CN102590988A - Compensator camera lens for aspheric surface detection - Google Patents
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Abstract
The invention discloses a compensator camera lens for aspheric surface detection, which comprises 2-3 fraction lenses, wherein one lens is an aspheric surface lens, one surface of the aspheric surface lens is an aspheric surface, the other surface of the aspheric surface lens is a spherical surface, and the lenses are made of optical plastics. The other lenses are spherical lenses and made of the same optical glass. The aspheric surface lens is used in the compensator camera lens, so that capability for compensating spherical aberration is improved, difficulty in designing a compensator is reduced, and the lens is particularly suitable for design of compensators with conical coefficient absolute value larger than or equal to 10 and relative aperture larger than or equal to 2. A single-point diamond lathe is adopted for processing optical plastic aspheric surface lenses, so that processing time and cost of aspheric surfaces are reduced, and processing efficiency is improved. Compared with detection for aspheric surfaces with large relative aperture and large aspheric surface degree, the method can provide the compensator capable of meeting requirements of surplus wave aberration correspondingly.
Description
Technical field
The present invention relates to a kind of optical lens, particularly a kind of compensator camera lens that is used for the aspheric surface detection.
Background technology
Non-spherical element can be eliminated aberration effectively, improves the image quality of optical system, simultaneously can simplified structure, reduce the weight and volume of optical system.Non-spherical element is widely used in the aerospace field and all kinds of product for civilian use.
In the aspheric surface detection technique, the compensator method can change into plane wave or spherical wave with non-spherical wavefront, thereby realizes the interferometry of aspheric mirror in process.Than other aspheric surface detection technique, characteristics such as that the compensator method has is simple in structure, cost is low, the lead time is short, stable and reliable for performance make it to become the effective means that aspheric surface detects.
Existing aspheric surface compensator lens construction pattern is all fairly simple, is made up of 2～3 spherical lenses, be applicable to relative aperture medium and below, the less aspheric interference of aspherical degree detects.The face shape bigger for relative aperture, that aspherical degree is bigger is designed very difficulty of such sphere compensator, and the residue wave aberration often can not reach designing requirement.Development along with single-point diamond turning technology; Some carbon-free soft plastic metals, optical crystal and optical plastic can directly be processed into aspheric surface on diamond lathe; Surface figure accuracy PV value is superior to 1 μ m, some in addition can arrive 0.3 μ m, surfaceness can reach nanometer scale.This makes and in compensator, uses the optical plastic non-spherical lens to become possibility, has alleviated the design difficulty of compensator.Because infrared system; Infrared and Far-Infrared System particularly; During use face shape error require relatively low, although therefore the non-spherical lens of the single-point diamond turning processing error source that exists self is difficult to measure, face shape error is bigger than spherical glass lens, and problem such as the optical homogeneity of optical plastic is lower; Influenced compensation precision, but still be feasible for using aspheric surface in the visible light system of infrared system and low precision to detect.
Document " the parabolic null check design of Compensator of F/1.3 " (photoelectric project; 2004, Vol.31, No.1; P12-15) in; According to the requirement of assembling the two-piece type compensator that uses in the Offner compensator that uses in the light path and the parallel light path, designed three to the paraboloidal Offner compensator of F/1.3 and the compensators that parallel light path uses, and comparison is made to their performance in the aspect from remaining wave aberration, tolerance, processing technology, debug etc.; Confirmed three design results that can be used for actual compensation tests, its residue wave aberration PV value is all less than λ/35 (λ=632.8).The F/1.3 parabolic lens that the document is introduced; Its relative aperture and aspherical degree are less, and compensator is only accomplished with two spherical lenses, explains that design of Compensator is relatively easy; For the aspheric surface of object lens of large relative aperture, can not be met the compensator of requirement in this way with big aspherical degree.
