CN102593347A - Zinc oxide nanowire electric generator based on myocardial cells and preparing method thereof - Google Patents
Zinc oxide nanowire electric generator based on myocardial cells and preparing method thereof Download PDFInfo
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- CN102593347A CN102593347A CN2012100636709A CN201210063670A CN102593347A CN 102593347 A CN102593347 A CN 102593347A CN 2012100636709 A CN2012100636709 A CN 2012100636709A CN 201210063670 A CN201210063670 A CN 201210063670A CN 102593347 A CN102593347 A CN 102593347A
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Abstract
The invention discloses a zinc oxide nanowire electric generator based on myocardial cells and a preparing method thereof. An electric generator mechanism includes a substrate, wherein a groove is arranged on the substrate, an insulating tape is fixed on an opening of the groove, a plurality of zinc oxide seeding layers are deposited on the insulating tape at equal intervals, metal barrier layers are deposited on one side and the upper portion of the zinc oxide seeding layers, the zinc oxide nanowire horizontally arranged between the two adjacent metal barrier layers, one or more of the myocardial cells are arranged in the groove. According to the zinc oxide nanowire electric generator based on myocardial cells and the preparing method thereof, biological tissues (for example, myocardial cells) are used for driving the nanowire electric generator to perform power generation. The biological tissues, such as the myocardial cells and the like, has excited expansion function so that the external force is provided for the zinc oxide nanowire through an expansion process to drive the electric generator.
Description
Technical field
The invention belongs to the nano generator field, be specifically related to nano generator that a kind of cardiac muscle cell of employing generates electricity as drive source and a kind of device architecture of this nano generator.
Background technology
The nanometer piezoelectric like GaN and ZnO etc., has application widely at nano generator and piezoelectron devices field.Zinc oxide nanowire is to study maximum piezoelectrics at present in the world.
Zinc cation in the zinc oxide nanowire and negative oxygen ion are aimed at the positive tetrahedron structure, and under no external force effect, the center of positive charge of zinc ion and the center of negative charge of oxonium ion overlap, and dipole moment is zero.Under external force, zinc ion and oxonium ion depart from original position, and center of positive charge and center of negative charge no longer overlap, and dipole moment is non-vanishing; If the C direction of principal axis along nano wire imposes pulling force, dipole moment is being for just, otherwise; For negative, on macroscopic view, all dipole moments stack up; Form macroscopical electric field along the C direction of principal axis, the two ends of nano wire produce electrical potential difference, and mechanical energy is converted into electric energy.Utilize this principle, be born in 2006 based on first DC generator of zinc oxide nanowire, the correlative study achievement is published on U.S. Science magazine.(Zhong Lin Wang and Jinhui Song; Piezoelectronic Nanogenerators Based on Zinc Oxide Nanowire Arrays.Science; Vol.312,2006) subsequently, be born in zinc oxide nanowire alternating current generator in 2008.(Runsen Yang and Yong Qin et al.; Power generation with laterally packaged piezoelectric nanowires.NNANO; DOI:10.1038/NNANO.2008.314) utilize integrated method; The output voltage of nano generator is improved constantly, and the maximum output voltage of reporting for work in the document at present can reach 10V, can be used for driving a simple wireless system for transmitting data.(Youfan?Hu?and?Yan?Zhang?et?al.，Self-Powered?System?With?Wireless?Data?Transmission.Nano?letters，DOI：10.1021/nl201505c，2011)
Compare with traditional piezoelectric PZT, zinc oxide material has following advantage: 1, and zinc oxide nanowire can bear bigger deformation, can improve the stability and increase output voltage of nano generator work like this.2, zinc oxide nanowire can use the solution decomposition method on soft substrates such as plastics, to grow, and this means that nano generator can generate electricity in the substrate attached to softness, like skin of human body etc.3, zinc oxide material has good bio-compatibility, and toxicity is little.Because above-mentioned advantage, in the micro-nano power field, have very wide application prospect based on the TRT of zinc oxide nanowire, and in medical diagnosis and treatment, also have huge application potential.
The nano generator of reporting in the pertinent literature at present has two deficiencies: 1; The power source of nano generator comes from the outside, as: ultrasonic wave, the rotation of tire; Running of mouse and beating etc. of human pulse; The external force of these macroscopic aspect can not be integrated with the device of nanometer aspect, makes the nano generator can't individualism, must be attached on the power source.2, because the external force that nano generator utilized not is to continue to exist, but off and on, this makes the output of nano generator become unstable.
