CN103736204A - Implanted cuff neural electrode and manufacturing method thereof - Google Patents
Implanted cuff neural electrode and manufacturing method thereof Download PDFInfo
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- CN103736204A CN103736204A CN201410024820.4A CN201410024820A CN103736204A CN 103736204 A CN103736204 A CN 103736204A CN 201410024820 A CN201410024820 A CN 201410024820A CN 103736204 A CN103736204 A CN 103736204A
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Abstract
The invention provides an implanted cuff neural electrode based on a micromachining technology and a manufacturing method thereof, which overcome the problems that the diameter of a cuff cylinder is fixed, the large-scale manufacturing is difficult, the size of the electrode is larger, the tissue damage is larger and the like in the prior art. On the basis of the micromachining technology, the implanted cuff neural electrode comprises a long strip belt (2) provided with an electrode point (1) and a self-locking structure, a connecting lead (3) and a lead connecting point area (4), and has the characteristics of softness, thinness, good biocompatibility, slight tissue damage, adjustable diameter of the cuff cylinder, accurate and controllable size, high sensitivity and high reliability.
Description
Technical field
The present invention relates to microelectromechanical systems and implantation micro-electrode having technical field, relate in particular to a kind of implanted Kraft nerve electrode and preparation method thereof.
Background technology
Along with developing rapidly of industry and traffic, the patients with spinal cord injury increasing year by year of China.There is serious dysfunction in the limbs that spinal cord injury often causes damaging below sections, such as quadriplegia, urinary incontinence etc.Existing medical procedure is difficult to repair neural, and recovers patient's sensation and motor capacity completely.In recent years, the research of carrying out functional electric stimulation by implanting muscle nerve electrode receives people's concern.Functional electric stimulation is, by Operation neuromuscular electrode, target muscle or nerve are carried out to directly electricity irritation, thereby improves and recover patient's partial function obstacle.At present, in some clinical experiments abroad of the feasibility of technique, proved.
Existing implanted muscle nerve electrode can roughly be divided into following several: 1, be placed in muscle surface or intramuscular muscle electrode, kind electrode can stimulate the specific muscle of certain piece.Each electrode can only stimulate a specific muscle.In addition, because the continuous contraction of muscle can cause electrode to be moved, even there will be the problems such as metal connecting line fracture; 2, be wrapped in the Kraft nerve electrode on neural surface, kind electrode consists of with the electrode points that is distributed in cylinder inner wall the cylinder-like structure of electrical insulation, by the electrode points with the surperficial close contact of nerve, can optionally excite nerve and do surperficial zones of different, thereby realize the motion of controlling respective muscle.3, electrode between nerve tract, this electrode between neural intrinsic nerve bundle, has better selectivity than Kraft nerve electrode, by electrode points, can directly stimulate different nerve tract and stimulus threshold also lower.Shortcoming is in implant surgery process, easily to cause nervous tissue to damage.At the above, for muscle nerve electrode, Kraft nerve electrode is at stimulus threshold, selectivity and have than more comprehensive advantage aspect degree of tissue damage.
The literature search of existing Kraft nerve electrode is found to the U. S. application patent of CWRU: the manufacture method of implanted Kraft and installation method, patent No. US4602624, proposes a kind of from curling Kraft nerve electrode.Thereby this electrode can the naturally curling nerve that wraps, form the cylindric space of a sealing, thereby be conducive to improve the efficiency of electricity irritation and the signal to noise ratio of acquired signal.Manufacture method is that the insulation material layer that insulation material layer by one deck is stretched and one deck stretch is naturally bonded together, naturally curling due to stress mismatch.Because insulant is soft, Kraft drum diameter can change along with natural swelling neural after electrode implant surgery, avoids nerve to be oppressed and ischemic necrosis.The major defect of this design is to be difficult in the situation that operative space is limited, strut curling electrode and be placed on nerve.In addition, this electrode parcel is insecure, particularly when connecting lead wire is subject to external force traction to do the used time, easily from nerve, comes off.
