CN102560350A - Coated part and manufacturing method thereof - Google Patents
Coated part and manufacturing method thereof Download PDFInfo
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- CN102560350A CN102560350A CN2010106147478A CN201010614747A CN102560350A CN 102560350 A CN102560350 A CN 102560350A CN 2010106147478 A CN2010106147478 A CN 2010106147478A CN 201010614747 A CN201010614747 A CN 201010614747A CN 102560350 A CN102560350 A CN 102560350A
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Abstract
The invention provides a coated part which comprises a matrix and a chromium layer, a chromium oxynitride layer and a titanium nitride layer which are sequentially formed on the matrix. The coated part has excellent oxidation resistance and wear resistance under high temperature. The invention also provides a manufacturing method of the coated part. The chromium layer, the chromium oxynitride layer and the titanium nitride layer are sequentially formed on the matrix by a magnetron sputtering coating method.
Description
Technical field
The present invention relates to a kind of lining part and method of manufacture thereof.
Background technology
The material of the forming mould of existing magnesium or low melting materials such as magnesiumalloy, aluminum or aluminum alloy is generally stainless steel.Yet in the high temperature oxidation stability environment, stainless steel-based surface is prone to form loose chromic oxide (Cr
2O
3) layer; When temperature raises gradually, Cr
2O
3Layer becomes unstable and begins and decomposes, and makes metals ions such as the inner Fe of stainless steel base, Ni to Cr
2O
3Layer diffusion causes Cr
2O
3Layer crackle occurs, the oxidation deactivation phenomenon such as peels off, and greatly reduces the high-temperature oxidation resistance of stainless steel base.
In addition, said Cr
2O
3The formation of layer will make the forming mould surface become coarse, so will influence the outward appearance of moulding product, the yield of reduction moulding product, also can shorten the work-ing life of forming mould simultaneously.
Summary of the invention
In view of this, be necessary to provide a kind of lining part that can address the above problem preferably.
The method of manufacture of above-mentioned lining part also is provided in addition.
A kind of lining part comprises matrix, is formed at chromium layer, nitrogen chromium oxide layer and titanium nitride layer on the matrix successively.
A kind of method of manufacture of the part that is covered may further comprise the steps:
Matrix is provided;
With the chromium target is target, magnetically controlled sputtering chrome layer on matrix;
With the chromium target is target, is reactant gases with nitrogen and oxygen, magnetron sputtering nitrogen chromium oxide layer on the chromium layer;
With the titanium target is target, is reactant gases with nitrogen, magnetron sputtering titanium nitride layer on the nitrogen chromium oxide layer.
The be covered method of manufacture of part of the present invention forms chromium layer, nitrogen chromium oxide layer and titanium nitride layer through the magnetron sputtering embrane method successively on matrix.Because under the high temperature oxidation stability condition, said chromium layer and CrON layer all can effectively prevent matrix generation oxidation, so can effectively improve the high-temperature oxidation resistance of said matrix; The formation of said TiN layer can prevent the CrON layer by scratch, thereby makes said lining part have good wear resistance.
In addition, when the lining part is when being used for the forming mould of low melting materials such as moulding magnesium, magnesiumalloy, aluminum or aluminum alloy, the raising of said lining part high-temperature oxidation resistance can improve the yield of moulding product, also can prolong the work-ing life of lining part.
Description of drawings
Fig. 1 is the sectional view of the lining part of the present invention's one preferred embodiment;
Fig. 2 is the synoptic diagram of the used vacuum plating unit of plated film spare in the shop drawings 1.
The main element nomenclature
Lining part 10
Chromium layer 13
Nitrogen chromium oxide layer 15
Coating equipment 100
Coating chamber 20
Vacuum pump 30
Track 21
First target 22
Second target 23
Source of the gas passage 24
Embodiment
See also Fig. 1, the lining part 10 of the present invention's one preferred embodiment comprises matrix 11, is formed at chromium layer 13 on the matrix 11, nitrogen chromic oxide (CrON) layer 15 and titanium nitride (TiN) layer 17 successively.
