CN102541135B - Parallel driving circuit for plurality of titanium pumps - Google Patents

Parallel driving circuit for plurality of titanium pumps Download PDF

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Publication number
CN102541135B
CN102541135B CN201110136628.0A CN201110136628A CN102541135B CN 102541135 B CN102541135 B CN 102541135B CN 201110136628 A CN201110136628 A CN 201110136628A CN 102541135 B CN102541135 B CN 102541135B
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resistance
operational amplifier
titanium
titanium pump
power supply
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CN102541135A (en
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樊仲维
李迎春
张正祥
徐伟力
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Beijing GK Laser Technology Co Ltd
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Beijing GK Laser Technology Co Ltd
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Abstract

The invention provides a parallel driving circuit for a plurality of titanium pumps, which comprises a power source access end and at least two titanium pump power source access points connected with a titanium pump power source wiring end. A first resistor is in series connection between the power source access end and each titanium pump power source access point, or the first resistor is in series connection between each titanium pump power source access point and the titanium pump power source wiring end. Therefore, output power of a titanium pump power source is greatly reduced, and the function of using one titanium pump power source to stably supply power to the plurality of titanium pumps is achieved.

Description

The parallel driver circuit of many titanium pumps
Technical field
The present invention relates to electronic technology field, specifically a kind of parallel driver circuit of many titanium pumps.
Background technology
Titanium pump is that the stainless steel thin-wall cylinder that is 12~40mm by many thick 0.1~0.3mm of being, diameter forms titanium pump anode canister, and thick at the two ends of anode be that the titanium negative electrode of 1~3mm forms.The axis of titanium pump anode canister is vertical with the surface of titanium negative electrode, adds the voltage of 3~7KV between the two, the uniform magnetic field that axially adds 1000~3000 Gausses of titanium pump anode canister.The electronics moving in titanium pump anode canister, has axial velocity component and radial velocity component, and the electrons in titanium pump anode canister is subject to Lorentz force action and electric field force effect, and its motion is the wheel rolling curve motion on axial rectilinear motion and xsect.Trajectory of electron motion is extended greatly, and the collision probability of electronics and neutral gas molecule increases, and has improved ionizing efficiency, makes also can discharge under very low air pressure.Above-mentioned phenomenon is called Penning discharge.The electron collision of gas molecule and rotation and be ionized to gaseous ion, this gaseous ion, under the effect of electric field, flies to and bombards titanium negative electrode, produces two kinds of effects: 1, sputtered titanium atom, forms titanium film; 2, get secondary electron.In said process, the titanium atom sputtering out, is deposited on the inwall of titanium pump anode canister and the surface of titanium negative electrode, forms fresh titanium film and maintain the exhaust capacity of titanium pump.The sputter ability of gaseous ion is difference along with the difference of energy, quality and the incident angle of this gaseous ion of incident, and the sputter ability of the gaseous ion that energy is large, quality is large is also large.In order to guarantee the gettering ability of the titanium film on titanium pump anode canister, must guarantee enough sputtering rastes, requiring has enough voltage, to guarantee that gaseous ion obtains enough bombarding energies.Bombard by this gaseous ion, can get secondary electron, secondary electron is entered in rotating electron cloud by electromagnetic field effect, supplements the electronics losing.When each gas molecule is ionized, all at least emit an electronics, these electronics also enter in rotating electron cloud, and they compensate the electronics losing on anode because going to together with secondary electron, thereby can constantly maintain Penning discharge.
The power supply of titanium pump is generally to use 5KV voltage multiplying rectifier power supply, and when load current is large, output voltage drops to several hectovolts.Conventionally with flowing through electric current reflection between the titanium pump both positive and negative polarity vacuum tightness between finding time.
In prior art, a titanium pump needs a titanium pump power supply.The shell of a titanium pump power supply is a 3U cabinet, therefore, in the time that many titanium pumps use, needs multiple suitable titanium pump power supplys, and multiple titanium pump power supplys carry out work causes the waste of cost, and multiple titanium pump power supplys need again to take very large space.
Summary of the invention
Fundamental purpose of the present invention is to provide a kind of parallel driver circuit of many titanium pumps, makes many titanium pumps only need a titanium pump power supply.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of parallel driver circuit of many titanium pumps, it comprises: power access end and at least two titanium pump power supply access points, described titanium pump power supply access point connects titanium pump supply terminals, between described power access end and each titanium pump power supply access point, is serially connected with between the first resistance or described titanium pump power supply access point and titanium pump supply terminals and is serially connected with the first resistance.