The U. S. application patent of Medtronic Inc.: Kraft electrode, patent No. US5344438, proposes a kind of the neural U-shaped Kraft electrode of a parcel part.Kind electrode is conducive to postoperative nerve recovery to be damaged with avoiding nerve compression to compel.Shortcoming is that only a parcel part is neural, can not stimulate and record whole nerve, and records nerve signal and can be subject to outer signals and disturb.
In sum, existing electrode exists Kraft drum diameter to fix, and is difficult to extensive manufacture, and electrode size is large, to problems such as tissue injury are larger.
Summary of the invention
(1) technical problem that will solve
The object of the invention is to for the deficiencies in the prior art, Kraft nerve electrode based on micro fabrication of a kind of implanted and preparation method thereof is provided, its have soft frivolous, bio-compatibility good, to tissue injury is slight, Kraft drum diameter is adjustable, accurate controlled, highly sensitive, the feature that reliability is high of size.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of implanted Kraft nerve electrode, described implanted Kraft nerve electrode, comprising: described in the strip belt 2 with electrode points 1 and self-locking structure based on micro-processing technology, connecting lead wire 3 and lead contact region 4, electrode points 1 is distributed in described strip belt 2 middle parts near near closed-loop 5; One end of described strip belt 2 is the flat closed-loop 5 that opening is elongate rectangle; Described flat closed-loop opening 11 is elongated strip, can make strip belt 2 smooth from wherein passing through; Described strip belt 2 other ends are equipped with the guiding tongue 6 that an auxiliary electrode is installed; There is continuous micro-protuberance thing 7 described strip belt 2 both sides.
Preferably, described strip belt 2 is made by the polymer thin-film material with bio-compatibility.
Preferably, described self-locking structure comprises described closed-loop 5 and described micro-protuberance thing 7, and the micro-protuberance thing 7 when strip belt 2 both sides passes through after closed-loop 5, and closed-loop 5 is blocked micro-protuberance thing 7; Described strip belt 2 will be closed the self-locking structure monodirectional locking of ring, can not fall back to returning, and described strip belt 2 will form cylinder-like structure; Described drum diameter is by continuing to pull belt to regulate.
Preferably, described connecting lead wire 3 is connected to described lead contact region 4 by described electrode points 1; Each electrode points 1 is connected to lead contact 10 by interconnection line 9 independently.
Preferably, described strip belt 2 dimensional parameters are: long 15mm, wide 8mm, thickness 15 μ m; The dimensional parameters of described closed-loop 5 is: the long 8mm of opening, wide 50 μ m; Described micro-protuberance thing 7 ledge dimensional parameters are: long 100 μ m; Described electrode points 1 dimensional parameters is: big or small 300 μ m * 300 μ m.
In order to solve the problems of the technologies described above, the invention provides a kind of making as weighed the method for the implanted Kraft nerve electrode as described in 1, described manufacture method comprises the following steps:
(1) being coated with the metal electrode layer of making polymer-metal alloy-polymer architecture on the substrate of sacrifice layer by polymer thin-film material deposit, photoetching, evaporation, sputter and wet etching, comprise electrode points 1, interconnection line 9 and lead contact 10;
(2) by photoetching, plating, make metal mechanical support layer, or make polymer machinery supporting layer by polymer thin-film material growth, photoetching and dry etching, described mechanical support layer comprises micro-protuberance thing 7 and closed-loop 5;
(3) make the mask for etch polymers, determine position and the size of electrode points 1 and lead contact 10, determine size and the position of closed-loop opening 11, determine the profile in strip belt 2, connecting lead wire 3 and lead contact region 1;
(4) by dry etching polymeric layer, until expose described sacrifice layer, expose electrode points 1 and lead contact 10; Produce closed-loop opening 11, produce the profile in strip belt 2, connecting lead wire 3 and lead contact region 4;
(5) remove sacrifice layer, obtain Kraft nerve electrode.