Document " processing of large-numerical aperture, high order aspheric surface lens and check " (optical technology; 2003; Vol.29, No.5, P584-586) in; To the high order aspheric surface surface of certain lens in the space camera optical system, provided the actual optics design result of medium caliber high order aspheric surface compensator.The relative aperture of the high order aspheric surface in the document is about 0.82, and the circular cone coefficient is 0, and aspherical degree is less; Be about 0.1mm; The design of Compensator difficulty is lower, has only accomplished the design of compensator in the document with two spherical lenses, and residue wave aberration PV value reaches 0.046 λ.For circular cone coefficient (absolute value) greater than 10; And relative aperture carries out interferometry greater than 2 aspheric surface; If adopt disclosed technical scheme designed in the document compensator can not satisfy the general requirement (＜λ, when light during) of residue wave aberration at tested aspheric surface generation external reflection.Therefore, for aspheric interferometry, need a kind of ability to satisfy the compensator camera lens of requirement of general residue wave aberration or requirements at the higher level especially with above-mentioned requirements.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists, a kind of circular cone coefficient (absolute value) >=10 is provided, the aspheric surface of relative aperture (D/f) >=2 compensator camera lens that required satisfied residue wave aberration requires in interferometry.
For realizing above-mentioned purpose, the technical scheme that the present invention adopts provides a kind of compensator camera lens that aspheric surface detects that is used for, and it comprises 2～3 refractors, and a slice lens wherein are non-spherical lens, and remaining lens is a spherical lens; The optical parametric of compensator camera lens according to seized aspheric surface and the requirement of residue wave aberration, adopts optical design optimization to obtain.
Described non-spherical lens, one side is an aspheric surface, another side is a sphere.
The material of described non-spherical lens is an optical plastic, adopts the single-point diamond lathe to process.
The material of described spherical lens is identical, a kind of in the optical glass.
In the present invention, according to seized aspheric surface and the requirement of residue wave aberration, adopt optical design optimization to obtain the optical parametric of camera lens, its step is following:
(1) under interferometer directional light light incidence condition, with respect to tested aspheric initial position, tested aspheric vertex curvature radius, bore and detection mode, is compensated the focal length of device camera lens according to the compensator camera lens of setting; First spherical lens of the single spherical lens camera lens as compensation of the glass material that selection and this focal length are approximate; Applied Optics Design software; First spherical lens and tested aspheric surface are formed a compensator optical system; With the radius and the thickness of described first spherical lens, reach these lens and arrive tested aspheric distance as optimization variable, the compensator camera lens is carried out initial optimization;
(2) behind the initial optimization of step 1; Between first spherical lens and tested aspheric surface, add the planar lens of a slice and the first spherical lens same glass material; Radius, thickness and the airspace of adding said planar lens is optimization variable; The compensator camera lens initial optimization result that step (1) is obtained optimizes again, obtains containing the compensator camera lens after the optimization of two spherical lenses;
(3) in the compensator camera lens after the optimization that step 2 obtains; The circular cone coefficient on a surface in two spherical lenses is set to optimization variable successively, and other optimization variable are provided with constant, respectively the Automatic Optimal program of Applied Optics Design software; A surface that is wherein made the optimization aim function reduce at most; This surface is set to high order aspheric surface, and adding this aspheric limited high order aspheric surface coefficient is optimization variable, and should change optical plastic into by aspheric material; Adopt the optical design optimization method that the compensator camera lens is optimized again, obtain containing the compensator camera lens of a slice non-spherical lens and a slice spherical lens;
By the residue wave aberration of designing requirement the Optimization result of step (3) is judged that (4) if the residue wave aberration of compensator camera lens meets design requirement, then this Optimization result is resulting a kind of compensator camera lens that aspheric surface detects that is used for; If unmet, then execution in step (5);
(5) in the compensator camera lens that contains two spherical lenses that step (2) obtains, add the planar lens of a slice same glass material again; The radius, thickness and the airspace that increase the planar lens that is added are optimization variable; Adopt the optical design optimization method that the compensator camera lens is optimized again, obtain containing the compensator camera lens of three spherical lenses; Repeated execution of steps (3) and (4) obtain containing the compensator camera lens that aspheric surface detects that is used for of a slice non-spherical lens and two spherical lenses.
