CN102519608A - Method for assembling microobjective on point-diffraction interferometer - Google Patents
Method for assembling microobjective on point-diffraction interferometer Download PDFInfo
- Publication number
- CN102519608A CN102519608A CN2011104090287A CN201110409028A CN102519608A CN 102519608 A CN102519608 A CN 102519608A CN 2011104090287 A CN2011104090287 A CN 2011104090287A CN 201110409028 A CN201110409028 A CN 201110409028A CN 102519608 A CN102519608 A CN 102519608A
- Authority
- CN
- China
- Prior art keywords
- microcobjective
- optical
- meniscus lens
- optical flat
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
A method for assembling a microobjective on a point-diffraction interferometer belongs to an interference measuring technology field. The assembling method comprises the following steps: fixing the microobjective on a main lens cone, adjusting an optical axis of the microobjective and a rotation shaft of a high precision lathe till the optical axis and the rotation shaft are superposed and turning an inner circle of the main lens cone; making that an excircle of a meniscus lens cone and an optical axis of a meniscus lens are coaxial; replacing an aperture plate by using an optical flat; making that the excircle of an optical flat seat is parallel to the optical axis of the optical flat; installing the meniscus lens and the optical flat into the main lens cone, pressing tightly through a clamping ring so that the microobjective, the meniscus lens and the optical axis of the optical flat are superposed and the assembling is completed; after reconstruction is completed, installing the aperture plate on a three-dimensional precision adjusting table and making the optical axis which is used to reconstruct the microobjective pass through the aperture on the aperture plate. The invention belongs to an improved invention. The commercialized microobjective is used to perform the reconstruction so that a processing period can be substantially shortened, processing cost can be greatly reduced and an image quality can be guaranteed.
Description
Technical field
The present invention relates to the interfere measurement technique field, particularly a kind of microcobjective is assemblied in the method in the point-diffraction interferometer.
Background technology
Fast-developing and application along with the high precision precision optical instrument; Require also increasingly high to optical system imaging quality; Especially extreme ultraviolet lithography (EUVL) is used, and operation wavelength is the wave band of 13～14nm, and optical element processing and detection technique are higher than traditional optical system requirements.In order to guarantee optical system imaging quality, accurately detection optical element surface surface figure accuracy and optical system wavefront aberration have become important link.
Based on interferometric principle, a variety of interferometers have been developed.Common double beam interferometer mainly contains safe graceful Green (Twyman Green) interferometer, Fei Suo (Fizeau) interferometer, savart (Savart) interferometer, corrugated shearing interferometer and phase shift point-diffraction interferometer etc.Optical component surface shape and optical system wavefront aberration that the phase shift point-diffraction interferometer is widely used in the extreme ultraviolet lithography detect.
In point-diffraction interferometer, laser expands bundle through beam expander, and through on the aperture of object lens focusing to the glass plate (aperture is transmission, is the chromium reflectance coating around the aperture), in order to obtain comparatively desirable spherical wave, aperture is usually less than 1um.The microcobjective of the microscope manufacturer production that more external popularity are higher is big with its numerical aperture, work is widely used in a lot of optical instruments apart from long and good imaging quality, in its various types of interferometers.Aperture plate in the point-diffraction interferometer is if its thinner thickness use business-like microcobjective very little to the picture element influence, but the aperture plate physical strength is lower, and aperture plate is unfavorable for clamping and damages easily; Aperture plate is if its thickness is thicker, and the aperture plate physical strength increases, and aperture plate is beneficial to clamping and is not easy and damages, but uses business-like microcobjective very big to the picture element influence, and disc of confusion suddenly gathers increase; If on aperture plate, process bellmouth, reduce partly thickness of the logical light of aperture plate, though reduced the influence of aperture plate thickness to image quality, its difficulty of processing is very big, surface shape quality will produce very big influence to the spherical wave quality of aperture.
Summary of the invention
In order to address the above problem, the invention provides and a kind of microcobjective is assemblied in the method in the point-diffraction interferometer, it has not only optimized the difficulty that the quality of microcobjective picture element in the interferometer has also been simplified the aperture plate process and assemble.
A kind of microcobjective is assemblied in the method in the point-diffraction interferometer, this method comprises the steps:
Step 1: be fixed on microcobjective on the body tube, adjustment microcobjective optical axis and smooth turning lathe rotating shaft overlap, circle in the turning body tube;
Step 2: make the mechanical axis of meniscus lens tube cylindrical and the light shaft coaxle of meniscus lens;
Step 3: replace aperture plate with optical flat, make optical flat seat cylindrical parallel with the optical flat optical axis;
Step 4: meniscus lens and the optical flat body tube of packing into, make microcobjective, meniscus lens and optical flat optical axis coincidence after compressing, assembling is accomplished;
Step 5: the point spread function of inspection institute transformation microcobjective, when reaching requirement, optical index then unloads optical flat, machine away the protruding part of optical flat seat;
Step 6: aperture plate is installed on the three-dimensional accurate adjustment platform, makes the optical axis of transforming microcobjective through the aperture on the aperture plate through adjustment.
