CN102541110A - Device and method for testing temperature control based on temperature derating curve of modular power supply - Google Patents

Device and method for testing temperature control based on temperature derating curve of modular power supply Download PDF

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CN102541110A
CN102541110A CN2010106057838A CN201010605783A CN102541110A CN 102541110 A CN102541110 A CN 102541110A CN 2010106057838 A CN2010106057838 A CN 2010106057838A CN 201010605783 A CN201010605783 A CN 201010605783A CN 102541110 A CN102541110 A CN 102541110A
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temperature
substrate
power source
modular power
control
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CN102541110B (en
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张啸宇
秦方庆
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ZTE Corp
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ZTE Corp
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Abstract

The invention provides a device and a method for testing temperature control based on a temperature derating curve of a modular power supply. The device comprises a temperature cabinet, an environmental temperature controller and a substrate temperature controller, wherein the temperature cabinet is used for holding a modular power supply and carrying out heat preservation on the modular power supply; the environmental temperature controller is used for controlling the environmental temperature of the modular power supply, controlling the temperature cabinet to carry out cooling when the environmental temperature is higher than a preset temperature, and controlling the temperature cabinet to carry out temperature rise when the environmental temperature is lower than the preset temperature, wherein the environmental temperature refers to the internal temperature of the temperature cabinet; and the substrate temperature controller is used for controlling the substrate temperature of the temperature cabinet, controlling a substrate to carry out temperature rise when the substrate temperature is lower than a preset temperature and controlling the substrate to carry out cooling when the substrate temperature is higher than the preset temperature. By using the method and device disclosed by the invention, a test environment for naturally cooling a modular power supply can be precisely simulated.

Description

The method of modular power source temperature derate curve test attemperating unit and test temperature control thereof
Technical field
The present invention relates to the communications field, in particular to the method for modular power source temperature derate curve test attemperating unit and test temperature control thereof.
Background technology
Along with environment for use becomes increasingly complex, the user proposes increasingly high requirement to the test of modular power source.Particularly at communication field; Because the restriction in environment and space; The power density of equipment integral is increasing, and the applied environment temperature range is more and more wider, and the stability and reliability of system works is increasingly high; Requirement for the adaptive faculty of the environment of modular power source improves constantly, and requires also increasingly high to the test accuracy of modular power source.Usually; Adopt the derate curve of modular power source that the test accuracy requirement of modular power source is described; Wherein, the derate curve of modular power source is meant through control module power environment and the electric stress that born, tests out the limit of the electric stress that bears under the modular power source varying environment; For the adaptive faculty of its environment provides an objective evaluation, improve its reliability of applying and stability.
In modular power source,, can be divided into air blast cooling and natural cooling through the occasion of radiating mode and application.
Derate test to the natural cooling modular power source is the difficult point in the test always; The main at present mode of the temperature that controls environment that adopts is carried out the test of derate curve; Only consider environment temperature, but other factors can influence the cooling procedure of modular power source equally in test process, according to this pattern; Can't simulate natural cooling modular power source test environment more accurately, test out the actual conditions that the derate curve also can't embody the testing power supply module.
To simulating natural cooling modular power source test environment more accurately in the correlation technique, test out the problem that the derate curve also can't embody the testing power supply module, effective solution is not proposed at present as yet.
Summary of the invention
The present invention aims to provide the method for a kind of modular power source temperature derate curve test attemperating unit and test temperature control thereof; Can't simulate natural cooling modular power source test environment more accurately to solve in the correlation technique, test out the problem that the derate curve also can't embody the testing power supply module.
According to an aspect of the present invention, a kind of modular power source temperature derate curve test attemperating unit is provided, comprising: the temperature casing is used to lay modular power source, and said modular power source is incubated; The environment temperature controller; Be used to control the environment temperature of said modular power source, when said environment temperature is higher than preset temperature, control said temperature casing cooling; When said environment temperature is lower than said preset temperature; Control said temperature casing and heat up, wherein, said environment temperature refers to the internal temperature of said temperature casing; The substrate temperature controller is used to control the substrate temperature of said modular power source, and when said substrate temperature was lower than said preset temperature, control basal plate heated up, and when said substrate temperature is higher than said preset temperature, controls said substrate cooling.
