CN102557646A - Preparation method of AlN ceramic substrate - Google Patents
Preparation method of AlN ceramic substrate Download PDFInfo
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- CN102557646A CN102557646A CN2011104373958A CN201110437395A CN102557646A CN 102557646 A CN102557646 A CN 102557646A CN 2011104373958 A CN2011104373958 A CN 2011104373958A CN 201110437395 A CN201110437395 A CN 201110437395A CN 102557646 A CN102557646 A CN 102557646A
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Abstract
The invention relates to a preparation method of an AlN ceramic substrate, which comprises the following steps: respectively preparing substrate body green sheets and surface green sheets by adopting a casting forming method; attaching the surface green sheets on the upper surface and the lower surface of each substrate body green sheet, pressing into a complete green body, rubber-removing and sintering to obtain the AlN ceramic substrate. The preparation method provided by the method has the benefits that the liquid phase distribution of a central part and a surface layer is improved, the heat conductivity is high, the adhesion between adjacent substrates is avoided, the production efficiency is improved, and the production cost is reduced.
Description
(1) technical field
The present invention relates to a kind of method of manufacture of AlN ceramic substrate.
(2) background technology
Along with the raising of high power module circuit level and the development of great power LED; Used insulated substrate material is had higher requirement; Aluminium nitride ceramics material has been used for the insulated substrate material of various large power, electrically sub-elements owing to have high thermal.At present; The preparation technology who has realized business-like aluminium nitride ceramics substrate adopts the base sheet of casting method (scraping the skill in using a kitchen knife in cookery) moulding desired thickness, obtains the ceramic of compact body [patent No. ZL 200410016144.2, patent No. ZL 20480034414.0, application number 200680021803.9, application number 200810224311.0] of high thermal conductance again through liquid phase sintering.This method has two defectives perplexing the production in enormous quantities of aluminium nitride ceramics substrate always, and a defective is because liquid phase can be moved [Qiao Liang etc., the migration of liquid in the AlN pottery low-temperature sintering, material engineering, 2000,10,7-10 in the ceramic post sintering process; Fu Renli etc., migration of liquid in the aluminium nitride ceramics low-temperature sintering process and surface layer grain growth, China YouSe Acta Metallurgica Sinica; 2004,11,1828-1832]; Thereby cause that substrate surface and central liquid phase content exist than big difference in the sintering process; This difference causes ceramic base plate surface layer and center densification inhomogeneous, therefore produces buckling deformation, influences the surface finish and the size precision of substrate; Another defective is because migration of liquid to the surface, makes to stick together between the substrate, bonds for fear of between the substrate; Often adopt the method for applying insulating powder, yet it is a difficult problem that the granularity of insulating powder is selected; Granularity is too big, then causes the substrate warpage easily, and granularity is too little; Thereby be submerged in the liquid phase of substrate surface sintered together again easily with substrate; Simultaneously, need behind the sintering to increase to remove powder craft, dusting before the sintering and the powder program of going behind the sintering all make the production efficiency of aluminium nitride substrate descend significantly.Applicant of the present invention carries out aluminium nitride ceramics substrate production manufacturing experience for a long time based on aluminium nitride ceramics liquid phase sintering Study on Mechanism is reached, and proposes a kind of new preparation method, can solve surface and center liquid phase problem pockety effectively.
(3) summary of the invention
The purpose of this invention is to provide and a kind ofly need not apply the method that the insulating powder sintering prepares the AlN ceramic substrate.
The technical scheme that the present invention adopts is:
A kind of method of manufacture of AlN ceramic substrate is for preparing base main body green sheet and top layer green sheet respectively with the flow casting molding method earlier; Again the top layer green sheet is attached to two surfaces up and down of base main body green sheet; Be pressed into a complete base substrate then; Behind binder removal and sintering, obtain described AlN ceramic substrate.
Further, base main body green compact of the present invention are the A green compact, and described top layer green compact are the B green compact; Described A green compact are processed by the blank that contains aluminium nitride powder, also are added with mass percent in the said blank and are 5～8% rare earth oxide class additive of aluminium nitride powder; Described B green compact are processed by the blank that contains aluminium nitride powder, also are added with mass percent in the said blank and are 0.5～2% rare earth oxide class additive of aluminium nitride powder.
