CN102568503B - Recording layer for optical information recording medium and optical information recording medium - Google Patents
Recording layer for optical information recording medium and optical information recording medium Download PDFInfo
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- CN102568503B CN102568503B CN201110413857.2A CN201110413857A CN102568503B CN 102568503 B CN102568503 B CN 102568503B CN 201110413857 A CN201110413857 A CN 201110413857A CN 102568503 B CN102568503 B CN 102568503B
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Abstract
The invention provides a recording layer for optical information recording medium with excellent recording characteristics and an optical information recording medium with the recording layer. The recording layer for recording by laser irradiation comprises: oxide containing Mn. The atomic ratio of the Mn to all the metal elements of the oxide in the recording layer is below 80 atom% and the recording layer does not contain metal Mn.
Description
Technical field
The present invention relates to optical information recording media recording layer and optical information recording media.
Background technology
Optical information recording media (CD) represents by CD, DVD, the such CD of BD, according to record regenerating mode, roughly divided into read-only, Worm type, rewriting type three classes.Wherein, the recording mode of the CD of Worm type, is mainly roughly divided into following mode: the phase transformation mode that makes recording layer phase transformation; Make the interlayer reactive mode of multiple recording layer reactions; Make the isolation of the compound decomposition that forms recording layer; Make to form locally on recording layer the perforate mode that records mark of hole and pit etc.
In described phase transformation mode, propose as the material of recording layer, utilize crystallization based on recording layer to cause the material of change of optical properties.For example, in patent documentation 1, the recording layer that contains Te-O-M (M is at least one element of selecting) from metallic element, semimetallic elements and semiconductor element has been proposed, in patent documentation 2, the recording layer that contains Sb and Te is proposed.
As the recording layer of the optical information recording media of described interlayer reactive mode, for example in patent documentation 3, propose to have a kind of recording layer, it makes the first recording layer be made up of the alloy that contains In-O-(Ni, Mn, Mo), and makes the second recording layer by containing Se and/or Te element, O (oxygen) and forming from the alloy of an element selecting among Ti, Pd, Zr.In patent documentation 4, propose in addition, the first recording layer contains the metal taking In as major component, the second recording layer contains at least one element that belongs to 5B or 6B family element, the metal beyond stacked oxide or nonmetal, and the reaction bringing by heating or alloying are carried out record.
As the recording layer of isolation of compound that point is deconstructed into described recording layer, in patent documentation 5, the recording layer taking nitride as major component is disclosed for example, its research be, decompose this nitride by heating, thus the material recording and organic color material.
As the recording layer of described perforate mode, study the recording layer being formed by low melting point metal material.For example, in patent documentation 6, propose to have a kind of recording layer being formed by the alloy of element that is added with 3B family, 4B family, 5B family in Sn alloy.In patent documentation 7, proposing has a kind of recording layer being made up of Sn base alloy in addition, and this Sn base alloy contains Ni and/or Co in the scope of 1～50 atom %.In this external patent documentation 8, disclose a kind of recording layer being made up of In alloy, the Co that this In alloy contains 20～65 atom %, wherein also contains below more than one element 19 atom % that select from Sn, Bi, Ge, Si.In patent documentation 9, disclose in addition a kind of recording layer, it is made up of Pd, Ag, O, and the ratio of the atomicity of this Pd, Ag, O is controlled in specialized range.
[patent documentation 1] JP 2005-135568 communique
[patent documentation 2] JP 2003-331461 communique
[patent documentation 3] JP 2003-326848 communique
No. 3499724 communique of [patent documentation 4] Jap.P.
No. 2003/101750 handbook of [patent documentation 5] International Publication
[patent documentation 6] JP 2002-225433 communique
[patent documentation 7] JP 2007-196683 communique
No. 4110194 communique of [patent documentation 8] Jap.P.
[patent documentation 9] JP 2005-238516 communique
In the desired demand characteristics of optical information recording media, the having of requirement: by writing the incident of laser, there is the tracer signal sufficient signal amplitude (system to a high-profile) of regenerating; Signal intensity high (high C/N ratio); Be difficult to produce the deteriorated and deteriorated high-durability of environment.C/N ratio is the meaning of carrier-to-noise ratio (Carrier to Noise ratio), other ratio of the noise output stage of the signal while reading and background.
