CN102545811B - A kind of automatic gain system signal and gain synchronous acquisition device and method - Google Patents
A kind of automatic gain system signal and gain synchronous acquisition device and method Download PDFInfo
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- CN102545811B CN102545811B CN201010621219.5A CN201010621219A CN102545811B CN 102545811 B CN102545811 B CN 102545811B CN 201010621219 A CN201010621219 A CN 201010621219A CN 102545811 B CN102545811 B CN 102545811B
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Abstract
The present invention discloses a kind of automatic gain system signal and gain synchronous acquisition device and method, this device comprises: automatic gain system signal acquisition module, gain synchronous acquisition module and signal gain acquisition controller, auto gain link input signal is divided into two-way after entering described automatic gain system signal acquisition module, one tunnel enters described signal gain acquisition controller, and another road enters described gain synchronous acquisition module; Gain setting link input signal is divided into two-way after entering described gain synchronous acquisition module, and a road enters described signal gain acquisition controller, and another road enters described automatic gain system signal acquisition module; Described auto gain link input signal comprises normal mode of operation signal and surveying work mode signal, and described gain setting link input signal comprises the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern.
Description
Technical field
The present invention relates to a kind of collection of simulant signal and processing technology field, particularly relate to a kind of automatic gain system signal and gain synchronous acquisition device and method.
Background technology
In analog and acquisition system, often use auto gain link.The principle of auto gain link is as follows: judge the effective value that auto gain link outputs signal, if effective value is less than set point, adopts FEEDBACK CONTROL, by improving gain, signal is exported close to effective value; If signal exports effective value be greater than settings, adopting FEEDBACK CONTROL, by reducing gain, signal being exported close to effective value; When the effective value output of signal is less than certain scope with the error of set point, by gain locking, realize signal automatic gain and control.By the signal of automatic gain process by gathering link collection, image data is for system.
If auto gain link is applied to the occasion higher to signal accuracy requirement, the change in gain of automatic growth control will have influence on the output quality of signal, and then influential system error.So need to gather the output signal of automatic gain system and gain, and by gain, signal is revised, eliminate this deviation of signal introduced due to gain fluctuation.If the collection of signals collecting and gain is asynchronous, the error correction to signal will be caused, the result accuracy recorded is deteriorated.Usually adopt directly to the method that output signal and gain gather in prior art, but this method can not ensure the synchronous acquisition of output signal and gain.
As shown in fig. 1, Fig. 1 is the automatic gain system signal and the direct harvester of gain that use in prior art.In FIG, auto gain link 21 input signal enters variable gain amplifier 22.Signal out enters signal transacting link 23 afterwards from variable gain amplifier 22.The signal of signal transacting link 23 is divided into two-way, entering signal gain acquisition controller 30 again after a road entering signal analog-to-digital conversion link 24, and another road enters as RMS to DC and gain control output element 26.Gain setting link 27 signal out enters after gain controls output element 26 and is divided into two-way, one tunnel to enter after gain analog-to-digital conversion link 29 entering signal gain acquisition controller 30 again after gain controls to export conditioning link 28, and another road enters after gain controls conditioning link 25 and enters variable gain amplifier 22.Therefore this device can not determine the relation of signal and gain, can not accurately calibrate signal.
Therefore need to provide a kind of mechanism in order to overcome the defect existed in prior art, realize automatic gain system signal and gain synchronous collection method, eliminate because gain fluctuation is on the impact of signal.
Summary of the invention
The object of the present invention is to provide a kind of automatic gain system signal and gain synchronous acquisition device and method, realize automatic gain system signal and gain synchronous acquisition, eliminate because gain fluctuation is on the impact of signal.
For achieving the above object, the present invention discloses a kind of automatic gain system signal and gain synchronous acquisition device, comprise: automatic gain system signal acquisition module, gain synchronous acquisition module and signal gain acquisition controller, auto gain link input signal is divided into two-way after entering described automatic gain system signal acquisition module, one tunnel enters described signal gain acquisition controller, and another road enters described gain synchronous acquisition module; Gain setting link input signal is divided into two-way after entering described gain synchronous acquisition module, and a road enters described signal gain acquisition controller, and another road enters described automatic gain system signal acquisition module; It is characterized in that, described auto gain link input signal comprises normal mode of operation signal and surveying work mode signal, and described gain setting link input signal comprises the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern.