The material of said matrix 11 is stainless steel, die steel or rapid steel etc.
Said lining part 10 can be the forming mould of low melting materials such as being used for moulding magnesium, magnesiumalloy, aluminum or aluminum alloy.
Said chromium layer 13, CrON layer 15 and TiN layer 17 can form through the magnetron sputtering embrane method respectively.
The thickness of said chromium layer 13 is 100～200nm.
The thickness of said CrON layer 15 is 0.5～1 μ m.The quality percentage composition of chromium element is 40%～60% in the said CrON layer 15, and the quality percentage composition of oxygen element is 30%～50%, and the quality percentage composition of nitrogen element is 5%～15%.
The thickness of said TiN layer 17 is 0.4～1.2 μ m.
Please consult shown in Figure 2ly in the lump, the method for manufacture of the lining part 10 of the present invention's one preferred embodiment mainly comprises the steps:
One matrix 11 is provided.This matrix 11 can obtain through impact briquetting.
This matrix 11 is carried out pre-treatment.This pre-treatment can comprise conventional carries out steps such as electrochemical deoiling, paraffin removal, pickling, ultrasonic cleaning and oven dry to matrix 11.
One coating equipment 100 is provided, said matrix 11 is placed in this coating equipment 100, adopt the magnetron sputtering embrane method on matrix 11, to form chromium layer 13, CrON layer 15 and TiN layer 17 successively.
As shown in Figure 2, this coating equipment 100 comprises a coating chamber 20 and is connected a vacuum pump 30 of coating chamber 20 that vacuum pump 30 is in order to vacuumize coating chamber 20.Be provided with pivoted frame (not shown), 2 first targets 22 and 2 second targets 23 in this coating chamber 20.Pivoted frame drives matrix 11 and revolves round the sun along circular trace 21, and matrix 11 also rotation along track 21 revolution the time.2 first targets 22 and 2 second targets 23 are about the centrosymmetry setting of track 21, and 2 first targets 22 relatively are arranged on the interior outside of track 21, and 2 second targets 23 relatively are arranged on the interior outside of track 21.The two ends of each first target 22 and each second target 23 are equipped with source of the gas passage 24, and gas gets in the said coating chamber 20 through this source of the gas passage 24.When matrix 11 passes between 2 first targets 22, can plate the particle that first target, 22 surface sputterings go out; In like manner, when matrix 11 passes between 2 second targets 23, can plate the particle that second target, 23 surface sputterings go out.In this instance, said first target 22 is the chromium target, and said second target 23 is the titanium target.
Surface magnetic control sputtering chromium layer 13 in this matrix 11.The concrete operation method and the processing parameter that form said chromium layer 13 are: to this coating chamber 20 vacuumize handle to the base vacuum degree be 8.0 * 10
-3Pa; With the argon gas is working gas, and in coating chamber 20, feeding flow is the argon gas of 100～200sccm, on matrix 11, apply-100～-bias voltage of 300V; Heat 20 to 100～150 ℃ of this coating chambers (being that coating temperature is 100～150 ℃); Open the power supply of first target 22, it is 5～10kw that its power is set, and deposits this chromium layer 13.The time that deposits this chromium layer 13 is 5～15min.
Cr atom in the said chromium layer 13 can combine to form Cr with the O atom under high-temperature oxidation environment
2O
3Protective membrane, thereby can effectively prevent matrix 11 from oxidations taking place and lost efficacy.
On this chromium layer 13, form CrON layer 15.The concrete operation method and the processing parameter that form this CrON layer 15 are: keep the power of argon flow amount, coating temperature, first target 22 and put on the bias voltage of matrix 11 constant; With nitrogen and oxygen is reactant gases; The flow that nitrogen is set is that the flow of 10～100sccm, oxygen is 10～100sccm, deposits this CrON layer 15.The time that deposits this CrON layer 15 is 30～60min, closes the power supply of said first target 22 after deposition finishes.
