CN102515183A - Method and device for treating chlorosilane liquid produced in polysilicon production - Google Patents
Method and device for treating chlorosilane liquid produced in polysilicon production Download PDFInfo
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- CN102515183A CN102515183A CN2011104053199A CN201110405319A CN102515183A CN 102515183 A CN102515183 A CN 102515183A CN 2011104053199 A CN2011104053199 A CN 2011104053199A CN 201110405319 A CN201110405319 A CN 201110405319A CN 102515183 A CN102515183 A CN 102515183A
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Abstract
The invention relates to a method and a device for treating a chlorosilane liquid produced in polysilicon production. The method provided by the invention comprises the following step of feeding a chlorosilane liquid into a tube-type filter, carrying out filtration, discharging intercepted solid impurities into a closed slagging tank, feeding air into the closed slagging tank, and heating the closed slagging tank so that the solid impurities in the closed slagging tank undergo chemical reactions to produce silica powder and hydrogen chloride gas. The device provided by the invention comprises the tube-type filter with a liquid inlet, a liquid outlet and a slag removal opening. The slag removal opening is located at the bottom of the tube-type filter. The slag removal opening is communicated with the closed slagging tank located below the tube-type filter. The closed slagging tank is provided with an air inlet, a gas outlet and a fixing discharge opening. The fixing discharge opening is located at the bottom of the closed slagging tank. An auxiliary heating system is arranged outside the closed slagging tank. The device provided by the invention can realize filtration of a chlorosilane liquid by the tube-type filter, harmless treatment on filtered and intercepted solid impurities, high filtration efficiency, and environmentally friendly, safe and stable operation.
Description
Technical field
The present invention relates to the production of polysilicon, the treatment process and the device of the chlorosilane liquid in specifically a kind of production of polysilicon.
Background technology
Polysilicon is the important foundation starting material that develop microelectronic industry and solar energy industry now, is to stride multidisciplinary, multi-field new high-tech products such as chemical industry, metallurgy, machinery, electronics.
Along with the fast development of photovoltaic industry, the demand of polysilicon is increased rapidly, China is as the maximum polysilicon area of consumption in the whole world, and supply falls short of demand always at the domestic polysilicon of China.Chinese in recent years domestic many fairly large polysilicon projects of having built, some small-scale relatively polysilicon projects of having built are also in continuous enlarging.The polysilicon industry has obtained develop rapidly in recent years.
Chlorosilane liquid is most important material in the production technique of polysilicon; Chlorosilane mainly generates in three operations; Trichlorosilane synthesis procedure, trichlorosilane reduction operation and hydrogenation of silicon tetrachloride operation; Be stored in respectively in raw chlorsilane storage tank, reduction chlorosilane storage tank and the hydrogenation chlorosilane storage tank at the chlorosilane liquid that these operations are separated, extract out with pump then, send in the different rectifying tower of chlorosilane separation purification process; Separate the purification trichlorosilane, trichlorosilane is the important source material that generates polysilicon.
The major ingredient of chlorosilane liquid is trichlorosilane TCS, silicon tetrachloride STC, a spot of hydrogen chloride gas and some solid impurities, and these solid impurities mainly are silica flour and FeCl
2The existence of these solid impurities directly influences the quality and the purification efficiency of post-order process.
Traditional treatment process is on the chlorosilane liquid line, deep bed filter to be installed, and is used for filtering separation solid impurity wherein.But because the solid impurity content in the liquid is more relatively, very big even deep bed filter is done, filter bag also very soon can be blocked, need frequently open strainer and change filter bag.The chlorosilane liquid that contains silica flour runs into air and will burn rapidly, and the solid impurity that is filtered also can detonation, intractable, and Peril Incident often appears in chlorosilane liquid filtering station, and personnel's phenomenon of being burnt also happens occasionally.So chlorosilane liquid be processed into the production difficult problem that each production of polysilicon producer need capture.
There are a lot of manufacturers to adopt multiple devices to be in parallel installed with now; Several modes that are equipped with of one usefulness are operated, both deep bed filter on-line filtrations, and other several strainer off-lines feed safe substitution gas; Filter cover is opened in the filter interior gas displacement later on; Vacant again for some time, think that filter bag is changed in the back manual work safely, the slag body that is filtered is out sealed landfill.This operating method than the mode safety of separate unit strainer work many, but this configuration device quantity is many, it is big to take up an area of the space, the maintenance of the equipment personnel increase, the consumptive material consumption is big, maintenance cost is high.This scheme also can go wrong sometimes unavoidably.In this chemical plant, a bit little fire just possibly cause great misfortune, and this also is one of polysilicon factory reason that accident often occurs.
