CN102538876B - Tester for parameter of flow field of gas static pressure restrictor - Google Patents
Tester for parameter of flow field of gas static pressure restrictor Download PDFInfo
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- CN102538876B CN102538876B CN201210012416.6A CN201210012416A CN102538876B CN 102538876 B CN102538876 B CN 102538876B CN 201210012416 A CN201210012416 A CN 201210012416A CN 102538876 B CN102538876 B CN 102538876B
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- gas
- flow controller
- restrictor
- static
- pressure transducer
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Abstract
The invention relates to a tester for a parameter of a flow field of a gas static pressure restrictor. A pair of guide rails is arranged at the middle upper part of a base, and a guide rail sliding block moves relative to the guide rails through a lead screw; a horizontal measurement working surface of a restrictor is fixedly arranged on the guide rail sliding block and is opposite to the gas static pressure restrictor fixed on the base, and a gas film with adjustable thickness is formed between the working surface of the restrictor and the gas static pressure restrictor. The working surface of the restrictor is provided with five sensor mounting holes in a straight line, the projection of the straight line on the gas static pressure restrictor passes through the central hole of the gas static pressure restrictor, and a sensor sensing probe in each mounting hole is level with the lower bottom surface of the measurement working surface of the restrictor. The tester can be used for measuring the distribution situation of pressure and temperature of the flow field inside the gas static pressure restrictor, and establishing a pressure resistance model so as to obtain the most reasonable set parameter value of a restricting channel, thereby finally reaching the purpose of reducing the flow velocity and ensuring good rigidity and stability of the gas film.
Description
Technical field
The invention belongs to fluid Technology of Precision Measurement field, relate to a kind of tester for parameter of flow field of gas static pressure restrictor.
Background technology
In ultraprecise processing and ultraprecise detection technique field, no matter be precision processing machine, or surveying instrument, the harsh requirement of each side all mechanical part has been proposed, as high precision, high-speed, high Motion Resolution rate, Heat stability is good, low vibration, little, the of low pollution and reduce equipment cost etc. of creeping.Facts have proved, gas-static technology solves the above-mentioned harsh important channel requiring just.At present, relating to the revolution of nano-precision and the occasion of displacement function, support pattern adopts gas-static lubrication technology mostly, thereby realizes nano level resolving power.At present, gas-static lubricating system mainly exists that load-bearing capacity is low, rigidity is little and the great technical barrier of poor stability.Although there are a lot of scholars this to be done to research, this problem is not yet well solved, and major obstacle shows the requirement that is difficult to the overstable and high rigidity that simultaneously meets system.
Initial analysis is thought, can be used as the approach that reduces flow velocity by the setting of throttling passage.Under study for action, in the time of can increasing by simulation study flow velocity, the situation of change in air film flow field is found effective reduction of speed mechanism.So, the variation of analyzing the correlation parameters such as air film flow field internal pressure flow velocity and temperature is extremely necessary, the variation of the inner pressure flow velocity of difference in flow field and the variation of temperature and whole air-film thickness and capacitance in the time of can changing by measurement bleed pressure, build-up pressure impedance model, to obtaining the most rational throttling passage parameter setting values, finally reach the object that reduces flow velocity, realizing the dual of gas film stiffness and stability takes into account, the device that when multiple microchannels formula gas-static flow controller measurement of flow parameter instrument is a measurement bleed pressure variation, the inner pressure flow velocity of difference in flow field and the variation of temperature and whole air-film thickness change.
Summary of the invention
The problem that can not take into account for overcoming the lubricated skill rigidity of gas-static and stability, the object of the present invention is to provide a kind of tester for parameter of flow field of gas static pressure restrictor.
For achieving the above object, the technical solution used in the present invention is:
The present invention includes leading screw, guide rail, guide rail slide block, pedestal, gas-static flow controller and flow controller surveying work face.
Middle and upper part at pedestal is provided with pair of guide rails, and guide rail slide block forms relative motion by leading screw and guide rail; On guide rail slide block, be fixedly installed the flow controller surveying work face of level, flow controller surveying work face, with to be fixed on gas-static flow controller on pedestal relative, forms the adjustable air film of thickness between the two.