As the disclosed recording materials of above-mentioned prior art, be difficult to meet these requirements with recording materials monomer.
In phase transformation mode, the independent reflectivity of recording layer is low, so should improve the reflectivity under compact disc states, needs reflectance coating, and in order to increase degree of modulation, need to be at the ZnS-SiO setting up and down of recording layer
2deng dielectric layer (dielectric film), the number of plies that forms CD increases, and produces rate variance.Because interlayer reactive mode also needs several record layers, the number of plies that therefore forms CD increases, and produces rate variance.
In isolation, as recording layer, use the optical information recording media of organic color material to be widely used, but, because be difficult to absorb blue laser and near the such short wavelength's of bluish violet color laser (400nm) luminous ray, so can not get good recorded information, can not improve recording density.In addition, use the optical information recording media of organic color material, suppress that the light of daylight etc. causes deteriorated and deteriorated the having any problem that long-term preservation causes.
With respect to this, described perforate mode, because the reflectivity of recording layer self is high, and also can guarantee large degree of modulation, forms the number of plies of CD so can reduce, but will reach higher recording sensitivity time, also needs further research.
Summary of the invention
The present invention does in light of this situation, its object is, a kind of number of plies that can either reduce CD is provided, and meets again above-mentioned requirements characteristic, can improve the optical information recording media recording layer of the throughput rate of optical information recording media, and there is the optical information recording media of this recording layer.
Can solve the present invention of above-mentioned problem, it is optical information recording media recording layer, the recording layer recording by the irradiation of laser, it has following main idea: contain Mn oxide, form in described recording layer in oxidiferous whole metallic elements the atomic ratio of shared Mn be below 80 atom %, and containing metal Mn not.
In addition, also preferred embodiment, also contain at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide.
The present invention also comprises optical information recording media, it is characterized in that, has described optical information recording media recording layer.
In addition, the preferred embodiment of the present invention, is a kind of optical information recording media, its described optical information recording media with on recording layer and/or under, be laminated with dielectric layer.
Described light recording information media of the present invention, preferably metal-containing layer not.
Be preferred embodiment that described optical information recording media, has optical information recording media recording layer described in multilayer, and have transparent intermediate layer in multilayer optical information recording media with the interlayer of recording layer in addition.
According to the present invention, can improve the recording layer for optical information recording media (particularly Worm type optical information recording media recording layer) of the recording sensitivity excellence under the recording laser power of practicality, and there is the optical information recording media (particularly Worm type optical information recording media) of this recording layer.
Also have, in this manual, so-called " recording sensitivity excellence ", in embodiment mono-hurdle, describe in detail as described later, the meaning is, by recording layer irradiating laser (writing laser), even lower recording laser power, roughly 5～15mW, also can realize high C/N ratio and lofty tone system.
Brief description of the drawings
Fig. 1 is the mode chart of the summary of the optical information recording media that represents that embodiment 1 makes.
Symbol description
1 substrate
2,4 dielectric layers
3 recording layers
5 photic zones
Embodiment
The present inventors, in order to realize the irradiation by writing laser, the Worm type optical information recording media of recording sensitivity excellence has carried out research with keen determination with recording layer.It found that, if the recording layer using, it contains the material different from existing recording layer,, it is the recording layer that contains Mn oxide, or preferably contain Mn oxide, and the recording layer of at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide, the object of expection can be reached.If to above-mentioned recording layer irradiating laser, Mn oxide is decomposed by LASER HEATING, emit oxygen (O
2gas), generated bubble by the part of Ear Mucosa Treated by He Ne Laser Irradiation.Consequently, film change of shape, mark forms.If adopt the irreversible recording mode of such bubble formation that is accompanied by Ear Mucosa Treated by He Ne Laser Irradiation and come, find recording sensitivity than improved in the past, thereby completed the present invention.