Described CrON layer 15 can form Cr-O and Cr-N two phase compounds in its forming process; This two phases compound forms the growth that can suppress each phase crystal grain each other simultaneously; Thereby can reduce the size of each phase crystal grain; Strengthen the compactness of this CrON layer 15 and reach the effect of oxygen that hinder, can prevent further that matrix 11 from oxidation taking place to CrON layer 15 internal divergence.
On this CrON layer 15, form TiN layer 17.The concrete operation method and the processing parameter that form this TiN layer 17 are: keep argon flow amount, coating temperature and put on the bias voltage of matrix 11 constant; With nitrogen is reactant gases; The flow that nitrogen is set is 60～120sccm; Open the power supply of said second target 23, it is 8～10kw that its power is set, and deposits this TiN layer 17.The time that deposits this TiN layer 17 is 30～90min.
Said TiN layer 17 have HMP, high firmness and excellent abrasive can, so this TiN layer 17 can protect CrON layer 15, prevents that CrON layer 15 is by scratch.
Close the power supply of negative bias and target, stop to feed argon gas and oxygen, treat 17 cooling of said TiN layer after, bubbling air in plated film is opened the coating chamber door, takes out lining part 10.
The method of manufacture of preferred embodiment lining part 10 of the present invention forms chromium layer 13, CrON layer 15 and TiN layer 17 through the magnetron sputtering embrane method successively on matrix 11.Because under the high temperature oxidation stability condition, said chromium layer 13 and CrON layer 15 can prevent effectively that all matrix 11 from oxidation taking place, and so can effectively improve the high-temperature oxidation resistance of said matrix 11; The formation of said TiN layer 17 can prevent CrON layer 15 by scratch, thereby makes said lining part 10 have good wear resistance.
In addition, when lining part 10 when being used for the forming mould of low melting materials such as moulding magnesium, magnesiumalloy, aluminum or aluminum alloy, the raising of said lining part 10 high-temperature oxidation resistances can improve the yield of moulding product, also can prolong the work-ing life of lining part 10.
Come the present invention is specified through embodiment below.
Embodiment 1
(1) magnetron sputtering forms chromium layer 13
The base vacuum degree of said coating chamber 20 is 8 * 10
-3Pa, argon flow amount is 150sccm, and the bias voltage that puts on the matrix 11 is-200V, and it is 120 ℃ that coating temperature is set, and the power that first target 22 is set is 8kw, depositing 13 time of this chromium layer is 5min.
(2) magnetron sputtering forms CrON layer 15
Keep the power of argon flow amount, coating temperature, first target 22 and put on the bias voltage of matrix 11 constant, the flow that nitrogen is set is that the flow of 30sccm, oxygen is 40sccm, and the time that deposits this CrON layer 15 is 40min.
(3) magnetron sputtering forms TiN layer 17
Keep argon flow amount, coating temperature and put on the bias voltage of matrix 11 constant, the flow that nitrogen is set is 60sccm, and the power of said second target 23 is 8kw, and the time that deposits this TiN layer 17 is 60min.
Embodiment 2
(1) magnetron sputtering forms chromium layer 13
The base vacuum degree of said coating chamber 20 is 8 * 10
-3Pa, argon flow amount is 150sccm, and the bias voltage that puts on the matrix 11 is-200V, and it is 120 ℃ that coating temperature is set, and the power that first target 22 is set is 5kw, depositing 13 time of this chromium layer is 10min.
(2) magnetron sputtering forms CrON layer 15
Keep the power of argon flow amount, coating temperature, first target 22 and put on the bias voltage of matrix 11 constant, the flow that nitrogen is set is that the flow of 60sccm, oxygen is 80sccm, and the time that deposits this CrON layer 15 is 60min.
(3) magnetron sputtering forms TiN layer 17
Keep argon flow amount, coating temperature and put on the bias voltage of matrix 11 constant, the flow that nitrogen is set is 100sccm, and the power of said second target 23 is 8kw, and the time that deposits this TiN layer 17 is 30min.
