CN102540332B - Light polarization splitter based on lithium-niobate photon rays - Google Patents
Light polarization splitter based on lithium-niobate photon rays Download PDFInfo
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- CN102540332B CN102540332B CN 201210023243 CN201210023243A CN102540332B CN 102540332 B CN102540332 B CN 102540332B CN 201210023243 CN201210023243 CN 201210023243 CN 201210023243 A CN201210023243 A CN 201210023243A CN 102540332 B CN102540332 B CN 102540332B
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Abstract
The invention discloses a polarization splitter based on lithium-niobate photon rays, which comprises a lithium-niobate substrate, a silicon-dioxide coating layer and two parallel lithium-niobate light waveguides, wherein the heights of the two parallel lithium-niobate light waveguides are both 0.73mum, and the widths of the tops of the waveguides are both 0.5mum; and the shaft distance Sc of the two parallel light waveguides forming the polarization splitter is equal to 0.74mum, and the coupling length Lc is equal to 49.28mum. The waveguide parameters suitable for the polarization splitter are as follows: the working waveguide is 1.55mum; the refractive index nLN of a liquid nitrogen (LN) waveguide is equal to 2.2; the refractive index nSiO2 of an SiO2 area is equal to 1.44; and the polarization splitter based on the lithium-niobate photon rays can be used for a light path with high integration degree based on the lithium-niobate photon rays. The distribution graphs of the electric field and the magnetic field of the polarization splitter are simulated by utilizing OptiFDTD business software. The light orientation coupler not only has the advantage of high transmissivity on the working wavelength but also has a supercompact structure.
Description
Technical field
The invention belongs to one of critical component of photonics technical field, specifically, is a kind of ultra-compact auroral poles splitter based on lithium niobate photon line (being abbreviated as LN).
Background technology
LN photon line (that is, lithium niobate fiber waveguide)
[1-8]Becoming the candidate of following integrated photonics, this is that to have a dimensional structure little due to it, good electrical-optical, sound-optical, and nonlinear optical properties
[9], be subject to rare earth element ion and mix and obtain the laser active material
[10], highly-efficient equipment likely especially (even also may realize in appropriate optical power value).Obviously, based on the auroral poles splitter of LN photon line be a critical component of the integrated optical circuit that consisted of by the LN photon line.Yet up to the present the data-searching of carrying out according to the applicant, there is no about the correlative study report based on the optical directional coupler of LN photon line.
Below the pertinent literature that the inventor retrieves:
【1】P.Rabiei，and?W.H.Steier，“Lithium?niobate?ridge?waveguides?and?modulators?fabricated?using?smart?guide，”Appl.Phys.Lett.Vol.86，no.16，pp.161115-161118，Apr?2005。
【2】D.Djukic，G.Cerda-Pons，R.M.Roth，R.M.Osgood，Jr.，S.Bakhru，and?H.Bakhru，”Electro-optically?tunable?second-harmonic-generation?gratings?in?ion-exfoliated?thin?films?of?periodically?poled?lithium?niobate，”Appl.Phys.Lett.Vol.90，no.17，pp.171116-171119，April?2007。
【3】A.Guarino，G.Poberaj，D.Rezzonico，R.Degl’innocenti，and?P.Günter，“Electro-optically?tunable?microring?resonators?in?lithium?niobate，”Nat.Photonics?Vol.1，no.7，pp.407-410，May?2007。
【4】F.Schrempel，T.Gischkat，H.Hartung，T.