In the recording mode of carrying out at recording layer of the present invention, prelaser recording layer be configured to noncrystalline, after Ear Mucosa Treated by He Ne Laser Irradiation, be also noncrystalline, this point is different from phase transformation mode, phase transformation mode is utilized, noncrystalline becomes crystallization by Ear Mucosa Treated by He Ne Laser Irradiation.
Reason as recording layer recording sensitivity excellence of the present invention is considered to, the gassing passing through Ear Mucosa Treated by He Ne Laser Irradiation, carry out the part of mark formation, with the part that there is no a gassing (, do not form the part of mark) compare, transmissivity increases (being that reflectivity reduces), thereby can increase degree of modulation.
In addition, if the present invention is by contain Mn oxide in recording layer, and not containing compared with the recording layer of Mn oxide, can strengthen the absorptivity of film, therefore can will write the energy efficient rate ground energy transform into heat energy of laser of light inlet.In addition in the present invention, in whole metallic elements (at least one element that is preferably Mn and selects from the group of In, Zn, Sn and Cu formation) of the contained oxide of formation recording layer, because suitably controlling the ratio (atomic ratio) of wherein shared Mn amount, recording needed laser power so can control.Consequently, according to the present invention, at the power (roughly 5～15mW) of practical recording laser, the decomposition of above-mentioned oxidation Mn is promoted, and can make to record inspiration degree and improve.
Further, not containing metal Mn of recording layer of the present invention.This be due to, if metal M n is included in recording layer, the oxidation of metal M n and decomposition are carried out, permanance reduce.Therefore, recording layer of the present invention is containing metal Mn not, thereby can suppress the long-term reliability reduction that recording layer causes because environment is deteriorated.According to the present inventors' result of study, because suitably controlled the ratio (atomic ratio) of above-mentioned Mn amount, so as described later shown in embodiment, can obtain good characteristic.
Below, describe the structure of recording layer of the present invention in detail.In this manual, for the convenience illustrating, have and will form the situation that group at least one element that goes out to select is called X group element from In, Zn, Sn and Cu
As aforementioned, recording layer of the present invention, is the recording layer recording by the irradiation of laser, it is characterized in that, contains Mn oxide.Preferred recording layer of the present invention, contains Mn oxide, and at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide.As above-mentioned in recording layer, not containing metal Mn.
Recording layer of the present invention contains Mn oxide, as long as the form of Mn oxide is the form conventionally existing, is not particularly limited.As Mn oxide, except MnO, Mn
3o
4, Mn
2o
3, MnO
2beyond the oxide being formed by Mn and oxygen (O) like this, can also enumerate with above-mentioned recording layer in the composite oxides (X-Mnx-Oy) of contained other elements (at least one of X group element=In, Zn, Sn and Cu).
In recording layer of the present invention, contain above-mentioned Mn oxide, and to need Mn shared atomic ratio in the whole metallic elements that form the contained oxide of recording layer be below 80 atom %.Exceeded 80 atom % if Mn contains, cannot form well bubble by Ear Mucosa Treated by He Ne Laser Irradiation, can not get tracer signal.
Recording layer of the present invention, except Mn oxide, also can contain at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide.These oxides are useful in the control of film refractive index and the control of recording sensitivity (degree of modulation and C/N ratio).The form of In oxide, Zn oxide, Sn oxide and Cu oxide is also the form conventionally existing, and is not particularly limited, and for example, for In oxide, can illustrate In
2o
3deng, Zn oxide can illustrate ZnO etc., and Sn oxide can illustrate SnO or SnO
2deng, Cu oxide can illustrate CuO, Cu
2o etc.In the present invention, at least one that contains above-mentioned oxide, can contain separately respectively In oxide, Zn oxide, Sn oxide and Cu oxide, also can contain two or more oxides.Wherein preferred oxide is In oxide.
Further, in recording layer, contain above-mentioned selective oxidation thing, when In oxide, Zn oxide, Sn oxide and Cu oxide, preferably containing their metallic element (, metal In, Metal Zn, metal Sn, metal Cu).This is because these metallic elements can be captured oxygen and be oxidized from other oxides, under these circumstances, can impact the characteristic of recording layer.