Preferably, described titanium pump power supply access point also connects earth terminal by the second electric capacity.
Preferably, described each titanium pump power supply access point connects the positive voltage input end of the first operational amplifier by bleeder circuit;
The negative voltage incoming end of described the first operational amplifier connects the output terminal of described the first operational amplifier by the second resistance, the output terminal of described the first operational amplifier is the first sampled point for the sampling of electric current display.
Preferably, the positive voltage input end of described the first operational amplifier or the output terminal of described the first operational amplifier are the second sampled point for described titanium pump voltage signal sampling, be connected to the negative voltage input end of the second operational amplifier by diode parallel with one another for the second sampled point of described titanium pump voltage signal sampling, the negative voltage input end of described the second operational amplifier is reference voltage incoming end, the output terminal output titanium pump voltage regulation feedback signal of described the second operational amplifier.
Preferably, described each titanium pump power supply access point connects the positive voltage input end of the first operational amplifier by bleeder circuit; Specifically comprise: between described titanium pump power supply access point and the positive voltage incoming end of described the first operational amplifier, be serially connected with the 3rd resistance, the positive voltage incoming end of described the first operational amplifier also connects earth terminal by the 4th resistance.
Preferably, the negative voltage incoming end of described the first operational amplifier also connects earth terminal by the 5th resistance.
Preferably, the output terminal of described the first operational amplifier is also connected earth terminal by the 6th resistance with the first electric capacity respectively.
Preferably, between described the 5th resistance and described earth terminal, be also connected with the 7th resistance.
Preferably, the resistance of described the first resistance is 1M-10M ohm, and the resistance of described the second resistance is 10-1M ohm.
Preferably, the resistance value ratio of described the 3rd resistance and described the 4th resistance is (100-10000): 1.
Preferably, described the 7th resistance is potentiometer.
Implement technical scheme of the present invention, there is following beneficial effect: the parallel driver circuit of many titanium pumps provided by the invention, the high-voltage output end of titanium pump power supply is powered to many titanium pumps respectively through resistive isolation, the power of titanium pump power supply output reduces greatly, realized the function of stable many titanium pumps of supply of titanium pump power supply.In addition, by this driving circuit by the sample current signal of each titanium pump of sample circuit, amplify this current signal through thering is the operational amplifier of high input impedance, deliver to comparator circuit, feed back to titanium pump power supply again, realize the voltage-regulation of titanium pump power supply, the voltage that titanium pump is obtained is more stable.
Accompanying drawing explanation
The application drawing of the first driving circuit that Fig. 1 provides for the embodiment of the present invention.
The structure principle chart of the second driving circuit that Fig. 2 provides for the embodiment of the present invention.
The casing structure schematic diagram with driving circuit that Fig. 3 provides for the embodiment of the present invention.
Realization, functional characteristics and the advantage of the object of the invention, in connection with embodiment, are described further with reference to accompanying drawing.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
The parallel driver circuit of many titanium pumps of the first that the embodiment of the present invention provides, as shown in Figure 1, this driving circuit comprises: a power access end HV connects respectively three the first operational amplifier U0, U1, the positive voltage input end of U2, in this embodiment, power access end HV connects titanium pump power supply, each the first operational amplifier is to there being a titanium pump, in other embodiment, also can there is more operational amplifier, can there is accordingly more titanium pump, in Fig. 1, three the first operational amplifier U0, U1, U2 is respectively to there being three titanium pumps (that is: titanium pump A, titanium pump B and titanium pump C).
Between the positive voltage input end of described power access end HV and described the first operational amplifier U0, be provided with titanium pump power supply access point A, described titanium pump power supply access point A is connected with the supply terminals 1 of titanium pump A, the other end 2 ground connection of described titanium pump A;
The negative voltage incoming end of described the first operational amplifier U0 connects the output terminal of described the first operational amplifier U0 by the second resistance R 6, the output terminal of described the first operational amplifier U0 is the first sampled point for the sampling of electric current display of titanium pump A; The current sampling signal of titanium pump A is input to display module carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump A.
Further, the output terminal of described the first operational amplifier U0 is also as the negative voltage input end that is connected to the second operational amplifier U3 for the second sampled point of described titanium pump voltage signal sampling by diode D1.
Same, between described power access end HV and the positive voltage input end of described the first operational amplifier U1, being provided with titanium pump power supply access point B, described titanium pump power supply access point B is connected with the supply terminals 1 of titanium pump B, the other end 2 ground connection of described titanium pump B.