Further, this automatic gain system signal acquisition module exports by signal and comprises variable gain amplifier, signal transacting link and signal mode number conversion link successively.
Further, this gain synchronous acquisition module comprises RMS to DC and gain control output element successively by signal output, gain controls conditioning link, link and gain analog-to-digital conversion link are nursed one's health in gain control output.
Further, this automatic gain system signal and gain synchronous acquisition device also comprise two diverter switches, for switching normal mode of operation signal and surveying work mode signal, and the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern.
Further, this automatic gain system signal and gain synchronous acquisition device also comprise isochronous controller, for storing and identifying the input from described automatic gain system signal acquisition module and described gain synchronous acquisition module and output signal information.
Further, isochronous controller switches for control signal analog-to-digital conversion link, gain analog-to-digital conversion link, normal mode of operation and surveying work pattern.
Further, isochronous controller is used for ride gain adjustment input end signal feature.
The present invention discloses a kind of lithographic equipment adopting above-mentioned automatic gain system signal and gain synchronous acquisition device simultaneously.
The present invention also discloses a kind of method of automatic gain system signal and gain synchronous acquisition, comprise: normal mode of operation and surveying work pattern, surveying work pattern is for determining the synchronized relation of automatic gain system signal under described normal mode of operation and gain, it is characterized in that, under described surveying work pattern, constant input signal is increased at the signal input part of auto gain link, and increase by a gain signal at Gain tuning input, after gathering automatic gain system signal and gain, by phase difference measurement to obtain the synchronized relation of automatic gain system signal and gain.
Further, this normal mode of operation comprises: step one, arrange automatic gain system worked well pattern, namely according to the effective value that signal exports, adopts closed loop feedback to control to adjust gain; Step 2, automatic gain adjust; Step 3, gain locking; Step 4, signals collecting and gain collection; Step 5, signal storage and gain store.
Further, this surveying work pattern specifically comprises: step 6, to arrange auto gain link be surveying work pattern, and surveying work pattern is gain opened loop control; Step 7, add constant input at auto gain link input, eliminate input signal impact that synchronized relation is measured; Step 8, feature identification is carried out to the gain stored in step 5; Step 9, add gain signal at Gain tuning input, this gain signal is consistent with the gain characteristics of storage; Step 10, signals collecting and gain collection; The time phase that under step 11, measurement pattern, signals collecting and gain gather; Step 12, according to the time phase difference measured by step 11 to the signal under normal mode of operation and gain data synchronous calibration; Step 13, obtain signal and gain synchrodata, realize the synchronous of signal and gain.
Further, increase by gain characteristics and time phase difference characteristic storage experts database is also comprised in this surveying work pattern, the gain characteristics surveyed under surveying work pattern for store-memory and time phase difference.
The beneficial effect of technical scheme provided by the invention is: due in the normal mode of operation, signals collecting and gain collection cannot complete synchronous acquisition, but by under surveying work pattern, adopt this method, the phase difference that signals collecting and gain gather can be determined, utilize the phase difference measured to go to compensate signals collecting and gain collection under normal mode of operation, what can realize that signals collecting and gain gather is synchronous.Under the surveying work pattern of technical scheme provided by the invention, gain characteristics is identical with gain characteristics under normal mode of operation, makes the phase difference under surveying work pattern consistent with the phase difference of signal under normal mode of operation and gain.Utilize technical scheme provided by the invention, the one-to-one relationship of further guarantee gain collection and signals collecting, ensures the correctness that gain is revised signal, eliminates because gain fluctuation is on the impact of signal, improve the precision of signals collecting to a certain extent, improve system accuracy.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is the structural representation of automatic gain system signal and the direct harvester of gain used in prior art;
Fig. 2 is the structural representation of automatic gain system signal involved in the present invention and the direct harvester of gain;
Fig. 3 is the flow chart of the first execution mode of automatic gain system signal involved in the present invention and the direct acquisition method of gain;
Fig. 4 is the flow chart of the second execution mode of automatic gain system signal involved in the present invention and the direct acquisition method of gain;
Fig. 5 is the present invention's gain collection and signals collecting oscillogram in the normal mode of operation;
Fig. 6 is the present invention's gain collection and signals collecting oscillogram under surveying work pattern;
Fig. 7 is the oscillogram of the present invention's gain collection and signals collecting synchronized relation under surveying work pattern;
Fig. 8 is the oscillogram that the present invention applies sinusoidal gains signal under surveying work pattern;
Fig. 9 is the structural representation using lithographic equipment of the present invention.