Along with the develop rapidly of domestic polysilicon industry, the continuous expansion of scale, output, the safety and the environmental issue that occur in the consequent polysilicon production process also become increasingly conspicuous.It is more and more important that the improvement of the pollutent of discharging in the production of polysilicon also becomes.Some undressed chlorosilanes are poisonous and harmful liquid or the gas with severe corrosive, and are very big to safety and environmental hazard.Therefore, safe, effective, the stable treated technology of chlorosilane liquid have become one of bottleneck of being badly in need of solution in the whole polysilicon industrial chain.
Summary of the invention
The present invention is directed to the problems referred to above, the treatment process of the chlorosilane liquid in the production of polysilicon of a kind of safety, environmental protection is provided, for this reason, the present invention also provides a kind of device of this treatment process of application.
According to technical scheme of the present invention: the treatment process of the chlorosilane liquid in a kind of production of polysilicon; Chlorosilane liquid is admitted to pipe filter and filters; Chlorosilane liquid after the filtration gets into the subsequent handling of production of polysilicon; Tackled the solid impurity that gets off by pipe filter and enter closed deslagging jar, in the deslagging jar, feed an amount of air and heat the deslagging jar, make the solid impurity generation chemical reaction in the deslagging jar generate SiO 2 powder and hydrogen chloride gas.
Said hydrogen chloride gas is admitted to the hydrochloric acid cuvette, and circulation absorbs processes hydrochloric acid soln.
The treatment unit of the chlorosilane liquid in a kind of production of polysilicon; Comprise the pipe filter that has liquid inlet, liquid exit and slag-drip opening; Said slag-drip opening is positioned at the bottom of said pipe filter, and said slag-drip opening is connected with the deslagging jar that is positioned at said pipe filter below, and said deslagging jar is provided with gas inlet, pneumatic outlet and fixed discharge mouth; Said fixed discharge mouth is positioned at the bottom of said deslagging jar, and said deslagging jar is outside equipped with auxiliary heating system.
The pneumatic outlet of said deslagging jar communicates with the hydrochloric acid cuvette.
Said pipe filter comprises and is arranged on intravital at least two collector tubes of filter cartridge; Suspention has at least two filtering elements on the every said collector tube; Every said filtering element comprises a pipe core of not holing and the circulating tube of holing around the six roots of sensation of said pipe core, and the periphery of said six roots of sensation circulating tube is enclosed with filter cloth.
Said pipe filter links to each other with back-purge system; Said back-purge system comprises first backwash valve, surplus valve and the vent valve that is arranged on said pipe filter top; And be installed in every second backwash valve on the said collector tube drain pipe, communicate with anti-purge gas inlet after said second backwash valve and the said first backwash valve parallel connection.
Be provided with transducer between said collector tube drain pipe and the said pipe filter.
Said pipe filter is provided with safe gas displacement valve, and said safe gas displacement valve links to each other with the safe gas exchange system.
Said pipe filter is provided with two, is connected in parallel.
Said pipe filter links to each other with full-automatic control system.
Technique effect of the present invention is: the present invention effectively filters chlorosilane liquid through pipe filter, removes solid impurity wherein, and the dangerous impurity that is filtered interception has been carried out harmless treatment; Total system total closed type operation, the filtering element long service life does not have dangerous operating mode and takes place, and has solved for a long time that chlorosilane liquid is difficult to a Treatment Technology difficult problem, has reached filtration efficiency height, environmental protection, safety, aim of stable operation.
Description of drawings
Fig. 1 is the technical process schematic block diagram of the treatment process among the present invention.
Fig. 2 is the structural representation of the treatment unit among the present invention.
Embodiment
Be further described below in conjunction with the accompanying drawing specific embodiments of the invention.
Among Fig. 2, comprise that bottom residual cake valve 1, raffinate return valve 2, feed liquor valve 3, pipe filter 4, filtering element 5, collector tube 6, surplus valve 7, steam supply valve 8, feed water valve 9, first backwash valve 10, vent valve 11, transducer 12, second backwash valve 13, liquid-outlet valve 14, safe gas displacement valve 15, hydrogen chloride gas outlet valve 16, deslagging jar 17, silicon-dioxide bleed valve 18, auxiliary heating system 19, gas inlet valve 20 etc.