Summary of the invention
Main purpose of the present invention is that proposing to utilize biological tissue (such as the cardiac muscle cell) to drive nano generator generates electricity.Biological tissues such as cardiac muscle cell have excited Telescopic, come external force to zinc oxide nanowire to be provided through this telescopic process, drive nano generator work.
The structure of nano generator of the present invention specifically comprises a substrate, on substrate, is provided with groove; Opening part at groove is provided with insulating tape; Equally spaced local deposit zinc oxide seed layer on the insulating tape of softness, then a side of Seed Layer with above the depositing metal barrier layer, have the conductive metallic material layer in the opposite side deposit of metal barrier; Zinc oxide nanowire laterally carries on zinc oxide seed layer, is provided with single or a plurality of cardiac muscle cells in the said groove.
The basic functional principle of this nano generator:
1, the size of piezoelectricity gesture: theoretical research shows, the size of piezoelectricity gesture is directly proportional with the deformation size that applies the nano wire that external force causes, with cube being inversely proportional to of the length of nano wire and diameter ratio.It is estimated, a diameter 50nm, the zinc oxide nanowire of length 600nm under external force, the piezoelectricity gesture of generation can reach 0.3V.(Yifan?Gao?and?Zhong?Lin?Wang?et?al，Electrostatic?Potential?in?a?Bent?Piezoelectric?Nanowire.The?Fundamental?Theory?of?Nanogenerator?and?Nanopiezotronics.Nano?letters，DOI：10.1021/nl071310j，2007)
2, press Potential Distribution: under external force, the piezoelectricity gesture of zinc oxide nanowire distribute with external force to apply direction closely related.When external force is lateral stress, the both sides of nano wire are in respectively and stretch and compressive state, and the side pressure electromotive force that stretches compresses a side pressure electromotive force for negative for just, and the piezoelectricity gesture direction of nano wire root for bearing, is compressed a side for just in the side that stretches.When along nano wire axially apply external force, the nano wire both sides all are to be in to stretch or compressive state, under extended state, the piezoelectricity gesture along stress direction from negative to just evenly increasing, under compressive state, the piezoelectricity gesture is pressing stress direction from just evenly reducing to negative.
3; The deformation that the nano generator that this patent proposed is produced under extraneous stress is single; This be because the diameter (tens nanometers are to 300 nanometers) of nano wire with respect to the thickness (micro-meter scale of flexible insulation adhesive tape; Like Kapton500HN, 120 microns) be very little, so the deformation of the deformation of nano wire and the KAPTON substrate surface that is depended on is consistent.
The invention allows for the implementation method of the single generator unit of this device, relate to the etching of groove, the cross growth of nano wire and cardiac muscle cell's introducing.
The basic performing step of this generator:
1, preparation groove: select suitable substrate, like Si/SiO
2, Si
3N
4With quartz glass etc.Adopt corresponding lithographic method, as: wet etching, dry etching etc. etch on substrate and selected groove with cardiac muscle cell's size match;
2, fixing soft insulating tape: adopt the method for depositing metal, the insulating tape of softness such as KAPTON etc. are fixed on the top of groove;
3, deposit zinc oxide seed layer and growth barrier layer: equally spaced local deposit zinc oxide seed layer on the insulating tape of softness, then a side of Seed Layer with above the metal barrier of depositing nanowires growth, like chromium, nickel etc.;
4, the cross growth zinc oxide nanowire: adopt solution thermal decomposition method or chemical vapour deposition technique growth of zinc oxide nano line, zinc oxide nanowire laterally is located between two adjacent metal barrier layers;
5, depositing metal: have the metal material (like gold etc.) of satisfactory electrical conductivity in the outgrowth that metal barrier is arranged, to guarantee forming good electricity contact between nano wire and the metal electrode;
6, cardiac muscle cell's cultivation and introducing: select suitable cardiac muscle cell's kind, like people cardiac muscle cell, muroid cardiac muscle cell etc.And be directed against cardiac muscle cell's kind of being selected for use, and the configuration nutrient solution is inserted device in the nutrient solution then, and nutrient solution will penetrate in the middle of the groove, and final cardiac muscle cell can divide formation in groove.