The invention belongs to the property improved invention, adopt business-like microcobjective to transform, the process-cycle is shortened greatly, processing cost also significantly reduces, and picture element is also guaranteed preferably.
Description of drawings
A kind of installation drawing that microcobjective is assemblied in the method in the point-diffraction interferometer of Fig. 1 the present invention.
Among the figure: 1, body tube, 2, microcobjective, 3 meniscus lens, 4, optical flat, 5, the meniscus lens tube, 6, the optical flat seat, 7, spacer ring and 8, trim ring.
Embodiment
A kind of microcobjective is assemblied in the method in the point-diffraction interferometer, this transformation microcobjective comprises: body tube 1, microcobjective 2, meniscus lens 3 and optical flat 4; Said microcobjective 2 is installed in body tube 1 the inside; Meniscus lens 3 is fixed on the body tube 1; Their optical axis is coaxial, and said optical flat 4 is fixed on the body tube 1, the mechanical axis of body tube 1 and microcobjective 2, meniscus lens 3, optical flat 4 optical axis coincidences; Said meniscus lens 3 is fixed on the body tube 1 and through spacer ring 7 through meniscus lens tube 5 and guarantees meniscus lens 3 and microcobjective 2 optical intervals, and optical flat 4 is fixed on the body tube 1 through optical flat seat 6.。
A kind of microcobjective is assemblied in the method in the point-diffraction interferometer, this method comprises the steps:
Step 1: at first be fixed on microcobjective 2 on the body tube 1, through centrescope observation, adjustment microcobjective 2 optical axises and smooth turning lathe rotating shaft overlap, circle in the turning body tube 1;
Step 2: join car through centering and make the mechanical axis of meniscus lens tube 5 cylindricals and the light shaft coaxle of meniscus lens 3;
Step 3: replace aperture plate with optical flat 4; Optical flat 4 physical dimension are identical with aperture plate; Do not have the aperture plate center less than chromium plating reflectance coating around 1 micron aperture and the aperture, join car through centering and make optical flat seat 6 cylindricals parallel with optical flat 4 optical axises;
Step 4: meniscus lens 3, optical flat 4 body tube 1 of packing into, compress through trim ring 8, make microcobjective 2, meniscus lens 3 and optical flat 4 optical axis coincidences, guarantee optical interval between microcobjectives 2 and the meniscus lens 3 through reconditioning spacer ring 7, assembling is accomplished;
Step 5: the point spread function of transforming inspection institute transformation microcobjective after accomplishing; When optical index unloads optical flat during near diffraction limit, on lathe, machine away the optical flat seat in the part of transforming the microcobjective raising, or with spacer ring replacement optical flat seat;
Step 6: aperture plate is installed on the three-dimensional accurate adjustment platform, makes the optical axis of transforming microcobjective through the aperture on the aperture plate through adjustment.
Claims (4)
1. one kind is assemblied in the method in the point-diffraction interferometer with microcobjective, and this method comprises the steps:
Step 1: be fixed on microcobjective (2) on the body tube (1), adjustment microcobjective (2) optical axis and smooth turning lathe rotating shaft overlap, circle in the turning body tube (1);
Step 2: make the mechanical axis of meniscus lens tube (5) cylindrical and the light shaft coaxle of meniscus lens (3);
Step 3: replace aperture plate with optical flat (4), make optical flat seat (6) cylindrical parallel with optical flat (4) optical axis;
Step 4: meniscus lens (3) and optical flat (4) body tube (1) of packing into, make microcobjective (2), meniscus lens (3) and optical flat (4) optical axis coincidence after compressing, assembling is accomplished;
Step 5: the point spread function of inspection institute's transformation microcobjective (2), when reaching requirement, optical index then unloads optical flat (4), machine away the protruding part of optical flat seat (6);
Step 6: aperture plate is installed on the three-dimensional accurate adjustment platform, makes the optical axis of transforming microcobjective (2) through the aperture on the aperture plate through adjustment.
2. as claimed in claim 1ly a kind of microcobjective is assemblied in the method in the point-diffraction interferometer, it is characterized in that having reconditioning spacer ring (7) between microcobjective (2) and the meniscus lens (3), guarantee the optical interval between microcobjective (2) and the meniscus lens (3).
3. as claimed in claim 1ly a kind of microcobjective is assemblied in the method in the point-diffraction interferometer, it is characterized in that there is the aperture less than 1 micron at said aperture plate center, chromium plating reflectance coating around the aperture.