Compared with prior art; The invention has the beneficial effects as follows: in the structure of compensator camera lens, adopt aspheric surface; Greatly improved the ability of compensation spherical aberration; Alleviate the design difficulty of compensator, be particularly suitable for circular cone coefficient (absolute value) >=10, and the aspheric compensator of relative aperture (D/f) >=2; Adopt single-point diamond machined into optical plastic non-spherical lens, reduced aspheric process time and cost, improved working (machining) efficiency.This method is bigger for relative aperture, and the aspheric detection that aspherical degree is bigger can provide the corresponding compensator that the residue wave aberration requires that satisfies.
Description of drawings
The light that Fig. 1 provides for the embodiment of the invention 1 is at the compensator optical system structure synoptic diagram of tested surface external reflection;
The light that Fig. 2 provides for the embodiment of the invention 2 is at the compensator optical system structure synoptic diagram of tested surface internal reflection;
The light that Fig. 3 provides for the embodiment of the invention 3 is at the compensator optical system structure synoptic diagram of tested surface refraction;
Among the figure, 1, first spherical lens; 2, non-spherical lens; 3, second spherical lens; 4, seized off-axis aspheric mirror.
Embodiment
In the present embodiment, one is detected from the axle high order aspheric surface, this seized aspheric rise z is defined as:
Wherein, vertex curvature c=1/R
0, vertex curvature radius R
0=100mm, circular cone coefficient k=-105, r is the radial coordinate of putting on the non-spherical surface, r
2=x
2+ y
2α
iBe the high order aspheric surface coefficient, wherein, α
1=0, α
2=2.77613e-7, α
3=-3.80645e-11, α
4=2.27615e-15, α
5=-2.64441e-20.The off-axis aspheric surface clear aperture is 39mm, is 54.5mm from the axle amount, is 26mm from the thickness of axle high order aspheric surface on optical axis, and material is a fused quartz.The another side of this aspheric mirror is the plane.This aspheric surface is used at infrared band, and wavelength coverage is 3～5 μ m.
The designing requirement that is used for the compensator camera lens of this aspheric surface detection is: residue wave aberration PV≤λ/3 (λ=632.8nm detects tested aspheric surface external reflection formula).The coaxial eyeglass all-pass light bore D that comprises from the axle high order aspheric surface is 148mm, and the aspheric surface bore of the bore of compensator after by completion calculates, and only need calculate the wave aberration in axle high order aspheric surface clear aperture when analyzing aberration.
Can know that from tested aspheric surface parameter this aspheric relative aperture (being defined as the ratio of tested aspheric all-pass light bore D and focal distance f) is 2.96, circular cone coefficient (absolute value) reaches 105, and is convex aspheric surface, and by prior art, the design of Compensator difficulty is very big.