More excellent, said temperature casing comprises: heat insulating box is used to prevent that the said modular power source and the external world from carrying out heat conduction; The modular power source stationary installation is used for fixing said modular power source; The air channel utilizes the said modular power source of control top temperature equalization.
More excellent, said environment temperature controller comprises: the environment temperature sampling module, be used for said environment temperature is sampled, and confirm according to sampled value whether said environment temperature is higher than said preset temperature; The environment control module when being used for said environment temperature and being higher than said preset temperature, is controlled said temperature casing cooling; The wind speed control module is used to control the wind speed in said air channel, and said wind speed refers to the circulation of air speed in the said air channel; The air door control module is used to control said air channel and opens or close.
More excellent, the wind speed that said wind speed control module also is used to control said modular power source top is not more than 0.3m/s.
More excellent, said wind speed control module also is used for said air channel is arranged at said modular power source two ends.
More excellent, said environment temperature controller comprises: the substrate temperature sampling module, be used for said substrate temperature is sampled, and confirm according to sampled value whether said substrate temperature is higher than said preset temperature; The substrate heating tube is used for when said substrate temperature is lower than said preset temperature, increases heating power and heats up; The substrate cooling fan is used for when said substrate temperature is higher than said preset temperature, introduces cold air entering substrate below and lowers the temperature.
According to an aspect of the present invention, provide and used the method that above-mentioned modular power source temperature derate curve test attemperating unit is tested temperature control, having comprised: lay modular power source at the temperature casing, and said modular power source is incubated; Utilize the environment temperature controller to control the environment temperature of said modular power source; When said environment temperature is higher than preset temperature; Control said temperature casing cooling, when said environment temperature is lower than said preset temperature, controls said temperature casing and heat up; Wherein, said environment temperature refers to the internal temperature of said temperature casing; Utilize the substrate temperature controller to control the substrate temperature of said modular power source, when said substrate temperature was lower than said preset temperature, control basal plate heated up, and when said substrate temperature is higher than said preset temperature, controlled said substrate cooling.
More excellent, saidly lay modular power source, and said modular power source is incubated at the temperature casing, comprising: utilize the heat insulating box of said temperature casing to prevent that the said modular power source and the external world from carrying out heat conduction; Utilize the fixing said modular power source of modular power source stationary installation of said temperature casing; Utilize the air channel of said temperature casing to control said modular power source top temperature equalization.
More excellent; The said environment temperature of utilizing the environment temperature controller to control said modular power source when said environment temperature is higher than preset temperature, is controlled said temperature casing cooling; When said environment temperature is lower than preset temperature; Control said temperature casing and heat up, comprising: utilize the environment temperature sampling module of said environment temperature controller that said environment temperature is sampled, confirm according to sampled value whether said environment temperature is higher than said preset temperature; When said environment temperature is higher than said preset temperature, utilize the environment control module of said environment temperature controller to control said temperature casing cooling; Utilize the wind speed control module of said environment temperature controller to control the wind speed in said air channel, said wind speed refers to the circulation of air speed in the said air channel; Utilizing the air door control module of said environment temperature controller to control said air channel opens or closes.
More excellent, the wind speed of said modular power source top is not more than 0.3m/s.
More excellent, said air channel is arranged at said modular power source two ends.
More excellent; The said substrate temperature that utilizes the substrate temperature controller to control said modular power source, when said substrate temperature was lower than said preset temperature, control basal plate heated up; When said substrate temperature is higher than said preset temperature; Control said substrate cooling, comprising: utilize the substrate temperature sampling module of said substrate temperature controller that said substrate temperature is sampled, confirm according to sampled value whether said substrate temperature is higher than said preset temperature; When said substrate temperature is lower than said preset temperature, utilize the said substrate heating tube increase heating power of said substrate temperature controller to heat up; When said substrate temperature is higher than said preset temperature, utilize the said substrate cooling fan introducing cold air entering substrate below of said substrate temperature controller to lower the temperature.