The present invention adopts pipe filter that chlorosilane liquid is carried out filtration treatment, and it is 200820057362.4 that the structure of this pipe filter adopts the patent No., and patent name is the Chinese utility model patent of " a kind of catalyst recovery strainer ".
As shown in Figure 1, be the technical process schematic block diagram of the treatment process of the chlorosilane liquid in a kind of production of polysilicon.This treatment process is: chlorosilane liquid to be filtered is admitted to pipe filter and filters; The chlorosilane liquid of the cleaning after the filtration gets into the subsequent handling of production of polysilicon; Being tackled the solid impurity that gets off by pipe filter discharges from filter bottom; Directly enter closed deslagging jar; In the deslagging jar, feed an amount of air and, make solid impurity and the oxygen generation chemical reaction in the middle of the air in the deslagging jar generate stable SiO 2 powder and more purified hydrogen chloride gas through assisted heating device heating deslagging jar.SiO 2 powder can have multiple use, recycles like the compound as cement.Hydrogen chloride gas is admitted to the hydrochloric acid cuvette, and circulation absorbs that to process concentration be that about 30% hydrochloric acid soln is recycled a small amount of unabsorbed other gas qualified discharge after neutralizing treatment.This processing is simple to operate, easy to maintenance, does not have dangerous, pollution-free.
As shown in Figure 2, be the treatment unit of the chlorosilane liquid in a kind of production of polysilicon, comprise pipe filter 4.Pipe filter 4 can be arranged to the separate unit non-stop run, at this moment will online deslagging, can only discharge the slag body of pulp-like.Chlorosilane liquid is kept to greatest extent, will make the residue liquid content that is filtered minimum, the filter cake of formation is the most dried, promptly so-called dry residue emission; Just can only the off-line deslagging, so strainer is typically provided to many parallel connections, work with the mode that several usefulness one are equipped with; Be provided with two in the present embodiment, be connected in parallel, the using and the reserved; A strainer on-line filtration job, another strainer off-line deslagging back flushing, the filter cake thorough drying that the filter core outside surface is formed; Only keep solid impurity wherein, chlorosilane liquid small amount of residual, approximate dry residue emission.
Pipe filter 4 is provided with liquid inlet, liquid exit and slag-drip opening.Chlorosilane liquid communicates through the liquid inlet of feed liquor valve 3 with pipe filter 4; Liquid exit communicates with subsequent handling through liquid-outlet valve 14; Slag-drip opening is positioned at the bottom of pipe filter 4, is connected with the deslagging jar 17 that is positioned at pipe filter 4 belows through bottom residual cake valve 1.The bottom of strainer 4 also is provided with raffinate and returns valve 2, links to each other with the raffinate storage tank.Deslagging jar 17 is provided with the gas inlet that has gas inlet valve 20, have the pneumatic outlet of hydrogen chloride gas outlet valve 16 and have the fixed discharge mouth of silicon-dioxide bleed valve 18, and the fixed discharge mouth is positioned at the bottom of deslagging jar 17.The pneumatic outlet of deslagging jar 17 communicates with the hydrochloric acid cuvette.Deslagging jar 17 is outside equipped with auxiliary heating system 19.
Pipe filter 4 comprises and is arranged on intravital at least two collector tubes 6 of filter cartridge that suspention has at least two filtering elements 5 on the every collector tube 6.Every filtering element 5 is made up of two portions, and inside is the metal pipe type structure of 6+1 formula, comprises a pipe core of not holing and around the circulating tube of the six roots of sensation boring of pipe core, both as support frame, again as chimney filter; The outside is to be wrapped in the peripheral filter cloth of six roots of sensation circulating tube, and filter cloth is actual filtration medium, makes its sealing be fastened on the surface of filtering element with special-purpose clip.The advantage of this structure is the advantage that filtering accuracy is high, filtration efficiency is high of existing nonmetal filter cloth; Have very high intensity and impact resistance again, 6 inner tubular constructions make the filter cloth can not be fully and the applying of interior metal pipe; Be more conducive to the blowback shake, row unloads filter cake.This special tubular structure makes that being higher than the above liquid of filtering element can all be filtered away, filters more fully, do not waste mother liquor, and the filter residue liquid content also reaches minimum, the minimizing wastage of material.When strainer 4 begins to filter work; Filtrating gets into filtering element 5 inside from the outside of filtering element 5; Solid impurity is intercepted at the filter cloth outside surface and forms filter cake, and clean filtrating flows to collector tube 6 from the top of filtering element 5, from the outlet discharge filter 4 of collector tube 6 connections.