Embodiment
Specific embodiments of the invention are described in detail below in conjunction with accompanying drawing.
The object of the present invention is to provide a kind of automatic gain system signal and gain synchronous acquisition device and method, realize automatic gain system signal and gain synchronous acquisition, eliminate because gain fluctuation is on the impact of signal.Inventive concept of the present invention is as follows: auto gain link is set to two kinds of mode of operations, normal mode of operation and surveying work pattern.In the normal mode of operation, can gather signal and gain simultaneously, gain be stored, gain characteristics is identified.Under surveying work pattern, constant input signal is added at the signal input part of auto gain link, the gain signal of certain feature (identical with gain characteristics under normal mode of operation) is added at the Gain tuning end of auto gain link, auto gain link carries out opened loop control, obtains output signal and gain.The phase difference of auto gain link output signal and gain can be measured by two groups of Data Comparisons.Use the phase difference recorded under measurement pattern to go to compensate output signal collection under auto gain link normal mode of operation and gain collection, under determining normal mode of operation with this, the one-to-one relationship that signals collecting and gain gather, realizes synchronous acquisition.
See the structural representation that Fig. 2, Fig. 2 are automatic gain system signal involved in the present invention and the direct harvester of gain.This device comprises automatic gain system signal acquisition module, gain synchronous acquisition module and signal gain acquisition controller, auto gain link input signal is divided into two-way after entering described automatic gain system signal acquisition module, one tunnel enters described signal gain acquisition controller, and another road enters described gain synchronous acquisition module; Gain setting link input signal is divided into two-way after entering described gain synchronous acquisition module, and a road enters described signal gain acquisition controller, and another road enters described automatic gain system signal acquisition module; It is characterized in that, described auto gain link input signal comprises normal mode of operation signal and surveying work pattern, and described gain setting link input signal comprises the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern.
As shown in Figure 2, comprise signal input interface under two kinds of mode of operations in the apparatus, signal input interface 1 and constant value signal input interface 2 under surveying work pattern under normal mode of operation.Diverter switch 3, under normal mode of operation and under surveying work pattern, to the switching of signal input, controls by isochronous controller 14.4 is variable gain amplifier.5 is signal transacting link.6 is signal modulus (AD) conversion links, by the control of isochronous controller 14.7 is gain control conditioning link.8 is that RMS to DC and gain control output element.9 is diverter switch, and under normal mode of operation and under surveying work pattern, Gain tuning input applies the switching of signal.10 is under normal mode of operation, gain set-point.11 is under surveying work pattern, gain input signal.12 nurse one's health link for gain controls to export.13 is gain analog-to-digital conversion link.14 is isochronous controller, and its function is control signal analog-to-digital conversion, gain analog-to-digital conversion, signal and gain store and memory, the identification of gain characteristics, the store-memory of gain characteristics and phase difference, normal mode of operation and surveying work pattern switch, ride gain adjustment input end signal feature.
Automatic gain system signal and gain synchronous acquisition device, have two kinds of mode of operations, normal mode of operation and surveying work pattern.Under automatic operation mode, can gather signal and gain, gain be stored, gain characteristics is identified, but under this pattern, the signal of collection and the synchronized relation of gain need to determine under surveying work pattern.Under surveying work pattern, constant input signal is added at the signal input part of auto gain link, the gain signal of certain feature (identical with gain characteristics under normal mode of operation) is added at the Gain tuning input of auto gain link, auto gain link carries out opened loop control, obtains output signal and gain.The phase difference of auto gain link output signal and gain can be measured by two groups of Data Comparisons.Use the phase difference under measurement pattern to go to compensate signals collecting under auto gain link normal mode of operation and gain collection, under determining normal mode of operation with this, the one-to-one relationship that signals collecting and gain gather, realizes synchronous acquisition.
The present invention also provides a kind of automatic gain system signal and gain synchronous collection method.It is the flow chart of the first execution mode of automatic gain system signal involved in the present invention and the direct acquisition method of gain see Fig. 3, Fig. 3.The step of this automatic gain system signal and gain synchronous collection method is as follows:
S01-, for arranging automatic gain system worked well pattern, namely according to the effective value that signal exports, adopts closed loop feedback to control, adjustment gain.