In order to obtain the recording layer of recording sensitivity excellence, preferably forming oxide (the Mn oxide that forms recording layer of the present invention, with at least one oxide of selecting the group who preferably forms from In oxide, Zn oxide, Sn oxide and Cu oxide) metallic element (Mn and X group element) in the atomic ratio (be expressed from the next, below have the situation referred to as " Mn ratio ") of shared Mn amount be more than 10 atom %.
Mn measures (atom %)={ [Mn]/([Mn]+[In]+[Zn]+[Sn]+[Cu]) } × 100
In formula, [Mn], [In], [Zn], [Sn] and [Cu] look like respectively, and Mn amount (atom %), In amount (atom %), Zn amount (atom %), Sn amount (atom %), Cu contained in recording layer of the present invention measure (atom %).
Further, while not containing In, Zn, Sn, Cu in recording layer, calculate as 0 atom % respectively.
At this, if Mn lower than 10 atom %, the oxidation Mn decomposing when Ear Mucosa Treated by He Ne Laser Irradiation is few, the oxygen amount of therefore emitting is insufficient, the bubble of generation tails off, result is that signal intensity (C/N ratio) diminishes.Exist in more than 2 layers multiplayer optical disks at recording layer in addition, enter face recording layer farthest apart from laser and require transmissivity to a certain degree.If Mn ratio is lower than 10 atom %, the absorptivity of recording layer also diminishes, therefore record needed laser power and become large, and be not preferred.More than Mn ratio is preferably 10 atom %, more preferably more than 12 atom %, more preferably more than 15 atom %.
, if oxidation Mn is many, degree of modulation diminishes, and therefore Mn ratio is below 80 atom %, is preferably below 70 atom %, more preferably below 60 atom %.
Recording layer of the present invention, contains Mn oxide as above-mentioned, and can contain the inevitable impurity of unavoidably sneaking in the time making.Preferred recording layer of the present invention contains Mn oxide in addition, and at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide, and can contain the inevitable impurity of unavoidably sneaking in the time making.
The preferred thickness of above-mentioned recording layer, on recording layer and/or under insert the situation of other layers such as dielectric layer, and there is no the situation of these other layers be different.Although also different according to the structure of optical information recording media, mainly, in the time that individual layer uses recording layer (while not establishing dielectric layer), the thickness that preferably makes recording layer is 10～60nm.If the thickness of recording layer is excessively thin, the Mn quantitative change of decomposing is few, is therefore difficult to obtain the sufficient reflectance varies that record brings.More preferably more than 20nm, more than being particularly preferably 30nm.On the other hand, if the thickness of recording layer is blocked up, the formation spended time of film, throughput rate reduces, and records needed laser power change greatly.More preferably below 50nm, more preferably below 45nm.In addition, on recording layer and/or under when dielectric layer is set, the thickness that preferably makes recording layer is 2～50nm, more preferably more than 3nm, more preferably more than 5nm, then more than being further preferably 10nm, more preferably below 40nm, more preferably below 15nm.
Recording layer of the present invention is as above-mentioned, contain Mn oxide (Mn of specific ratio), preferably contain Mn oxide, with at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide, but in order to obtain the recording layer of such form, preferably form recording layer with sputtering method.According to sputtering method, can also guarantee the film thickness distribution homogeneity in disc face, therefore preferred.
In order to form the recording layer that contains above-mentioned oxide with sputtering method, carry out reactive sputtering, as sputtering condition, preferably adjust gas flow and carry out.Particularly preferably making oxygen flow is more than 0.5 times for the ratio of Ar (argon) flow, more preferably more than 1.0 times.In addition, oxygen flow is preferably below 5.0 times for the ratio of Ar flow.Other conditions of sputtering method are not particularly limited, and can adopt general method, air pressure are controlled to the scope of for example 0.1～1.0Pa, by sputter Electronic Control at for example 0.5～20W/cm
2scope.
As the sputtering target using in described sputtering method (being only called below " target "), can enumerate and contain Mn oxide, surplus is the target of inevitable impurity.