The negative voltage incoming end of described the first operational amplifier U1 connects the output terminal of described the first operational amplifier U1 by the second resistance R 7, the output terminal of described the first operational amplifier U1 is the first sampled point for the sampling of electric current display of titanium pump B; The current sampling signal of titanium pump B is input to display module carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump B.
Further, the output terminal of described the first operational amplifier U1 is also as the negative voltage input end that is connected to the second operational amplifier U3 for the second sampled point of described titanium pump voltage signal sampling by diode D2.
Same, between described power access end HV and the positive voltage input end of described the first operational amplifier U2, being provided with titanium pump power supply access point C, described titanium pump power supply access point C is connected with the supply terminals 1 of titanium pump C, the other end 2 ground connection of described titanium pump C;
The negative voltage incoming end of described the first operational amplifier U2 connects the output terminal of described the first operational amplifier U2 by the second resistance R 8, the output terminal of described the first operational amplifier U2 is the first sampled point for the sampling of electric current display of titanium pump C; The current sampling signal of titanium pump C is input to display module carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump C.
Further, the output terminal of described the first operational amplifier U2 is also as the negative voltage input end that is connected to the second operational amplifier U3 for the second sampled point of described titanium pump voltage signal sampling by diode D3.
In this application, the negative voltage input end of described the second operational amplifier U3 is reference voltage incoming end (this reference voltage can arrange as required), the voltage regulation feedback signal of the output terminal output titanium pump of described the second operational amplifier U3, the output terminal of the second operational amplifier U3 outputs to the voltage regulation feedback signal of this titanium pump in titanium pump power supply.The needs of the multiple that will amplify according to the second operational amplifier U3, are connected with the 9th resistance R 10 between the negative voltage input end of the second operational amplifier U3 and the output terminal of described the second operational amplifier U3.
In the present embodiment, the output terminal of the first operational amplifier is also simultaneously as the sampled point of titanium pump voltage signal, by the sampled signal of the titanium pump voltage of the sampled point of the titanium pump voltage signal at three places being input to the positive voltage input end of the second operational amplifier U3, compare with described reference voltage, the voltage maximum of the sampled signal of the titanium pump voltage at any place, this maximum voltage and reference voltage are compared, obtain the voltage regulation feedback signal of this titanium pump according to result relatively, the voltage regulation feedback signal of this titanium pump feeds back in titanium pump power supply, to carry out the voltage-regulation of this titanium pump power supply, make titanium pump voltage more stable.
In the present embodiment, in order to regulate the enlargement factor of described the first operational amplifier U0, U1, U2, the negative voltage incoming end of described the first operational amplifier U0, U1, U2 also connects earth terminal by the 5th resistance R 3, R4, R5 respectively.In the present embodiment, in order to protect described titanium pump, prevent that titanium pump from being broken by the high voltage of titanium pump power supply, guarantee the stability of titanium pump voltage, between described titanium pump power supply access point A, B, C and described power access end HV, be connected with respectively the first resistance R 0, R1, R2.In addition, in the present embodiment, power access end HV connects the positive voltage input end of four-operational amplifier Ur by resistance R r0, output terminal by this four-operational amplifier Ur is as the electric power output voltage sampled point of titanium pump, the electric power output voltage sampled point of this titanium pump connects display module, demonstrate the electric power output voltage sampled signal of titanium pump by this display module, so that described titanium pump power supply is monitored.Wherein, the negative voltage input end of described four-operational amplifier Ur connects earth terminal by the tenth resistance R r1, and the negative voltage input end of described four-operational amplifier Ur also connects the output terminal of described four-operational amplifier Ur by the 11 resistance R r2.
The parallel driver circuit of many titanium pumps of the second that the embodiment of the present invention provides, as shown in Figure 2, this driving circuit comprises: power access end HV connects respectively three the first operational amplifier U0, U1, the positive voltage input end of U2, in this embodiment, power access end HV is used for connecting titanium pump power supply, each the first operational amplifier is to there being a titanium pump, in other embodiment, also can there is more operational amplifier, can there is accordingly more titanium pump, in Fig. 2, three the first operational amplifier U0, U1, U2 is respectively to there being three titanium pumps (that is: titanium pump A, titanium pump B and titanium pump C).
