece 11 is fixed on the headstock 12 and 7 of tailstocks and the headstock 12 and tailstock 7 is fixed on the frame with bolt assembly; The smoothing roller 5 that to be longer than workpiece 11 then and be 1~2cm is fixed on 4 on two columns and column 4 usefulness bolt assemblies is fixed on the planker 3; Regulating glue storehouse 9 level altitudes makes gum outlet apart from workpiece 11 face of cylinder vertical height 1cm; Regulate the vernier of the thick control slide calliper rule 8 of glue and set bondline thickness; Open the valve 9-1 under the glue storehouse 9 and make glue storehouse 9 be parallel to smoothing roller 5 axis and move back and forth with the speed of 0.1m/s; Liquid photosensitive glue 16 is dripped to workpiece 11 surfaces along workpiece 11 axis; Open smoothing roller rotary driving part 15 and make smoothing roller 5 and workpiece 11 all with the linear velocity reverse rotation roll extrusion of 0.2m/s with workpiece rotary driving part 14, liquid photosensitive glue 17 is applied on the face of cylinder of workpiece, far infrared drying glue device 10 will be dried into solid-state photoresists 18 attached to the photoresists on workpiece 11 surfaces; Simultaneously; Electronic slide unit 2 also drives the continuous backward microfeed of smoothing roller 5 with the speed of 5 μ m/s; Photosensitive layer progressive additive with workpiece 11 surfaces; Reach required bondline thickness when on the vernier of the thick control slide calliper rule 8 of glue, adhering to photoresists, can stop to retreat feeding, treat that taking off workpiece after the photoresists sclerosis of surface of the work accomplishes even glue process.In the whole even glue process, scraper 6 scrapes the liquid photosensitive glue 17 that adheres on the smoothing roller 5 and sends back to workpiece 11 surfaces, reduces the waste of photoresists when keeping smoothing roller 5 cleaning surfaces.
Claims (10)
1. adhesive dispenser is spared on a face of cylinder; It is characterized in that: comprise the perpendicular type frame; The frame horizontal component is provided with the straight line slide unit perpendicular to the vertical part of frame; Vertically being provided with on the straight line slide unit can be along the even glue unit that the straight line slide unit moves, and frame vertically part is provided with clamping workpiece unit and drying glue device, and top, clamping workpiece unit is provided with and can be parallel to the Jiao Cang that axis of workpiece moves back and forth; Said even glue unit comprises the planker that is arranged on the straight line slide unit slide block, and planker is provided with smoothing roller, and smoothing roller one end axle is provided with the smoothing roller rotary driving part; Said clamping workpiece unit comprises two headstock and tailstocks perpendicular to the vertical part setting of frame, is provided with the clamping workpiece rotating shaft between the headstock and the tailstock, and an end of clamping workpiece rotating shaft is provided with the workpiece rotary driving part, and the headstock or tailstock are provided with the thick control slide calliper rule of glue.
2. adhesive dispenser is spared on the face of cylinder according to claim 1; It is characterized in that: be provided with the scraper that length is longer than smoothing roller length through blade shaft between two columns and above being positioned at smoothing roller; Be provided with the spring that scraper front end and smoothing roller cylinder are fitted tightly between scraper front end and the column; High back is low before the scraper, and the scraper rear end is in the top between smoothing roller and the workpiece, and scraper is longer than smoothing roller 1~2cm.
3. adhesive dispenser is spared on the face of cylinder according to claim 1 and 2, it is characterized in that: said planker is provided with two can move the column of adjusting along the planker length direction, is provided with rotating smoothing roller between two columns; The T type groove that is provided with on said column and the planker cooperates through bolt assembly, and the T type groove that is provided with on the headstock and tailstock and the frame cooperates through bolt assembly.
4. adhesive dispenser is spared on the face of cylinder according to claim 3, it is characterized in that: described straight line slide unit is the electric linear slide unit, and planker is provided with the catch tray of the unnecessary liquid photosensitive glue that is used to collect drippage, and catch tray is below between smoothing roller and the workpiece.
5. adhesive dispenser is spared on the face of cylinder according to claim 4, it is characterized in that: said drying glue device is electric heating drying glue device or far infrared drying glue device, is fixedly mounted on the frame between the headstock and tailstock, and drying glue device length is greater than Workpiece length 2~3cm.