Preferably target is, (A) contains Mn oxide, and at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide, and surplus is inevitable impurity.Or also can use (B) to contain Mn metallic target, and the metallic target of at least one element of selecting from the group that In, Zn, Sn and Cu form substitutes the target of (A), make them discharge simultaneously and carry out polynary sputter.In addition also can use (C) metal and oxide hybrid target.Metallic element becomes oxide by importing oxygen.
Also can use following sputtering target,, with respect to the contained Mn atom of sputtering target of above-mentioned (A)～(C), with the total of at least one atom (the actual atom containing) of selecting from the group of In atom, Zn atom, Sn atom and Cu atomic building, the ratio of Mn atom is 10～80 atom %.
Also have, as above-mentioned (A) and sputtering target (C), particularly by the powder of the metal powder of Mn or Mn oxide, mix with at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide or the powder of metal, make it sintering, use such sputtering target, on the inner evenness of composition of throughput rate and the film that forms and the point of THICKNESS CONTROL preferably.In the time of the manufacture of above-mentioned sputtering target, although micro-, but have impurity to sneak in sputtering target.But the one-tenth of sputtering target of the present invention is grouped into, there is no regulation to these micro constitutent of unavoidably sneaking into, only otherwise hinder above-mentioned characteristic of the present invention, the trace of these inevitable impurity is sneaked into and is allowed to.
Optical information recording media of the present invention, the feature having is to possess above-mentioned recording layer this point, utilizes the oxide of Mn to decompose and the O of generation
2the effect of gas forms mark.
In the present invention, the formation beyond above-mentioned recording layer is not particularly limited, and can adopt known formation in the field of optical information recording media.
Optical information recording media of the present invention, there is above-mentioned recording layer, also on recording layer and/or under (at least one side) be laminated with dielectric layer, thus, can omit in the past in order to improve the formation of the needed metal level of reflectivity (metal level and its alloy-layers of Ag, Au, Cu, Al, Ni, Cr, Ti etc.).As above-mentioned recording layer of the present invention, there is high reflectance, rate of change, even if therefore reflection horizon is not set especially, also can carry out fully signal regeneration.
In addition, by recording layer and/or under dielectric layer is set, can improve signal intensity, can further improve characteristics of signals.This be due to, prevented becoming separated in flight of the oxygen that causes recording layer to decompose occurring because of Ear Mucosa Treated by He Ne Laser Irradiation, thereby can reduce the reduction of reflectivity, can guarantee as the needed reflectivity of recording layer.
Can enumerate knownly as the kind of above-mentioned dielectric layer, can illustrate the such as oxide of Si, Al, In, Zn, Zr, Ti, Nb, Ta, Cr, Sn etc.; The nitride of Si, Al, In, Ge, Cr, Nb, Mo, Ti etc.; Zn sulfide; The carbonide of Cr, Si, Al, Ti, Zr, Ta etc.; The fluoride of Mg, Ca, La etc.; Or its potpourri etc.If consider the raising of throughput rate and recording sensitivity etc., preferably use In
2o
3.
The thickness of above-mentioned dielectric layer, is preferably roughly 2～30nm.If the thickness of dielectric layer is excessively thin, the O occurring
2the spreadability of gas is insufficient, and recording sensitivity reduces.On the other hand, if the thickness of dielectric layer is blocked up, due to interference of light, cause reducing as stacked film (recording layer+dielectric layer) overall absorption, therefore the laser power that writes needing uprises, and the metamorphosis (generation of bubble) when mark forms is difficult to occur, and therefore recording sensitivity reduces.If consider such situation, the preferred thickness while dielectric layer being located to lower floor's (non-light incident side of laser) of recording layer is 3～15nm, and the preferred thickness while being located at the upper strata (laser light incident side) of recording layer is roughly 2～30nm.
In addition, as optical information recording media (CD), its structure can be enumerated as, stacked recording layer on the substrate of groove of guiding use that is carved with laser, more stacked photic zone thereon.