In embodiments of the present invention; Be provided with environment temperature controller and substrate temperature controller simultaneously in the modular power source temperature derate curve test attemperating unit; Can control environment temperature and substrate temperature simultaneously, when considering environment temperature, also consider the influence of substrate temperature, can simulate natural cooling modular power source test environment more accurately modular power source temperature derate curve; Improve nature substrate refrigerating module power supply acclimation to heat ability; Guarantee the stability and the reliability of power module work, generate the higher derate curve of reliability and stability, for the application selecting type of such power supply provides objective foundation.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present invention, constitutes the application's a part, and illustrative examples of the present invention and explanation thereof are used to explain the present invention, do not constitute improper qualification of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation according to the modular power source temperature derate curve test attemperating unit of the embodiment of the invention;
Fig. 2 is the structural representation according to the temperature casing of the embodiment of the invention;
Fig. 3 is the structural representation according to the environment temperature controller of the embodiment of the invention;
Fig. 4 is the structural representation according to the substrate temperature controller of the embodiment of the invention;
Fig. 5 tests the processing flow chart of the method for temperature control according to the above-mentioned modular power source temperature of the application of embodiment of the invention derate curve test attemperating unit;
Fig. 6 lays modular power source at the temperature casing, and the processing flow chart that modular power source is incubated according to the embodiment of the invention;
Fig. 7 is the environment temperature of utilizing environment temperature controller control module power supply according to the embodiment of the invention, when environment temperature is higher than preset temperature, and the processing flow chart of control temperature casing cooling;
Fig. 8 is the substrate temperature that utilizes substrate temperature controller control module power supply according to the embodiment of the invention, when substrate temperature is lower than preset temperature, and the control basal plate cooling, when substrate temperature is higher than preset temperature, the processing flow chart that control basal plate heats up;
Fig. 9 is first kind of concrete structure synoptic diagram according to the modular power source temperature derate curve test attemperating unit of the embodiment of the invention;
Figure 10 is second kind of concrete structure synoptic diagram according to the modular power source temperature derate curve test attemperating unit of the embodiment of the invention.
Embodiment
Below with reference to accompanying drawing and combine embodiment, specify the present invention.
Hereinafter will and combine embodiment to specify the present invention with reference to accompanying drawing.Need to prove that under the situation of not conflicting, embodiment and the characteristic among the embodiment among the application can make up each other.
Mention in the correlation technique; Derate test to the natural cooling modular power source is the difficult point in the test always, and the main at present mode of the temperature that controls environment that adopts is carried out the test of derate curve, only considers environment temperature; But other factors can influence the cooling procedure of modular power source equally in test process; According to this pattern, can't simulate natural cooling modular power source test environment more accurately, test out the actual conditions that the derate curve also can't embody the testing power supply module.
Usually, the radiating mode of natural cooling modular power source has two approach, and the first, be pathway with the substrate that carries, conduct heat to the purpose that realizes heat radiation on the heat radiator; The second, heat is dispersed into the purpose that realizes heat radiation in the air through thermal-radiating form.Based on this principle; The embodiment of the invention provides a kind of modular power source temperature derate curve test attemperating unit, can't simulate natural cooling modular power source test environment more accurately in order to solve in the correlation technique, tests out the problem that the derate curve also can't embody the testing power supply module; Simultaneously control basal plate temperature and environment temperature when carrying out the derate curved measurement; To realize the simulation of environment, its structure is as shown in Figure 1, comprising:
Temperature casing 101 is used to lay modular power source, and modular power source is incubated;
Environment temperature controller 102 is used for the environment temperature of control module power supply, when environment temperature is higher than preset temperature; The cooling of control temperature casing, when environment temperature was lower than preset temperature, control temperature casing heated up; Wherein, environment temperature refers to the internal temperature of temperature casing;
Substrate temperature controller 103 is used for the substrate temperature of control module power supply, and when substrate temperature was lower than preset temperature, control basal plate heated up, when substrate temperature is higher than preset temperature, and the control basal plate cooling.
In embodiments of the present invention; Be provided with environment temperature controller and substrate temperature controller simultaneously in the modular power source temperature derate curve test attemperating unit; Can control environment temperature and substrate temperature simultaneously, when considering environment temperature, also consider the influence of substrate temperature, can simulate natural cooling modular power source test environment more accurately modular power source temperature derate curve; Improve nature substrate refrigerating module power supply acclimation to heat ability; Guarantee the stability and the reliability of power module work, generate the higher derate curve of reliability and stability, for the application selecting type of such power supply provides objective foundation.
During enforcement, for guaranteeing to lay and the realization of heat insulation function, as shown in Figure 2, temperature casing 101 can comprise:
Heat insulating box 201 is used to prevent that the modular power source and the external world from carrying out heat conduction;
Modular power source stationary installation 202 is used for fixing modular power source;
Air channel 203 is used for control module power supply top temperature equalization.