Further again; The method of manufacture of AlN ceramic substrate of the present invention recommends to carry out as follows: A green compact and B green compact are struck out side's sheet of the same area; Bottom surface with two B green compact is attached to a slice A green compact upper and lower surfaces respectively again; Become a complete base substrate through 8～12MPa pressure with 70～90 ℃ temperatures, again with described base substrate binder removal 2～4h under 600～650 ℃ of temperature, putting into the hydrogen/nitrogen gas mixture serves as that protection gas, temperature are tungsten vacuum resistance furnace pressureless sintering 2～8h of 1790～1890 ℃ again; Can make the aluminium nitride ceramics substrate, described hydrogen nitrogen flow rate ratio is 1: 1.
Further, it is 0.2～0.7mm that the present invention recommends A green compact thickness, and B green compact thickness is 0.08～0.12mm.
The present invention recommends the A green compact by the raw material of the following mass parts sheet material through flow casting molding to 0.2～0.7mm thickness:
Absolute ethyl alcohol and butanols volume ratio are 1: 1～2 among described absolute ethyl alcohol/butanols admixture solvent A
Described B green compact are processed by the sheet material that the feedstream of following mass parts is extended down to 0.08～0.12mm thickness:
Absolute ethyl alcohol and butanols volume ratio are 1: 1～2 among described absolute ethyl alcohol/butanols admixture solvent B
A green compact of the present invention prepare as follows: in prescription amount aluminium nitride powder A; Adding rare earth oxide class additive A, the absolute ethyl alcohol/butanols admixture solvent A of prescription amount, prescription amount dispersion agent fish oil A are pre-mixed 12～24h together in ball mill device; Preferred 24h, the plasticizer phthalic acid dibutylester A that adds prescription amount sticker polyvinyl butyral acetal A, prescription amount again is remix 12～24h, most preferably 12h together; Carry out froth in vacuum then and handle 2～6h; Obtaining viscosity is 18000～21000cps, and the casting slurry of 19000cps most preferably is cast to the thickness of 0.2～0.7mm on the flow casting molding machine; Obtain the A green compact of aluminium nitride ceramics substrate, absolute ethyl alcohol and butanols volume ratio are 1: 1～2 among described absolute ethyl alcohol and the butanols admixture solvent A.
B green compact of the present invention prepare as follows: in the aluminium nitride powder B of prescription amount; After adding the rare earth oxide class additive B of prescription amount; Absolute ethyl alcohol/butanols admixture solvent B, dispersion agent fish oil B are pre-mixed 12～24h together in ball mill device; The sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester that adds the prescription amount again be remix 12～24h together, carries out froth in vacuum then and handles 4～8h, obtains the casting slurry that viscosity is 24000～26000cps; On the flow casting molding machine, be cast to the thickness of 0.08～0.12mm, obtain the B green compact of aluminium nitride ceramics substrate; Anhydrous second and butanols volume ratio are 1: 1～2 in described absolute ethyl alcohol/butanols admixture solvent.The thickness of B green compact is preferably 0.1mm among the present invention.
Preferably, described rare earth oxide class additive A or rare earth oxide class additive B are Y
2O
3
Further, the size distribution of preferred said rare earth oxide class additive A of the present invention or rare earth oxide class additive B is 0.5～3.0 μ m, and the preferred mass parts of rare earth oxide class additive B is 0.8～1 part.
The method of manufacture of AlN ceramic substrate of the present invention; Recommend preparation as follows: the square sheet that A green compact and green compact B green compact is struck out same size; Bottom surface with two B green compact is attached to a slice A green compact upper and lower surfaces respectively again; Become a complete base substrate through 8～12MPa pressure with 70～90 ℃ temperatures, more described base substrate is carried out binder removal 2～4h under 600～650 ℃ of temperature, can obtain the lamination green compact behind the binder removal; The lamination green compact being put into the hydrogen/nitrogen gas mixture serves as that protection gas, temperature are that 1790～1890 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 2～8h again, can make the aluminium nitride ceramics substrate, and described hydrogen nitrogen flow rate ratio is 1: 1.
Concrete, described AlN ceramic substrate prepares as follows:
(1) preparation A green compact: in prescription amount aluminium nitride powder A; Adding rare earth oxide class additive A, the absolute ethyl alcohol/butanols admixture solvent A of prescription amount, prescription amount dispersion agent fish oil A are pre-mixed 24h together in ball mill device; The plasticizer phthalic acid dibutylester A that adds prescription amount sticker polyvinyl butyral acetal A, prescription amount again is remix 12h together; Carry out froth in vacuum then and handle 5h, obtain the casting slurry that viscosity is 19000cps, on the flow casting molding machine, be cast to the thickness of 0.6mm; Obtain the A green compact of aluminium nitride ceramics substrate, absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent A;
Described A green compact mass component is following:
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent A;
(2) preparation B green compact:
In the aluminium nitride powder B of prescription amount; After adding the rare earth oxide class additive B of prescription amount; Absolute ethyl alcohol/butanols admixture solvent B, dispersion agent fish oil B are pre-mixed 24h together in ball mill device; The sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester that adds the prescription amount again be remix 12h together, carries out froth in vacuum then and handles, and obtains the casting slurry that viscosity is 25000cps; On the flow casting molding machine, be cast to the thickness of 0.1mm, obtain the B green compact of aluminium nitride ceramics substrate; Anhydrous second/butanols volume ratio is 1: 2 in described absolute ethyl alcohol/butanols admixture solvent;
Described B green compact mass component is following:
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent B;
(3) lamination green compact preparation: with the A green compact, strike out the square sheet that length and width are 90mm with green compact B green compact; Bottom surface with two B green compact is attached to a slice A green compact upper and lower surfaces respectively again; Become a complete base substrate through 10MPa pressure with 85 ℃ temperatures; Again described base substrate is carried out binder removal under 600 ℃ of temperature, can obtain the lamination green compact;
(4) the lamination green compact being put into the hydrogen/nitrogen gas mixture serves as that protection gas, temperature are that 1850 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 4h again, the aluminium nitride ceramics substrate that can make, and described hydrogen nitrogen flow rate ratio is 1: 1.
The present invention adopts conventional rare earth oxide (like Y
2O
3) do additive, require Y
2O
3The size-grade distribution of powder is 0.5～3 μ m, to surpassing the commercial Y of this yardstick
2O
3Powder adopts ball milling or airflow pulverization method that it is crushed to this size range.A green compact of the present invention all are identical with aluminium nitride powder, rare earth oxide class additive, absolute ethyl alcohol/butanols mixture, dispersion agent fish oil, sticker polyvinyl butyral acetal, these materials of plasticizer phthalic acid dibutylester in the B green compact prescription; For the convenience of describing, distinguish the prescription that they belong to A green compact or B green compact respectively with A, B here.
The invention has the beneficial effects as follows: the additive of introducing different ratios rare earth oxide class respectively through the main part and the top layer part of substrate; Through being laminated into an integral body, carry out sintering then again, the liquid phase that can improve centre portions and upper layer distributes; Obtain both to have had high thermal conductivity; The product of avoiding adjacent substrate to stick together again, thus pad powder process saved, enhance productivity, reduce production costs.
(4) embodiment
Below in conjunction with specific embodiment the present invention is described further, but protection scope of the present invention is not limited in this:
Embodiment 1～10: different additive content was to sintering result's influence when B green compact thickness was 0.1mm
A green compact mass component is following: the amount of the oxide-based additive A of A green compact prescription middle-weight rare earths is different among the embodiment 1～10, and other is all identical.Specific as follows:
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent A.
B green compact mass component is following: the amount of the oxide-based additive B of B green compact prescription middle-weight rare earths is different among the embodiment 1～10, and other is all identical.Specific as follows:
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent B.
(1) preparation base main body A green compact: according to A green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; Absolute ethyl alcohol/butanols admixture solvent, dispersion agent fish oil are pre-mixed 24h together in ball mill device; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 12h together, and carry out froth in vacuum then and handle 5h, obtain the casting slurry that viscosity is 19000cps; On the flow casting molding machine, be cast to the thickness of 0.6mm, obtain the A green compact of aluminium nitride ceramics substrate;
2) preparation upper layer B green compact: according to B green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; In ball mill device, be pre-mixed 24h with absolute ethyl alcohol/butanols admixture solvent, dispersion agent fish oil; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 12h together, and carry out froth in vacuum then and handle 7h, obtain the casting slurry that viscosity is 25000cps; On the flow casting molding machine, be cast to the thickness of 0.1mm, obtain the B green compact of aluminium nitride ceramics substrate; Described absolute ethyl alcohol/butanols admixture solvent volume ratio is 1: 2;
(3) preparation of lamination green compact: the A green compact that step (1) is obtained, the B green compact that step (2) obtains strike out identical 90 * 90mm side sheet; Bottom surface with two B green compact is attached to A green compact upper and lower surfaces again; Become a complete base substrate through 10Mpa pressure with 85 ℃ temperatures; Again described base substrate is carried out binder removal 2h under 600 ℃ of temperature, obtain the lamination green compact behind the binder removal;
(4) preparation of aluminium nitride ceramics substrate: the lamination green compact that step (3) is obtained are put into and are mixed into protection gas, temperature with hydrogen/nitrogen is that 1850 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 4h.Logical hydrogen nitrogen mixture in the vacuum oven, both flow velocitys are 1: 1.Measure the thermal conductivity of the substrate obtained with hot disk thermal conductance appearance, the results are shown in Table 1;
Table 1
When embodiment 11～14B green compact thickness is 0.08mm to sintering result's influence
A green compact mass component is following: embodiment 11～14, and the amount of the oxide-based additive A of A green compact prescription middle-weight rare earths is different, and other component content is all identical.Specific as follows:
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent A.The B green compact are made up of as follows following quality: (embodiment 11～14, and B green compact prescription is all following)
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent B.