For example, as the former material of described substrate, can enumerate polycarbonate resin, norbornene resin, cyclic olefine copolymer, amorphous polyolefin etc.In addition, can use polycarbonate or ultraviolet hardening resin as described light transmission layer.As euphotic material, preferably there is high-transmission rate for the laser that carries out record regenerating, absorptivity is little.The thickness of described substrate can be enumerated for example 0.5～1.2mm.Described euphotic thickness can be enumerated for example 0.1～1.2mm in addition.
Recording layer recording characteristic excellence of the present invention, but for the permanance raising of recording layer or the further raising of recording characteristic, also can, in the upper strata of recording layer and/or lower floor, oxide skin(coating), nitride layer, sulfurized layer etc. be set.By stacked these layers, can improve the permanance of recording layer, and can further improve recording characteristic.
Further, above-mentioned demonstration be recording layer and photic zone 1 layer of CD of 1 layer of each formation respectively, but be not limited thereto, can be also 2 layers of multilayer laminated above CD of recording layer and photic zone.
In the situation of described 2 layers of above CD, by recording layer with between stacked optical adjustment layer and dielectric layer form as required recording layer group and other recording layers group, also can there is the transparent intermediate layer for example being formed by the transparent resin such as ultraviolet hardening resin or polycarbonate etc.By transparent intermediate layer is set, can be for multilayer record in the focus of depth direction convergent laser.
The invention is characterized in, adopt aforesaid recording layer, on preferred recording layer and/or under be provided with the stacked film this point of dielectric layer, substrate and photic zone beyond described recording layer, also have the formation method of transparent intermediate layer etc. to be not particularly limited, form to manufacture optical information recording media with the method for conventionally carrying out.
As optical information recording media, can enumerate CD, DVD or BD, as concrete example, for example, can enumerate BD-R, it can be by about wavelength 380nm to 450nm, and the blue laser of preferred about 405nm is irradiated on recording layer, carries out record and the regeneration of data.
[embodiment]
Below, enumerate embodiment and be described more specifically the present invention, but the present invention is not limited by following embodiment certainly, also can suitablely be changed enforcement before not departing from the scope of aim described later, these are all included in technical scope of the present invention.
In the present embodiment, the recording layer using is by forming as follows: Mn oxide, with from the group that In oxide, Zn oxide, Sn oxide and Cu oxide form, select at least one, the impact that the ratio of Mn element that investigation records layer is contained and the combination of X group element cause recording characteristic etc.
(1) making of CD
The formation summary mode chart of the CD using in the present embodiment is presented in Fig. 1.As shown in Figure 1, CD has on polycarbonate substrate 1 stacked as the structure of lower floor in order: dielectric layer 2; Containing the recording layer 3 of Mn oxide; Dielectric layer 4; Photic zone 5.
The method for making of above-mentioned CD is as follows.
As disc substrates, use polycarbonate substrate 1 (thickness: 1.1mm, diameter: 120mm, track pitch: 0.32 μ m, depth of groove: about 25nm), on substrate 1, by DC magnetron sputtering system, form successively the downside dielectric layer 2 that table 1 describes, the upside dielectric layer 4 that Mn as shown in table 1 describes than different recording layer 3, table 1.The thickness of recording layer 3 is 40nm, on recording layer/under the thickness of stacked dielectric layer 2,4 respectively, up/down is 10nm.
The sputter forming for recording layer, carries out as follows.At this moment sputtering condition is, Ar flow: 10sccm, and oxygen flow: 10sccm, air pressure: 0.2Pa, DC sputtering power: 100～200W, substrate temperature: room temperature.
In the No.1,2 of table 1, use pure Mn target.
In No.3～7 of table 1, utilize the target of pure Mn and these two kinds of elements of pure Cu, by polynary spatter film forming, make thus Mn than changing.In No.8～12,15,16 of table 1, utilize the target of pure Mn and these two kinds of elements of pure In equally, in No.13, utilize the target of pure Mn and these two kinds of elements of pure Sn, in No.14, utilize the target of pure Mn and these two kinds of elements of pure Zn.
In dielectric layer 2,4, use sputtering target, Ar flow: 10sccm, and oxygen flow: 10sccm, air pressure: 0.2Pa, DC sputtering power: 100～200W, substrate temperature: room temperature, (sputtering target is the known sputtering target that the one-tenth of table 1 is grouped into the dielectric layer that the one-tenth of formation table 1 is grouped into, No.2,4～14th, In
2o
3, No.15 is SnO
2, No.16 is ZnO
2).
