CN102538685A - Displacement detection system with twist error correcting function - Google Patents

Displacement detection system with twist error correcting function Download PDF

Info

Publication number
CN102538685A
CN102538685A CN2011104494365A CN201110449436A CN102538685A CN 102538685 A CN102538685 A CN 102538685A CN 2011104494365 A CN2011104494365 A CN 2011104494365A CN 201110449436 A CN201110449436 A CN 201110449436A CN 102538685 A CN102538685 A CN 102538685A
Authority
CN
China
Prior art keywords
position signal
detection system
displacement
signal detection
standard grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011104494365A
Other languages
Chinese (zh)
Inventor
曾琪峰
吴宏圣
乔栋
孙强
卢振武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN2011104494365A priority Critical patent/CN102538685A/en
Publication of CN102538685A publication Critical patent/CN102538685A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a displacement detection system, in particular to a displacement detection system with a twist error correcting function. The problem that the measurement precision of a measuring instrument cannot be fully used because of the mechanical structure precision or the mounting precision of a machine tool while the traditional measurement technology is designed according to the measurement precision of the measuring instrument is solved. The system comprises a first standard raster, a second standard raster, a sampling control module, a first position signal probing system, a second position signal probing system and a position analyzing module, wherein the first position signal probing system and the second position signal probing system send sampling signals through the sampling control module together; and the position analyzing module weighs the two displacement signals and averagely calculates the displacement value of a moving body by analyzing and comparing the displacement signals from the first position signal probing system and the second position signal probing system. The displacement detection system is used for improving reading stability and self-detection ability of a measurement system, and eliminating or reducing a twist error to the greatest extent at the same time.

Description

具有修正扭转误差功能的位移检测系统Displacement detection system with the function of correcting torsion error

技术领域 technical field

本发明涉及一种位移检测系统,具体涉及一种具有修正扭转误差功能的位移检测系统。用于高精度和高稳定测量长度的测量系统。The invention relates to a displacement detection system, in particular to a displacement detection system with the function of correcting torsion errors. Measuring system for measuring lengths with high precision and stability.

背景技术 Background technique

光栅线位移测量系统在数控中主要作为闭环控制中的位置反馈元件,其精度和可靠性影响到加工精度,而全闭环相对于半闭环的优势主要在于能够消除传动误差,对于加工刀具位置和工件位置的直接测量。国内外光栅尺的精度已经能够达到较高的测量精度要求,但是国内的机床本身存在安装精度不够高的情况,使得高精度的测量仪器的高精度优势很难在自己的数控系统中得到充分的发挥,原因之一就是数控系统中的各种影响因素,包括移动体在滑块上的运动不是绝对的直线运动,对于位移的测量仍然存在误差。如果不能处理好同机床搭配的问题,那么就无法发挥全闭环加工的优势,其稳定性和精度可能还不如安装精度高的半闭环系统,这样的情况阻碍了对高精度数控系统的研究,使得人们对于机床的改装存在较大的困难。The grating line displacement measurement system is mainly used as the position feedback element in the closed-loop control in the numerical control. Its accuracy and reliability affect the machining accuracy. The advantage of the full-closed loop compared with the semi-closed loop is mainly that it can eliminate transmission errors. For machining tool position and workpiece Direct measurement of position. The accuracy of grating rulers at home and abroad has been able to meet higher measurement accuracy requirements, but the installation accuracy of domestic machine tools is not high enough, making it difficult for the high-precision advantages of high-precision measuring instruments to be fully utilized in their own numerical control systems. One of the reasons is that there are various influencing factors in the numerical control system, including that the motion of the moving body on the slider is not an absolute linear motion, and there are still errors in the measurement of displacement. If the problem of matching with the machine tool cannot be handled well, then the advantages of full closed-loop machining cannot be brought into play, and its stability and accuracy may not be as good as semi-closed-loop systems with high installation precision. This situation hinders the research on high-precision CNC systems, making People have great difficulties in refitting machine tools.

一般解决测量误差的方法就是提高系统各个部件的精度和光栅尺的精度来减小测量误差,但是系统的长期运行的精度和稳定性仍然需要对于运行中出现的偏差进行修正。The general way to solve the measurement error is to improve the accuracy of each component of the system and the accuracy of the grating ruler to reduce the measurement error, but the long-term operation accuracy and stability of the system still need to correct the deviation that occurs during operation.

发明内容 Contents of the invention

本发明为解决现有的位移测量技术主要是针对测量仪器本身的测量精度来设计的,虽然能够达到很高的测量精度,但是由于机床本身的机械结构精度或者安装精度的原因,测量仪器本身的测量精度不能够得到充分的发挥,为了在已有的机床设计的精度的基础上,提高系统位移测量的稳定性,尽量减小由于轨道运动非直线性导致的偏差,减小对于安装精度的要求,提供一种具有修正扭转误差功能的位移检测系统。In order to solve the existing displacement measurement technology, the present invention is mainly designed for the measurement accuracy of the measuring instrument itself. Although it can achieve high measurement accuracy, due to the mechanical structure accuracy or installation accuracy of the machine tool itself, the measuring instrument itself cannot The measurement accuracy cannot be fully utilized. In order to improve the stability of the system displacement measurement on the basis of the accuracy of the existing machine tool design, minimize the deviation caused by the non-linearity of the orbital motion, and reduce the requirements for installation accuracy , providing a displacement detection system with the function of correcting torsion errors.

具有修正扭转误差功能的位移检测系统,该系统包括第一标准光栅、第二标准光栅、采样控制模块、第一位置信号探测系统、第二位置信号探测系统和位置分析模块;所述采样控制模块发出采集信号,第一位置信号探测系统和第二位置信号探测系统分别对移动体相对于第一标准光栅和第二标准光栅上的位移信号进行采集,获得第一位置信号和第二位置信号,所述位置分析模块对第一位置信号和第二位置信号进行加权平均计算,获得修正后的移动体的位移值,并将所述移动体的位移值经结果输出模块输出。A displacement detection system with the function of correcting torsion error, the system includes a first standard grating, a second standard grating, a sampling control module, a first position signal detection system, a second position signal detection system and a position analysis module; the sampling control module Send out the acquisition signal, the first position signal detection system and the second position signal detection system collect the displacement signals of the moving body relative to the first standard grating and the second standard grating respectively, and obtain the first position signal and the second position signal, The position analysis module performs weighted average calculation on the first position signal and the second position signal to obtain the corrected displacement value of the moving body, and outputs the displacement value of the moving body through the result output module.

本发明的有益效果:本发明所述的位移检测系统通过两个分别安装在两个轨道上的第一位置信号探测系统和第二位置信号探测系统,两个探测系统分别对应于移动体在两个轨道上的移动位移,那么通过比较得到的两个位移值就能够分析得到移动体在运动过程中的扭转情况,从而得到修正后的位移测量值,这是单独通过一个位置探测系统所难以做到的。本发明用于提高测量系统的读数稳定性和自检能力,同时消除或者尽量减小扭转误差。Beneficial effects of the present invention: the displacement detection system of the present invention uses two first position signal detection systems and a second position signal detection system respectively installed on two rails, and the two detection systems correspond to the movement of the moving body at the two The moving displacement on a track, then by comparing the two displacement values obtained, the torsion of the moving body during the movement can be analyzed to obtain the corrected displacement measurement value, which is difficult to do through a position detection system alone. arrived. The invention is used to improve the reading stability and self-inspection ability of the measurement system, and simultaneously eliminate or minimize the torsion error.