E.B.Kley，A.Tünnermann，and?W.Wesch，“Ultrathin?membranes?in?x-cut?lithium?niobate，”Opt.Lett.Vol.34，no.9，pp.1426-1428，April?2009。
【5】T.Takaoka，M.Fujimura，and?T.Suhara，“Fabrication?of?ridge?waveguides?in?LiNbO3?thin?film?crystal?by?proton-exchange?accelerated?etching，”Electron.Lett.Vol.45，no.18，pp.940-941(2009)。
【6】G.Poberaj，M.Koechlin，F.Sulser，A.Guarino，J.Hajfler，and?P.Günter，“Ion-sliced?lithium?niobate?thin?films?for?active?photonic?devices，”Opt.Mater.Vol.31，no.7，pp.1054-1058(2009)。
【7】G.W.Burr，S.Diziain，and?M.-P.Bernal，“Theoretical?study?of?lithium?niobate?slab?waveguides?for?integrated?optics?applications，”Opt.Mater.Vol.31，no.10，pp.1492-1497(2009)。
【8】H.Hu，R.Ricken，and?W.Sohler，“Lithium?niobate?photonic?wires，”Opt.Express，Vol.17，no.26，pp.2426-242681，December?2009。
【9】R.S.Weis，and?T.K.Gaylord，“Lithium?niobate：summary?of?physical?properties?and?crystal?structure，”Appl.Phys.，A?Mater.Sci.Process.Vol.37，no.4，pp.191-203，March?1985。
【10】W.Sohler，B.Das，D.Dey，S.Reza，H.Suche，and?R.Ricken，“Erbium-doped?lithium?niobate?waveguides?lasers，”in?2005?IEICE?Trans.Electron.E88(C)，pp.990-997。
【11】H.Hu，R.Ricken，and?W.Sohler，Large?area，crystal-bonded?LiNbO3?thin?films?and?ridge?waveguides?of?high?refractive?index?contrast，Topical?Meeting“Photorefractive?Materials，Effects，and?Devices-Control?of?Light?and?Matter”(PR?09)，Bad?Honnef，Germany?2009。On?the?poster，presented?to?PR?09，a?photograph?of?a?3?inch?LNOI?wafer?was?shown.A?manuscript?to?describe?the?LNOI-technology?developed?is?in?preparation。
Summary of the invention
The object of the invention is to, a kind of auroral poles splitter based on the LN photon line is provided, this polarization splitter can be used to the high integration light path based on the lithium niobate photon line, with adapt to contemporary growing optical communication and sensing technology in the urgent need to.
In order to realize above-mentioned task.The present invention takes following technical solution to be achieved:
A kind of auroral poles splitter based on the LN photon line is characterized in that, by at the bottom of lithium niobate base, the silicon dioxide coating forms with two parallel lithium niobate fiber waveguides, wherein, wherein, the height of two parallel lithium niobate fiber waveguides is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Consist of the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.
The preparation method of above-mentioned auroral poles splitter based on the LN photon line is characterized in that at first the method makes the lithium niobate sample (being abbreviated as LNOI) based on insulator, and LNOI comprises the silicon dioxide (SiO that directly is attached on 1.3 micron thickness
2) the monocrystalline LN layer (being the LN film) of 730 nanometer thickness on layer, silicon dioxide layer is to cut Z face at the bottom of lithium niobate base through the Z that is coated in congruence with the plasma enhanced chemical vapor deposition method, and namely LN film and thickness are that the LN substrate of 1um has congruent crystal orientation; After processing with CMP (Chemical Mechanical Polishing) process (CMP), the surface of LN film reaches the rms roughness of 0.5 nanometer; Then the wide photoresistance band of 1.7 μ m are thick and 0.5 μ m is used as etch mask.Photoresistance through the annealing of 1 hour, is followed, in Oxford Plasmalab System100 under 120 ℃, being coupled inductively with the 100W radio-frequency power becomes plasma, and the 70W radio-frequency power is coupled to sample surface, mills etching through 60 minutes argons, the end face polishing, and get final product.
Optical directional coupler based on the LN photon line of the present invention, the technique effect that brings is:
1, (be fit to transmission standard-TE (qTE) and standard-TM (qTM) single mode) under the condition of above-mentioned given waveguide dimensions parameter and optical parametric, in the situation that operation wavelength λ=1.55 μ m, for the input light wave of standard-TE (qTE) single mode, can obtain 97.31% transmissivity at shorter straight wave guide output terminal; For the input light wave of standard-TM (qTM) single mode, can obtain 97.25% transmissivity at long straight wave guide output terminal.Contain the input light wave of standard-TE (qTE) and standard-TM (qTM) single mode when simultaneously, through this auroral poles splitter, can obtain standard-TE (qTE) ripple at shorter straight wave guide output terminal, its transmissivity is 97.31%, simultaneously can obtain standard-TM (qTM) ripple at longer straight wave guide output terminal, its transmissivity is 97.25%.