Advantage of the present invention and technique effect
The nano generator based on single or a plurality of cardiac muscle cells that this patent proposes has overcome the shortcoming of prior art.At first single or a plurality of cardiac muscle cells are convenient to be integrated into an independently power supply device with nano generator in micro-meter scale and the size match of nano generator, and nano generator no longer need be attached on the external power supply.Secondly, the cardiac muscle cell only otherwise dead just can continue and stable vibrations, and therefore the output of nano generator just can continue and stablize.
In sum; Overcome existing nano generator based on single or a plurality of cardiac muscle cells' nano generator external power supply depended on and exported problem of unstable; Make the nano generator can steady operation whenever and wherever possible; The miniature generator of this kind can be integrated in human body or animal hearts, and the output that generator produced can be used for driving medical diagnosis device or therapeutic equipment work.
The invention has the advantages that the stretching motion that adopts the cardiac muscle cell as the power that drives nano generator work, so just can not need the artificial actuating force that adds,, just can make the nano generator continuous firing as long as let the cardiac muscle cell keep life.Let the cardiac muscle cell keep life; As long as it is just passable to let it be in suitable external environment, can the device of good seal be placed nutrient solution such as us, even place suitable internal milieu; It is flexible just can to let the cardiac muscle cell continue, and drives the nano generator continuous firing.
Description of drawings
Accompanying drawing 1 is the vertical view of device of the present invention;
Accompanying drawing 2 is that figure is cutd open in the cross section of device of the present invention;
Among the figure, the 1-zinc oxide nanowire; The 2-metal barrier; The 3-zinc oxide seed layer; The insulating tape that 4-is soft; The 5-conducting metal; 6-scheming cell sketch map; The 7-groove; The 8-substrate.
Embodiment
1. preparation groove: spin coating one deck photoresist on silicon substrate; Through exposure and development, on silicon substrate, define the figure of groove then, the non-graphics field of substrate is protected by photoresist; Adopt the method for dry etching at last; Carry out the etching of groove, the degree of depth of etching and cardiac muscle cell's size should be mated, and the degree of depth of groove should be between 15 microns to 20 microns; Width and length are decided by the cardiac muscle cell's of needs number, and cardiac muscle cell's number is by the power output decision of needed TRT.
2. fixing KAPTON adhesive tape: choose the KAPTON adhesive tape of suitable dimension, place on the silicon substrate, the length of KAPTON adhesive tape is greater than the length of groove, and width should be slightly less than the width of groove, exposes the slit, as the injection channel of cardiac muscle cell's nutrient solution.(see accompanying drawing 1, change slightly) through the deposit gold at the two ends of KAPTON adhesive tape, fixed the KAPTON adhesive tape then.
3. cleaning substrate: substrate is put into acetone successively, alcohol, in isopropyl alcohol and the deionized water, ultrasonic 10 minutes respectively, dry up with the argon gas rifle then, put into baking oven, be heated to 200 and spend, with the steam of thorough removal substrate surface.
4. deposit zinc oxide seed layer and longitudinal growth barrier layer: spin coating one deck photoresist on substrate; Then through photoetching and development; On the KAPTON adhesive tape, define equally spaced belt-like zone; The method of using CVD subsequently is the zinc oxide seed layer of deposit 200nm and the chromium barrier layer of 5nm successively, and the chromium barrier layer is above zinc oxide seed layer.Through stripping technology, remove other regional Seed Layer and barrier layer at last, only keep the Seed Layer and the barrier layer of belt-like zone.
5. deposit lateral growth barrier layer: spin coating one deck photoresist on substrate; Then through alignment and development; One deck in each zinc oxide seed layer defines strip region, uses the chromium barrier layer of the method deposit 5nm of CVD subsequently, passes through stripping technology at last; Remove other regional chromium barrier layers, only keep the chromium barrier layer of strip region.
6. cross growth zinc oxide nanowire: with the HMTA of 0.025mol/L and the Zn (NO of 0.025mol/L
3)
2The configuration nutrient solution is then put into the device of the good zinc oxide seed layer of deposit in the middle of the solution, and solution is placed in the middle of the baking oven, is heated to 90 degree, keeps 24 hours, to carry out the growth of zinc oxide nanowire.The present invention increases the length of nano wire through the method for upgrading nutrient solution and increase growth time.