S02-is automatic gain adjustment.
S03-gain locking, after Gain tuning is good, by gain locking.
S04 is signals collecting and gain collection, and the signal now gathered and gain synchronized relation be can not determine.
S05-signal storage and gain store.
S06-is surveying work pattern for arranging auto gain link, and surveying work pattern is gain opened loop control.
S08-, for adding constant input at auto gain link input, eliminates the impact that input signal is measured for synchronized relation.
S07-carries out feature identification to the gain stored.
S09-is for add gain signal at Gain tuning input, and this gain signal is consistent with the gain characteristics of storage.
S10-is signals collecting and gain collection, due to signal input part add for constant value signal, so signals collecting and gain to gather roughly feature consistent, just go up difference time phase.
The time phase that under S11-measurement pattern, signals collecting and gain gather can Accurate Measurement.
The time phase difference that S12-step S11 measures is to the signal under normal mode of operation and gain data synchronous calibration.S13 obtains signal and gain synchrodata, achieves the synchronous of signal and gain.
The present invention also provides the another kind of execution mode of this automatic gain system signal and gain synchronous collection method simultaneously.As shown in Figure 4:
S101-, for arranging automatic gain system worked well pattern, namely according to the effective value that signal exports, adopts closed loop feedback to control, adjustment gain.
S102-is automatic gain adjustment.
S103-gain locking, after Gain tuning is good, by gain locking.
S104-is signals collecting and gain collection, and the signal now gathered and gain synchronized relation be can not determine.
S105-signal storage and gain store.
S106-is gain characteristics identification.
S107-is gain characteristics and time phase difference characteristic storage experts database, can the gain characteristics surveyed under surveying work pattern of store-memory and time phase difference, it is as experts database, the gain characteristics of the gain characteristics in step S106 and experts database is compared, match if to have in experts database, then directly export the time phase difference numerical value corresponding with gain characteristics, if do not matched in experts database, can measurement pattern be proceeded to, carry out this attribute gain and signals collecting measuring difference of phases.
S108-with the time phase difference of step S107 to the signal under normal mode of operation and gain data synchronous calibration.
S109-obtains signal and gain synchrodata, achieves the synchronous of signal and gain.
S110-is surveying work pattern for arranging auto gain link, and surveying work pattern is gain opened loop control.
S111-, for adding constant input at auto gain link input, eliminates the impact that input signal is measured for synchronized relation.
S112-is for add attribute gain signal at Gain tuning input, and this attribute gain can define the gain of a certain characteristic rule in advance, and by this characteristic storage in experts database, a certain gain characteristics also can specified for experts database.
S113-is that under surveying work pattern, output signal gathers and gain collection, due to signal input part add for constant value signal, so signals collecting and gain to gather roughly feature consistent, just time phase above difference.
The time phase that under S114-measurement pattern, signals collecting and gain gather can Accurate Measurement, and measurement result stores in gain characteristics and phase difference experts database.
Fig. 5 is the present invention's gain collection and signals collecting oscillogram in the normal mode of operation.As shown in Figure 5, input is the input of automatic gain device primary signal, and g1 is the gain signal collected, and s1 adjusts after locking through automatic gain, the output signal collected.From Fig. 5, obviously can find out, be difficult to the time phase difference determining g1 and s1.
Fig. 6 is the present invention's gain collection and signals collecting oscillogram under surveying work pattern.As shown in Figure 6, input is constant value signal input, and g1 is after the gain gathered under applying normal mode of operation, the gain signal collected, and s1 is the output signal collected after the gain gathered under applying normal mode of operation.Be constant input due to what apply at signal input part, so the feature of g1 and s1 is except life period phase difference, further feature is consistent, so can from two signal determination time phase differences, in figure, Δ t be the time phase difference of g1 and s1.
Fig. 7 is the oscillogram of the present invention's gain collection and signals collecting synchronized relation under surveying work pattern.Fig. 7 utilizes the time phase difference Δ t of Fig. 6, determines relation time phase of g1 and s1 in Fig. 5, thus determines the synchronized relation of g1 and s1 in Fig. 5.Utilize this relation, corresponding gain can be used corresponding signal calibration.Signal after calibration can provide the accuracy of signal.