Between the positive voltage input end of described power access end HV and described the first operational amplifier U0, be provided with titanium pump power supply access point E, described titanium pump power supply access point E is connected with the supply terminals of titanium pump A by the first resistance R 0;
The negative voltage incoming end of described the first operational amplifier U0 connects the output terminal of described the first operational amplifier U0 by the second resistance R 6, the positive voltage input end of described the first operational amplifier U0 is the first sampled point for the sampling of electric current display; This current sampling signal that is used for the first sampled point of electric current display sampling is input to display module and carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump A.
The output terminal of described the first operational amplifier U0 is connected to the negative voltage input end of the second operational amplifier U3 by diode D1.
Same, between described power access end HV and the positive voltage input end of described the first operational amplifier U1, being provided with titanium pump power supply access point F, described titanium pump power supply access point F is connected with the supply terminals of titanium pump B by the first resistance R 1;
The negative voltage incoming end of described the first operational amplifier U1 connects the output terminal of described the first operational amplifier U1 by the second resistance R 7, the positive voltage input end of described the first operational amplifier U1 is the first sampled point for the sampling of electric current display; This current sampling signal that is used for the first sampled point of electric current display sampling is input to display module and carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump B.
The output terminal of described the first operational amplifier U1 is connected to the negative voltage input end of the second operational amplifier U3 by diode D2.The negative voltage input end of described the second operational amplifier U3 is reference voltage incoming end (this reference voltage can arrange as required), the output terminal output titanium pump voltage regulation feedback signal of described the second operational amplifier U3.
Same, between described power access end HV and the positive voltage input end of described the first operational amplifier U2, being provided with titanium pump power supply access point G, described titanium pump power supply access point G is connected with the supply terminals of titanium pump C by the first resistance R 2;
The negative voltage incoming end of described the first operational amplifier U2 connects the output terminal of described the first operational amplifier U2 by the second resistance R 8, the positive voltage input end of described the first operational amplifier U2 is the first sampled point for the sampling of electric current display; This current sampling signal that is used for the first sampled point of electric current display sampling is input to display module and carries out the demonstration of electric current, gives display module by the current signal of sampling, and monitor staff can know the vacuum state of titanium pump C.
The output terminal of described the first operational amplifier U2 is connected to the negative voltage input end of the second operational amplifier U3 by diode D3.The negative voltage input end of described the second operational amplifier U3 is reference voltage incoming end (this reference voltage can arrange as required), the output terminal output titanium pump voltage regulation feedback signal of described the second operational amplifier U3.
In this application, the output terminal of the second operational amplifier U3 outputs to the voltage regulation feedback signal of this titanium pump in titanium pump power supply.The needs of the multiple that will amplify according to the second operational amplifier U3, are connected with the 9th resistance R 10 between the negative voltage input end of the second operational amplifier U3 and the output terminal of described the second operational amplifier U3.The positive voltage input end of the first operational amplifier is as the sampled point of titanium pump voltage signal, by the sampled signal of the titanium pump voltage of the sampled point of the titanium pump voltage signal at three places being input to the positive voltage input end of the second operational amplifier U3, compare with described reference voltage, the voltage maximum of the sampled signal of the titanium pump voltage at any place, this maximum voltage and reference voltage are compared, obtain the voltage regulation feedback signal of this titanium pump according to result relatively, the voltage regulation feedback signal of this titanium pump feeds back in titanium pump power supply, to carry out the voltage-regulation of this titanium pump power supply, the output voltage of titanium pump power supply along with load current reduce constantly increase, the voltage of final titanium pump power supply remains relatively stable, the vacuum tightness of titanium pump is also maintained within a certain range.
In the present embodiment, further, between described titanium pump power supply access point E and described the first operational amplifier U0, be serially connected with the 3rd resistance R 35.Same, between described titanium pump power supply access point F and described the first operational amplifier U1, be serially connected with the 3rd resistance R 36.Same, between described titanium pump power supply access point G and described the first operational amplifier U2, be serially connected with the 3rd resistance R 37.The positive voltage incoming end of described the first operational amplifier U2 also connects earth terminal by the 4th resistance R 16, to divide the voltage that subtracts the first operational amplifier U2.In addition, in other embodiment, also can substitute the 3rd resistance R 37 and the 4th resistance R 16 with electric capacity, and carry out current limliting dividing potential drop.