2, this auroral poles splitter is of compact construction.
Through applicant's emulation and analytical proof, should can be used to high integration light path based on the lithium niobate photon line based on auroral poles splitter of LN photon line, with adapt to growing optical communication technique and optical sensing in the urgent need to.
Description of drawings
Fig. 1-1st, the input end view in transverse section based on LN photon line auroral poles splitter of the present invention;
Fig. 1-2 is the output terminal view in transverse section based on LN photon line auroral poles splitter corresponding with Fig. 1-1;
Fig. 1-3rd, the auroral poles splitter vertical view corresponding with Fig. 1-1 and Fig. 1-2;
Fig. 2 is under above-mentioned intended size parameter and optical parametric, when input standard-TE (qTE) single mode light wave, the Distribution of Magnetic Field figure (power input: 0.7178W, output power: 0.6985W, the percent of pass: 97.31%) that utilize business software OptiFDTD to obtain;
Fig. 3 is under above-mentioned intended size parameter and optical parametric, when input standard-TM (qTM) single mode light wave, the distribution map of the electric field (power input: 0.727W, output power: 0.707W, the percent of pass: 97.25%) that utilize business software OptiFDTD to obtain;
Fig. 4-1 (a, b) and Fig. 4-2 (a, b) be the manufacture craft schematic diagram, wherein, Fig. 4-1a is based on the input end of auroral poles splitter of the lithium niobate sample (LNOI) of insulator, and Fig. 4-2a is based on the output terminal of auroral poles splitter of the lithium niobate sample (LNOI) of insulator; And Fig. 4-1b, Fig. 4-2b and 4-3 represent final sample.
The present invention is described in further detail below in conjunction with drawings and Examples.
Embodiment
1, simulation result
The auroral poles splitter structure based on the LN photon line that the present embodiment provides, as shown in Figure 1, it by lithium niobate base at the bottom of, the lithium niobate waveguide parallel with two of silicon dioxide coating form.Article two, the height of parallel lithium niobate fiber waveguide is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Consist of the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.
The lithium niobate substrate thickness is 1 μ m, and the silicon dioxide coating thickness is 1.3 μ m.
The waveguide parameter that is suitable for this auroral poles splitter is: the refractive index n of LN waveguide
LN=2.2; SiO
2The refractive index n in zone
SiO2=1.44; Height h=0.73 μ m, the top width w=0.5 μ m of waveguide so select to guarantee to realize single mode transport.Consist of the distance between axles S of two parallel optical waveguides (being photon line) of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.Operation wavelength λ=1.55 μ m, SiO
2The bottom surface of layer is connected with the Z-face that Z-cuts the LN substrate, LN waveguide (being the LN photon line) and SiO
2Layer end face is connected, and LN substrate and LN photon line have the crystal orientation of omnidirectional.
Utilize business software OptiFDTD structure shown in Figure 1 to be carried out the result demonstration of emulation, this splitter that polarizes for the input light wave of standard-TE (qTE) single mode, can obtain 97.31% transmissivity at shorter straight wave guide output terminal; For the input light wave of standard-TM (qTM) single mode, can obtain 97.25% transmissivity at long straight wave guide output terminal.Contain the input light wave of standard-TE (qTE) and standard-TM (qTM) single mode when simultaneously, through this auroral poles splitter, can obtain standard-TE (qTE) ripple at shorter straight wave guide output terminal, its transmissivity is 97.31%, simultaneously can obtain standard-TM (qTM) ripple at longer straight wave guide output terminal, its transmissivity is 97.25%.Fig. 2 and Fig. 3 provide corresponding magnetic field, the distribution map of the electric field that is obtained by emulation.