For accomplishing this aspheric design of Compensator, at first confirm tested aspheric detection mode.If tested aspheric surface is a concave surface, adopt the external reflection formula, promptly the light through the compensator outgoing is directly incident on tested surface, after the tested surface reflection, gets back in the compensator again.If tested surface is a convex surface, then can be reflective outside, select in reflection type and the refraction type a kind ofly, promptly external reflection, internal reflection and refraction take place respectively in the light that comes out of compensator on tested surface.When tested surface is that convex aspheric surface and bore are bigger, adopt the external reflection formula, the compensator bore certainly will be bigger, can increase the difficulty of buying compensator lens materials and eyeglass processing, and the clear aperture requirement of interferometer has also been strengthened.If adopt reflection type or transmission-type, then to process a plane at the back, and require the material of element can see through that interferometer detects optical wavelength and optical homogeneity is good at tested surface.When reflection type detected, the plane was preceding, seized aspheric surface after, light earlier through plane refraction to seized, on seized aspheric surface, reflect then, light is got back in the compensator behind plane refraction again.When refraction type detects, then be seized preceding, the plane after, light is refracted to the plane through seized aspheric surface, reflects in the plane then, light is got back in the compensator through seized refraction again.For the external reflection formula, the residue wave aberration of compensator camera lens is the twice of seized non-spherical surface wave aberration; For the internal reflection structure, the residue wave aberration of compensator camera lens is 2*N a times of seized non-spherical surface wave aberration, and wherein N is that seized aspheric surface material detects the refractive index under the optical wavelength at interferometer; And for the refraction type structure, the residue wave aberration of compensator camera lens is 2* (N-1) times of seized non-spherical surface wave aberration.More than in three kinds of structures, the external reflection formula is the first-selection of design of Compensator, if compensator eyeglass bore or interferometer bore surpass restrictive condition, can select reflection type, and refraction type is compared with preceding two kinds of adjustment more difficulty of getting up, and uses lessly, can in the end consider.
Secondly, confirm the initial configuration of compensator camera lens.Consider the tested aspheric design difficulty of present embodiment, adopt two-piece type or three-chip type structure.Can adopt the system of intermediate image plane, also can adopt the system of compact no intermediate image plane.Because the compensator of converging light incident is debug very difficulty, therefore generally adopt directional light incident now.According to compensator with respect to tested aspheric initial position and tested aspheric vertex curvature radius, bore and detection mode; Calculate the compensator lens focus, in optical design software lens storehouse, select first spherical lens of the single spherical lens camera lens as compensation of approximate focal length.In optical design software, first spherical lens and tested aspheric surface are formed a compensator optical system, with radius, the thickness of this spherical lens, and arrive tested aspheric distance as optimization variable, the compensator camera lens is carried out initial optimization.Add the planar lens of a slice same glass material then at the back at these sheet lens; Radius, thickness and the airspace that increases this planar lens is optimization variable; The compensator camera lens is optimized again; Planar lens is become has second spherical lens of focal power, system is optimized up to the optimization aim function no longer diminish.In optimizing process, note controlling bore, thickness and the compensator mechanical tube length of eyeglass, reduce technology difficulty and assembly difficulty as far as possible.
At last, because present embodiment aspheric surface relative aperture to be measured is bigger, the spherical lens of two-piece type is difficult to be met the compensating glass that the residue wave aberration requires, and therefore, certain that can make spherical lens simultaneously becomes aspheric surface, to increase the calibration capability of compensator to spherical aberration.Confirm at first which face is aspheric surface be arranged on.Method is that the circular cone coefficient with the some surfaces of lens is made as parameter; Find out the one side that makes the optimization aim function reduce at most through the Automatic Optimal of optical design software; This face is set to aspheric surface, and increasing this aspheric limited high order aspheric surface coefficient again is variable, and the material of this sheet is become optical plastic; And then adopt the optical design optimization method, require and the good compensator camera lens of manufacturability up to being met the residue wave aberration.If the residue wave aberration of the compensator camera lens after the adding aspheric surface can not meet the demands; A slice planar lens that adds the same glass material on the basis of the two-piece type spherical lens that can obtain in front again is in the compensator camera lens; Same radius, thickness and the airspace that increases this planar lens is optimization variable; System is optimized once more, obtains containing the compensator camera lens of three spherical lenses.Repeat the step of front then; Confirm that some is aspheric surface; Increasing this aspheric limited high order aspheric surface coefficient is variable; The material of this sheet is become optical plastic, and then adopt the optical design optimization method, up to obtaining remaining the compensator camera lens that wave aberration meets design requirement and shop characteristic is good.