Fig. 8 is the oscillogram that the present invention applies sinusoidal gains signal under surveying work pattern.Wherein apply sinusoidal gains signal in surveying work pattern, input is constant value signal input, and g1 is that under applying this attribute gain situation, gain gathers waveform, and s1, in this attribute gain situation of applying, outputs signal and gathers waveform.According to s1 and g1, the time phase difference Δ t that the sinusoidal gains of this feature is corresponding can be determined.This gain characteristics and time phase difference can be stored in experts database.
How to be used in the occasion higher to signal accuracy requirement for further describing automatic gain system signal provided by the present invention and gain synchronous acquisition, spy provides the lithographic equipment of this device of application to be illustrated.Detailed content please refer to Fig. 9, and Fig. 9 is the structural representation that in lithographic equipment silicon chip alignment system, registration signal and gain synchronous acquisition are applied.Exposure light source 31 provides exposing light beam, image information entrained on mask is projeced on silicon chip 35 after this exposing light beam illuminating mask through projection objective 34.Mask platform 32 is for providing the movement of multiple degree of freedom for mask, silicon wafer stage 35 is for providing the movement of multiple degree of freedom for silicon chip 35.Silicon wafer stage 35 includes silicon chip alignment mark.36 is silicon wafer stage position measuring system.37 is silicon chip alignment light source.38 is image-forming module, and it receives the light that silicon chip alignment light source sends, and light shines on the silicon chip alignment mark of silicon wafer stage, and receives the diffraction light getting to silicon chip mark, output optical signal.39 is silicon chip alignment controller, and it is embodied as the reception of picture module output optical signal, process and collection, receives the position data of mask platform position measuring system and silicon wafer stage position measuring system.Calculate the position of silicon chip mark, realize silicon chip and aim at.Silicon chip alignment controller have employed the signal of automatic gain system of the present invention and gain synchronous acquisition device 401,402,40n.The signalling channel number that silicon chip alignment controller can export according to image-forming module, the signal of the automatic gain system of configurable respective numbers and gain synchronous acquisition device.Utilize the signal of automatic gain system provided by the present invention and gain synchronous acquisition device can ensure the one-to-one relationship of gain collection and signals collecting, ensure the correctness that gain is revised signal, eliminate because gain fluctuation is on the impact of signal, improve the precision of signals collecting, improve system accuracy.
Just preferred embodiment of the present invention described in this specification, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (12)
1. an automatic gain system signal and gain synchronous acquisition device, comprise: automatic gain system signal acquisition module, gain synchronous acquisition module and signal gain acquisition controller, auto gain link input signal is divided into two-way after entering described automatic gain system signal acquisition module, one tunnel enters described signal gain acquisition controller, and another road enters described gain synchronous acquisition module, gain setting link input signal is divided into two-way after entering described gain synchronous acquisition module, and a road enters described signal gain acquisition controller, and another road enters described automatic gain system signal acquisition module, it is characterized in that, described auto gain link input signal comprises normal mode of operation signal and surveying work mode signal, described gain setting link input signal comprises the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern, under described surveying work pattern, constant input signal is increased at the signal input part of described auto gain link, and increase by a gain signal at Gain tuning input, after gathering automatic gain system output signal and gain, by phase difference measurement to obtain the synchronized relation of automatic gain system output signal and gain, the described phase difference recorded under using described surveying work pattern carries out synchronous calibration to the output signal under described normal mode of operation and gain signal.
2. automatic gain system signal as claimed in claim 1 and gain synchronous acquisition device, is characterized in that, described automatic gain system signal acquisition module exports by signal and comprises variable gain amplifier, signal transacting link and signal mode number conversion link successively.
3. an automatic gain system signal as claimed in claim 1 and gain synchronous acquisition device, it is characterized in that, described gain synchronous acquisition module comprises RMS to DC successively by signal output and gain controls output element, gain controls conditioning link, gain controls output conditioning link and gain analog-to-digital conversion link.
4. automatic gain system signal as claimed in claim 1 and gain synchronous acquisition device, it is characterized in that, described automatic gain system signal and gain synchronous acquisition device also comprise two diverter switches, for switching normal mode of operation signal and surveying work mode signal, and the gain setting input signal of normal mode of operation and the gain setting input signal of surveying work pattern.