(1) preparation base main body A green compact: according to A green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; Absolute ethyl alcohol/butanols admixture solvent, dispersion agent fish oil are pre-mixed 12h together in ball mill device; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 24h together, and carry out froth in vacuum then and handle 6h, obtain the casting slurry that viscosity is 21000cps; On the flow casting molding machine, be cast to the thickness of 0.6mm, obtain the A green compact of aluminium nitride ceramics substrate;
2) preparation upper layer B green compact: according to B green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; In ball mill device, be pre-mixed 12h with absolute ethyl alcohol/butanols admixture solvent, dispersion agent fish oil; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 24h together, and carry out froth in vacuum then and handle 8h, obtain the casting slurry that viscosity is 26000cps; On the flow casting molding machine, be cast to the thickness of 0.08mm, obtain the B green compact of aluminium nitride ceramics substrate; Described absolute ethyl alcohol/butanols admixture solvent volume ratio is 1: 1;
(3) preparation of lamination green compact: the A green compact that step (1) is obtained, the B green compact that step (2) obtains strike out identical 90 * 90mm side sheet; Bottom surface with two B green compact is attached to A green compact upper and lower surfaces again; Become a complete base substrate through 12Mpa pressure with 90 ℃ temperatures; Again described base substrate is carried out binder removal 4h under 600 ℃ of temperature, obtain the lamination green compact behind the binder removal;
(4) preparation of aluminium nitride ceramics substrate: the lamination green compact that step (3) is obtained are put into and are mixed into protection gas, temperature with hydrogen/nitrogen is that 1790 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 8h, and obtaining the substrate specification is that 76.3mm, thickness are 0.66mm.Logical hydrogen nitrogen mixture in the vacuum oven, both flow velocitys are 1: 1.Measure the thermal conductivity of the substrate obtained with hot disk thermal conductance appearance, the results are shown in Table 1;
Table 2
When embodiment 15～18B green compact thickness is 0.12mm to sintering result's influence
The A green compact are made up of as follows following quality: embodiment 15～18, and the amount of the oxide-based additive A of A green compact prescription middle-weight rare earths is different, and other component content is all identical.Specific as follows:
Absolute ethyl alcohol and butanols volume ratio are 1 among described absolute ethyl alcohol/butanols admixture solvent A: 2B green compact mass component is following: (embodiment 15～18, and B green compact prescription is all following)
Absolute ethyl alcohol and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent B;
(1) preparation base main body A green compact: according to A green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; Absolute ethyl alcohol/butanols admixture solvent A, dispersion agent fish oil are pre-mixed 24h together in ball mill device; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 12h together, and carry out froth in vacuum then and handle 2h, obtain the casting slurry that viscosity is 18000cps; On the flow casting molding machine, be cast to the thickness of 0.6mm, obtain the A green compact of aluminium nitride ceramics substrate;
2) preparation upper layer B green compact: according to B green compact prescription, with the Y of aluminium nitride powder and different mass
2O
3Additive; In ball mill device, be pre-mixed 24h with absolute ethyl alcohol/butanols admixture solvent B, dispersion agent fish oil; And then add sticker polyvinyl butyral acetal, plasticizer phthalic acid dibutylester remix 12h together, and carry out froth in vacuum then and handle 4h, obtain the casting slurry that viscosity is 24000cps; On the flow casting molding machine, be cast to the thickness of 0.12mm, obtain the B green compact of aluminium nitride ceramics substrate; Described absolute ethyl alcohol/butanols admixture solvent volume ratio is 1: 2;
(3) preparation of lamination green compact: the A green compact that step (1) is obtained, the B green compact that step (2) obtains strike out identical 90 * 90mm side sheet; Bottom surface with two B green compact is attached to A green compact upper and lower surfaces again; Become a complete base substrate through 8Mpa pressure with 70 ℃ temperatures; Again described base substrate is carried out binder removal 2h under 600 ℃ of temperature, obtain the lamination green compact behind the binder removal;
