CN102540332A - Light polarization splitter based on lithium-niobate photon rays - Google Patents
Light polarization splitter based on lithium-niobate photon rays Download PDFInfo
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- CN102540332A CN102540332A CN2012100232438A CN201210023243A CN102540332A CN 102540332 A CN102540332 A CN 102540332A CN 2012100232438 A CN2012100232438 A CN 2012100232438A CN 201210023243 A CN201210023243 A CN 201210023243A CN 102540332 A CN102540332 A CN 102540332A
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Abstract
The invention discloses a polarization splitter based on lithium-niobate photon rays, which comprises a lithium-niobate substrate, a silicon-dioxide coating layer and two parallel lithium-niobate light waveguides, wherein the heights of the two parallel lithium-niobate light waveguides are both 0.73mum, and the widths of the tops of the waveguides are both 0.5mum; and the shaft distance Sc of the two parallel light waveguides forming the polarization splitter is equal to 0.74mum, and the coupling length Lc is equal to 49.28mum. The waveguide parameters suitable for the polarization splitter are as follows: the working waveguide is 1.55mum; the refractive index nLN of a liquid nitrogen (LN) waveguide is equal to 2.2; the refractive index nSiO2 of an SiO2 area is equal to 1.44; and the polarization splitter based on the lithium-niobate photon rays can be used for a light path with high integration degree based on the lithium-niobate photon rays. The distribution graphs of the electric field and the magnetic field of the polarization splitter are simulated by utilizing OptiFDTD business software. The light orientation coupler not only has the advantage of high transmissivity on the working wavelength but also has a supercompact structure.
Description
Technical field
The invention belongs to one of critical component of photonics technical field, specifically, is a kind of ultra-compact auroral poles splitter based on lithium niobate photon line (being abbreviated as LN).
Background technology
LN photon line (that is lithium niobate fiber waveguide)
[1-8]Becoming the candidate that following integrated photon is learned, this be since it to have a dimensional structure little, good electricity-light, sound-light, reach nonlinear optical properties
[9], be subject to rare earth element ion and mix and obtain the laser active material
[10], highly-efficient equipment likely especially (even also possibly realize in appropriate optical power value).Obviously, based on the auroral poles splitter of LN photon line be a critical component of the integrated optical circuit that constitutes by the LN photon line.Yet,, up to the present, still have nothing to do in correlative study report based on the optical directional coupler of LN photon line according to the data-searching that the applicant carried out.
Below be the pertinent literature that the inventor retrieves:
【1】P.Rabiei，and?W.H.Steier，“Lithium?niobate?ridge?waveguides?and?modulators?fabricated?using?smart?guide，”Appl.Phys.Lett.Vol.86，no.16，pp.161115-161118，Apr?2005。
【2】D.Djukic，G.Cerda-Pons，R.M.Roth，R.M.Osgood，Jr.，S.Bakhru，and?H.Bakhru，”Electro-optically?tunable?second-harmonic-generation?gratings?in?ion-exfoliated?thin?films?of?periodically?poled?lithium?niobate，”Appl.Phys.Lett.Vol.90，no.17，pp.171116-171119，April?2007。
【3】A.Guarino，G.Poberaj，D.Rezzonico，R.Degl’innocenti，and?P.Günter，“Electro-optically?tunable?microring?resonators?in?lithium?niobate，”Nat.Photonics?Vol.1，no.7，pp.407-410，May?2007。
【4】F.Schrempel，T.Gischkat，H.Hartung，T.