Described flow controller surveying work face has five installation of sensors holes, these five installation of sensors holes are with in a straight line, the projection of this straight line on gas-static flow controller is through the center pit of gas-static flow controller, and the sensor sensing probe in mounting hole flushes with the bottom surface of flow controller surveying work face.
Described gas-static flow controller is parallel microchannel spray nozzle type layer flow static-pressure throttleer, and one of centre in five sensors is the first pressure transducer, and the first pressure transducer is relative with the center pit of gas-static flow controller; The second pressure transducer, the 3rd pressure transducer are installed in one side senser mounting hole of the first pressure transducer, in the opposite side installation of sensors hole of the first pressure transducer, the first temperature sensor, the second temperature sensor are installed.
The second described pressure transducer and the first temperature sensor correspond respectively to the microchannel outlet of gas-static flow controller; The 3rd described pressure transducer and the second temperature sensor correspond respectively to the petal-shaped groove end of gas-static flow controller.
The beneficial effect that the present invention has is: the present invention can measure the distribution situation of parallel microchannel spray nozzle type layer flow static-pressure throttleer air film interior flow field pressure and temperature, build-up pressure impedance model, to obtaining the most rational throttling passage parameter setting values, finally reach the object that reduces flow velocity, realize the dual of gas film stiffness and stability and take into account.
Accompanying drawing explanation
Fig. 1 is front view of the present invention;
Fig. 2 is left view of the present invention;
Fig. 3 is parallel microchannel spray nozzle type layer flow static-pressure throttleer vertical view;
Fig. 4 is flow controller surveying work face vertical view.
Embodiment
As shown in accompanying drawing 1, Fig. 2, in the middle and upper part of pedestal (5), be provided with pair of guide rails (2), it is upper that leading screw (6) is fixed on pedestal (5) by leading screw base (10), and guide rail (2) slide block forms relative motion by leading screw (6) and guide rail (2); On guide rail slide block (9), be fixedly installed the flow controller surveying work face of level, control hand wheel (1) can make flow controller surveying work face (3) pump, flow controller surveying work face (3), with to be fixed on gas-static flow controller (7) on pedestal (5) relative, forms the adjustable air film of thickness between the two; Rami tracheales support (8), for fixing draft tube, makes gas-static flow controller (7) maintenance level;
During work, the gas that is 0.1Mpa～0.6Mpa by pressure is sent into flow controller by draft tube (4), make to produce certain thickness air film between gas-static flow controller (7) and flow controller surveying work face (3), keep pressure constant, by handwheel (1) regulate flow controller surveying work face (3) thus displacement regulate air-film thickness, record respectively three pressure transducers, the reading value of two temperature sensors and displacement transducer, thereby monitor the situation of change of the pressure and temperature of inside, air film flow field in the different situation of admission pressure and air-film thickness.
Pressure transducer shown in Fig. 2 (11) is the micro pressure sensor that Shanghai Ming Dong Electronic Science and Technology Co., Ltd. produces, and measurement range is from 5 to 200bar, and precision is ± 0.25% FS; Temperature sensor (12) is the DS18B20 screw down temperature sensor of being produced by ocean, the Kunlun, Beijing instrument Science and Technology Ltd., measurement range is from-55 ℃ to+125 ℃, precision is 0.2%FS, three pressure transducers are same model, and two temperature sensors are also same model.
Be illustrated in figure 3 parallel microchannel spray nozzle type layer flow static-pressure throttleer (7), five sensors are measured respectively the pressure that its center pit (15) is located, microchannel outlet (14) is located and petal-shaped groove end (13) is located and the temperature that microchannel outlet (14) is located and petal-shaped groove end (13) is located, manufactured materials is selected wrought aluminium 6061, and anodized need to be passed through in surface.
Be illustrated in figure 4 flow controller surveying work face (3), have five installation of sensors holes, these five installation of sensors holes are with in a straight line, the projection of this straight line on gas-static flow controller (7) is through the center pit (15) of gas-static flow controller (7), and the sensor sensing probe in mounting hole flushes with the bottom surface of flow controller surveying work face (3); It is upper that this workplace is fixed by screws in guide rail slide block (9), and control hand wheel (1) makes it move up and down to regulate air-film thickness.