5. automatic gain system signal as claimed in claim 1 and gain synchronous acquisition device, it is characterized in that, described automatic gain system signal and gain synchronous acquisition device also comprise isochronous controller, for storing and identifying the input from described automatic gain system signal acquisition module and described gain synchronous acquisition module and output signal information.
6. automatic gain system signal as claimed in claim 5 and gain synchronous acquisition device, is characterized in that, described isochronous controller is used for control signal analog-to-digital conversion link, gain analog-to-digital conversion link, normal mode of operation and surveying work pattern and switches.
7. automatic gain system signal as claimed in claim 5 and gain synchronous acquisition device, is characterized in that, described isochronous controller is used for ride gain adjustment input end signal feature.
8. the automatic gain system signal of employing according to any one of claim 1 to 7 and the lithographic equipment of gain synchronous acquisition device.
9. the method for an automatic gain system signal and gain synchronous acquisition, comprise: normal mode of operation and surveying work pattern, surveying work pattern is for determining the synchronized relation of automatic gain system output signal under described normal mode of operation and gain, it is characterized in that, under described surveying work pattern, constant input signal is increased at the signal input part of auto gain link, and increase by a gain signal at Gain tuning input, after gathering automatic gain system output signal and gain, by phase difference measurement to obtain the synchronized relation of automatic gain system output signal and gain, the phase difference recorded under using surveying work pattern carries out synchronous calibration to the output signal under normal mode of operation and gain signal.
10. the method for automatic gain system signal as claimed in claim 9 and gain synchronous acquisition, it is characterized in that, described normal mode of operation comprises:
Step one, automatic gain system worked well pattern is set, namely according to the effective value that signal transacting link signal exports, adopts closed loop feedback to control to adjust gain;
Step 2, automatic gain adjust;
Step 3, gain locking;
The output signal collection of step 4, normal mode of operation analog-to-digital conversion link and gain collection;
The output signal of step 5, normal mode of operation analog-to-digital conversion link stores and stores with gain.
The method of 11. automatic gain system signals as claimed in claim 10 and gain synchronous acquisition, it is characterized in that, described surveying work pattern specifically comprises:
Step 6, to arrange auto gain link be surveying work pattern, and surveying work pattern is gain opened loop control;
Step 7, add constant input at auto gain link input, eliminate input signal impact that synchronized relation is measured;
Step 8, feature identification is carried out to the gain stored in step 5;
Step 9, add gain signal at Gain tuning input, this gain signal is consistent with the gain characteristics of storage;
Step 10, surveying work mode output signal gather and gain collection;
Under step 11, measurement pattern, measure the time phase difference of output signal and the gain gathered;
Step 12, according to the time phase difference measured by step 11 to the output signal under normal mode of operation and gain data synchronous calibration;
Step 13, obtain the output signal after calibration and gain synchrodata, the phase difference recorded under realizing surveying work pattern is synchronous to the output signal under normal mode of operation and gain.
The method of 12. automatic gain system signals as claimed in claim 11 and gain synchronous acquisition, it is characterized in that, increase by one gain characteristics and time phase difference characteristic storage experts database is also comprised, the gain characteristics surveyed under surveying work pattern for store-memory and time phase difference in described surveying work pattern.
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| US6473182B1 (en) * | 2000-07-27 | 2002-10-29 | Northrup Grumman Corporation | Automatic gain control of a closed loop fiber optic gyroscope using non-linear control laws |
| CN1843011A (en) * | 2004-07-28 | 2006-10-04 | 卡西欧计算机株式会社 | OFDM signal demodulator circuit and OFDM signal demodulating method |
| CN101366176A (en) * | 2006-01-05 | 2009-02-11 | 高通股份有限公司 | Phase compensation for analog gain switching in OFDM modulated physical channel |
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| US6473182B1 (en) * | 2000-07-27 | 2002-10-29 | Northrup Grumman Corporation | Automatic gain control of a closed loop fiber optic gyroscope using non-linear control laws |
| CN1843011A (en) * | 2004-07-28 | 2006-10-04 | 卡西欧计算机株式会社 | OFDM signal demodulator circuit and OFDM signal demodulating method |
| CN101366176A (en) * | 2006-01-05 | 2009-02-11 | 高通股份有限公司 | Phase compensation for analog gain switching in OFDM modulated physical channel |
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Address after: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |