CN102538685A - Displacement detection system with twist error correcting function - Google Patents
Displacement detection system with twist error correcting function Download PDFInfo
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- CN102538685A CN102538685A CN2011104494365A CN201110449436A CN102538685A CN 102538685 A CN102538685 A CN 102538685A CN 2011104494365 A CN2011104494365 A CN 2011104494365A CN 201110449436 A CN201110449436 A CN 201110449436A CN 102538685 A CN102538685 A CN 102538685A
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Abstract
The invention relates to a displacement detection system, in particular to a displacement detection system with a twist error correcting function. The problem that the measurement precision of a measuring instrument cannot be fully used because of the mechanical structure precision or the mounting precision of a machine tool while the traditional measurement technology is designed according to the measurement precision of the measuring instrument is solved. The system comprises a first standard raster, a second standard raster, a sampling control module, a first position signal probing system, a second position signal probing system and a position analyzing module, wherein the first position signal probing system and the second position signal probing system send sampling signals through the sampling control module together; and the position analyzing module weighs the two displacement signals and averagely calculates the displacement value of a moving body by analyzing and comparing the displacement signals from the first position signal probing system and the second position signal probing system. The displacement detection system is used for improving reading stability and self-detection ability of a measurement system, and eliminating or reducing a twist error to the greatest extent at the same time.
Description
Technical field
The present invention relates to a kind of displacement detection system, be specifically related to a kind of displacement detection system of revising the torsional error function that has.Be used for high precision and high stable and measure the measurement of length system.
Background technology
The optical grid line displacement measuring system in numerical control mainly as the position feedback element in the closed-loop control; Its precision and reliability effect are to machining precision; And the full cut-off ring mainly is to eliminate driving error with respect to the advantage of semiclosed loop, for the direct measurement of the process tool position and the location of workpiece.The precision of grating chi can reach higher measuring accuracy requirement both at home and abroad; But there is the not high enough situation of installation accuracy in domestic lathe itself; Making the high precision advantage of high-precision surveying instrument be difficult in oneself the digital control system is fully played; One of reason is exactly the various influence factors in the digital control system, comprises that the motion of moving body on slide block is not absolute rectilinear motion, still has error for the measurement of displacement.If can not handle problem well with the lathe collocation; So just can't bring into play the advantage of full cut-off ring processing; Its stability and precision possibly it would be better the high semi-closed loop system of installation accuracy; Such situation has hindered the high precision numerical control systematic research, makes people have bigger difficulty for the repacking of lathe.
The general method that solves measuring error is exactly that the precision of each parts of raising system and the precision of grating chi reduce measuring error, but the precision of the long-time running of system still need be revised for the deviation of emerged in operation with stability.
Summary of the invention
The present invention mainly is that the measuring accuracy that is directed against surveying instrument itself designs for solving existing displacement measurement technology; Though can reach very high measuring accuracy; But because the physical construction precision or the installation accuracy of lathe itself, the measuring accuracy of surveying instrument itself can not be fully played, on the basis of the precision of existing Machine Tool design; Improve the stability of system bits shift measurement; Reduce because the deviation that the orbital motion nonlinearity causes reduces the requirement for installation accuracy as far as possible, a kind of displacement detection system of revising the torsional error function that has is provided.
Have the displacement detection system of revising the torsional error function, this system comprises first master grating, second master grating, controlling of sampling module, primary importance signal detection system, second place signal detection system and location analysis module; Said controlling of sampling module is sent acquired signal; Primary importance signal detection system and second place signal detection system are gathered with respect to the displacement signal on first master grating and second master grating moving body respectively; Obtain primary importance signal and second place signal; Said location analysis module is carried out weighted average calculation to primary importance signal and second place signal, obtains the shift value of revised moving body, and with the shift value of said moving body through output module output as a result.
Beneficial effect of the present invention: displacement detection system of the present invention is installed in two primary importance signal detection system and second place signal detection systems on the track respectively through two; Two detection systems correspond respectively to the moving displacement of moving body on two tracks; Just can analyze the reverse situation of moving body in motion process that obtain through two shift values that relatively obtain so; Thereby obtain revised displacement measurement, this is to be difficult to accomplish through a location detection system separately.The present invention is used to improve the reading stability and the self-checking capability of measuring system, eliminates simultaneously perhaps to reduce torsional error as far as possible.
Description of drawings
Fig. 1 is the structural drawing with displacement detection system of revising the torsional error function of the present invention;
The position view that Fig. 2 detects for the displacement detection system with correction torsional error function of the present invention in the ideal case;
Fig. 3 is the position view with displacement detection system of revising the torsional error function under the non-ideality.
