CN102522449B - 一种制备硅太阳能电池的磷扩散方法 - Google Patents
一种制备硅太阳能电池的磷扩散方法 Download PDFInfo
- Publication number
- CN102522449B CN102522449B CN201110378576.8A CN201110378576A CN102522449B CN 102522449 B CN102522449 B CN 102522449B CN 201110378576 A CN201110378576 A CN 201110378576A CN 102522449 B CN102522449 B CN 102522449B
- Authority
- CN
- China
- Prior art keywords
- phosphorus
- diffusion
- source
- temperature
- dry oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110378576.8A CN102522449B (zh) | 2011-11-24 | 2011-11-24 | 一种制备硅太阳能电池的磷扩散方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110378576.8A CN102522449B (zh) | 2011-11-24 | 2011-11-24 | 一种制备硅太阳能电池的磷扩散方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102522449A CN102522449A (zh) | 2012-06-27 |
CN102522449B true CN102522449B (zh) | 2014-06-18 |
Family
ID=46293302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110378576.8A Active CN102522449B (zh) | 2011-11-24 | 2011-11-24 | 一种制备硅太阳能电池的磷扩散方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102522449B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102737964B (zh) * | 2012-07-02 | 2015-02-11 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅片及其扩散方法 |
CN102758256B (zh) * | 2012-07-11 | 2015-04-22 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅片的磷扩散方法 |
CN103022265B (zh) * | 2013-01-10 | 2016-06-29 | 英利集团有限公司 | 太阳能电池片及其扩散方法 |
CN103199152B (zh) * | 2013-03-11 | 2016-05-25 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅片的磷扩散方法 |
CN103400897B (zh) * | 2013-07-30 | 2016-08-17 | 保定天威英利新能源有限公司 | 一种低表面杂质浓度的太阳能电池pn结的制备方法 |
CN104659151A (zh) * | 2015-02-09 | 2015-05-27 | 浙江晶科能源有限公司 | 一种太阳能电池扩散吸杂的方法 |
CN107086176A (zh) * | 2017-04-20 | 2017-08-22 | 通威太阳能(合肥)有限公司 | 一种扩散低表面浓度提效工艺 |
CN107437573A (zh) * | 2017-07-28 | 2017-12-05 | 浙江晶科能源有限公司 | 太阳能电池硅片的扩散方法、管式扩散炉、太阳能电池 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101404309A (zh) * | 2008-11-14 | 2009-04-08 | 中国科学院电工研究所 | 一种硅太阳电池发射极的扩散工艺 |
CN101419997A (zh) * | 2008-11-28 | 2009-04-29 | 宁波尤利卡太阳能科技发展有限公司 | 晶体硅太阳电池pn结的制备方法 |
CN101425549A (zh) * | 2008-10-13 | 2009-05-06 | 浙江弘晨光伏能源有限公司 | 晶体硅太阳能电池钝化与发射极(pn结)生产工艺 |
CN102005501A (zh) * | 2010-10-15 | 2011-04-06 | 苏州阿特斯阳光电力科技有限公司 | 制造太阳能电池的磷扩散方法 |
CN102097523A (zh) * | 2010-09-28 | 2011-06-15 | 常州天合光能有限公司 | 双次扩散选择性发射结硅太阳能电池的扩散工艺 |
-
2011
- 2011-11-24 CN CN201110378576.8A patent/CN102522449B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101425549A (zh) * | 2008-10-13 | 2009-05-06 | 浙江弘晨光伏能源有限公司 | 晶体硅太阳能电池钝化与发射极(pn结)生产工艺 |
CN101404309A (zh) * | 2008-11-14 | 2009-04-08 | 中国科学院电工研究所 | 一种硅太阳电池发射极的扩散工艺 |
CN101419997A (zh) * | 2008-11-28 | 2009-04-29 | 宁波尤利卡太阳能科技发展有限公司 | 晶体硅太阳电池pn结的制备方法 |
CN102097523A (zh) * | 2010-09-28 | 2011-06-15 | 常州天合光能有限公司 | 双次扩散选择性发射结硅太阳能电池的扩散工艺 |
CN102005501A (zh) * | 2010-10-15 | 2011-04-06 | 苏州阿特斯阳光电力科技有限公司 | 制造太阳能电池的磷扩散方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102522449A (zh) | 2012-06-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102522449B (zh) | 一种制备硅太阳能电池的磷扩散方法 | |
CN102593262B (zh) | 一种多晶硅选择性发射极太阳能电池的扩散方法 | |
CN104393107B (zh) | 一种高方阻晶体硅电池低压扩散工艺 | |
CN106057980B (zh) | 一种晶体硅太阳能电池的磷扩散方法 | |
CN101916799B (zh) | 一种晶体硅太阳能电池选择性发射结的制备方法 | |
CN102005502B (zh) | 一种改善太阳能电池磷扩散均匀性的方法 | |
CN104404626B (zh) | 物理冶金多晶硅太阳能电池的磷扩散方法 | |
CN102903619B (zh) | 一种实现深结低表面浓度的晶体硅扩散工艺 | |
CN107293617A (zh) | 一种高效低成本太阳能电池扩散工艺 | |
CN103618023A (zh) | 一种高方阻扩散工艺 | |
CN107331731A (zh) | 一种太阳能电池晶体硅片磷扩散方法 | |
CN102509748A (zh) | 一种降低冶金级硅太阳能电池暗电流的扩散工艺 | |
CN106856215A (zh) | 太阳能电池片扩散方法 | |
CN102005501A (zh) | 制造太阳能电池的磷扩散方法 | |
CN102130211B (zh) | 一种改善太阳能电池表面扩散的方法 | |
CN101494253B (zh) | 一种选择性发射极太阳电池制造过程中的重扩散和轻扩散工艺 | |
JP2024537419A (ja) | 半導体基板層の処理方法及び太陽電池の製造方法 | |
CN104868013A (zh) | 太阳能晶硅电池扩散工艺 | |
CN204668282U (zh) | 一种高温低压扩散装置 | |
CN103117328A (zh) | 冶金多晶硅片磷吸杂方法及该法制成的硅片和太阳能电池 | |
CN104269456A (zh) | 一种新型太阳电池p扩散吸杂的工艺 | |
CN108110090B (zh) | 一种n型双面电池制备方法 | |
CN103178157B (zh) | 一种选择性发射极多晶硅太阳电池的制备方法 | |
CN103094410A (zh) | 一种用于太阳能电池硅片的磷扩散控制方法 | |
CN104269466B (zh) | 一种硅片的硼掺杂方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215129 Suzhou high tech Zone, Jiangsu Province, Lu Shan Road, No. 199, No. Co-patentee after: Artes sunshine Power Group Co. Ltd. Patentee after: Suzhou Canadian Solar Inc. Address before: 215129 Suzhou high tech Zone, Jiangsu Province, Lu Shan Road, No. 199, No. Co-patentee before: Canadian (China) Investment Co., Ltd. Patentee before: Suzhou Canadian Solar Inc. |
|
CP01 | Change in the name or title of a patent holder | ||
CP03 | Change of name, title or address |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: 215129 199 deer Road, Suzhou hi tech Development Zone, Jiangsu, Suzhou Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
CP03 | Change of name, title or address |