According to said method, compensate the device design to what this instance proposed from the axle high order aspheric surface, tested aspheric surface adopts the external reflection formula.Referring to accompanying drawing 1; It is the structural representation of the compensator camera lens accomplished to present embodiment: the directional light that sends from interferometer incides first spherical lens 1 of compensator camera lens, behind superrefraction, passes through non-spherical lens 2, second spherical lens 3 successively; Incide on the seized off-axis aspheric mirror 4; Through seized reflection, the former road of light that comprises the off-axis aspheric surface face shape error is returned, and passes through the compensator camera lens again; Get back in the interferometer interfering, form interference fringe at last with reference light.The non-spherical lens 2 here, its first is sphere, and second is aspheric surface, and material is an optical plastic, and the trade mark is PMMA, and the material of first spherical lens 1, second spherical lens 3 is with a kind of optical glass, and the trade mark is BK7 (a SCHOTT glass).The concrete parameter of the compensator camera lens that present embodiment provides (comprising first spherical lens, non-spherical lens and second spherical lens) is seen table 1.Visible from table, the clear aperture maximum of compensator lens reaches 160.34mm.Because the optical homogeneity requirement to compensator camera lens material is very high, obtain bigbore like this optical glass and optical plastic and be not easy very much, cost is high.This compensator residue wave aberration PV=0.1365 λ (λ=632.8nm), RMS=0.0331 λ, (is 100mm for calculating the perfect lens focal length that remains the wave aberration adding) meets design requirement.
Table 1
In the table, the aspheric surface of non-spherical lens is by formula (1) expression, and the high order aspheric surface coefficient is respectively:
α
1＝0，
α
2＝-6.9323202e-7，
α
3＝1.2169162e-10，
α
4＝-1.6592523e-14，
α
5＝7.518955e-19。
This compensator camera lens removes the optical plastic non-spherical lens and adopts the single-point diamond lathe to process, and all the other spherical mirrors adopt traditional milling and polishing processing.Adopt single-point diamond machined into optical plastic aspheric surface, can guarantee surface figure accuracy and surface quality, need not once more that design compensation device camera lens has reduced process time to detect this aspheric surface, improved working (machining) efficiency, reduced production cost.
Because a compensator camera lens can only compensate a certain aspheric surface, the tested aspheric surface of different designs parameter, the optical parametric of its compensator camera lens is also different, but this does not influence the protection of the present invention to the method for designing of the aspheric surface compensator of constrained.Requirement with the residue wave aberration is obtained by optical design optimization the parameters of compensator camera lens according to seized aspheric surface.
A kind of aspheric surface that is used for infrared system that provides present embodiment detects contains aspheric compensator lens design method and one and uses aspheric compensator camera lens.This method is that some relative aperture is bigger; The aspheric detection that aspherical degree is bigger; Provide and to satisfy the compensator camera lens that corresponding residue wave aberration requires, be particularly suitable for circular cone coefficient (absolute value) >=10, and the aspheric surface of relative aperture >=2 detects the compensator camera lens of usefulness.
The seized off-axis aspheric surface data that provide according to embodiment 1 with contain aspheric compensator lens design method, present embodiment provides the compensator camera lens of a kind of light in the tested surface internal reflection.The structural representation of compensator camera lens is referring to accompanying drawing 2.Can see that by Fig. 2 the directional light that sends from interferometer incides first spherical lens 1, pass through the non-spherical lens 2 and second spherical lens 3 through refraction; Incide on the plane of seized off-axis aspheric mirror 4,, incide seized aspheric surface through the refraction on plane; On seized, internal reflection takes place, the former road of light that comprises the off-axis aspheric surface face shape error is catadioptric, again through plane and compensator camera lens; Get back in the interferometer interfering, form interference fringe with reference light.Described non-spherical lens 2, its first is aspheric surface, and second is sphere, and material is an optical plastic, and the trade mark is PMMA, and the material of spherical lens is an optical glass, and the trade mark is BK7 (SCHOTT glass).The concrete parameter of the compensator camera lens that present embodiment provides (comprising first spherical lens, non-spherical lens and second spherical lens) is seen table 2.Visible from table, the clear aperture of each lens is starkly lower than external reflection formula structure, has so just reduced material cost and processing cost.This compensator residue wave aberration PV=0.1280 λ, RMS=0.0261 λ meets design requirement.