Pipe filter 4 links to each other with back-purge system, can make strainer 4 long-term automatic operations, does not need often to open strainer 4 and changes filtering element 5, makes total system remain airtight operation, makes not ingress of air of chlorosilane liquid, and non-detonating is dangerous.Back-purge system comprises first backwash valve 10, surplus valve 7 and the vent valve 11 that is arranged on pipe filter 4 tops, and is installed in second backwash valve 13 on every collector tube 6 drain pipes.Second backwash valve 13 communicates with anti-purge gas inlet through steam supply valve 8 with after first backwash valve 10 is parallelly connected, and entering the mouth with backwash water through feed water valve 9 communicates.Also be provided with safe gas displacement valve 15 on the pipe filter 4, safe gas displacement valve 15 links to each other with the safe gas exchange system.
Pipe filter 4 links to each other with full-automatic control system.The shared cover PLC system of the automatic control of all devices among the present invention also can focus in the DCS system of whole project and unify red-tape operati.Native system has been installed transducer 12 between the drain pipe of the admission chamber of pipe filter 4 and collector tube 6.Filtration, blowback, tapping process have differential pressure and time two kinds of master modes.From feed liquor, filter that liquid-solid separation, row raffinate, filtration cakes torrefaction, blowback filter cake come off, deslagging, filter residue generate silicon-dioxide powder and hydrogen chloride gas with air reaction, the silicon-dioxide powdery collection packs and hydrogen chloride gas is discharged to the absorption tower; Whole flow process full automatic control; The fully-closed operation; There are not any leakage and environmental pollution, safe and convenient operation.
As shown in Figure 2, the working process of the treatment unit among the present invention is following: when strainer A is filtering work, and the back flushing of filter B deslagging, back flushing finishes the back standby.When strainer A begins to filter, open the surplus valve 7 and the vent valve 11 of feed liquor valve 3, filter top earlier, other valve all is in closing condition; Chlorosilane liquid makes chlorosilane liquid be full of strainer 4, when riser has overflow liquid through the inside of feed liquor valve 3 entering strainers 4; Closing outflow valve 7 and vent valve 11; Open liquid-outlet valve 14, chlorosilane liquid is tackled outside surface at filtering element 5 by filtering element 5 with the solid impurity in the chlorosilane liquid through filtering element 5; The chlorosilane liquid of the cleaning that is filtered enters into collector tube 6 through filtering element 5, again from liquid-outlet valve 14 discharge filters 4.Along with the increase of filtration time, the solid impurity of being tackled is more and more, and solid impurity gathers the formation filter cake at the outside surface of filtering element 5.Along with filter cake constantly thickens, the pressure reduction between the admission chamber of strainer 4 and fluid pipeline is also increasing, and when filter cake reached certain thickness, pressure reduction reached set(ting)value, and strainer A stops to filter, and filter B begins to filter.Strainer A begins deslagging, closes liquid-outlet valve 14, opens raffinate and returns valve 2, steam supply valve 8, first backwash valve 10; In strainer 4, feed nitrogen and send the residual stoste of strainer A bottom back to head tank, close raffinate and return valve 2, open liquid-outlet valve 14; Continue to feed nitrogen, liquid contained in the filter cake is extruded, form the very low dried filter cake of liquid content; At this moment, a part of filter cake is shed to strainer 4 bottoms voluntarily owing to season cracking.Close the liquid-outlet valve 14 and first backwash valve 10; Open second backwash valve 13 and bottom residual cake valve 1; The reverse nitrogen that feeds is from filtering element 5 inner outwards blowbacks; Filtering element 5 outside filter clothes are shaken, and some residual filter cakes can be shed to strainer 4 bottoms by blowback, and these slag bodies are discharged in the deslagging jar 17 through bottom residual cake valve 1.