Then,, after spin coating uv-hardening resin on dielectric layer 4 (Japanese chemical drug society's system " BRD-864 "), irradiation ultraviolet radiation and form the photic zone of the about 0.1mm of thickness, obtains CD.
The one-tenth of recording layer is grouped into, and forms the monofilm (there is no dielectric layer) of recording layer with above-mentioned same condition, uses ICP luminescence analysis to analyze for this recording layer monofilm.
(XPS analysis)
For each test portion of table 1, by XPS method, the state of contained Mn and In, Zn, Sn, Cu etc. in analytic record layer.Specifically, use the x-ray photoelectron spectroscopy Quantera processed SXM of physical Electronics society, implement the qualitative analysis of the wide area photoelectron spectroscopy based on most surface., by Ar sputter from surface to depth direction carry out etching, measure the Constitution Elements of film and the narrow territory photoelectron spectroscopy of the element that detects in most surface in each constant depth thereafter.According to areal intensity ratio and the relative sensitivity coefficient of the narrow territory photoelectron spectroscopy obtaining in each degree of depth, compute depth direction composition distribution (atom %).In addition, infer bonding state according to the peak of the mixing power spectrum of each element (montage spectrum).Consequently, in each test portion of No.3～16, unconfirmed to having in recording layer Mn and X group's atom to have (recording layer 3 except No.1,2 all contain Mn oxide, not containing metal Mn, the oxide that X group element is contained in No.3～16 in addition) as metal.
Also carry out above-mentioned same analysis for dielectric layer 2,4.
(2) evaluation of CD
Evaluate as follows the initial stage recording characteristic (power of recording laser, C/N ratio, degree of modulation) of the CD of making.
First, use disc evaluation device (recording laser centre wavelength: 405nm, the NA (numerical aperture): 0.85), irradiate regeneration/recording laser, carry out the reading of CD, record of パ Le ス テ Star Network industry society's system " ODU-1000 ".Linear velocity is evaluated as 4.92m/s.
About degree of modulation (C/N is than the degree of modulation that becomes maximum point), use Yokogawa Electric Corporation's digital oscilloscope processed " DL1640 ", the maximum reflectivity of survey record part and minimum reflectance, calculate based on following formula.
Degree of modulation (ratio)=(maximum reflectivity-minimum reflectance)/(maximum reflectivity)
About C/N ratio, use ADVANTEST society R3131A spectrum analyzer processed, measurement can obtain the recording power of the highest C/N ratio.In detail, it is exactly the mark (being equivalent to the 8T of Blu-tay Disk) that repeatedly records 0.60 μ m, the signal intensity (carrier wave C/dB) of the 4.12MHz frequency content while measuring the signal-obtaining under reproducing laser power 0.3mW, with the signal intensity (noise N/dB) of the frequency content before and after it, calculate C/N ratio.
These result quantities are also presented in table 1.In table 1, describe and can arrive the highest C/N yesterday than the power of the recording laser in moment (recording power) and this highest C/N ratio.
In the present embodiment, degree of modulation (ratio) is more than 0.4, C/N than be more than 43 for recording sensitivity excellence.
[table 1]
Can be investigated as follows by table 1.First, meet the recording layer of regulation No.4～16 of the present invention, degree of modulation and C/N are all better than this two aspect., confirm and given play to good recording characteristic.
No.1, the 2nd, the comparative example that recording layer is only made up of metal M n (100%), No.2 is the example that has dielectric layer on record.So No.1,2 all can not carry out record, therefore can not measure for C/N ratio, degree of modulation.
In addition, No.3 is the example that does not form dielectric layer, and on the other hand, No.4～16th, at the example that forms up and down dielectric layer of recording layer.With respect to No.3, form in the No.5 of dielectric layer, C/N is than improving, and degree of modulation also improves 4 times of left and right.Therefore known, by recording layer dielectric layer setting up and down, can obtain higher degree of modulation.Its reason is considered to due to the input of, recording laser, when Mn oxide is decomposed, by making to embed the O occurring in dielectric layer
2, the mark that metamorphosis brings forms and becomes easy.