Table 2
In the table, the aspheric surface of non-spherical lens is by formula (1) expression, and the high order aspheric surface coefficient is respectively:
α
1＝0，
α
2＝-9.1346302e-7，
α
3＝-5.0771941e-9，
α
4＝3.1070255e-12，
α
5＝7.3773738e-15，
α
6＝-1.1390468e-17，
α
7＝6.1344738e-21，
α
8＝-1.211996e-24。
Embodiment 3
The seized off-axis aspheric surface data that provide by embodiment 1 with contain aspheric compensator lens design method, present embodiment provides the compensator camera lens of a kind of light in tested aspheric surface refraction.The structural representation of compensator camera lens is referring to accompanying drawing 3.Can see that by Fig. 3 the directional light that sends from interferometer incides compensator, pass through the non-spherical lens 2 and first spherical lens 1 successively; Incide then on seized (the preceding one side) of seized off-axis aspheric mirror 4,, impinge perpendicularly on the plane (back one side) of seized off-axis aspheric mirror 4 through seized refraction; Internal reflection takes place on this plane; The former road of light that comprises the off-axis aspheric surface face shape error is catadioptric, through seized off-axis aspheric surface refraction, gets back in the interferometer through compensator once more; Interfere with reference light, form interference fringe.The non-spherical lens 2 here, its first is sphere, and second is aspheric surface, and material is an optical plastic, and the trade mark is PMMA, and the material of first spherical lens is an optical glass, and the trade mark is BK7 (a SCHOTT glass).The concrete parameter of the compensator camera lens that present embodiment provides (comprising the non-spherical lens and first spherical lens) is seen table 3.After compensation, the residue wave aberration PV value of seized off-axis aspheric mirror is 0.058 λ, and the RMS value is 0.0151 λ, meets design requirement.
Table 3
In the table, the aspheric surface of non-spherical lens is by formula (1) expression, and the high order aspheric surface coefficient is respectively:
α
1＝0，
α
2＝9.2769686e-8，
α
3＝1.7430502e-10，
α
4＝-1.270145e-13，
α
5＝4.5610339e-17，
α
6＝-9.9627773e-21，
α
7＝1.2539524e-24，
α
8＝-6.8639275e-29。
Claims (6)
1. one kind is used for the compensator camera lens that aspheric surface detects, and it is characterized in that: it comprises 2～3 refractors, and a slice lens wherein are non-spherical lens, and remaining lens is a spherical lens; The optical parametric of compensator camera lens according to seized aspheric surface and the requirement of residue wave aberration, adopts optical design optimization to obtain.
2. a kind of compensator camera lens that aspheric surface detects that is used for according to claim 1 is characterized in that: described non-spherical lens, and one side is an aspheric surface, another side is a sphere.
3. a kind of compensator camera lens that aspheric surface detects that is used for according to claim 1 and 2, it is characterized in that: the material of described non-spherical lens is an optical plastic.
4. a kind of compensator camera lens that aspheric surface detects that is used for according to claim 1, it is characterized in that: the material of described spherical lens is identical, a kind of in the optical glass.
5. a kind of compensator camera lens that aspheric surface detects that is used for according to claim 3, it is characterized in that: described non-spherical lens adopts the single-point diamond lathe to process.