After the solid particulate that is filtered interception is discharged into deslagging jar 17, close bottom residual cake valve 1, open gas inlet valve 20; Bubbling air is opened auxiliary heating system 19 simultaneously, to 17 heating of deslagging jar; Make the temperature in the deslagging jar 17 reach design temperature, close auxiliary heating system 19, solid particulate in the deslagging jar 17 and airborne oxygen reaction generate stable SiO 2 powder and hydrogen chloride gas; Open hydrogen chloride gas outlet valve 16, hydrogen chloride gas is discharged into the hydrochloric acid cuvette.After reaction finishes, continue to feed the air of for some time, the hydrogen chloride gas in the deslagging jar 17 is discharged from; Close hydrogen chloride gas outlet valve 16; Open silicon-dioxide bleed valve 18, the SiO 2 powder that generates is entered packing bag, after packing, can deliver to cement mill etc. and locate recycling.
When filtering element 5 through behind the blowback deslagging several times, the porosity of the filter cloth that filtering element 5 is outside can descend, and needs cleaning down.Open feed water valve 9, second backwash valve 13, vent valve 11 and raffinate and return valve 2; Close other valve; Feed the backwash water of for some time to filtering element 5 inside from collector tube 6; From the filtering element 5 inner filter clothes that outwards clean, solid impurity residual in the filter cloth hole is gone out by recoil, take off strainer 4 bottoms with backwash water.Close second backwash valve 13; Open first backwash valve 10; Feed backwash water; To filtering element 5 outside flushing filter clothes, can along with backwash water drop to strainer 4 bottoms attached to the solid impurity outside the filter cloth from strainer 4 tops, these backwash liquors that contain solid impurity return valve 2 through raffinate and are discharged in the raffinate pipeline.
When the filter cloth outside maintenance strainer 4 or the replacing filtering element 5, need open strainer 4, need open the safe gas exchange system this moment earlier, and strainer 4 gas inside are replaced fully.Open vent valve 11 and safe gas displacement valve 15; Other valve is all closed, and feeds safe gas, and system begins gas displacement; Up to setting-up time; Strainer 4 gas inside are closed vent valve 11 and safe gas displacement valve 15 all by after the safe gas displacement, and strainer 4 just can be opened the filter cloth that overhauls or change outside the filtering element 5.The safe gas exchange system can prevent deflagration phenomenon, prevents that operator from coming to harm.
The present invention effectively filters chlorosilane liquid through pipe filter, has removed solid impurity wherein, and the dangerous impurity that is filtered interception has been carried out harmless treatment; Adopt the pipe filter of special construction; Make the operation of total system total closed type, accomplished the processing of full-automatic back washing and automatic slagging, the filtering element long service life; Need not frequent replacing; Do not have dangerous operating mode and take place, solved for a long time that chlorosilane liquid is difficult to a Treatment Technology difficult problem, reached filtration efficiency height, environmental protection, safety, aim of stable operation.
The present invention compared with prior art has the following advantages:
1, the present invention utilizes pipe filter to filter the solid impurity in the interception chlorosilane liquid, and filtration efficiency can reach more than 99.5%, and filtration efficiency is high.
2, filtering system is a totally enclosed full-automatic back washing filtering system; The totally-enclosed fully automatic operation of total system in filtration procedure, the pressure reduction that leans on system with control deslagging working time or filtering element carried out back flushing, the work-ing life of prolongation filtering element; Do not need the frequent change filtering element; Guarantee do not have to leak, avoided often opening strainer and cause danger, guarantee the environmental protection of work on the spot clean environment.
3, the present invention can filter chlorosilane liquid to greatest extent, and can accomplish does not have the raffinate dry residue emission, does not waste stoste, reduces financial loss.
4, filtering element adopts the composite tube type structure, and intensity is high, and shock-resistant, good mechanical property is easy to form cake layer, also is easy to the anti-filter cloth that cleans.
Chemical reaction takes place and generates more purified silicon-dioxide (SiO in the filter residue that 5, is filtered interception in the deslagging jar
2) powder and hydrogenchloride (HCl) gas, silicon-dioxide can be as the material of dosing of industries such as building, and hydrogen chloride gas is admitted to cuvette, and the hydrochloric acid soln that utilizes the water circulation system absorption to can be made into 30% above concentration is recycled, and can create certain economic and be worth.