Preferably, the substrate in described step (1) is silicon chip 12; Evaporation or sputtered aluminum film production aluminum film sacrifice layer on described silicon chip 12; On described aluminum film sacrifice layer, deposit polymer is as isolated insulation layer; Make electrode points 1, interconnection line 9 and the lead contact 10 of Kraft nerve electrode, and deposit polymer isolated insulation layer thereon, form the electrode layer of polymer-metal alloy-polymer.
Preferably, described deposit polymer is to grow parylene film layer 14 as isolated insulation layer by chemical vapor deposition as isolated insulation layer; The manufacture method of the electrode points 1 of described Kraft nerve electrode, interconnection line 9 and lead contact 10: evaporation or splash-proofing sputtering metal alloy-layer also carry out photoetching, and wet etching goes out electrode points, interconnection line and lead contact figure; Or first carry out then splash-proofing sputtering metal alloy-layer of photoetching, adopt stripping technology to produce metal electrode figure.
Preferably, the preferred fabrication method of described metal mechanical support layer: form plating mask 17 by sputter copper seed layer, the thick glue of spin coating photoetching, electroplate gold or other metals with bio-compatibility; The manufacture method of described polymer machinery supporting layer: by thin polymer film layer growth and for mask fabrication and the dry etching of etch polymers thin layer, make polymer machinery supporting layer; Described polymer machinery supporting layer is that Parylene is made; The manufacture method of described etch mask 17: adopt spin coating positive photoresist photoetching to form etch mask, or make patterned titanium film or aluminum film by physical vapor deposition, photoetching, dry etching and wet etching, form etch mask.
Preferably, in described step (3), determine size and the position of closed-loop opening 11, described size is identical with the opening of the closed-loop of making in described step (2) with position; In described step (3), determine the profile of strip belt 2, described profile comprises the profile of the micro-protuberance thing 7 of making in described step (2).
(3) beneficial effect
Compared with prior art, implanted Kraft nerve electrode provided by the invention and preparation method thereof has the following advantages:
(1) adopt self-locking structure can in implantation process, regulate Kraft drum diameter, adapt to different diameter nerves;
(2) of polymer thin-film material, make the isolated insulation layer of Kraft nerve electrode, there is frivolous and soft feature, can alleviate neural physical damnification, be more suitable for long-term implantation;
(3) adopt electroplating technology or polymer thin membrane process to produce the mechanical support layer of the high tenacity that bio-compatibility is good, can strengthen the mechanical strength of self-locking structure, reduce process costs;
(4) make full use of microelectromechanical systems processing technique, the shape of self-locking structure, electrode points, interconnection line and lead contact, size and position can accurately be controlled, the Kraft nerve electrode of producing is for different neural research fields, such as, large scale Kraft nerve electrode, for functional electric stimulation, carries out blocking type sleep apnea operative treatment; And small size Kraft nerve electrode carries out the neural biological study of insecticide, for making insect flying device, lay the foundation;
(5) Parylene has transparent smooth, chemical stability, bio-compatibility and stronger mechanical performance, is to make the optimal insulant of biological microelectrode.In addition, integration system is produced the lead-in wire that flexibly connects based on Parylene, is conducive to Kraft nerve electrode and is connected with the electricity of external circuit.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of a kind of implanted Kraft of the present invention nerve electrode;
Fig. 2 is the process chart of the manufacture method of a kind of implanted Kraft of the present invention nerve electrode.
The specific embodiment
Below in conjunction with Figure of description and embodiment, the specific embodiment of the present invention is described in further detail.Following examples are only for the present invention is described, but can not be used for limiting the scope of the invention.
As shown in Figure 1, a kind of implanted Kraft of the present invention nerve electrode, comprises the strip belt 2 with electrode points 1, connecting lead wire 3 and lead contact region 4.