Performance test
The above-mentioned lining part that makes 10 is carried out electromagnet shield effect test, hundred lattice tests, SaltSprayTest and hot and humid test, and concrete testing method and result are following:
(1) high-temperature oxidation resistant test
Adopt the tubular type heat treatment furnace, be warming up to 800 ℃ with the temperature rise rate of 10 ℃/min, and 800 ℃ of insulation 10h down, this heat treatment furnace cooled off then.
Test shows, by the embodiment of the invention 1 and 2 prepared lining parts 10 behind 800 ℃ of thermal treatment 10h, do not see oxidation takes place, come off etc. bad.Thus it is clear that, have the good high-temperature oxidation-resistance by the prepared lining part 10 of embodiment of the invention method.
(2) wearability test
Adopting 5700 molded lines property wearability test appearance, is under the effect of 1kg power in load, with the surface of 2 inches the speed of circulation friction lining parts 10 that slide length, 25 cycles per minute.
The result shows, after 20 circulations, does not all expose base material by the embodiment of the invention 1 and 2 prepared lining parts 10.It is thus clear that this lining part 10 has wear resistance preferably.
Claims (10)
1. a lining part comprises matrix, and it is characterized in that: said lining part also comprises chromium layer, nitrogen chromium oxide layer and the titanium nitride layer that is formed at successively on the matrix.
2. lining part as claimed in claim 1 is characterized in that: said chromium layer, nitrogen chromium oxide layer and titanium nitride layer form through the magnetron sputtering embrane method respectively.
3. according to claim 1 or claim 2 lining part, it is characterized in that: the quality percentage composition of aluminium element is 40%～65% in the said nitrogen titanium nitride layer, and the quality percentage composition of oxygen element is 30%～45%, and the quality percentage composition of nitrogen element is 5%～15%.
4. lining part as claimed in claim 1 is characterized in that: the thickness of said chromium layer is 100～200nm.
5. lining part as claimed in claim 1 is characterized in that: the thickness of said nitrogen chromium oxide layer is 0.5～1 μ m, and the thickness of said titanium nitride layer is 0.3～0.5 μ m.
6. lining part as claimed in claim 1 is characterized in that: said matrix is stainless steel, die steel or rapid steel.
7. the method for manufacture of the part that is covered may further comprise the steps:
Matrix is provided;
With the chromium target is target, magnetically controlled sputtering chrome layer on matrix;
With the chromium target is target, is reactant gases with nitrogen and oxygen, magnetron sputtering nitrogen chromium oxide layer on the chromium layer;
With the titanium target is target, is reactant gases with nitrogen, magnetron sputtering titanium nitride layer on the nitrogen chromium oxide layer.
8. the method for manufacture of lining part as claimed in claim 7; It is characterized in that: the step of magnetically controlled sputtering chrome layer adopts following mode to realize: be working gas with the argon gas; It is 100～200sccm that argon flow amount is set, on matrix, apply-100～-bias voltage of 300V, coating temperature is 100～150 ℃; The power that the chromium target is set is 5～10kw, and depositing time is 5～15min.
9. the method for manufacture of lining part as claimed in claim 7; It is characterized in that: the step of magnetron sputtering nitrogen chromium oxide layer adopts following mode to realize: be working gas with the argon gas; It is 100～200sccm that argon flow amount is set, and the flow that nitrogen is set is that the flow of 10～100sccm, oxygen is 10～100sccm; On matrix, apply-100～-bias voltage of 300V, coating temperature is 100～150 ℃, and the power that the chromium target is set is 5～10kw, and coating temperature is 100～150 ℃, and depositing time is 30～60min.