Claims (10)
1. the treatment process of the chlorosilane liquid in the production of polysilicon; It is characterized in that: chlorosilane liquid is admitted to pipe filter and filters; Chlorosilane liquid after the filtration gets into the subsequent handling of production of polysilicon; Tackled the solid impurity that gets off by pipe filter and enter closed deslagging jar, in the deslagging jar, feed an amount of air and heat the deslagging jar, make the solid impurity generation chemical reaction in the deslagging jar generate SiO 2 powder and hydrogen chloride gas.
2. according to the treatment process of the chlorosilane liquid in the described production of polysilicon of claim 1, it is characterized in that: said hydrogen chloride gas is admitted to the hydrochloric acid cuvette, and circulation absorbs processes hydrochloric acid soln.
3. the treatment unit of the chlorosilane liquid in the production of polysilicon; Comprise the pipe filter (4) that has liquid inlet, liquid exit and slag-drip opening; Said slag-drip opening is positioned at the bottom of said pipe filter (4); Said slag-drip opening is connected with the deslagging jar (17) that is positioned at said pipe filter (4) below; Said deslagging jar (17) is provided with gas inlet, pneumatic outlet and fixed discharge mouth, and said fixed discharge mouth is positioned at the bottom of said deslagging jar (17), and said deslagging jar (17) is outside equipped with auxiliary heating system (19).
4. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 3, it is characterized in that: the pneumatic outlet of said deslagging jar (17) communicates with the hydrochloric acid cuvette.
5. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 3; It is characterized in that: said pipe filter (4) comprises and is arranged on intravital at least two collector tubes of filter cartridge (6); Every said collector tube (6) is gone up suspention has at least two filtering elements (5); Every said filtering element (5) comprises a pipe core of not holing and the circulating tube of holing around the six roots of sensation of said pipe core, and the periphery of said six roots of sensation circulating tube is enclosed with filter cloth.
6. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 5; It is characterized in that: said pipe filter (4) links to each other with back-purge system; Said back-purge system comprises first backwash valve (10), surplus valve (7) and the vent valve (11) that is arranged on said pipe filter (4) top; And being installed in second backwash valve (13) on every said collector tube (6) drain pipe, said second backwash valve (13) communicates with anti-purge gas inlet with said first backwash valve (10) parallel connection back.
7. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 5, it is characterized in that: be provided with transducer (12) between said collector tube (6) drain pipe and the said pipe filter (4).
8. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 3; It is characterized in that: said pipe filter (4) is provided with safe gas displacement valve (15), and said safe gas displacement valve (15) links to each other with the safe gas exchange system.
9. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 3, it is characterized in that: said pipe filter (4) is provided with two, is connected in parallel.
10. according to the treatment unit of the chlorosilane liquid in the described production of polysilicon of claim 3, it is characterized in that: said pipe filter (4) links to each other with full-automatic control system.
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| CN107758673A (en) * | 2017-11-03 | 2018-03-06 | 洛阳中硅高科技有限公司 | Chlorosilane Recovery Purifying device and method |
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| CN103159217A (en) * | 2013-03-07 | 2013-06-19 | 江西景德半导体新材料有限公司 | Polysilicon reducing furnace tail gas silicon powder collection device and application method |
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| CN105536326A (en) * | 2016-01-22 | 2016-05-04 | 峨眉山长庆化工新材料有限公司 | Liquid silicon tetrachloride filter structure and cleaning method |
| CN107758673A (en) * | 2017-11-03 | 2018-03-06 | 洛阳中硅高科技有限公司 | Chlorosilane Recovery Purifying device and method |
| CN107758673B (en) * | 2017-11-03 | 2024-01-12 | 洛阳中硅高科技有限公司 | Chlorosilane purifying and recycling equipment and method |
| CN108275655A (en) * | 2018-01-17 | 2018-07-13 | 大连金鑫设备有限公司 | Polysilicon waste residue environmental protection and public nuisance free processing system and processing method |
| CN108275655B (en) * | 2018-01-17 | 2023-07-25 | 大连华鹏工程技术服务有限公司 | Environment-friendly pollution-free treatment system and treatment method for polycrystalline silicon waste residues |
| CN112316556A (en) * | 2020-10-28 | 2021-02-05 | 飞潮（无锡）过滤技术有限公司 | Modular small intelligent continuous flow purification device and method |
| CN112807827A (en) * | 2020-12-01 | 2021-05-18 | 飞潮（无锡）过滤技术有限公司 | Full-automatic cleaning and filtering system |
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