附图说明 Description of drawings

图1为本发明所述的具有修正扭转误差功能的位移检测系统的结构图;Fig. 1 is a structural diagram of a displacement detection system with a function of correcting torsion error according to the present invention;

图2为本发明所述的具有修正扭转误差功能的位移检测系统在理想情况下进行检测的位置示意图;2 is a schematic diagram of the position of the displacement detection system with the function of correcting the torsion error described in the present invention under ideal conditions;

图3为非理想情况下的具有修正扭转误差功能的位移检测系统的位置示意图。Fig. 3 is a schematic diagram of the position of the displacement detection system with the function of correcting the torsion error under the non-ideal condition.

具体实施方式 Detailed ways

结合图1至图3说明本实施方式,具有修正扭转误差功能的位移检测系统,该系统包括第一标准光栅101、第二标准光栅201、采样控制模块10、第一位置信号探测系统21、第二位置信号探测系统22和位置分析模块30;1 to 3 to illustrate this embodiment, the displacement detection system with the function of correcting torsional errors, the system includes a first standard grating 101, a second standard grating 201, a sampling control module 10, a first position signal detection system 21, a second Two position signal detection system 22 and position analysis module 30;

所述位置分析模块30接收来自第一位置信号探测系统21和第二位置信号探测系统22的位置信号,所述第一位置信号探测系统21和第二位置信号探测系统22由采样控制模块10统一发出采集信号,位置分析模块30通过分析比较来自第一位置信号探测系统21和第二位置信号探测系统22的获得的移动体300相对于第一标准光栅101和第二标准光栅201的位移信号,对两个位移信号进行加权平均计算移动体300的位移值。The position analysis module 30 receives position signals from the first position signal detection system 21 and the second position signal detection system 22, and the first position signal detection system 21 and the second position signal detection system 22 are unified by the sampling control module 10 The acquisition signal is sent out, and the position analysis module 30 analyzes and compares the displacement signals of the moving body 300 obtained from the first position signal detection system 21 and the second position signal detection system 22 relative to the first standard grating 101 and the second standard grating 201, The weighted average of the two displacement signals is used to calculate the displacement value of the moving body 300 .

本实施方式中所述的第一标准光栅101和第二标准光栅201分别固定在第一轨道100和第二轨道200上,在第一标准光栅101和第二标准光栅201上有标志着位置信息的图案,为了得到绝对位置信息,在第一标准光栅101和第二标准光栅201上至少有一个标准光栅上有标志绝对位置信息的图案。在第一位置信号探测系统21和第二位置信号探测系统22固定在移动体上,第一位置信号探测系统21和第二位置信号探测系统22把在第一标准光栅101和第二标准光栅201上的长度的信息分别扫描到第一位置信号探测系统21和第二位置信号探测系统22中,所述第一位置信号探测系统21和第二位置信号探测系统22通过光电扫描的方式进行扫描。所述第一位置信号探测系统21和第二位置信号探测系统22为CMOS(Complementary Metal Oxide Semiconductor)、光电池阵列或者CCD。The first standard grating 101 and the second standard grating 201 described in this embodiment are fixed on the first track 100 and the second track 200 respectively, and position information is marked on the first standard grating 101 and the second standard grating 201 In order to obtain absolute position information, at least one of the first standard grating 101 and the second standard grating 201 has a pattern marking absolute position information. When the first position signal detection system 21 and the second position signal detection system 22 are fixed on the moving body, the first position signal detection system 21 and the second position signal detection system 22 place the first standard grating 101 and the second standard grating 201 The information on the length above is scanned into the first position signal detection system 21 and the second position signal detection system 22 respectively, and the first position signal detection system 21 and the second position signal detection system 22 scan by means of photoelectric scanning. The first position signal detection system 21 and the second position signal detection system 22 are CMOS (Complementary Metal Oxide Semiconductor), photocell array or CCD.

本实施方式所述的第一位置信号探测系统21为光电池阵列,其固定在移动体上,第二位置信号探测系统22为光电池阵列,其固定在移动体上。第一位置信号探测系统21和第二位置信号探测系统22中至少任意一方具有绝对位置信号探测功能。The first position signal detection system 21 in this embodiment is a photocell array, which is fixed on the moving body, and the second position signal detection system 22 is a photocell array, which is fixed on the moving body. At least any one of the first position signal detection system 21 and the second position signal detection system 22 has an absolute position signal detection function.