In the present embodiment, further, the positive voltage incoming end of described the first operational amplifier U0 also connects earth terminal by the 4th resistance R 14, the negative voltage incoming end of described the first operational amplifier U0 also connects earth terminal by the 5th resistance R 3, and the output terminal of described the first operational amplifier U0 is also connected earth terminal by the 6th resistance R 18 with the first capacitor C 4 respectively.Same, the positive voltage incoming end of described the first operational amplifier U1 also connects earth terminal by the 4th resistance R 15, the negative voltage incoming end of described the first operational amplifier U1 also connects earth terminal by the 5th resistance R 4, and the output terminal of described the first operational amplifier U1 is also connected earth terminal by the 6th resistance R 20 with the first capacitor C 5 respectively.Same, the positive voltage incoming end of described the first operational amplifier U2 also connects earth terminal by the 4th resistance R 16, the negative voltage incoming end of described the first operational amplifier U2 also connects earth terminal by the 5th resistance R 5, and the output terminal of described the first operational amplifier U2 is also connected earth terminal by the 6th resistance R 22 with the first capacitor C 7 respectively.So that described the first operational amplifier is protected.
In the present embodiment, further, described titanium pump power supply access point E connects earth terminal by the second capacitor C 9.Same, described titanium pump power supply access point F connects earth terminal by the second capacitor C 11.Same, described titanium pump power supply access point G connects earth terminal by the second capacitor C 12.To carry out the protection of titanium pump.
In the present embodiment, further, between described the 5th resistance R 3 and described earth terminal, be also in series with the 7th resistance R 23.Same, between described the 5th resistance R 4 and described earth terminal, be also in series with the 7th resistance R 24.Same, between described the 5th resistance R 5 and described earth terminal, be also in series with the 7th resistance R 25.To carry out the voltage trim of negative voltage input end of the first operational amplifier, preferably, described the 7th resistance is potentiometer, to facilitate adjusting, can be also the resistor of fixed resistance value as required.
In the present embodiment, preferably, the resistance of described the first resistance is 1M-10M ohm.
In the present embodiment, preferably, the resistance value ratio of described the 3rd resistance and described the 4th resistance is (100-10000): 1.
In the present embodiment, preferably, the resistance of described the second resistance is 10-1M ohm.
Because the power that titanium pump needs in the time maintaining vacuum is quite little, and need larger power in the time starting.Need the electric current of a such titanium pump of titanium pump power supply in the time starting larger according to the general titanium pump of prior art, to having relatively high expectations of power supply, for example in the time starting, power supply reaches 20mA, slowly reduce later, voltage needs only several hectovolts, and arrive vacuum while maintaining voltage can to reach 5000V even higher, the output power of this power supply will consider that the maximal value of voltage and current will just can guarantee safe handling for the power of 5000V*20mA=100W so.And adopt technology of the present invention larger in the resistance of the first resistance of titanium pump power supply access point A serial connection, the for example resistance of this first resistance is 3M ohm, the output terminal output current maximum of titanium pump power supply just only has 1.7 milliamperes (mA) so, output power just reduces 5000V*1.7mA=5.5W greatly like this, and this titanium pump power supply can be given the power supply of more (as: 2-18) titanium pump.While just startup, need vacuum tightness better, increase by 3~5 hours start-up time.This can not affect the startup operation of the system of whole many titanium pump compositions.
Give display module by the current signal of sampling, monitor staff can know the vacuum state of equipment.Be connected in series the first resistance R 0 of large resistance at titanium pump power supply access point, then get near of 0~10V and a little give the first operational amplifier U1 and amplify after the current signal of this sampling, again the current signal of this sampling is deducted to the electric current flowing through in the first resistance R 1, be the current value that flows through titanium pump.
The amplification coefficient of the first operational amplifier in each current sampling circuit is according to being arranged on multiple titanium pumps current-limiting resistance (sample resistance before, that is: between the first resistance) resistance ratio and determine, the resistance ratio of for example, the first resistance R 1 before the first resistance R 0 before titanium pump A and second titanium pump is 10, the amplification coefficient of the first operational amplifier U0 in the sample circuit after corresponding titanium pump A be the first operational amplifier U1 of the sample circuit after titanium pump B amplification coefficient 1/10th.
The driving circuit that the various embodiments described above provide the more in the past power supply mode of titanium pump has been saved very large space, a titanium pump power supply is in the past just a 3U cabinet, 1U=1.75 inch=4.445 centimetres, 3U=5.25 inch=13.335 centimetre, just can control three titanium pumps with a 2U cabinet now.As shown in Figure 3, in this 2U cabinet 107, be provided with the drive plate 108 of many titanium pump parallel driver circuits, this drive plate 108 be electrically connected titanium pump supply voltage control signal end 101, titanium pump power input 102, with the interface end 103 of host computer interface, the High voltage output interface end 104,105,106 being connected by BNC, this titanium pump supply voltage control signal end 101, titanium pump power input 102, be all arranged on cabinet 107 with interface end 103, the High voltage output interface end 104,105,106 of host computer interface.