6. a kind of compensator camera lens that aspheric surface detects that is used for according to claim 1 is characterized in that: according to seized aspheric surface and the requirement of residue wave aberration, adopt optical design optimization to obtain the optical parametric of camera lens, its step is following:
(1) under interferometer directional light light incidence condition, with respect to tested aspheric initial position, tested aspheric vertex curvature radius, bore and detection mode, is compensated the focal length of device camera lens according to the compensator camera lens of setting; First spherical lens of the single spherical lens camera lens as compensation of the glass material that selection and this focal length are approximate; Applied Optics Design software; First spherical lens and tested aspheric surface are formed a compensator optical system; With the radius and the thickness of described first spherical lens, reach these lens and arrive tested aspheric distance as optimization variable, the compensator camera lens is carried out initial optimization;
(2) behind the initial optimization of step 1; Between first spherical lens and tested aspheric surface, add the planar lens of a slice and the first spherical lens same glass material; Radius, thickness and the airspace of adding said planar lens is optimization variable; The compensator camera lens initial optimization result that step (1) is obtained optimizes again, obtains containing the compensator camera lens after the optimization of two spherical lenses;
(3) in the compensator camera lens after the optimization that step 2 obtains; The circular cone coefficient on a surface in two spherical lenses is set to optimization variable successively, and other optimization variable are provided with constant, respectively the Automatic Optimal program of Applied Optics Design software; A surface that is wherein made the optimization aim function reduce at most; This surface is set to high order aspheric surface, and adding this aspheric limited high order aspheric surface coefficient is optimization variable, and should change optical plastic into by aspheric material; Adopt the optical design optimization method that the compensator camera lens is optimized again, obtain containing the compensator camera lens of a slice non-spherical lens and a slice spherical lens;
By the residue wave aberration of designing requirement the Optimization result of step (3) is judged that (4) if the residue wave aberration of compensator camera lens meets design requirement, then this Optimization result is resulting a kind of compensator camera lens that aspheric surface detects that is used for; If unmet, then execution in step (5);
(5) in the compensator camera lens that contains two spherical lenses that step (2) obtains, add the planar lens of a slice same glass material again; The radius, thickness and the airspace that increase the planar lens that is added are optimization variable; Adopt the optical design optimization method that the compensator camera lens is optimized again, obtain containing the compensator camera lens of three spherical lenses; Repeated execution of steps (3) and (4) obtain containing the compensator camera lens that aspheric surface detects that is used for of a slice non-spherical lens and two spherical lenses.
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| CN103134442A (en) * | 2013-04-02 | 2013-06-05 | 中国科学院上海光学精密机械研究所 | Detection method of aspherical surface shape |
| CN103557791A (en) * | 2013-11-08 | 2014-02-05 | 中国科学院光电技术研究所 | Measuring device and method for secondary constants of large-caliber aspheric primary mirror |
| CN105445931A (en) * | 2015-12-21 | 2016-03-30 | 中国科学院长春光学精密机械与物理研究所 | Compensator optical system used for ultrahigh precision concave aspheric detection |
| CN105588519A (en) * | 2015-12-21 | 2016-05-18 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface shape of large-aperture telescope by using phase diversity phase retrieval |
| WO2017107747A1 (en) * | 2015-12-22 | 2017-06-29 | 中国科学院长春光学精密机械与物理研究所 | Etalon of convex reference face with long curvature radius |
| CN109579739A (en) * | 2019-01-07 | 2019-04-05 | 北京理工大学 | A kind of off-axis refraction-reflection type part compensator system and design method |
| CN110927965A (en) * | 2019-12-20 | 2020-03-27 | 易思维（杭州）科技有限公司 | Design method of compensation lens for compensating error caused by light deflection |
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| CN103557791B (en) * | 2013-11-08 | 2016-01-20 | 中国科学院光电技术研究所 | A kind of large-caliber aspheric surface primary mirror secondry constants measurement mechanism and method |
| CN105445931A (en) * | 2015-12-21 | 2016-03-30 | 中国科学院长春光学精密机械与物理研究所 | Compensator optical system used for ultrahigh precision concave aspheric detection |
| CN105588519A (en) * | 2015-12-21 | 2016-05-18 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting surface shape of large-aperture telescope by using phase diversity phase retrieval |
| CN105445931B (en) * | 2015-12-21 | 2018-07-06 | 中国科学院长春光学精密机械与物理研究所 | For the compensator optical system of superhigh precision concave aspherical surface detection |
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