Concrete, air channel 203 can utilize temperature casing air channel, the temperature equalization of going bail for, and do not directly act on the module top, guarantee its windless condition.
Based on temperature casing shown in Figure 2, as shown in Figure 3, environment temperature controller 102 can comprise:
Environment temperature sampling module 301 is used for environment temperature is sampled, and confirms according to sampled value whether environment temperature is higher than preset temperature;
Environment control module 302, when being used for environment temperature and being higher than preset temperature, the cooling of control temperature casing;
Wind speed control module 303 is used to control the wind speed in said air channel, and wind speed refers to the circulation of air speed in the air channel;
Air door control module 304 is used to control the air channel and opens or close.
During enforcement, environment temperature sampling module 301 can utilize the incubator temperature-sensing probe to realize.
In one embodiment, more excellent, for guaranteeing the natural cooling requirement, wind speed control module 303 can also be used for the air channel is arranged at the modular power source two ends, to avoid modular power source top wind speed greater than 0.3m/s.
During enforcement, as shown in Figure 4 based on temperature casing shown in Figure 2, substrate temperature controller 103 can comprise:
Substrate temperature sampling module 401 is used for substrate temperature is sampled, and confirms according to sampled value whether substrate temperature is higher than preset temperature;
Substrate heating tube 402 is used for when substrate temperature is lower than preset temperature, increases heating power and heats up;
Substrate cooling fan 403 is used for when substrate temperature is higher than preset temperature, introduces cold air entering substrate below and lowers the temperature.
During enforcement, substrate temperature sampling module 401 can utilize the heating plate temperature-sensing probe to realize.
Based on same inventive concept, the embodiment of the invention provides a kind of method that above-mentioned modular power source temperature derate curve test attemperating unit is tested temperature control of using, and its treatment scheme comprises referring to Fig. 5:
Step 502, lay modular power source, and modular power source is incubated at the temperature casing;
Step 504, utilize the environment temperature of environment temperature controller control module power supply, when environment temperature is higher than preset temperature, the cooling of control temperature casing; When environment temperature is lower than preset temperature; Control temperature casing heats up, and wherein, environment temperature refers to the internal temperature of temperature casing;
Step 506, utilize the substrate temperature of substrate temperature controller control module power supply, when substrate temperature was lower than preset temperature, control basal plate heated up, when substrate temperature is higher than preset temperature, and the control basal plate cooling.
Wherein, the execution sequence of step 504 and step 506 is dissimilar, can be successively, also can be simultaneously, can also preferential execution in step 506.
Referring to device shown in Figure 2, lay modular power source at the temperature casing, and the treatment scheme that modular power source is incubated is as shown in Figure 6, comprising:
Step 602, utilize the heat insulating box of temperature casing to prevent that the modular power source and the external world from carrying out heat conduction;
Step 604, utilize the modular power source stationary installation stuck-module power supply of temperature casing;
Step 606, utilize the air channel control module power supply top temperature equalization of temperature casing.
Referring to device shown in Figure 3, utilize the environment temperature of environment temperature controller control module power supply, when environment temperature was higher than preset temperature, the treatment scheme of control temperature casing cooling was as shown in Figure 7, comprising:
Step 702, utilize the environment temperature sampling module of environment temperature controller that environment temperature is sampled, confirm according to sampled value whether environment temperature is higher than preset temperature;
Step 704, when environment temperature is higher than preset temperature, utilize the environment control module control temperature casing cooling of environment temperature controller;
Step 706, utilize the wind speed in the wind speed control module control air channel of environment temperature controller, wind speed refers to the circulation of air speed in the air channel;
Step 708, utilize the air door control module control air channel of environment temperature controller to open or close.
Step 706 is when implementing, and the wind speed in air channel is not more than 0.3m/s.For the wind speed that guarantees the modular power source top less than 0.3m/s, can the air channel be arranged at the modular power source two ends, rather than be arranged at the modular power source top.