(4) preparation of aluminium nitride ceramics substrate: the lamination green compact that step (3) is obtained are put into and are mixed into protection gas, temperature with hydrogen/nitrogen is that 1890 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 4h, and obtaining the substrate specification is that 76.6mm, thickness are 0.68mm.Logical hydrogen nitrogen mixture in the vacuum oven, both flow velocitys are 1: 1.Measure the thermal conductivity of the substrate obtained with hot disk thermal conductance appearance, the results are shown in Table 1;
Table 3
Embodiment 19～23 laminating technologies are to sintering result's influence (embodiment 19～23:A green compact: the B green compact are all identical)
(1) preparation A green compact: in the 1000g aluminium nitride powder, add 60g rare earth oxide class additive Y
2O
3, 430g absolute ethyl alcohol/butanols admixture solvent A, 20g dispersion agent fish oil be pre-mixed 24h together in ball mill device; Add 10g sticker polyvinyl butyral acetal, 50g plasticizer phthalic acid dibutylester remix 12h together again; Carry out froth in vacuum then and handle 5h; Obtain the casting slurry that viscosity is 19300cps; On the flow casting molding machine, be cast to the thickness of 0.6mm, obtain the A green compact of aluminium nitride ceramics substrate, absolute ethyl alcohol and butanols volume ratio are 1:2 among described absolute ethyl alcohol/butanols admixture solvent A;
(2) preparation B green compact: in the 1000g aluminium nitride powder, add 10g rare earth oxide class additive Y
2O
3, 430g absolute ethyl alcohol/butanols admixture solvent B, 15g dispersion agent fish oil be pre-mixed 24h together in ball mill device; Add 10g sticker polyvinyl butyral acetal, 50g plasticizer phthalic acid dibutylester remix 12h together again; Carry out froth in vacuum then and handle 6h; Obtain the casting slurry that viscosity is 24500cps, on the flow casting molding machine, be cast to the thickness of 0.1mm, obtain the B green compact of aluminium nitride ceramics substrate; Anhydrous second and butanols volume ratio are 1: 2 among described absolute ethyl alcohol/butanols admixture solvent B;
(3) lamination green compact preparation: with the A green compact, strike out the square sheet of 90 * 90mm with green compact B green compact, the bottom surface with two B green compact is attached to a slice A green compact upper and lower surfaces respectively again, and embodiment 19～23 is located at (8Mpa successively respectively; 90 ℃), (9Mpa; 85 ℃), under the pressure and temperature of (10Mpa, 80 ℃), (11Mpa, 75 ℃) and (12Mpa, 70 ℃), be pressed into a complete base substrate; Base substrate with gained carries out binder removal 2h under 650 ℃ of temperature again, can obtain the lamination green compact.
(4) the lamination green compact being put into the hydrogen/nitrogen gas mixture serves as that protection gas, temperature are that 1850 ℃ tungsten vacuum resistance furnace carries out pressureless sintering 4h again, the aluminium nitride ceramics substrate that can make, and described hydrogen nitrogen flow rate ratio is 1: 1.Measure the thermal conductivity of the substrate obtained with hot disk thermal conductance appearance, the results are shown in Table 4.
Table 4
Claims (9)
1. the method for manufacture of an AlN ceramic substrate; It is characterized in that described method is for preparing base main body green sheet and top layer green sheet respectively with the flow casting molding method earlier; Again the top layer green sheet is attached to two surfaces up and down of base main body green sheet; Be pressed into a complete base substrate then, behind binder removal and sintering, obtain described AlN ceramic substrate.
2. the method for manufacture of AlN ceramic substrate as claimed in claim 1 is characterized in that: described base main body green sheet is the A green compact, and described top layer green sheet is the B green compact; Described A green compact are processed by the blank that contains aluminium nitride powder, and also being added with mass percent in the said blank is the rare earth oxide class additive of the 5%-8% of aluminium nitride powder; Described B green compact are processed by the blank that contains aluminium nitride powder, and also being added with mass percent in the said blank is the rare earth oxide class additive of the 0.5%-2% of aluminium nitride powder.