Described strip belt 2 one end are the ring-type of flat sealing, and the opening 11 of described closed-loop 5 is elongate rectangle, and the length of opening 11 equals the width of belt 2, and the width of opening 11 is slightly larger than the thickness of belt 2.The guiding tongue 6 that described strip belt 2 other ends are installed with an auxiliary electrode.There is the micro-protuberance thing 7 of continuous indentation described strip belt both sides.When electrode is installed, first the guiding tongue 6 that is positioned at belt one end is passed to the closed-loop 5 that is positioned at the belt other end, then from the opposite side of closed-loop, pull belt head 8, once the micro-protuberance thing 7 of belt both sides is by after closed-loop 5, closed-loop 5 can be blocked micro-protuberance thing 7, strip belt 2 can not back fall back, and strip belt 2 will form cylinder-like structure.Drum diameter is by continuing to pull belt further to regulate.
Described electrode points 1 is distributed in described strip belt 2 middle parts near near described closed-loop 5; Described connecting lead wire 3 is connected to described lead contact region 4 by described electrode points; Each electrode points 1 is connected to lead contact 10 by interconnection line 9 independently.
Described belt 2 is made by the Parylene with bio-compatibility; The metallic film materials such as the titanium that described electrode points 1 is grown by physical vapor deposition, gold, platinum are made.
Wherein, described strip belt 2 is long is 15mm, and wide is 8mm, and thickness is 10～20 μ m.
Wherein the opening of closed-loop 5 is long is 8mm, and wide is 20～50 μ m, and micro-protuberance thing 7 ledge length are 100 μ m, and the spacing of adjacent micro-protuberance thing 7 is 628 μ m simultaneously.
Wherein, described connecting lead wire 3 is long is 25mm, and simultaneously wide is 2mm, and thick is 10～20 μ m.
Wherein, described metal alloy interconnection line 4 is wide can be 40 μ m, and the spacing of adjacent interconnection line 4 is 60 μ m simultaneously, and described electrode points size is 300 μ m * 300 μ m.
As shown in Figure 2, the manufacture method of implanted Kraft nerve electrode of the present invention, comprises the following steps:
1, the metal electrode layer of making Parylene-metal alloy-Parylene structure on the silicon chip that is coated with aluminum film sacrifice layer by Parylene deposit, photoetching, evaporation, sputter and wet etching, comprises electrode points, interconnection line and lead contact;
This step can adopt following method to realize.
(1) on silicon chip 12, evaporation or sputtered aluminum film 13 are made sacrifice layer, and on described sacrifice layer deposit ground floor Parylene isolated insulation layer 14, wherein, aluminum film 13 thickness can be approximately 1 μ m, ground floor Parylene isolated insulation layer 14 thickness can be about 8 μ m, as Fig. 2 (a);
(2) make electrode points 1, interconnection line 9 and the lead contact 10 of Kraft nerve electrode, and deposit second layer Parylene isolated insulation layer 15 thereon, form the electrode layer of Parylene-metal alloy-Parylene, wherein, second layer Parylene isolated insulation layer 15 thickness can be about 4 μ m, as Fig. 2 (b).
2, by photoetching, plating, make metal mechanical support layer, described metal mechanical support layer comprises micro-protuberance thing 7 and closed-loop 5.Described plating forms plating mask by sputter copper seed layer, the thick glue of spin coating photoetching, carrys out electrogilding.After making micro-protuberance thing 7 and closed-loop 5, deposit the 3rd strata xylol isolated insulation layer 16, wherein, the thickness of described micro-protuberance thing 7 and closed-loop 5 can be approximately 12 μ m, the deposition thickness of described the 3rd strata xylol isolated insulation layer 16 can be approximately 3 μ m, as Fig. 2 (c).
3, the mask 17 that is used for etching Parylene by spin coating, photoetching making, determine position and the size of the exposure of electrode points 1 and lead contact 10, determine size and the position of the opening 11 of closed-loop 5, determine the profile in strip belt 2, connecting lead wire 3 and lead contact region 4, as Fig. 2 (d).
