CN102522302A - Manufacturing method for low-energy implantation mode switcher of ion implanter - Google Patents
Manufacturing method for low-energy implantation mode switcher of ion implanter Download PDFInfo
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- CN102522302A CN102522302A CN2010102434670A CN201010243467A CN102522302A CN 102522302 A CN102522302 A CN 102522302A CN 2010102434670 A CN2010102434670 A CN 2010102434670A CN 201010243467 A CN201010243467 A CN 201010243467A CN 102522302 A CN102522302 A CN 102522302A
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- low energy
- low
- piston
- way switch
- manufacturing approach
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Abstract
The invention relates to a manufacturing method for a low-energy implantation mode switcher of an ion implanter. A long-stroke insulated single-acting air cylinder is manufactured. One end of a low-energy power supply is connected with one end of the low-energy implantation mode switcher. A piston is connected with the other end of the low-energy implantation mode switcher by using a steel wire. The piston is used for controlling a circuit to be closed or opened and therefore the goal of switching a low-energy implantation mode is achieved.
Description
Technical field
The present invention relates to the manufacturing approach of low energy injection way switch.Further, the present invention relates to simple and economic cylinder manufacturing approach.Belong to semiconductor device manufacturing equipment field.
Background technology
In ion implantation technology, according to the difference of injecting element, the ionizing energy of requirement also is that gap is very big; Especially injecting in the position, four directions; 45 ° of injections of wafer rotation of waiting to annotate the people on the target platform once should guarantee implantation quality, and also high efficiency has just become the problem of necessary solution as far as possible.Owing to be power conversion, safety factor must be considered, will add tens-hundreds of kv voltage in the ion implantation technology usually, is safest method so regulate energy with pneumatic controller.According to energy requirement, only need control circuit switch starts or cuts out the low energy power supply, thereby reaches the purpose of the different elements of ionization.
Summary of the invention
The present invention discloses a kind of manufacturing approach of simple, economic low energy injection way switch.
A kind of manufacturing approach of low energy injection way switch comprises: an insulation bucket, two ends are sealed with crown cap, are sealed by sealing ring.One of them crown cap is equipped with spooler and has air taking port, and spooler is linked to each other by steel wire with piston rod, and another crown cap links to each other with the switch loam cake through screw thread.When being inflated by air taking port, piston is raised to loam cake one end, and the back that stops to supply gas is withdrawn into lower cover one end to piston by spooler, thereby reaches the purpose of control circuit closure and conducting.
Description of drawings
Below in conjunction with accompanying drawing and specific embodiment the present invention is done further introduction, but not as the qualification to patent of the present invention.
Fig. 1 is a slipper seal assembly sketch map.
Fig. 2 is three-dimensional slipper seal assembly cutaway view.
Fig. 3 is a three-dimensional micromodule top partial enlarged view.
Embodiment
Fig. 1 is a slipper seal assembly sketch map, and parts comprise: top cover 1, link 2, spring 3, bumping post 4, loam cake 5, switch bucket 6, piston 7, piston rod 8, steel wire 9, lower cover 10, spooler 11, magnet 12, magnetic switch 13.
Said top cover 1 uses insulating material PP, and top cover 1 is connected with link 2 usefulness screws.
Have inner chamber in the said link 2, spring 3 one ends link to each other with link 2 inner chambers, and an other end links to each other with bumping post 4, rise piston 7 cushioning effects.
Said link 2 is threaded with loam cake 5, and loam cake 5 has gas vent.
Said loam cake 5 is connected with switch bucket 6 usefulness screws, between loam cake 5 and the switch bucket 6 the O RunddichtringO is housed.
In the said switch bucket 6 piston 7 is housed, switch bucket 6 materials are PP, and piston 7 materials are PDEF, to guarantee insulation property and wear-resisting, compressive property.
Said piston 7 links to each other with spooler 11 with steel wire 9 through piston rod 8.
Said spooler 11 is used to make piston 7 when switch stops air feed, to get back to lower cover one end faster.
Said spooler 11 links to each other with lower cover 10 usefulness between centers screws.Lower cover 10 has air taking port, is used for the control piston position.
Said lower cover 10 is connected with switch bucket 6 usefulness screws, between lower cover 10 and the switch bucket 6 the O RunddichtringO is housed.
On the said piston 7 magnet 12 is housed, confirms piston 7 positions through magnetic switch 13.
The above elaborates content of the present invention.As far as persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from spirit of the present invention, it being done all constitutes the infringement to patent of the present invention, with corresponding legal responsibilities.
Claims (5)
1. the manufacturing approach of a low energy injection way switch, said low energy injection way switch utilizes the pneumatic control contactor, and it is characterized in that: controller housing is made by insulating material, and inside is metallic conductor, through pneumatic conducting or open circuit.
2. the manufacturing approach of claim 1 said low energy injection way switch, it is characterized in that: switch bucket two ends are sealed by sealing ring, wherein an end air feed.
3. the manufacturing approach of claim 1 said low energy injection way switch, it is characterized in that: piston is linked to each other with lower cover by steel wire.
4. the manufacturing approach of claim 1 said low energy injection way switch is characterized in that: the piston rod in the piston is a metal material.
5. the manufacturing approach of claim 1 said low energy injection way switch, it is characterized in that: controller loam cake and top cover are metal material, to guarantee conductivity and structural strength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102434670A CN102522302A (en) | 2010-08-02 | 2010-08-02 | Manufacturing method for low-energy implantation mode switcher of ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102434670A CN102522302A (en) | 2010-08-02 | 2010-08-02 | Manufacturing method for low-energy implantation mode switcher of ion implanter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102522302A true CN102522302A (en) | 2012-06-27 |
Family
ID=46293185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102434670A Pending CN102522302A (en) | 2010-08-02 | 2010-08-02 | Manufacturing method for low-energy implantation mode switcher of ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102522302A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192805A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
| CN114628195A (en) * | 2022-04-11 | 2022-06-14 | 北京烁科中科信电子装备有限公司 | Potential switching device suitable for site |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1398505A (en) * | 2000-02-11 | 2003-02-19 | 瓦里安半导体设备联合公司 | Methods and appts. for operating high energy accelerator in low energy mode |
| US6717079B2 (en) * | 2002-06-21 | 2004-04-06 | Varian Semiconductr Equipmentassociates, Inc. | Electrical switches and methods of establishing an electrical connection |
-
2010
- 2010-08-02 CN CN2010102434670A patent/CN102522302A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1398505A (en) * | 2000-02-11 | 2003-02-19 | 瓦里安半导体设备联合公司 | Methods and appts. for operating high energy accelerator in low energy mode |
| US6717079B2 (en) * | 2002-06-21 | 2004-04-06 | Varian Semiconductr Equipmentassociates, Inc. | Electrical switches and methods of establishing an electrical connection |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111192805A (en) * | 2018-11-15 | 2020-05-22 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
| CN111192805B (en) * | 2018-11-15 | 2024-06-11 | 北京中科信电子装备有限公司 | Pneumatic switching device of ion implanter |
| CN114628195A (en) * | 2022-04-11 | 2022-06-14 | 北京烁科中科信电子装备有限公司 | Potential switching device suitable for site |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120627 |