本实施方式所述的第一标准光栅101和第二标准光栅201可以是反射式光栅或者透射式光栅。第一位置信号探测系统21和第二位置信号探测系统22的接收芯片可以是硅光电池或者CCD。The first standard grating 101 and the second standard grating 201 described in this embodiment may be reflective gratings or transmissive gratings. The receiving chips of the first position signal detection system 21 and the second position signal detection system 22 may be silicon photocells or CCDs.

结合图3对本实施方式作进一步说明,当系统存在一定的运动偏差,存在一定的扭转,扭转的角度在图示中表示为α,而第一位置信号探测系统21和第二位置信号探测系统22都分别沿着各自的轨道100和200运动,并没有随着移动体的扭转而扭转,形成了图3中的形态,这样,使得在两个轨道上运动的位移值不相同,经过位置分析模块30的位置细分模块后,对应于轨道100和轨道200的读数分别为X1和X2,结合图2,假设两轨道上的刻线101和201间距表示为L,可以根据图3所示的位置关系得到移动体中心(在本实例中假设移动体的形状和位置相对于两轨道是对称的,这样移动体的中心点处于与两轨道等距的线上,并且不随扭转运动而运动,即不动点)相对两轨道等距离的点的位移值可以表示为:This embodiment is further described in conjunction with FIG. 3. When the system has a certain movement deviation and a certain twist, the twist angle is represented as α in the figure, and the first position signal detection system 21 and the second position signal detection system 22 They all move along their respective orbits 100 and 200, and do not twist with the twisting of the moving body, forming the shape in Figure 3. In this way, the displacement values moving on the two orbits are different, and after the position analysis module After the position subdivision module of 30, the readings corresponding to track 100 and track 200 are respectively X1 and X2. In combination with FIG. 2, assuming that the distance between the reticle lines 101 and 201 on the two tracks is expressed as L, the position shown in FIG. 3 can be relationship to obtain the center of the moving body (in this example, it is assumed that the shape and position of the moving body are symmetrical with respect to the two rails, so that the center point of the moving body is on a line equidistant from the two rails, and does not move with the twisting motion, that is, does not The displacement value of a point equidistant from two orbits) can be expressed as:

X=(X1+X2)/2                     ①X=(X1+X2)/2 ①

扭转角α可以通过下面的公式计算出来:The twist angle α can be calculated by the following formula:

α=arctan[(X1-X2)/L]            ②α=arctan[(X1-X2)/L] ②

为了描述方便在本实例中把移动体的形状假设成矩形,但是不影响结论的推广,假设移动体运行位移为X,那么两读数头的读数将分别为:For the convenience of description, the shape of the moving body is assumed to be a rectangle in this example, but it does not affect the extension of the conclusion. Assuming that the running displacement of the moving body is X, then the readings of the two reading heads will be:

X1=X+L*tan(α)/2                    ③X1=X+L*tan(α)/2 ③

X2=X-L*tan(α)/2                    ④X2=X-L*tan(α)/2 ④

这样不动点的位置X就可以表示为式①,计算式①中得到的值独立于扭转角α,所述α为很小的偏转角,例如α的角度为10′。In this way, the position X of the fixed point can be expressed as formula ①, and the value obtained in formula ① is independent of the torsion angle α, which is a small deflection angle, for example, the angle of α is 10′.