In addition, the composition of recording layer is not Mn oxide and In oxide, but while using the recording layer (No.13,14) of oxide of Mn oxide and Sn or Zn, with the recording layer (No.10) that contains Mn oxide and In oxide too, can obtain good degree of modulation and C/N ratio.In addition, while using the dielectric layer (No.15,16) of Sn oxide, Zn oxide, also same with No.10 (dielectric layer of In oxide), can obtain good degree of modulation and C/N ratio.
Claims (6)
1. an optical information recording media recording layer, it is characterized in that, it is the amorphous recording layer recording by the irradiation of laser, wherein, contain Mn oxide, not containing metal Mn, and the atomic ratio that forms Mn shared in whole metallic elements of oxide contained in described recording layer is below 80 atom %.
2. optical information recording media recording layer according to claim 1, wherein, also contains at least one oxide of selecting the group who forms from In oxide, Zn oxide, Sn oxide and Cu oxide.
3. an optical information recording media, is characterized in that, has the optical information recording media recording layer described in claim 1 or 2.
4. optical information recording media according to claim 3, wherein, described optical information recording media with recording layer on and/or under be laminated with dielectric layer.
5. according to the optical information recording media described in claim 3 or 4, wherein, not metal-containing layer of described light recording information media.
6. according to the optical information recording media described in claim 3 or 4, wherein, described optical information recording media has optical information recording media recording layer described in multilayer, and has transparent intermediate layer in described multilayer optical information recording media with the interlayer of recording layer.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010293266A JP5346915B2 (en) | 2010-12-28 | 2010-12-28 | Recording layer for optical information recording medium and optical information recording medium |
| JP2010-293266 | 2010-12-28 |
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| TWI521505B (en) | 2012-06-04 | 2016-02-11 | Sony Corp | Information media |
| US10373641B2 (en) | 2015-12-01 | 2019-08-06 | Sony Corporation | Optical recording medium |
| TWI722142B (en) | 2016-04-08 | 2021-03-21 | 日商新力股份有限公司 | Optical recording medium and manufacturing method thereof, and recording layer for optical recording medium |
| JP7130447B2 (en) * | 2018-06-07 | 2022-09-05 | 株式会社神戸製鋼所 | Recording layer for optical information recording medium, optical information recording medium, and sputtering target |
| WO2020031498A1 (en) * | 2018-08-09 | 2020-02-13 | パナソニックＩｐマネジメント株式会社 | Information recording medium and method for manufacturing same |
| JP7396125B2 (en) | 2020-03-03 | 2023-12-12 | オムロン株式会社 | Model generation device, estimation device, model generation method, and model generation program |
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| FR2832251B1 (en) * | 2001-11-12 | 2006-08-25 | Univ Toulouse | USES OF OXIDABLE SPINAL OXIDES AS SENSITIVE LAYER MATERIALS OF AN OPTICAL SUPPORT RECORDABLE ONLY ONCE |
| FR2848012B1 (en) * | 2002-11-28 | 2006-09-29 | Robin Perrier | METHOD FOR MANUFACTURING A RECORDABLE OPTICAL DISK, OPTICAL DISK, AND INTEGRITY LAYER OBTAINED BY SAID METHOD |
| JP2005135568A (en) * | 2003-10-08 | 2005-05-26 | Matsushita Electric Ind Co Ltd | Information recording medium, its manufacturing method, and sputtering target |
| JP4969625B2 (en) * | 2008-11-12 | 2012-07-04 | 株式会社神戸製鋼所 | Optical information recording medium |
| JP2010192025A (en) * | 2009-02-17 | 2010-09-02 | Sony Corp | Optical information recording medium |
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| TW201232533A (en) | 2012-08-01 |
| CN102568503A (en) | 2012-07-11 |
| JP2012139876A (en) | 2012-07-26 |
| JP5346915B2 (en) | 2013-11-20 |
| TWI449039B (en) | 2014-08-11 |
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