Above-mentioned embodiment is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change that the present invention is made, all fall into protection scope of the present invention.
Claims (1)
1. tester for parameter of flow field of gas static pressure restrictor, is characterized in that: comprise leading screw (6), guide rail (2), guide rail slide block (9), pedestal (5), gas-static flow controller (7) and flow controller surveying work face (3);
In the middle and upper part of pedestal (5), be provided with pair of guide rails (2), guide rail slide block (9) forms relative motion by leading screw (6) and guide rail (2); On guide rail slide block (9), be fixedly installed the flow controller surveying work face (3) of level, flow controller surveying work face (3), with to be fixed on gas-static flow controller (7) on pedestal (5) relative, forms the adjustable air film of thickness between the two;
Described flow controller surveying work face (3) has five installation of sensors holes, these five installation of sensors holes are with in a straight line, the projection of this straight line on gas-static flow controller (7) is through the center pit (15) of gas-static flow controller (7), and the sensor sensing probe in mounting hole flushes with the bottom surface of flow controller surveying work face (3);
Described gas-static flow controller (7) is parallel microchannel spray nozzle type layer flow static-pressure throttleer, one of centre in five sensors is the first pressure transducer, and the first pressure transducer is relative with the center pit (15) of gas-static flow controller (7); In one side senser mounting hole of the first pressure transducer, be separately installed with the second pressure transducer, the 3rd pressure transducer, in the opposite side installation of sensors hole of the first pressure transducer, be separately installed with the first temperature sensor, the second temperature sensor;
The second described pressure transducer and the first temperature sensor correspond respectively to the microchannel outlet (14) of gas-static flow controller (7); The 3rd described pressure transducer and the second temperature sensor correspond respectively to the petal-shaped groove end (13) of gas-static flow controller (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210012416.6A CN102538876B (en) | 2012-01-16 | 2012-01-16 | Tester for parameter of flow field of gas static pressure restrictor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210012416.6A CN102538876B (en) | 2012-01-16 | 2012-01-16 | Tester for parameter of flow field of gas static pressure restrictor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102538876A CN102538876A (en) | 2012-07-04 |
| CN102538876B true CN102538876B (en) | 2014-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210012416.6A Expired - Fee Related CN102538876B (en) | 2012-01-16 | 2012-01-16 | Tester for parameter of flow field of gas static pressure restrictor |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091070B (en) * | 2013-01-21 | 2015-10-21 | 中国计量学院 | Tester for parameter of flow field of gas static pressure restrictor |
| CN103257015B (en) * | 2013-05-09 | 2014-11-05 | 浙江理工大学 | High-speed spinning cup internal flow field dynamic pressure wireless measuring device |
| CN108535413B (en) * | 2018-03-29 | 2023-09-29 | 中国计量大学 | High-stability plane air film parameter measuring device |
| CN112556964B (en) * | 2020-10-22 | 2022-12-09 | 浙江工业大学 | Gas hydrostatic bearing gas film flow field observation device |
| CN112539929A (en) * | 2020-12-01 | 2021-03-23 | 中国计量大学 | Inlet and outlet parameter measuring device of gas static pressure restrictor |
| CN112611490B (en) * | 2020-12-10 | 2022-04-08 | 中国计量大学 | Energy efficiency measuring method for ultra-precise gas static pressure restrictor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001041242A (en) * | 1999-07-28 | 2001-02-13 | Ntn Corp | Static pressure gas bearing device |
| CN101818758B (en) * | 2010-04-13 | 2011-09-07 | 中国计量学院 | Parallel microchannel spray nozzle type layer flow static-pressure throttleer for anti-thrust |
| CN101968077B (en) * | 2010-10-12 | 2011-12-28 | 中国计量学院 | Split type parallel microchannel radial gas static-pressure throttleer |
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2012
- 2012-01-16 CN CN201210012416.6A patent/CN102538876B/en not_active Expired - Fee Related
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| CN102538876A (en) | 2012-07-04 |
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