下面分析以上计算公式的合理性,The rationality of the above calculation formula is analyzed below,

为了描述方便在本实例中把移动体的形状假设成矩形,但是不影响结论的推广,假设移动体运行位移为X,那么两读数头的读数将分别为式③和式④For the convenience of description, the shape of the moving body is assumed to be a rectangle in this example, but it does not affect the extension of the conclusion. Assuming that the running displacement of the moving body is X, then the readings of the two reading heads will be formula ③ and formula ④ respectively

比如,X1等于20.345mm,而X2等于20.355mm,这样通过式①计算得到X为20.350mm,如果L等于200mm,则通过式②计算得到偏转角α等于10.3角秒,误差降低了约5微米。For example, X1 is equal to 20.345mm, and X2 is equal to 20.355mm. In this way, X is 20.350mm calculated by formula ①. If L is equal to 200mm, the deflection angle α is calculated by formula ② to be equal to 10.3 arc seconds, and the error is reduced by about 5 microns.

如此,在本发明中,只需要一个处理电路,通过增加一个读数系统,两条标准光栅固定在两个轨道上,通过读数系统得到两个独立的位置值,并通过比较分析体系中不动点所在的位置,用这个位置来表示体系所在的位置,有效的克服了由于移动体扭转带来的测量误差,同时能够通过角度α来监测其扭转量,测量方法简单。这种测量方法能有效提高测量精度和测量的可靠性,特别适用于安装精度不够高,而测量精度要求高的环境,而不需要对于安装设备和方法有很高的苛求。In this way, in the present invention, only one processing circuit is needed, by adding a reading system, two standard gratings are fixed on the two tracks, two independent position values are obtained through the reading system, and the fixed point in the analysis system is compared The position, using this position to indicate the position of the system, effectively overcomes the measurement error caused by the torsion of the moving body, and at the same time can monitor the amount of torsion through the angle α, and the measurement method is simple. This measurement method can effectively improve the measurement accuracy and measurement reliability, and is especially suitable for environments where the installation accuracy is not high enough but the measurement accuracy is high, without requiring high requirements for installation equipment and methods.

此外,本发明中的测量方法还可以用于以下情况,以某一条轨道作为正常使用时所用的轨道,而另外一条轨道用于检验和修正位置值,只需要进行一定周期的检测,检测时对前一条轨道的测量值进行修正,这样就把安装误差同时考虑进去,第一条轨道得到的数值是包括了除读数系统本身以外的体系的整体误差,而不仅仅是对于光栅尺本身的修正。In addition, the measurement method in the present invention can also be used in the following situations, using a certain track as the track used in normal use, while the other track is used to check and correct the position value, only a certain period of detection is required. The measured value of the previous track is corrected, so that the installation error is taken into account at the same time. The value obtained by the first track includes the overall error of the system other than the reading system itself, not just the correction of the grating ruler itself.

Claims (5)