4. as claimed in claim 1ly a kind of microcobjective is assemblied in the method in the point-diffraction interferometer, it is characterized in that said optical flat (4) physical dimension is identical with aperture plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110409028 CN102519608B (en) | 2011-12-09 | 2011-12-09 | Method for assembling microobjective on point-diffraction interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110409028 CN102519608B (en) | 2011-12-09 | 2011-12-09 | Method for assembling microobjective on point-diffraction interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102519608A true CN102519608A (en) | 2012-06-27 |
| CN102519608B CN102519608B (en) | 2013-04-17 |
Family
ID=46290607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110409028 Expired - Fee Related CN102519608B (en) | 2011-12-09 | 2011-12-09 | Method for assembling microobjective on point-diffraction interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102519608B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330866A (en) * | 2014-11-25 | 2015-02-04 | 中国航空工业集团公司洛阳电光设备研究所 | Optical lens assembly method |
| CN105241393A (en) * | 2015-09-24 | 2016-01-13 | 南京理工大学 | High-precision portable optical surface three-dimensional morphology online detector |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158414A (en) * | 1996-02-29 | 1997-09-03 | 中国科学院上海光学精密机械研究所 | Detecting system and method for surface microstructure |
| CN2380579Y (en) * | 1999-05-25 | 2000-05-31 | 中国科学院力学研究所 | Real-time displaying diagnosis apparatus for crystal growth course |
| WO2003052345A1 (en) * | 2001-12-18 | 2003-06-26 | Massachusetts Institute Of Technology | System and method for measuring optical distance |
| KR100772557B1 (en) * | 2006-06-15 | 2007-11-02 | 경북대학교 산학협력단 | Apparatus for measurement based on micro-optic mach-zehnder interferometer |
-
2011
- 2011-12-09 CN CN 201110409028 patent/CN102519608B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1158414A (en) * | 1996-02-29 | 1997-09-03 | 中国科学院上海光学精密机械研究所 | Detecting system and method for surface microstructure |
| CN2380579Y (en) * | 1999-05-25 | 2000-05-31 | 中国科学院力学研究所 | Real-time displaying diagnosis apparatus for crystal growth course |
| WO2003052345A1 (en) * | 2001-12-18 | 2003-06-26 | Massachusetts Institute Of Technology | System and method for measuring optical distance |
| KR100772557B1 (en) * | 2006-06-15 | 2007-11-02 | 경북대학교 산학협력단 | Apparatus for measurement based on micro-optic mach-zehnder interferometer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330866A (en) * | 2014-11-25 | 2015-02-04 | 中国航空工业集团公司洛阳电光设备研究所 | Optical lens assembly method |
| CN105241393A (en) * | 2015-09-24 | 2016-01-13 | 南京理工大学 | High-precision portable optical surface three-dimensional morphology online detector |
| CN105241393B (en) * | 2015-09-24 | 2018-11-13 | 南京理工大学 | High-accuracy portable optical surface three-dimensional appearance on-line detector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102519608B (en) | 2013-04-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Chen et al. | Measurement of freeform optical surfaces: trade‐off between accuracy and dynamic range | |
| CN101876540B (en) | Nonspherical absolute measuring system based on multiwave front lens compensator | |
| CN102829733B (en) | Fringe contrast ratio-adjustable large-numerical value bore diameter point-diffraction interference device and method | |
| WO2012008031A1 (en) | Method and apparatus for measuring shape of surface to be inspected, and method for manufacturing optical element | |
| CN107990838B (en) | Cone mirror and cylindrical mirror surface shape measuring device and measuring method | |
| JP2011196954A (en) | Method and device for measuring aspherical surface object | |
| CN111367045B (en) | Wide spectrum spherical transmission standard mirror | |
| JP2010281792A (en) | Method and apparatus for measuring aspherical surface object | |
| CN108061514B (en) | Dynamic modeling method for detecting aspheric surface by using axial scanning light interferometry | |
| Langehanenberg et al. | Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics | |
| CN102519608B (en) | Method for assembling microobjective on point-diffraction interferometer | |
| CN111352207B (en) | Optical machine adjusting method based on card type optical system | |
| CN113739719B (en) | Surface shape detection system and method of high-precision Schmidt correction plate | |
| CN103246041A (en) | Objective lens assembly process | |
| CN112902875B (en) | Aspheric reflector curvature radius detection device and method | |
| CN102519611A (en) | Light path sharing axial shear digital wave surface interferometer | |
| KR20110065365A (en) | Method and apparatus for measuring aspherical body | |
| CN113465540B (en) | Phase shifting method for aperture plate for pinhole point diffraction interferometry system | |
| Schillke | Critical aspects of testing aspheres in interferometric setups | |
| US8294904B2 (en) | Fizeau lens having aspheric compensation | |
| Pariani et al. | Approaches to the interferometric test of large flat mirrors: the case of the adaptive M4 for E-ELT | |
| CN110823127A (en) | Non-cylindrical surface shape interference measurement system and method based on cylindrical surface partial compensator | |
| CN102878956A (en) | Equal thickness interference method based centering error measuring device | |
| JP2017513043A (en) | A method for setting tolerances on optical surfaces using local pupil regions | |
| Rhee et al. | Performance evaluation of laser lithographic machine for computer-generated hologram |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130417 Termination date: 20141209 |
|
| EXPY | Termination of patent right or utility model |