7. deposit gold: spin coating one deck photoresist on substrate through alignment and development for the second time, is having a side of chromium metal then; Define the strip region that needs deposit gold; With the gold of the method deposit 200nm of magnetron sputtering, through stripping technology, remove other regional gold at last; The gold that only keeps strip region guarantees that zinc oxide nanowire forms reliable electricity with the chromium metal and contacts.
8. cardiac muscle cell's cultivation and introducing: the preparation nutrient solution, put into cardiac muscular tissue's fragment of rat, carry out cardiac muscle cell's merisis under optimum conditions.In the process of growth, the silicon chip of the zinc oxide nanowire of having grown, put into nutrient solution, nutrient solution can infilter in the middle of the groove like this, and through suitable incubation time, division forms the cardiac muscle cell of diameter about 15 microns of some in the groove.
9. encapsulation seals entire device, should reserve groove and extraneous excuse, is used for carrying out the cycle and regeneration of mature of nutrient solution.
Claims (7)
1. a nano generator structure is characterized in that, comprises a substrate; On substrate, be provided with groove; Opening part at groove is fixed with insulating tape, equidistant several zinc oxide seed layer of deposit on insulating tape, a side of zinc oxide seed layer and depositing metal barrier layer, top; Zinc oxide nanowire laterally is located between two adjacent metal barrier layers, is provided with single or a plurality of cardiac muscle cells in the said groove.
2. nano generator structure as claimed in claim 1 is characterized in that, said insulating tape is the KAPTON adhesive tape.
3. nano generator structure as claimed in claim 1 is characterized in that, through the deposit gold at the two ends of insulating tape, insulating tape is fixed on the substrate.
4. nano generator structure as claimed in claim 1 is characterized in that, has the conductive metallic material layer in the opposite side deposit of metal barrier.
5. the preparation method of generator as claimed in claim 1, its step comprises:
1) preparation groove: on substrate, etch and selected groove with cardiac muscle cell's size match;
2) fixed insulation adhesive tape: adopt the method for depositing metal, insulating tape is fixed on the top of groove;
3) deposit zinc oxide seed layer and metal barrier: equidistant deposit zinc oxide seed layer on insulating tape, then a side of zinc oxide seed layer with above the depositing metal barrier layer;
4) cross growth zinc oxide nanowire: adopt solution thermal decomposition method or chemical vapour deposition technique growth of zinc oxide nano line, zinc oxide nanowire laterally is located between two adjacent metal barrier layers;
5) depositing metal: at the metal material of the outgrowth conductivity that barrier metal is arranged;
6) cardiac muscle cell's cultivation and introducing: be directed against cardiac muscle cell's kind of being selected for use, the configuration nutrient solution is inserted device in the nutrient solution then, and nutrient solution will penetrate in the middle of the groove, and final cardiac muscle cell can divide formation in groove.
6. method as claimed in claim 5 is characterized in that, the depth bounds of groove is between 15 microns to 20 microns.
7. method as claimed in claim 5 is characterized in that, said metal barrier is chromium or nickel.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109908464A (en) * | 2019-04-16 | 2019-06-21 | 北京师范大学 | A kind of biodegradable silicon nanometer needle injection and its application |
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| US20090226768A1 (en) * | 2008-03-04 | 2009-09-10 | Georgia Tech Research Corporation | Muscle-Driven Nanogenerators |
| CN101656486A (en) * | 2009-09-18 | 2010-02-24 | 上海理工大学 | Zinc oxide nano wire/polymer nano composite energy converter and preparation method thereof |
| US20110107569A1 (en) * | 2009-11-10 | 2011-05-12 | Georgia Tech Research Corporation | Large-Scale Lateral Nanowire Arrays Nanogenerators |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090226768A1 (en) * | 2008-03-04 | 2009-09-10 | Georgia Tech Research Corporation | Muscle-Driven Nanogenerators |
| CN101656486A (en) * | 2009-09-18 | 2010-02-24 | 上海理工大学 | Zinc oxide nano wire/polymer nano composite energy converter and preparation method thereof |
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| CN109908464A (en) * | 2019-04-16 | 2019-06-21 | 北京师范大学 | A kind of biodegradable silicon nanometer needle injection and its application |
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Application publication date: 20120718 |