E.B.Kley，A.Tünnermann，and?W.Wesch，“Ultrathin?membranes?in?x-cut?lithium?niobate，”Opt.Lett.Vol.34，no.9，pp.1426-1428，April?2009。
【5】T.Takaoka，M.Fujimura，and?T.Suhara，“Fabrication?of?ridge?waveguides?in?LiNbO3?thin?film?crystal?by?proton-exchange?accelerated?etching，”Electron.Lett.Vol.45，no.18，pp.940-941(2009)。
【6】G.Poberaj，M.Koechlin，F.Sulser，A.Guarino，J.Hajfler，and?P.Günter，“Ion-sliced?lithium?niobate?thin?films?for?active?photonic?devices，”Opt.Mater.Vol.31，no.7，pp.1054-1058(2009)。
【7】G.W.Burr，S.Diziain，and?M.-P.Bernal，“Theoretical?study?of?lithium?niobate?slab?waveguides?for?integrated?optics?applications，”Opt.Mater.Vol.31，no.10，pp.1492-1497(2009)。
【8】H.Hu，R.Ricken，and?W.Sohler，“Lithium?niobate?photonic?wires，”Opt.Express，Vol.17，no.26，pp.2426-242681，December?2009。
【9】R.S.Weis，and?T.K.Gaylord，“Lithium?niobate：summary?of?physical?properties?and?crystal?structure，”Appl.Phys.，A?Mater.Sci.Process.Vol.37，no.4，pp.191-203，March?1985。
【10】W.Sohler，B.Das，D.Dey，S.Reza，H.Suche，and?R.Ricken，“Erbium-doped?lithium?niobate?waveguides?lasers，”in?2005?IEICE?Trans.Electron.E88(C)，pp.990-997。
【11】H.Hu，R.Ricken，and?W.Sohler，Large?area，crystal-bonded?LiNbO3?thin?films?and?ridge?waveguides?of?high?refractive?index?contrast，Topical?Meeting“Photorefractive?Materials，Effects，and?Devices-Control?of?Light?and?Matter”(PR?09)，Bad?Honnef，Germany?2009。On?the?poster，presented?to?PR?09，a?photograph?of?a?3?inch?LNOI?wafer?was?shown.A?manuscript?to?describe?the?LNOI-technology?developed?is?in?preparation。
Summary of the invention
The objective of the invention is to, a kind of auroral poles splitter based on the LN photon line is provided, this polarization splitter can be used to the high integration light path based on the lithium niobate photon line, to adapt to pressing for of contemporary growing optical communication and sensing technology.
In order to realize above-mentioned task.The present invention takes following technical solution to be achieved:
A kind of auroral poles splitter based on the LN photon line is characterized in that, by at the bottom of the lithium niobate base, the silicon dioxide coating forms with two parallel lithium niobate fiber waveguides; Wherein, Wherein, the height of two parallel lithium niobate fiber waveguides is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Constitute the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.
The preparation method of above-mentioned auroral poles splitter based on the LN photon line is characterized in that this method is at first made the lithium niobate sample (being abbreviated as LNOI) based on insulator, and LNOI comprises the silicon dioxide (SiO that directly is attached on 1.3 micron thick
2) the monocrystalline LN layer (being the LN film) of 730 nanometer thickness on the layer, silicon dioxide layer is to cut the Z face at the bottom of the lithium niobate base through the Z that is coated in congruence with the plasma enhanced chemical vapor deposition method, promptly LN film and thickness are that the LN substrate of 1um has congruent crystal orientation; After handling with CMP process (CMP), the surface of LN film reaches the rms roughness of 0.5 nanometer; Photoresistance band then that 1.7 μ m are thick and that 0.5 μ m is wide is used as etch mask.Photoresistance through 1 hour annealing, is followed, in Oxford Plasmalab System100 under 120 ℃; Being coupled inductively with the 100W radio-frequency power becomes plasma and the 70W radio-frequency power is coupled to sample surface, mills etching through 60 minutes argons; The end face polishing promptly gets.
Optical directional coupler based on the LN photon line of the present invention, the technique effect that is brought is:
1, under the condition of above-mentioned given waveguide dimensions parameter and optical parametric, (is fit to transmission standard-TE (qTE) and standard-TM (qTM) single mode); Under the situation of operation wavelength λ=1.55 μ m; For the input light wave of standard-TE (qTE) single mode, can obtain 97.31% transmissivity at short straight wave guide output terminal; For the input light wave of standard-TM (qTM) single mode, can obtain 97.25% transmissivity at long straight wave guide output terminal.When the input light wave that contains standard-TE (qTE) and standard-TM (qTM) single mode simultaneously; Through this auroral poles splitter, can obtain standard-TE (qTE) ripple at shorter straight wave guide output terminal, its transmissivity is 97.31%; Simultaneously can obtain standard-TM (qTM) ripple at longer straight wave guide output terminal, its transmissivity is 97.25%.
2, this auroral poles divides and splits utensil compact structure is arranged.
Through applicant's emulation and analytical proof, should can be used to high integration light path based on the auroral poles splitter of LN photon line, to adapt to pressing for of growing optical communication technique and light sensing technology based on the lithium niobate photon line.