2, manufacture craft
In order to make lithium niobate (LN) photon line directional coupler, must first make the lithium niobate sample LNOI (shown in Fig. 4-1-a and Fig. 4-2-a) based on insulator.This sample has comprised the silicon dioxide (SiO that directly is attached on 1.3 micron thickness
2) the monocrystalline LN layer (LN film) of 730 nanometer thickness on layer, SiO
2Layer be cut lithium niobate base through the Z that is coated in congruence with plasma enhanced chemical vapor deposition (PECVD) method at the bottom of the Z face of (thickness is 1um), namely LN film and thickness are that the LN substrate of 1um has congruent crystal orientation; The surface of LN film must be with reaching the rms roughness of 0.5 nanometer after chemically mechanical polishing (CMP) PROCESS FOR TREATMENT.
Because refractive index differs large (n
LN=2.2, n
SiO=1.44), the LNOI sample is the slab guide with very strong leaded light performance, therefore is well suited for making the lithium niobate photon line.
Photoetching technique requires: photoresistance (OIR 907-17) band 1.7 μ m are thick and that 0.5 μ m is wide is used as etch mask.In order to improve the selectivity of mask, photoresistance under 120 ℃ through the annealing of 1 hour.Then, in Oxford Plasmalab System100, being coupled inductively with the 100W radio-frequency power becomes plasma (ICP), and the 70W radio-frequency power is coupled to sample surface, sample after so processing mills etching through 60 minutes argons, and result is as shown in Fig. 4-1-b and Fig. 4-2-b.
At last, with the meticulous polishing of end face process of sample, thereby realize efficient end-fire optically-coupled.
3, conclusion
The ultra-compact structured light polarization splitter that is fit to 1.55 mum wavelengths based on the LN photon line has been proposed first, the field pattern of this auroral poles splitter that utilized business software OptiFDTD emulation, and provided manufacture craft.This auroral poles splitter has the characteristics such as the high and ultra-compact structure of transmissivity.
The present invention has been subject to grant of national natural science foundation (fund numbering: 61040064).
Claims (2)
1. auroral poles splitter based on the lithium niobate photon line, it is characterized in that, by at the bottom of lithium niobate base, the silicon dioxide coating forms with two parallel lithium niobate fiber waveguides, wherein, article two, the height of parallel lithium niobate fiber waveguide is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Consist of the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m; Its method for making is:
At first make the lithium niobate sample based on insulator, sample comprises the monocrystalline lithium niobate layer of 730 nanometer thickness on the silicon dioxide layer that directly is attached on 1.3 micron thickness, silicon dioxide layer is to cut Z face at the bottom of lithium niobate base through the Z that is coated in congruence with the plasma enhanced chemical vapor deposition method, and namely lithium niobate film and thickness are congruent crystal orientation to be arranged at the bottom of the lithium niobate base of 1 μ m; After processing with CMP (Chemical Mechanical Polishing) process, the surface of lithium niobate film reaches the rms roughness of 0.5 nanometer; Then the wide photoresistance band of 1.7 μ m are thick and 0.5 μ m is used as etch mask, photoresistance under 120 ℃ through the annealing of 1 hour, then, in Oxford Plasmalab System100, being coupled inductively with the 100W radio-frequency power becomes plasma, and the 70W radio-frequency power is coupled to sample surface, mills etching through 60 minutes argons, the end face polishing, and get final product.
2. as claimed in claim the auroral poles splitter of lithium niobate photon line, is characterized in that, described lithium niobate substrate thickness is 1 μ m, and the silicon dioxide coating thickness is 1.3 μ m.
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| CN111487793B (en) * | 2020-04-17 | 2021-04-13 | 中国科学院半导体研究所 | Z-cut LNOI electro-optical modulator capable of improving modulation efficiency and application thereof |
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| JP2000347149A (en) * | 1999-03-26 | 2000-12-15 | Ngk Insulators Ltd | Directional coupler |
| WO2001065310A1 (en) * | 2000-03-02 | 2001-09-07 | Orchid Lightwave Communications, Inc. | Integrated optical devices and methods of making such devices |
| US7062131B2 (en) * | 2003-07-03 | 2006-06-13 | Oewaves, Inc. | Optical coupling for whispering-gallery-mode resonators via waveguide gratings |
| CN2689259Y (en) * | 2004-03-30 | 2005-03-30 | 上海理工大学 | Arsenones-lithium niobate composite waveguide couplers |
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