6. adhesive dispenser is spared on the face of cylinder according to claim 5, it is characterized in that: the thick control slide calliper rule of said glue radially are fixed on the tailstock along the workpiece rotary driving part, and the thick control slide calliper rule of glue can radially be regulated, slide calliper rule precision 1 μ m.
7. adhesive dispenser is spared on the face of cylinder according to claim 6, and it is characterized in that: said Jiao Cang is provided with arrangement for adjusting height, and the Jiao Cang bottom is provided with valve, and the gum outlet of Jiao Cang is apart from excircle of workpiece cylinder vertical height 1~2cm.
8. adhesive dispenser is spared on the face of cylinder according to claim 7, it is characterized in that: said smoothing roller is the cylinder of any surface finish, and the smoothing roller surface is provided with the high-hydrophobic material layer.
9. adhesive dispenser is spared on the face of cylinder according to claim 8, it is characterized in that: said smoothing roller rotary driving part and workpiece rotary driving part are formed by servomotor, built-up shaft bearing, shaft coupling.
10. adhesive dispenser is spared on the face of cylinder according to claim 9, and it is characterized in that: said smoothing roller turns clockwise, and workpiece is rotated counterclockwise, and the smoothing roller linear velocity keeps the gap of 5~15 μ m more than or equal to workpiece alignment speed between smoothing roller surface and surface of the work.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210083957.8A CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210083957.8A CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
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CN102601019A true CN102601019A (en) | 2012-07-25 |
CN102601019B CN102601019B (en) | 2014-03-12 |
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CN201210083957.8A Expired - Fee Related CN102601019B (en) | 2012-03-27 | 2012-03-27 | Spin-coating device with cylindrical surface |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104216231A (en) * | 2013-06-05 | 2014-12-17 | 中芯国际集成电路制造(上海)有限公司 | Coating device and coating method |
CN104614943A (en) * | 2013-11-05 | 2015-05-13 | 中芯国际集成电路制造(上海)有限公司 | Coating apparatus and coating method of cylindrical mask plate |
CN112705424A (en) * | 2021-01-23 | 2021-04-27 | 朱进军 | Protective film gluing device for automobile accessory glass |
Citations (5)
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CN2489875Y (en) * | 2001-03-01 | 2002-05-08 | 绍兴县轻纺科技中心有限公司 | Device for spraying photoresists to sprinting rotary screen |
JP2004160310A (en) * | 2002-11-11 | 2004-06-10 | Ricoh Co Ltd | Coating film forming apparatus and fixing roller |
CN201231200Y (en) * | 2008-07-21 | 2009-05-06 | 镇江鼎胜铝业有限公司 | Film thickness control device of coating device |
CN101528361A (en) * | 2006-10-27 | 2009-09-09 | Khs股份公司 | Glue application device |
CN101947504A (en) * | 2010-07-06 | 2011-01-19 | 杭州浙大精益机电技术工程有限公司 | Steel tube UV-curing color-painting mechanism |
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2012
- 2012-03-27 CN CN201210083957.8A patent/CN102601019B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2489875Y (en) * | 2001-03-01 | 2002-05-08 | 绍兴县轻纺科技中心有限公司 | Device for spraying photoresists to sprinting rotary screen |
JP2004160310A (en) * | 2002-11-11 | 2004-06-10 | Ricoh Co Ltd | Coating film forming apparatus and fixing roller |
CN101528361A (en) * | 2006-10-27 | 2009-09-09 | Khs股份公司 | Glue application device |
CN201231200Y (en) * | 2008-07-21 | 2009-05-06 | 镇江鼎胜铝业有限公司 | Film thickness control device of coating device |
CN101947504A (en) * | 2010-07-06 | 2011-01-19 | 杭州浙大精益机电技术工程有限公司 | Steel tube UV-curing color-painting mechanism |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104216231A (en) * | 2013-06-05 | 2014-12-17 | 中芯国际集成电路制造(上海)有限公司 | Coating device and coating method |
CN104614943A (en) * | 2013-11-05 | 2015-05-13 | 中芯国际集成电路制造(上海)有限公司 | Coating apparatus and coating method of cylindrical mask plate |
CN104614943B (en) * | 2013-11-05 | 2019-03-12 | 中芯国际集成电路制造(上海)有限公司 | The apparatus for coating and coating method of cylinder-shaped mask plate |
CN112705424A (en) * | 2021-01-23 | 2021-04-27 | 朱进军 | Protective film gluing device for automobile accessory glass |
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