Description of drawings
Fig. 1-the 1st, the input end view in transverse section based on LN photon line auroral poles splitter of the present invention;
Fig. 1-2 is and the corresponding output terminal view in transverse section based on LN photon line auroral poles splitter of Fig. 1-1;
Fig. 1-the 3rd is with Fig. 1-1 and the corresponding auroral poles splitter of Fig. 1-2 vertical view;
Fig. 2 is under above-mentioned intended size parameter and optical parametric, when input standard-TE (qTE) single mode light wave, and the Distribution of Magnetic Field figure (power input: 0.7178W, output power: 0.6985W, the percent of pass: 97.31%) that utilize business software OptiFDTD to obtain;
Fig. 3 is under above-mentioned intended size parameter and optical parametric, when input standard-TM (qTM) single mode light wave, and the distribution map of the electric field (power input: 0.727W, output power: 0.707W, the percent of pass: 97.25%) that utilize business software OptiFDTD to obtain;
Fig. 4-1 (a; B) and Fig. 4-2 (a b) is the manufacture craft synoptic diagram, wherein; Fig. 4-1a is based on the input end of auroral poles splitter of the lithium niobate sample (LNOI) of insulator, and Fig. 4-2a is based on the output terminal of auroral poles splitter of the lithium niobate sample (LNOI) of insulator; And Fig. 4-1b, Fig. 4-2b and 4-3 represent final sample.
Below in conjunction with accompanying drawing and embodiment the present invention is done further detailed description.
Embodiment
1, simulation result
The auroral poles splitter structure that present embodiment provides based on the LN photon line, as shown in Figure 1, it by lithium niobate base at the bottom of, the lithium niobate waveguide parallel with two of silicon dioxide coating form.Article two, the height of parallel lithium niobate fiber waveguide is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Constitute the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.
The lithium niobate substrate thickness is 1 μ m, and the silicon dioxide coating thickness is 1.3 μ m.
The waveguide parameter that is suitable for this auroral poles splitter is: the refractive index n of LN waveguide
LN=2.2; SiO
2The refractive index n in zone
SiO2=1.44; The height h=0.73 μ m of waveguide, top width w=0.5 μ m so select to guarantee to realize single mode transport.Constitute the distance between axles S of two parallel optical waveguides (being photon line) of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.Operation wavelength λ=1.55 μ m, SiO
2The bottom surface of layer is connected LN waveguide (being the LN photon line) and SiO with the Z-face that Z-cuts the LN substrate
2Layer end face is connected, and LN substrate and LN photon line have the crystal orientation of omnidirectional.
The result who utilizes business software OptiFDTD that structure shown in Figure 1 has been carried out emulation shows that this splitter that polarizes for the input light wave of standard-TE (qTE) single mode, can obtain 97.31% transmissivity at shorter straight wave guide output terminal; For the input light wave of standard-TM (qTM) single mode, can obtain 97.25% transmissivity at long straight wave guide output terminal.When the input light wave that contains standard-TE (qTE) and standard-TM (qTM) single mode simultaneously; Through this auroral poles splitter, can obtain standard-TE (qTE) ripple at shorter straight wave guide output terminal, its transmissivity is 97.31%; Simultaneously can obtain standard-TM (qTM) ripple at longer straight wave guide output terminal, its transmissivity is 97.25%.Fig. 2 and Fig. 3 provide corresponding magnetic field, the distribution map of the electric field that is obtained by emulation.
2, manufacture craft
In order to make lithium niobate (LN) photon line directional coupler, must make lithium niobate sample LNOI (shown in Fig. 4-1-a and Fig. 4-2-a) earlier based on insulator.This sample has comprised the silicon dioxide (SiO that directly is attached on 1.3 micron thick
2) the monocrystalline LN layer (LN film) of 730 nanometer thickness on the layer, SiO
2Layer is to cut the Z face of (thickness is 1um) at the bottom of the lithium niobate base through the Z that is coated in congruence with plasma enhanced chemical vapor deposition (PECVD) method, and promptly LN film and thickness are that the LN substrate of 1um has congruent crystal orientation; The surface of LN film must be with the rms roughness that reaches 0.5 nanometer after chemically mechanical polishing (CMP) PROCESS FOR TREATMENT.
Because refractive index differs big (n
LN=2.2, n
SiO=1.44), the LNOI sample is the slab guide with very strong leaded light performance, therefore is well suited for being used for making the lithium niobate photon line.
Photoetching technique requires: photoresistance (OIR 907-17) band 1.7 μ m are thick and that 0.5 μ m is wide is used as etch mask.In order to improve the selectivity of mask, photoresistance under 120 ℃ through 1 hour annealing.Then; In Oxford Plasmalab System100, being coupled inductively with the 100W radio-frequency power becomes plasma (ICP) and the 70W radio-frequency power is coupled to sample surface; Sample after so handling mills etching through 60 minutes argons, and the result is shown in Fig. 4-1-b and Fig. 4-2-b.