1.具有修正扭转误差功能的位移检测系统,该系统包括第一标准光栅(101)、第二标准光栅(201)、采样控制模块(10)、第一位置信号探测系统(21)、第二位置信号探测系统(22)和位置分析模块(30);其特征是,所述采样控制模块(10)发出采集信号,第一位置信号探测系统(21)和第二位置信号探测系统(22)分别对移动体(300)相对于第一标准光栅(101)和第二标准光栅(201)上的位移信号进行采集,获得第一位置信号和第二位置信号,所述位置分析模块(30)对第一位置信号和第二位置信号进行加权平均计算,获得修正后的移动体(300)的位移值,并将所述移动体(300)的位移值经结果输出模块输出。1. A displacement detection system with the function of correcting torsional errors, the system includes a first standard grating (101), a second standard grating (201), a sampling control module (10), a first position signal detection system (21), a second A position signal detection system (22) and a position analysis module (30); it is characterized in that the sampling control module (10) sends a collection signal, and the first position signal detection system (21) and the second position signal detection system (22) Respectively collect displacement signals of the mobile body (300) relative to the first standard grating (101) and the second standard grating (201), to obtain a first position signal and a second position signal, and the position analysis module (30) A weighted average calculation is performed on the first position signal and the second position signal to obtain a corrected displacement value of the mobile body (300), and the displacement value of the mobile body (300) is output through a result output module. 2.根据权利要求1所述的具有修正扭转误差功能的位移检测系统,其特征在于,该系统还包括第一轨道(100)和第二轨道(200),所述第一标准光栅(101)和第二标准光栅(201分别固定在第一轨道(100)和第二轨道(200)上,所述第一标准光栅(101)和第二标准光栅(201)中至少有一个标准光栅上标志有绝对位置信息的图案。2. The displacement detection system with the function of correcting torsion error according to claim 1, characterized in that, the system also includes a first track (100) and a second track (200), and the first standard grating (101) and the second standard grating (201) are respectively fixed on the first track (100) and the second track (200), and there is at least one mark on the standard grating in the first standard grating (101) and the second standard grating (201) A pattern with absolute position information. 3.根据权利要求1或2所述的具有修正扭转误差功能的位移检测系统,其特征在于,所述第一标准光栅(101)和第二标准光栅(201)为反射式光栅或者透射式光栅。3. The displacement detection system with the function of correcting torsion error according to claim 1 or 2, characterized in that, the first standard grating (101) and the second standard grating (201) are reflective gratings or transmissive gratings . 4.根据权利要求1所述的具有修正扭转误差功能的位移检测系统,其特征在于,所述第一位置信号探测系统(21)和第二位置信号探测系统(22)分别固定在移动体(300)上,所述第一位置信号探测系统(21)和第二位置信号探测系统(22)为光电池阵列、CCD或者CMOS。4. The displacement detection system with the function of correcting torsion error according to claim 1, characterized in that, the first position signal detection system (21) and the second position signal detection system (22) are respectively fixed on the moving body ( 300), the first position signal detection system (21) and the second position signal detection system (22) are photocell arrays, CCD or CMOS. 5.根据权利要求1所述的具有修正扭转误差功能的位移检测系统,其特征在于,所述第一位置信号探测系统(21)和第二位置信号探测系统(22)中至少有一个位置信号探测系统具有绝对位置信号的探测功能。5. The displacement detection system with the function of correcting torsion error according to claim 1, characterized in that at least one position signal is provided in the first position signal detection system (21) and the second position signal detection system (22) The detection system has the detection function of the absolute position signal.
CN2011104494365A 2011-12-29 2011-12-29 Displacement detection system with twist error correcting function Pending CN102538685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011104494365A CN102538685A (en) 2011-12-29 2011-12-29 Displacement detection system with twist error correcting function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011104494365A CN102538685A (en) 2011-12-29 2011-12-29 Displacement detection system with twist error correcting function

Publications (1)

Publication Number Publication Date
CN102538685A true CN102538685A (en) 2012-07-04

Family

ID=46346191

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011104494365A Pending CN102538685A (en) 2011-12-29 2011-12-29 Displacement detection system with twist error correcting function

Country Status (1)

Country Link
CN (1) CN102538685A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759660A (en) * 2014-01-28 2014-04-30 广东工业大学 Method for auxiliary installation and error compensation of absolute optical grating ruler
CN103868466A (en) * 2014-02-08 2014-06-18 合肥工业大学 Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm
CN104567598A (en) * 2014-12-31 2015-04-29 彩虹(合肥)液晶玻璃有限公司 Device and method for measuring forming furnace-discharging deviation of liquid crystal substrate glass
CN108153234A (en) * 2018-01-30 2018-06-12 中国工程物理研究院机械制造工艺研究所 The full degree of freedom accuracy detecting device of lathe linear motion run mode
CN110530310A (en) * 2019-08-26 2019-12-03 广西交通设计集团有限公司 A kind of deep soil movement monitoring device and method
CN114132531A (en) * 2022-01-28 2022-03-04 中国人民解放军32035部队 Low-orbit space target orbit correction method and device and electronic equipment
CN114172503A (en) * 2021-11-23 2022-03-11 成都飞机工业(集团)有限责任公司 Synchronous position error compensation correction method based on proximity switch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080094604A1 (en) * 2006-09-01 2008-04-24 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
CN102175147A (en) * 2011-01-10 2011-09-07 昆山双虎电子科技有限公司 Dynamic revising method of three-coordinate measuring machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080094604A1 (en) * 2006-09-01 2008-04-24 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
CN102175147A (en) * 2011-01-10 2011-09-07 昆山双虎电子科技有限公司 Dynamic revising method of three-coordinate measuring machine