Referring to device shown in Figure 4, utilize the substrate temperature of substrate temperature controller control module power supply, when substrate temperature is lower than preset temperature, the control basal plate cooling, when substrate temperature was higher than preset temperature, control basal plate heated up, and its treatment scheme is as shown in Figure 8, comprising:
Step 802, utilize the substrate temperature sampling module of substrate temperature controller that substrate temperature is sampled, confirm according to sampled value whether substrate temperature is higher than preset temperature;
Step 804, when substrate temperature is lower than preset temperature, utilize the substrate heating tube of substrate temperature controller to increase heating power and heat up;
Step 806, when substrate temperature is higher than preset temperature, utilize the substrate cooling fan of substrate temperature controller to introduce cold air and get into the substrate below and lower the temperature.
Describe with a specific embodiment, the concrete structure of the modular power source temperature derate curve test attemperating unit that relates in this example is as shown in Figure 9, comprising at present:
Modular power source to be tested is fixed on the heating plate 904; The modular power source substrate closely is connected with heating plate 904, and its environment temperature Control work process is following, temperature casing temperature-sensing probe 903; Sampled point as temperature casing internal temperature; Its material is that thermopair can be fixed in power supply to be tested top, temperature is uploaded to the environment temperature controller in real time, temperature casing heating tube 901,902 work of temperature casing blower fan when temperature is lower than preset temperature with the precision of ± 0.1C; When temperature is higher than preset temperature is to start damper control 908 and reduce temperature casing heating tube 901 power, realizes cooling; For guaranteeing the natural cooling requirement, modular power source promptly to be tested top wind speed is less than 0.3m/s simultaneously, and it is modular power source to be tested two ends that the air channel is arranged at power supply to be tested, and the air channel does not directly act on modular power source; The substrate temperature controller course of work is following, and heating plate temperature-sensing probe 907 is installed in the heating plate center as the substrate temperature sampled point; Precision with ± 0.1C is uploaded to the substrate temperature controller in real time with temperature; Heating plate heat radiator 905 is continuing heat radiation, and heating plate 904,906 work of heating plate cooling fan reduce heating plate 904 power when temperature is higher than preset temperature when temperature is lower than preset temperature; Increase heating plate cooling fan 906 rotating speeds, realize cooling.
Certainly, the concrete structure of modular power source temperature derate curve test attemperating unit is not limited to shown in Figure 9, and all right structure shown in figure 10 is with temperature casing heating part laying temperature tank ends.The curve representation circulation of air direction of band arrow, i.e. wind direction among Fig. 9 and Figure 10.
From above description, can find out that the present invention has realized following technique effect:
In embodiments of the present invention; Be provided with environment temperature controller and substrate temperature controller simultaneously in the modular power source temperature derate curve test attemperating unit; Can control environment temperature and substrate temperature simultaneously, when considering environment temperature, also consider the influence of substrate temperature, can simulate natural cooling modular power source test environment more accurately modular power source temperature derate curve; Improve nature substrate refrigerating module power supply acclimation to heat ability; Guarantee the stability and the reliability of power module work, generate the higher derate curve of reliability and stability, for the application selecting type of such power supply provides objective foundation.
Obviously; It is apparent to those skilled in the art that above-mentioned each module of the present invention or each step can realize that they can concentrate on the single calculation element with the general calculation device; Perhaps be distributed on the network that a plurality of calculation element forms; Alternatively, they can be realized with the executable program code of calculation element, carried out by calculation element thereby can they be stored in the memory storage; Perhaps they are made into each integrated circuit modules respectively, perhaps a plurality of modules in them or step are made into the single integrated circuit module and realize.Like this, the present invention is not restricted to any specific hardware and software combination.
The above is merely the preferred embodiments of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (12)

1. a modular power source temperature derate curve test attemperating unit is characterized in that, comprising:
The temperature casing is used to lay modular power source, and said modular power source is incubated;
The environment temperature controller; Be used to control the environment temperature of said modular power source, when said environment temperature is higher than preset temperature, control said temperature casing cooling; When said environment temperature is lower than said preset temperature; Control said temperature casing and heat up, wherein, said environment temperature refers to the internal temperature of said temperature casing;
The substrate temperature controller is used to control the substrate temperature of said modular power source, and when said substrate temperature was lower than said preset temperature, control basal plate heated up, and when said substrate temperature is higher than said preset temperature, controls said substrate cooling.
2. device according to claim 1 is characterized in that, said temperature casing comprises:
Heat insulating box is used to prevent that the said modular power source and the external world from carrying out heat conduction;
The modular power source stationary installation is used for fixing said modular power source;
The air channel utilizes the said modular power source of control top temperature equalization.