At last, with the end face process polishing meticulously of sample, thereby realize end-fire optically-coupled efficiently.
3, conclusion
The ultra-compact structured light polarization splitter that is fit to 1.55 mum wavelengths based on the LN photon line has been proposed first, the field pattern of this auroral poles splitter that utilized business software OptiFDTD emulation, and provided manufacture craft.This auroral poles divides and splits utensil characteristics such as the high and ultra-compact structure of transmissivity are arranged.
The present invention has received grant of national natural science foundation (fund numbering: 61040064).
Claims (3)
1. auroral poles splitter based on the LN photon line; It is characterized in that, by at the bottom of the lithium niobate base, the silicon dioxide coating forms with two parallel lithium niobate fiber waveguides, wherein; Article two, the height of parallel lithium niobate fiber waveguide is 0.73 μ m, and the top width of waveguide is 0.5 μ m; Constitute the distance between axles S of two parallel optical waveguides of this polarization splitter
c=0.74 μ m, coupling length L
c=49.28 μ m.
2. the auroral poles splitter based on the LN photon line as claimed in claim 1 is characterized in that, described lithium niobate substrate thickness is 1 μ m, and the silicon dioxide coating thickness is 1.3 μ m.
3. the preparation method of the described auroral poles splitter based on the LN photon line of claim 1; It is characterized in that; This method is at first made the lithium niobate sample based on insulator; Sample comprises the monocrystalline LN layer of 730 nanometer thickness on the silicon dioxide layer that directly is attached on 1.3 micron thick, and silicon dioxide layer is to cut the Z face at the bottom of the lithium niobate base through the Z that is coated in congruence with the plasma enhanced chemical vapor deposition method, and promptly LN film and thickness are that the LN substrate of 1um has congruent crystal orientation; After handling with CMP process, the surface of LN film reaches the rms roughness of 0.5 nanometer; Photoresistance band then that 1.7 μ m are thick and that 0.5 μ m is wide is used as etch mask, and photoresistance through 1 hour annealing, is followed under 120 ℃; In Oxford Plasmalab System100; Being coupled inductively with the 100W radio-frequency power becomes plasma and the 70W radio-frequency power is coupled to sample surface, mills etching through 60 minutes argons; The end face polishing promptly gets.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109407208A (en) * | 2018-12-13 | 2019-03-01 | 中国科学院半导体研究所 | The preparation method of optical coupling structure, system and optical coupling structure |
| CN111487793A (en) * | 2020-04-17 | 2020-08-04 | 中国科学院半导体研究所 | Z-cut L NOI electro-optic modulator capable of improving modulation efficiency and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000347149A (en) * | 1999-03-26 | 2000-12-15 | Ngk Insulators Ltd | Directional coupler |
| WO2001065310A1 (en) * | 2000-03-02 | 2001-09-07 | Orchid Lightwave Communications, Inc. | Integrated optical devices and methods of making such devices |
| WO2005008296A2 (en) * | 2003-07-03 | 2005-01-27 | Oewaves, Inc. | Optical coupling for whispering-gallery-mode resonators via waveguide gratings |
| CN2689259Y (en) * | 2004-03-30 | 2005-03-30 | 上海理工大学 | Arsenones-lithium niobate composite waveguide couplers |
| CN101620296A (en) * | 2008-06-30 | 2010-01-06 | Jds尤尼弗思公司 | High confinement waveguide on an electro-optic substrate |
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2012
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000347149A (en) * | 1999-03-26 | 2000-12-15 | Ngk Insulators Ltd | Directional coupler |
| WO2001065310A1 (en) * | 2000-03-02 | 2001-09-07 | Orchid Lightwave Communications, Inc. | Integrated optical devices and methods of making such devices |
| WO2005008296A2 (en) * | 2003-07-03 | 2005-01-27 | Oewaves, Inc. | Optical coupling for whispering-gallery-mode resonators via waveguide gratings |
| CN2689259Y (en) * | 2004-03-30 | 2005-03-30 | 上海理工大学 | Arsenones-lithium niobate composite waveguide couplers |
| CN101620296A (en) * | 2008-06-30 | 2010-01-06 | Jds尤尼弗思公司 | High confinement waveguide on an electro-optic substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109407208A (en) * | 2018-12-13 | 2019-03-01 | 中国科学院半导体研究所 | The preparation method of optical coupling structure, system and optical coupling structure |
| CN111487793A (en) * | 2020-04-17 | 2020-08-04 | 中国科学院半导体研究所 | Z-cut L NOI electro-optic modulator capable of improving modulation efficiency and application thereof |
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