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759660A (en) * 2014-01-28 2014-04-30 广东工业大学 Method for auxiliary installation and error compensation of absolute optical grating ruler
CN103759660B (en) * 2014-01-28 2016-03-23 广东工业大学 A kind of absolute grating ruler is auxiliary to be installed and error compensating method
CN103868466A (en) * 2014-02-08 2014-06-18 合肥工业大学 Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm
CN103868466B (en) * 2014-02-08 2017-05-17 合肥工业大学 Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm
CN104567598A (en) * 2014-12-31 2015-04-29 彩虹(合肥)液晶玻璃有限公司 Device and method for measuring forming furnace-discharging deviation of liquid crystal substrate glass
CN108153234A (en) * 2018-01-30 2018-06-12 中国工程物理研究院机械制造工艺研究所 The full degree of freedom accuracy detecting device of lathe linear motion run mode
CN108153234B (en) * 2018-01-30 2023-08-04 中国工程物理研究院机械制造工艺研究所 Full-freedom degree precision detection device for linear motion running state of machine tool
CN110530310A (en) * 2019-08-26 2019-12-03 广西交通设计集团有限公司 A kind of deep soil movement monitoring device and method
CN114172503A (en) * 2021-11-23 2022-03-11 成都飞机工业(集团)有限责任公司 Synchronous position error compensation correction method based on proximity switch
CN114132531A (en) * 2022-01-28 2022-03-04 中国人民解放军32035部队 Low-orbit space target orbit correction method and device and electronic equipment

Similar Documents

Publication Publication Date Title
CN102538685A (en) Displacement detection system with twist error correcting function
CN104075890B (en) A kind of servomotor and harmonic wave speed reducing machine comprehensive test platform
CN105547344B (en) A kind of test equipment calibrating installation and its calibration method
CN100462678C (en) Laser vision dynamic measurement method for rail wear
CN203981405U (en) A kind of servomotor and harmonic wave speed reducing machine comprehensive test platform
CN110906861B (en) Real-time measuring device and method for rolling angle error of guide rail movement
CN107588742A (en) A kind of cylindrical gear profile bias measurement method based on line-structured light
CN103630099A (en) Automated linear displacement sensor calibration device
CN109032070A (en) A kind of contactless R-test measuring instrument scaling method using eddy current displacement sensor
CN110530296B (en) Method for determining line laser installation error angle
CN107255453B (en) A device and method for measuring the eccentric shaft diameter of an industrial robot joint reducer
CN106767512A (en) Optical element high precision measuring device based on real-time monitoring kinematic error
CN101419044B (en) Micron-nano grade three-dimensional measurement '331' system and measurement method thereof
CN110398359A (en) A dynamic detection method and device for comprehensive error of mechanical transmission chain
CN111288922A (en) On-machine measurement method for rail vehicle wheel and tread profile
CN111895947A (en) Temperature compensation system and temperature compensation method based on three-coordinate measuring machine
CN103223628A (en) Method for detecting tooth profile error of big gear wheel on line
CN110514119A (en) A device and method for measuring the overall error of gears based on double circular gratings
CN113136752A (en) Device and method for calibrating equipment for measuring creeping and close-fitting clearance of switch rail
CN108871248B (en) An absolute position detection device applicable to ultra-large stroke detection
CN105157583B (en) A kind of axle journal length measuring system
CN106289058A (en) The method that a kind of grating scale location assignment accuracy compensates
CN112665477B (en) Detection tool and method for testing plane positioning accuracy of end effector
CN101183049B (en) Nc milling machine error automatic sizing device
CN208042983U (en) A kind of guide rail linearity measuring system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120704