3. the method for manufacture of AlN ceramic substrate as claimed in claim 2; It is characterized in that described AlN ceramic substrate prepares as follows: the square sheet that A green compact and B green compact is struck out identical shaped area; Bottom surface with two B green compact is attached to a slice A green compact upper and lower surfaces respectively again; Become a complete base substrate through 8～12MPa pressure with 70～90 ℃ temperatures, again with described base substrate binder removal 2-4h under 600～650 ℃ of temperature, putting into the hydrogen/nitrogen gas mixture serves as that protection gas, temperature are 1790～1890 ℃ tungsten vacuum resistance furnace pressureless sintering 2-8h again; Can make the aluminium nitride ceramics substrate, described hydrogen nitrogen flow rate ratio is 1: 1.
4. the method for manufacture of AlN ceramic substrate as claimed in claim 2 is characterized in that A green compact thickness is 0.2～0.7mm, and B green compact thickness is 0.08～0.12mm.
5. the method for manufacture of AlN ceramic substrate as claimed in claim 2 is characterized in that the A green compact are processed by the raw material of following mass parts:
100 parts of aluminium nitride powder A;
5～8 parts of rare earth oxide class additive A;
20～50 parts of absolute ethyl alcohols/butanols admixture solvent A;
1～3 part of dispersion agent fish oil A;
0.5～2 part of sticker polyvinyl butyral acetal A;
4～8 parts of plasticizer phthalic acid dibutylester A;
Absolute ethyl alcohol and butanols volume ratio are 1:1～2 among described absolute ethyl alcohol/butanols admixture solvent A.
6. the method for manufacture of AlN ceramic substrate as claimed in claim 2 is characterized in that described B green compact are processed by the raw material of following mass parts:
Absolute ethyl alcohol and butanols volume ratio are 1: 1～2 among described absolute ethyl alcohol/butanols mixture B.
7. the method for manufacture of AlN ceramic substrate as claimed in claim 2 is characterized in that being that said rare earth oxide class additive A or rare earth oxide class additive B are: Y
2O
3, its size distribution is 0.5-3 μ m.
8. like the method for manufacture of claim 2 or 6 described AlN ceramic substrates, it is characterized in that the content of B green compact middle-weight rare earths oxide addition B is 0.8%-1%.
9. the method for manufacture of AlN ceramic substrate as claimed in claim 4, the thickness that it is characterized in that described B green compact is 0.1mm.
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| CN106187201A (en) * | 2015-05-04 | 2016-12-07 | 北京大学 | A kind of flow casting molding without benzene prepares the method for aluminium nitride ceramics |
| CN108203294A (en) * | 2017-12-25 | 2018-06-26 | 高瑞贤 | A kind of composite ceramics to conduct electricity very well and preparation method thereof |
| CN109678530A (en) * | 2019-01-24 | 2019-04-26 | 中国电子科技集团公司第四十三研究所 | A kind of insulating powder and preparation method thereof |
| WO2020237979A1 (en) * | 2019-05-24 | 2020-12-03 | 广东工业大学 | Composite ceramic substrate and preparation method therefor |
| CN114105651A (en) * | 2021-08-31 | 2022-03-01 | 森霸传感科技股份有限公司 | Manufacturing method of pyroelectric ultrathin ceramic chip and application of pyroelectric ultrathin ceramic chip to sensor |
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| 傅仁利 等: "氮化铝陶瓷低温烧结过程中的液相迁移与表面晶粒生长", 《中国有色金属学报》 * |
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| CN108203294A (en) * | 2017-12-25 | 2018-06-26 | 高瑞贤 | A kind of composite ceramics to conduct electricity very well and preparation method thereof |
| CN109678530A (en) * | 2019-01-24 | 2019-04-26 | 中国电子科技集团公司第四十三研究所 | A kind of insulating powder and preparation method thereof |
| CN109678530B (en) * | 2019-01-24 | 2021-07-23 | 中国电子科技集团公司第四十三研究所 | Isolation powder and preparation method thereof |
| WO2020237979A1 (en) * | 2019-05-24 | 2020-12-03 | 广东工业大学 | Composite ceramic substrate and preparation method therefor |
| CN114105651A (en) * | 2021-08-31 | 2022-03-01 | 森霸传感科技股份有限公司 | Manufacturing method of pyroelectric ultrathin ceramic chip and application of pyroelectric ultrathin ceramic chip to sensor |
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