3. device according to claim 2 is characterized in that, said environment temperature controller comprises:
The environment temperature sampling module is used for said environment temperature is sampled, and confirms according to sampled value whether said environment temperature is higher than said preset temperature;
The environment control module when being used for said environment temperature and being higher than said preset temperature, is controlled said temperature casing cooling;
The wind speed control module is used to control the wind speed in said air channel, and said wind speed refers to the circulation of air speed in the said air channel;
The air door control module is used to control said air channel and opens or close.
4. device according to claim 3 is characterized in that, the wind speed that said wind speed control module also is used to control said modular power source top is not more than 0.3m/s.
5. device according to claim 4 is characterized in that, said wind speed control module also is used for said air channel is arranged at said modular power source two ends.
6. according to each described device of claim 2 to 5, it is characterized in that said environment temperature controller comprises:
The substrate temperature sampling module is used for said substrate temperature is sampled, and confirms according to sampled value whether said substrate temperature is higher than said preset temperature;
The substrate heating tube is used for when said substrate temperature is lower than said preset temperature, increases heating power and heats up;
The substrate cooling fan is used for when said substrate temperature is higher than said preset temperature, introduces cold air entering substrate below and lowers the temperature.
7. use the method that modular power source temperature derate curve test attemperating unit as claimed in claim 1 is tested temperature control for one kind, it is characterized in that, comprising:
Lay modular power source at the temperature casing, and said modular power source is incubated;
Utilize the environment temperature controller to control the environment temperature of said modular power source; When said environment temperature is higher than preset temperature; Control said temperature casing cooling, when said environment temperature is lower than said preset temperature, controls said temperature casing and heat up; Wherein, said environment temperature refers to the internal temperature of said temperature casing;
Utilize the substrate temperature controller to control the substrate temperature of said modular power source, when said substrate temperature was lower than said preset temperature, control basal plate heated up, and when said substrate temperature is higher than said preset temperature, controlled said substrate cooling.
8. method according to claim 7 is characterized in that, saidly lays modular power source at the temperature casing, and said modular power source is incubated, and comprising:
Utilize the heat insulating box of said temperature casing to prevent that the said modular power source and the external world from carrying out heat conduction;
Utilize the fixing said modular power source of modular power source stationary installation of said temperature casing;
Utilize the air channel of said temperature casing to control said modular power source top temperature equalization.
9. method according to claim 8; It is characterized in that the said environment temperature of utilizing the environment temperature controller to control said modular power source is when said environment temperature is higher than preset temperature; Control said temperature casing cooling; When said environment temperature is lower than preset temperature, control said temperature casing and heat up, comprising:
Utilize the environment temperature sampling module of said environment temperature controller that said environment temperature is sampled, confirm according to sampled value whether said environment temperature is higher than said preset temperature;
When said environment temperature is higher than said preset temperature, utilize the environment control module of said environment temperature controller to control said temperature casing cooling;
Utilize the wind speed control module of said environment temperature controller to control the wind speed in said air channel, said wind speed refers to the circulation of air speed in the said air channel;
Utilizing the air door control module of said environment temperature controller to control said air channel opens or closes.
10. method according to claim 9 is characterized in that, the wind speed of said modular power source top is not more than 0.3m/s.
11. method according to claim 10 is characterized in that, said air channel is arranged at said modular power source two ends.
12. according to Claim 8 to 11 each described methods; It is characterized in that the said substrate temperature that utilizes the substrate temperature controller to control said modular power source is when said substrate temperature is lower than said preset temperature; Control basal plate heats up; When said substrate temperature is higher than said preset temperature, control said substrate cooling, comprising:
Utilize the substrate temperature sampling module of said substrate temperature controller that said substrate temperature is sampled, confirm according to sampled value whether said substrate temperature is higher than said preset temperature;
When said substrate temperature is lower than said preset temperature, utilize the said substrate heating tube increase heating power of said substrate temperature controller to heat up;
When said substrate temperature is higher than said preset temperature, utilize the said substrate cooling fan introducing cold air entering substrate below of said substrate temperature controller to lower the temperature.
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CN112649752A (en) * 2020-11-25 2021-04-13 深圳市大能创智半导体有限公司 Derating curve measuring method and system

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