CN102569031A - 一种用铟(In)进行外延片/硅片键合的方法 - Google Patents
一种用铟(In)进行外延片/硅片键合的方法 Download PDFInfo
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- CN102569031A CN102569031A CN2012100015934A CN201210001593A CN102569031A CN 102569031 A CN102569031 A CN 102569031A CN 2012100015934 A CN2012100015934 A CN 2012100015934A CN 201210001593 A CN201210001593 A CN 201210001593A CN 102569031 A CN102569031 A CN 102569031A
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 24
- 239000010703 silicon Substances 0.000 title claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims abstract description 23
- 229910052738 indium Inorganic materials 0.000 title claims abstract description 19
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 239000010931 gold Substances 0.000 claims abstract description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052737 gold Inorganic materials 0.000 claims abstract description 11
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 abstract 7
- 239000010410 layer Substances 0.000 description 21
- 238000005516 engineering process Methods 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
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- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
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Application Number | Priority Date | Filing Date | Title |
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CN2012100015934A CN102569031A (zh) | 2011-07-07 | 2012-01-05 | 一种用铟(In)进行外延片/硅片键合的方法 |
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CN201110189149 | 2011-07-07 | ||
CN201110189149.5 | 2011-07-07 | ||
CN2012100015934A CN102569031A (zh) | 2011-07-07 | 2012-01-05 | 一种用铟(In)进行外延片/硅片键合的方法 |
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CN102569031A true CN102569031A (zh) | 2012-07-11 |
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CN2012100015934A Pending CN102569031A (zh) | 2011-07-07 | 2012-01-05 | 一种用铟(In)进行外延片/硅片键合的方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106115608A (zh) * | 2016-05-31 | 2016-11-16 | 苏州希美微纳系统有限公司 | 针对射频mems器件应用的横向互连低温圆片级封装方法 |
CN108572208A (zh) * | 2017-03-09 | 2018-09-25 | 深圳先进技术研究院 | 一种柔性可拉伸葡萄糖传感器及其制备方法和应用 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09172229A (ja) * | 1995-11-30 | 1997-06-30 | Hewlett Packard Co <Hp> | 半導体ウェーハ・ボンディングによって製造された透明基板垂直共振型面発光レーザ |
US20030040133A1 (en) * | 2001-08-24 | 2003-02-27 | Ray-Hua Horng | Novel for technique a surface emitting laser diode with a metal reflector |
CN101295753A (zh) * | 2007-04-24 | 2008-10-29 | 中国科学院上海微系统与信息技术研究所 | 用于III-V族化合物器件的低温Au-In-Au键合方法 |
-
2012
- 2012-01-05 CN CN2012100015934A patent/CN102569031A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09172229A (ja) * | 1995-11-30 | 1997-06-30 | Hewlett Packard Co <Hp> | 半導体ウェーハ・ボンディングによって製造された透明基板垂直共振型面発光レーザ |
US20030040133A1 (en) * | 2001-08-24 | 2003-02-27 | Ray-Hua Horng | Novel for technique a surface emitting laser diode with a metal reflector |
CN101295753A (zh) * | 2007-04-24 | 2008-10-29 | 中国科学院上海微系统与信息技术研究所 | 用于III-V族化合物器件的低温Au-In-Au键合方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106115608A (zh) * | 2016-05-31 | 2016-11-16 | 苏州希美微纳系统有限公司 | 针对射频mems器件应用的横向互连低温圆片级封装方法 |
CN108572208A (zh) * | 2017-03-09 | 2018-09-25 | 深圳先进技术研究院 | 一种柔性可拉伸葡萄糖传感器及其制备方法和应用 |
CN108572208B (zh) * | 2017-03-09 | 2023-10-03 | 深圳先进技术研究院 | 一种柔性可拉伸葡萄糖传感器及其制备方法和应用 |
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Application publication date: 20120711 |