4, by dry etching parylene layer until expose described aluminum film 13 sacrifice layers, expose electrode points 1 and lead contact 10, produce closed-loop opening 11, produce the profile in strip belt 2, connecting lead wire 3 and lead contact region 4, as Fig. 2 (e).
5, wet etching aluminum film sacrifice layer 13, obtain Kraft nerve electrode, as Fig. 2 (f).
Above embodiment is only for the present invention is described, but not limitation of the present invention.Although the present invention is had been described in detail with reference to embodiment, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is carried out to various combinations, revises or is equal to replacement, do not depart from the spirit and scope of technical solution of the present invention, all should be encompassed in the middle of claim scope of the present invention.
Claims (10)
1. an implanted Kraft nerve electrode, is characterized by, and described implanted Kraft nerve electrode, comprising: the strip belt (2) with electrode points (1) and self-locking structure based on micro-processing technology, connecting lead wire (3) and lead contact region (4); Described electrode points (1) is distributed in described strip belt (2) middle part near near closed-loop (5); One end of described strip belt (2) is the flat closed-loop (5) that opening is elongate rectangle; Described flat closed-loop opening (11) is elongated strip, can make strip belt (2) smooth from wherein passing through; Described strip belt (2) other end is equipped with the guiding tongue (6) that an auxiliary electrode is installed; There is continuous micro-protuberance thing (7) described strip belt (2) both sides.
2. a kind of implanted Kraft nerve electrode according to claim 1, is characterized by, and described strip belt (2) is made by the polymer thin-film material with bio-compatibility.
3. a kind of implanted Kraft nerve electrode according to claim 1, it is characterized by, described self-locking structure comprises described closed-loop (5) and described micro-protuberance thing (7), micro-protuberance thing (7) when strip belt (2) both sides passes through after closed-loop (5), and closed-loop (5) is blocked micro-protuberance thing (7); Described strip belt (2) will be closed the self-locking structure monodirectional locking of ring, can not fall back to returning, and described strip belt (2) will form cylinder-like structure; Described drum diameter is by continuing to pull belt to regulate.
4. a kind of implanted Kraft nerve electrode according to claim 1, is characterized by, and described connecting lead wire (3) is connected to described lead contact region (4) by described electrode points (1); Each electrode points (1) is connected to lead contact (10) by interconnection line (9) independently.
5. according to a kind of implanted Kraft nerve electrode described in claim 1-4 item any one, it is characterized by, described strip belt (2) dimensional parameters is preferably: long 15mm, wide 8mm, thickness 15 μ m; The dimensional parameters of described closed-loop (5) is preferably: the long 8mm of opening, wide 50 μ m; Described micro-protuberance thing (7) ledge dimensional parameters is preferably: long 100 μ m; Described electrode points (1) dimensional parameters is preferably: big or small 300 μ m * 300 μ m.
6. making is as weighed a method for the implanted Kraft nerve electrode as described in 1, and described manufacture method comprises the following steps:
(1) being coated with the metal electrode layer of making polymer-metal alloy-polymer architecture on the substrate of sacrifice layer by polymer thin-film material deposit, photoetching, evaporation, sputter and wet etching, comprise electrode points (1), interconnection line (9) and lead contact (10);
(2) by photoetching, plating, make metal mechanical support layer, or make polymer machinery supporting layer by polymer thin-film material growth, photoetching and dry etching, described mechanical support layer comprises micro-protuberance thing (7) and closed-loop (5);
(3) make the mask for etch polymers, determine position and the size of electrode points (1) and lead contact (10), determine size and the position of closed-loop opening (11), determine the profile of strip belt (2), connecting lead wire (3) and lead contact region (1);
(4) by dry etching polymeric layer, until expose described sacrifice layer, expose electrode points (1) and lead contact (10); Produce closed-loop opening (11), produce the profile of strip belt (2), connecting lead wire (3) and lead contact region (4);
(5) remove sacrifice layer, obtain Kraft nerve electrode.