10. the method for manufacture of lining part as claimed in claim 7; It is characterized in that: the step of magnetron sputtering titanium nitride layer adopts following mode to realize: with the argon gas is working gas, and it is 100～200sccm that argon flow amount is set, on matrix, apply-100～-bias voltage of 300V; The flow that nitrogen is set is 60～120sccm; The power that the titanium target is set is 8～10kw, and coating temperature is 100～150 ℃, and depositing time is 30～90min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106147478A CN102560350A (en) | 2010-12-30 | 2010-12-30 | Coated part and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010106147478A CN102560350A (en) | 2010-12-30 | 2010-12-30 | Coated part and manufacturing method thereof |
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|---|---|
| CN102560350A true CN102560350A (en) | 2012-07-11 |
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|---|---|---|---|
| CN2010106147478A Pending CN102560350A (en) | 2010-12-30 | 2010-12-30 | Coated part and manufacturing method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864455A (en) * | 2012-09-10 | 2013-01-09 | 虞雪君 | Wear-resistant and corrosion-resistant composite coating |
| CN102864454A (en) * | 2012-09-05 | 2013-01-09 | 忻峰 | Anti-abrasion and anti-corrosion composite coating for automobile brake caliper |
| CN102896833A (en) * | 2012-09-05 | 2013-01-30 | 徐琼 | Wear-resistant and corrosion-resistant coating for automobile brake caliper |
| CN103088341A (en) * | 2012-09-05 | 2013-05-08 | 陈敏 | Composite coating for preventing automobile brake caliper from wear and corrosion |
| CN105369205A (en) * | 2015-10-16 | 2016-03-02 | 常州大学 | Technological method for manufacturing multifunctional film on surface of stainless steel |
| CN115233156A (en) * | 2022-07-25 | 2022-10-25 | 复旦大学 | Josephson junction preparation method and josephson junction |
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| JP2005035128A (en) * | 2003-07-18 | 2005-02-10 | Sumitomo Bakelite Co Ltd | Transparent gas barrier film and display device using it |
| US20070275264A1 (en) * | 2003-12-23 | 2007-11-29 | Hultin Anna S | Stainless Steel Strip Coated With A Decorative Layer |
| CN101720365A (en) * | 2007-05-16 | 2010-06-02 | 奥尔利康贸易股份公司（特吕巴赫） | The cutting tool of band coating |
| CN102177278A (en) * | 2008-10-10 | 2011-09-07 | 欧瑞康贸易股份公司(特吕巴赫) | Non gamma - phase cubic AlCrO |
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2010
- 2010-12-30 CN CN2010106147478A patent/CN102560350A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005035128A (en) * | 2003-07-18 | 2005-02-10 | Sumitomo Bakelite Co Ltd | Transparent gas barrier film and display device using it |
| US20070275264A1 (en) * | 2003-12-23 | 2007-11-29 | Hultin Anna S | Stainless Steel Strip Coated With A Decorative Layer |
| CN101720365A (en) * | 2007-05-16 | 2010-06-02 | 奥尔利康贸易股份公司（特吕巴赫） | The cutting tool of band coating |
| CN102177278A (en) * | 2008-10-10 | 2011-09-07 | 欧瑞康贸易股份公司(特吕巴赫) | Non gamma - phase cubic AlCrO |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102864454A (en) * | 2012-09-05 | 2013-01-09 | 忻峰 | Anti-abrasion and anti-corrosion composite coating for automobile brake caliper |
| CN102896833A (en) * | 2012-09-05 | 2013-01-30 | 徐琼 | Wear-resistant and corrosion-resistant coating for automobile brake caliper |
| CN103088341A (en) * | 2012-09-05 | 2013-05-08 | 陈敏 | Composite coating for preventing automobile brake caliper from wear and corrosion |
| CN102864455A (en) * | 2012-09-10 | 2013-01-09 | 虞雪君 | Wear-resistant and corrosion-resistant composite coating |
| CN105369205A (en) * | 2015-10-16 | 2016-03-02 | 常州大学 | Technological method for manufacturing multifunctional film on surface of stainless steel |
| CN105369205B (en) * | 2015-10-16 | 2018-06-12 | 常州大学 | A kind of stainless steel surface prepares the process of multi-function membrane |
| CN115233156A (en) * | 2022-07-25 | 2022-10-25 | 复旦大学 | Josephson junction preparation method and josephson junction |
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Application publication date: 20120711 |