Embodiment
In conjunction with Fig. 1 to Fig. 3 this embodiment is described; Have the displacement detection system of revising the torsional error function, this system comprises first master grating 101, second master grating 201, controlling of sampling module 10, primary importance signal detection system 21, second place signal detection system 22 and location analysis module 30;
Said location analysis module 30 receives the position signalling from primary importance signal detection system 21 and second place signal detection system 22; Said primary importance signal detection system 21 sends acquired signal with second place signal detection system 22 by 10 unifications of controlling of sampling module; Location analysis module 30 is carried out the shift value of weighted average calculation moving body 300 through analyzing relatively from the moving body 300 of the acquisition of primary importance signal detection system 21 and second place signal detection system 22 displacement signal with respect to first master grating 101 and second master grating 201 to two displacement signals.
The described primary importance signal detection system 21 of this embodiment is a photovoltaic cell arrays, and it is fixed on the moving body, and second place signal detection system 22 is a photovoltaic cell arrays, and it is fixed on the moving body.Any at least side has the absolute position signal detecting function in primary importance signal detection system 21 and the second place signal detection system 22.
Described first master grating 101 of this embodiment and second master grating 201 can be reflective gratings or transmission-type grating.The receiving chip of primary importance signal detection system 21 and second place signal detection system 22 can be silicon photocell or CCD.
In conjunction with Fig. 3 this embodiment is described further,, has certain reversing when there is certain movement warp in system; The angle of reversing is expressed as α in diagram, and primary importance signal detection system 21 and second place signal detection system 22 all move along separately track 100 and 200 respectively, along with reversing of moving body; Formed the form among Fig. 3, like this, made that the shift value that on two tracks, moves is inequality; After the position segmentation module through location analysis module 30; Reading corresponding to track 100 and track 200 is respectively X1 and X2, in conjunction with Fig. 2, supposes that groove 101 and 201 spacings on two tracks are expressed as L; Can obtain the moving body center according to position relation shown in Figure 3 and (suppose that in this example the shape of moving body and position are symmetrical with respect to two tracks; Like this central spot of moving body in the line of two track equidistance on, and not with twisting motion campaign, i.e. fixed point) shift value of the equidistant point of relative two tracks can be expressed as:
X＝(X1+X2)/2 ①
Torsion angle α can calculate through following formula:
α＝arctan[(X1-X2)/L] ②
Assume rectangle to the shape of moving body in this example for convenience, but do not influence the popularization of conclusion, suppose that moving body operation displacement is X, the reading of two read heads will be respectively so:
X1＝X+L*tan(α)/2 ③
X2＝X-L*tan(α)/2 ④
1. the position X of fixed point just can be expressed as formula like this, and the value that calculating formula obtains in 1. is independent of torsion angle α, and said α is very little deflection angle, for example the angle of α be 10 '.
The rationality of the above computing formula of following surface analysis,
Assume rectangle to the shape of moving body in this example for convenience, but do not influence the popularization of conclusion, suppose that it is X that moving body moves displacement, so the reading of two read heads will be respectively formula 3. with formula 4.
Such as, X1 equals 20.345mm, and X2 equals 20.355mm, and 1. to calculate X be 20.350mm to through type like this, and if L equals 200mm, then 2. through type calculates angle of deflection and equals 10.3 rads, and error has reduced about 5 microns.
So, in the present invention, only need a treatment circuit; Through increasing a frame of reference, two master gratings are fixed on two tracks, obtain two independently positional values through frame of reference; And, represent the position that system belongs to this position through the position that fixed point in the comparative analysis system belongs to, effectively overcome because moving body reverses errors caused; Simultaneously can monitor its torsional capacity through angle [alpha], measuring method is simple.This measuring method can effectively improve measuring accuracy and measuring reliability, and it is not high enough to be specially adapted to installation accuracy, and the demanding environment of measuring accuracy, and need not have very high overcritical for erecting equipment and method.
In addition, the measuring method among the present invention can also be used for following situation, the used track during as normal use the with a certain track; And an other track is used for check and correction position value; Only need carry out the detection of some cycles, during detection the measured value of last track revised, so just take into account alignment error simultaneously; Article one, the numerical value that obtains of track is the global error that has comprised the system except that frame of reference itself, and is not only the correction for grating chi itself.