In addition, in the above-described embodiments, also can not carry out the sampling of electric current and electric signal and by this sampled signal, titanium pump power supply be carried out to pressure regulation this driving circuit.Therefore this driving circuit only can only include: power access end and at least two titanium pump power supply access points, described titanium pump power supply access point connects titanium pump supply terminals, between described power access end and each titanium pump power supply access point, is serially connected with between the first resistance or described titanium pump power supply access point and titanium pump supply terminals and is serially connected with the first resistance.This first resistance is the resistance that resistance is larger, the first larger resistance of output terminal serial connection resistance of titanium pump power supply, for example this resistance is 3M ohm, the electric current maximum of titanium pump power supply output just only has 1.7mA so, output power just reduces 5000V*1.7mA=5.5W greatly like this, and this titanium pump power supply can realize to 18 titanium pump power supplies.While just startup, need vacuum tightness higher, increase by 3~5 hours start-up time.This can not affect the startup operation of whole system.In addition, in a further embodiment, described titanium pump power supply access point also connects earth terminal by the second electric capacity.So that the voltage of titanium pump power supply is carried out to dividing potential drop and current limliting.
These are only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.

Claims (8)

1. the parallel driver circuit of many titanium pumps, it is characterized in that, comprise: power access end and at least two titanium pump power supply access points, described titanium pump power supply access point connects titanium pump supply terminals, between described power access end and each titanium pump power supply access point, is serially connected with between the first resistance or described titanium pump power supply access point and titanium pump supply terminals and is serially connected with the first resistance; Described titanium pump power supply access point also connects earth terminal by the second electric capacity; Described each titanium pump power supply access point connects the positive voltage input end of the first operational amplifier by bleeder circuit; The negative voltage incoming end of described the first operational amplifier connects the output terminal of described the first operational amplifier by the second resistance, the output terminal of described the first operational amplifier is the first sampled point for the sampling of electric current display.
2. the parallel driver circuit of many titanium pumps as claimed in claim 1, it is characterized in that, the positive voltage input end of described the first operational amplifier or the output terminal of described the first operational amplifier are the second sampled point for described titanium pump voltage signal sampling, each the second sampled point for described titanium pump voltage signal sampling is connected to the negative voltage input end of the second operational amplifier by diode, the negative voltage input end of described the second operational amplifier is reference voltage incoming end, the output terminal output titanium pump voltage regulation feedback signal of described the second operational amplifier.
3. the parallel driver circuit of many titanium pumps as claimed in claim 2, is characterized in that, described each titanium pump power supply access point connects the positive voltage input end of the first operational amplifier by bleeder circuit;
Specifically comprise:
Between described titanium pump power supply access point and the positive voltage incoming end of described the first operational amplifier, be serially connected with the 3rd resistance, the positive voltage incoming end of described the first operational amplifier also connects earth terminal by the 4th resistance.
4. the parallel driver circuit of many titanium pumps as claimed in claim 3, is characterized in that, the negative voltage incoming end of described the first operational amplifier also connects earth terminal by the 5th resistance.
5. the parallel driver circuit of many titanium pumps as claimed in claim 4, is characterized in that, the output terminal of described the first operational amplifier is also connected earth terminal by the 6th resistance with the first electric capacity respectively.
6. the parallel driver circuit of many titanium pumps as claimed in claim 4, is characterized in that, is also connected with the 7th resistance between described the 5th resistance and described earth terminal.
7. the parallel driver circuit of many titanium pumps as claimed in claim 3, it is characterized in that, the resistance of described the first resistance is 1M-10M ohm, and the resistance of described the second resistance is 10-1M ohm, and the resistance value ratio of described the 3rd resistance and described the 4th resistance is (100-10000): 1.
8. the parallel driver circuit of many titanium pumps as claimed in claim 6, is characterized in that, described the 7th resistance is potentiometer.
CN201110136628.0A 2011-05-25 2011-05-25 Parallel driving circuit for plurality of titanium pumps Expired - Fee Related CN102541135B (en)

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DE10120789A1 (en) * 2001-04-27 2002-11-21 Infineon Technologies Ag Method for activating an electrical switching circuit operated with reduced power or switched off uses a switching device to connect the switching circuit with an electrical power supply
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