7. a kind of manufacture method of implanted Kraft nerve electrode according to claim 6, is characterized by, and the substrate in described step (1) is silicon chip (12); At the upper evaporation of described silicon chip (12) or sputtered aluminum film production aluminum film sacrifice layer; On described aluminum film sacrifice layer, deposit polymer is as isolated insulation layer; Make electrode points (1), interconnection line (9) and the lead contact (10) of Kraft nerve electrode, and deposit polymer isolated insulation layer thereon, the electrode layer of formation polymer-metal alloy-polymer.
8. a kind of manufacture method of implanted Kraft nerve electrode according to claim 7, is characterized by, and described deposit polymer is to grow parylene film layer (14) as isolated insulation layer by chemical vapor deposition as isolated insulation layer; The manufacture method of the electrode points of described Kraft nerve electrode (1), interconnection line (9) and lead contact (10): evaporation or splash-proofing sputtering metal alloy-layer also carry out photoetching, and wet etching goes out electrode points, interconnection line and lead contact figure; Or first carry out then splash-proofing sputtering metal alloy-layer of photoetching, adopt stripping technology to produce metal electrode figure.
9. a kind of manufacture method of implanted Kraft nerve electrode according to claim 6; it is characterized by; the manufacture method of described metal mechanical support layer: form plating mask (17) by sputter copper seed layer, the thick glue of spin coating photoetching, electroplate gold or other metals with bio-compatibility; The preferred fabrication method of described polymer machinery supporting layer: by thin polymer film layer growth and for mask fabrication and the dry etching of etch polymers thin layer, make polymer machinery supporting layer; Described polymer machinery supporting layer is that Parylene is made; The manufacture method of described etch mask (17): adopt spin coating positive photoresist photoetching to form etch mask, or make patterned titanium film or aluminum film by physical vapor deposition, photoetching, dry etching and wet etching, form etch mask.
10. a kind of manufacture method of implanted Kraft nerve electrode according to claim 6, it is characterized by, in described step (3), determine size and the position of closed-loop opening (11), described size is identical with the opening of the closed-loop of making in described step (2) with position; In described step (3), determine the profile of strip belt (2), described profile comprises the profile of the micro-protuberance thing (7) of making in described step (2).
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Cited By (3)
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| CN104784816A (en) * | 2015-03-27 | 2015-07-22 | 北京大学 | Cuff electrode having garland structure and manufacturing method thereof |
| CN105749421A (en) * | 2016-02-04 | 2016-07-13 | 中国科学院深圳先进技术研究院 | Manufacturing method for implantable artificial retina silicon packaging body |
| CN105771089A (en) * | 2016-02-04 | 2016-07-20 | 中国科学院深圳先进技术研究院 | Manufacturing method of implantable artificial retina ceramic packaging body |
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| CN102178999A (en) * | 2011-04-29 | 2011-09-14 | 纽诺斯（天津）科技发展有限公司 | Implanted neural electrode array system and manufacturing method thereof |
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| US20100145221A1 (en) * | 2008-12-08 | 2010-06-10 | Brunnett William C | Nerve electrode |
| CN102178999A (en) * | 2011-04-29 | 2011-09-14 | 纽诺斯（天津）科技发展有限公司 | Implanted neural electrode array system and manufacturing method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104784816A (en) * | 2015-03-27 | 2015-07-22 | 北京大学 | Cuff electrode having garland structure and manufacturing method thereof |
| CN104784816B (en) * | 2015-03-27 | 2017-05-24 | 北京大学 | Cuff electrode having garland structure and manufacturing method thereof |
| CN105749421A (en) * | 2016-02-04 | 2016-07-13 | 中国科学院深圳先进技术研究院 | Manufacturing method for implantable artificial retina silicon packaging body |
| CN105771089A (en) * | 2016-02-04 | 2016-07-20 | 中国科学院深圳先进技术研究院 | Manufacturing method of implantable artificial retina ceramic packaging body |
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Application publication date: 20140423 |