Claims (5)
1. have the displacement detection system of revising the torsional error function, this system comprises first master grating (101), second master grating (201), controlling of sampling module (10), primary importance signal detection system (21), second place signal detection system (22) and location analysis module (30); It is characterized in that; Said controlling of sampling module (10) is sent acquired signal; Primary importance signal detection system (21) and second place signal detection system (22) are gathered with respect to the displacement signal on first master grating (101) and second master grating (201) moving body (300) respectively; Obtain primary importance signal and second place signal; Said location analysis module (30) is carried out weighted average calculation to primary importance signal and second place signal, obtains the shift value of revised moving body (300), and with the shift value of said moving body (300) through output module output as a result.
2. the displacement detection system with correction torsional error function according to claim 1; It is characterized in that; This system also comprises first track (100) and second track (200); (201 are separately fixed on first track (100) and second track (200), have at least in said first master grating (101) and second master grating (201) to indicate the pattern that absolute location information is arranged on the master grating for said first master grating (101) and second master grating.
3. the displacement detection system with correction torsional error function according to claim 1 and 2 is characterized in that said first master grating (101) and second master grating (201) are reflective gratings or transmission-type grating.
4. the displacement detection system with correction torsional error function according to claim 1; It is characterized in that; Said primary importance signal detection system (21) and second place signal detection system (22) are separately fixed on the moving body (300), and said primary importance signal detection system (21) and second place signal detection system (22) are photovoltaic cell arrays, CCD or CMOS.
5. the displacement detection system with correction torsional error function according to claim 1; It is characterized in that having at least a position signalling detection system to have the detecting function of absolute position signal in said primary importance signal detection system (21) and the second place signal detection system (22).
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103759660A (en) * | 2014-01-28 | 2014-04-30 | 广东工业大学 | Method for auxiliary installation and error compensation of absolute optical grating ruler |
| CN103868466A (en) * | 2014-02-08 | 2014-06-18 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN104567598A (en) * | 2014-12-31 | 2015-04-29 | 彩虹（合肥）液晶玻璃有限公司 | Device and method for measuring forming furnace-discharging deviation of liquid crystal substrate glass |
| CN108153234A (en) * | 2018-01-30 | 2018-06-12 | 中国工程物理研究院机械制造工艺研究所 | The full degree of freedom accuracy detecting device of lathe linear motion run mode |
| CN110530310A (en) * | 2019-08-26 | 2019-12-03 | 广西交通设计集团有限公司 | A kind of deep soil movement monitoring device and method |
| CN114132531A (en) * | 2022-01-28 | 2022-03-04 | 中国人民解放军32035部队 | Low-orbit space target orbit correction method and device and electronic equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20080094604A1 (en) * | 2006-09-01 | 2008-04-24 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
| CN102175147A (en) * | 2011-01-10 | 2011-09-07 | 昆山双虎电子科技有限公司 | Dynamic revising method of three-coordinate measuring machine |
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2011
- 2011-12-29 CN CN2011104494365A patent/CN102538685A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080094604A1 (en) * | 2006-09-01 | 2008-04-24 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
| CN102175147A (en) * | 2011-01-10 | 2011-09-07 | 昆山双虎电子科技有限公司 | Dynamic revising method of three-coordinate measuring machine |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103759660A (en) * | 2014-01-28 | 2014-04-30 | 广东工业大学 | Method for auxiliary installation and error compensation of absolute optical grating ruler |
| CN103759660B (en) * | 2014-01-28 | 2016-03-23 | 广东工业大学 | A kind of absolute grating ruler is auxiliary to be installed and error compensating method |
| CN103868466A (en) * | 2014-02-08 | 2014-06-18 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN103868466B (en) * | 2014-02-08 | 2017-05-17 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN104567598A (en) * | 2014-12-31 | 2015-04-29 | 彩虹（合肥）液晶玻璃有限公司 | Device and method for measuring forming furnace-discharging deviation of liquid crystal substrate glass |
| CN108153234A (en) * | 2018-01-30 | 2018-06-12 | 中国工程物理研究院机械制造工艺研究所 | The full degree of freedom accuracy detecting device of lathe linear motion run mode |
| CN108153234B (en) * | 2018-01-30 | 2023-08-04 | 中国工程物理研究院机械制造工艺研究所 | Full-freedom degree precision detection device for linear motion running state of machine tool |
| CN110530310A (en) * | 2019-08-26 | 2019-12-03 | 广西交通设计集团有限公司 | A kind of deep soil movement monitoring device and method |
| CN114132531A (en) * | 2022-01-28 | 2022-03-04 | 中国人民解放军32035部队 | Low-orbit space target orbit correction method and device and electronic equipment |
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Application publication date: 20120704 |