CN102507968B - Low-creep optical fiber disk for optical fiber accelerometer and manufacturing method thereof - Google Patents

Low-creep optical fiber disk for optical fiber accelerometer and manufacturing method thereof Download PDF

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Publication number
CN102507968B
CN102507968B CN201110351050.0A CN201110351050A CN102507968B CN 102507968 B CN102507968 B CN 102507968B CN 201110351050 A CN201110351050 A CN 201110351050A CN 102507968 B CN102507968 B CN 102507968B
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fiber reel
colloid
optical fiber
organic solvent
boss
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CN102507968A (en
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王冬云
王明超
舒晓武
刘承
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Zhejiang University ZJU
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Zhejiang University ZJU
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Abstract

The invention discloses a low-creep optical fiber disk for an optical fiber accelerometer and a manufacturing method thereof. Miniature lug bosses are formed on two surfaces of a crystal disk in a photoetching way to form a helical recess; a single layer of bare fibers is fixed in the recess; and symmetrically arranged first and second optical fiber disks are respectively formed on the two surfaces of the crystal disk. The manufacturing method comprises the steps of: utilizing the crystal disk as a support of flexible optical fiber disk, processing miniature lug bosses on the crystal disk in a micro-processing method to locate the optical fiber, controlling the glue dosage and guaranteeing uniformity by a spinning method, and preparing the low-creep optical fiber disk by bare fibers with removed coating layers. The low-creep optical fiber disk prepared by the invention generates no long time stress release and changes with the environment, so that the measurement of the acceleration is stable and reliable.

Description

Be used for low creep fiber reel of fibre optic accelerometer and preparation method thereof
Technical field
The present invention relates to the fiber reel that a kind of fibre optic accelerometer is used, especially relate to a kind of low creep fiber reel for fibre optic accelerometer and preparation method thereof.
Technical background
Accelerometer is a kind of inertia sensing device of acceleration measurement, has in a lot of fields extensive and important application.Adopt the phase modulation-type fibre optic accelerometer of cushion disk(-sc) structure, not only simple in structure, be easy to make, there is the advantages such as high precision, low cross response, high bandwidth simultaneously.
Along with the development of measurement with inertial technology, more and more higher to the index requests such as precision of accelerometer.Fiber phase type accelerometer has very large potentiality in precision, but it carrys out sensing based on flexible disk deformation to the effect of stress of optical fiber, and the flexible disk that metal or other resilient materials are made conventionally exists suitable creep, causes stress constantly slowly to change.Thereby this small STRESS VARIATION even cannot record desired data by phase of light wave being produced to long term drift, the swinging of signal that lasting impact causes measurement result.Also have creep and the inhomogeneous of glue amount of fibre cladding cause long-term stress relief and change with environment, also make acceleration analysis unstable, unreliable.
Summary of the invention
In order to solve the problem existing in background technology, the object of the present invention is to provide a kind of low creep fiber reel for fibre optic accelerometer and preparation method thereof.Adopt crystal dish to do the support of optical fiber flexible disk, by micro-manufacturing process, on crystal dish, produce miniature boss to fiber orientation, and control glue consumption and guarantee homogeneity by the method for whirl coating, and use the bare fibre of removing outer coat to reach the object of low creep.
The technical solution used in the present invention is:
One, a kind of low creep fiber reel for fibre optic accelerometer:
At crystal dish, please both parties and be carved with miniature boss, between miniature boss, form screw type groove, with the fixing individual layer bare fibre of colloid, on crystal dish two sides, form respectively the first fiber reel and the second fiber reel being arranged symmetrically with in groove.
The height of described miniature boss is hmicron, the width of miniature boss wfor micron, wherein
Figure 2011103510500100002DEST_PATH_IMAGE004
for bare fibre diameter, unit is micron, and fiber reel internal diameter deducts w/2the size of gained is as the position of initial miniature boss center line, and adjacent two miniature boss distance between center lines are
Figure 417446DEST_PATH_IMAGE004
micron.
Two, for a method for making for the low creep fiber reel of fibre optic accelerometer, the step of the method is as follows:
1) the outer overlay of removing optical fiber obtains bare fibre;
2) one side at the first baffle plate scribbles the colloid that is soluble in organic solvent, and the one side that scribbles the colloid that is soluble in organic solvent with the first baffle plate and center form two locating surfaces around bare fibre ring by the second baffle of boss, two locating surface spacings are determined by boss, with winder by bare fibre along boss external diameter, boss external diameter is that fiber reel internal diameter is covered with between two locating surfaces with spiral individual layer, forms the first fiber reel;
3) in the middle of winder takes off, be embedded with two locating surfaces of the first fiber reel, be heating and curing and be soluble in the colloid of organic solvent;
4) on crystal dish front surface, by the method for photoetching, make miniature boss, in screw type groove, get rid of and be coated with the colloid that one deck is insoluble to organic solvent;
5) second baffle after solidifying is removed, by the first baffle plate with the first fiber optic loop and crystal dish is simultaneously fitted and curing crystal dish and the first fiber reel between the colloid that is insoluble to organic solvent;
6) with organic solvent-acetone, soak the colloid that is soluble in organic solvent of removing on the first baffle plate, the first fiber reel and the first baffle plate are departed from;
7) repeat above-mentioned 1), 2) step obtain the second fiber reel, recycle its and repeat 3)-6) step must arrive the crystal dish that two sides glues bare fibre.
The described colloid that is soluble in organic solvent is that acrylate or other are dissolved in the colloid of acetone; The described colloid that is insoluble to organic solvent is ultra-violet curing glue.
The beneficial effect that the present invention has is:
The present invention will make the support of optical fiber flexible disk of crystal, by micro-manufacturing process, on crystal dish, produce miniature boss to fiber orientation, and control glue consumption and guarantee homogeneity by the method for whirl coating, and use the bare fibre of removing outer coat to prepare low creep fiber reel.Low creep fiber reel prepared by the present invention can not cause long-term stress relief and change with environment, makes acceleration analysis stable, reliable.
Accompanying drawing explanation
Fig. 1 is crystal dish front surface structural representation.
Fig. 2 is Fig. 1 crystal dish side centre section structural representation.
Fig. 3 is the first baffle surface structural representation.
Fig. 4 is two locating surface structures and bare fibre position view when ring.
Fig. 5 is the crystal dish whirl coating schematic diagram while just having splashed into colloid.
Fig. 6 is the interior colloid distribution schematic diagram of crystal dish groove after whirl coating.
Fig. 7 is the structural representation that bare fibre is fixed on whirl coating crystal dish.
Fig. 8 is fixed on crystal card schematic diagram by bare fibre dish.
Fig. 9 is that the lysing chamber that dissolves the outer coat of optical fiber cuts open figure.
Figure 10 is lysing chamber side view.
In figure: 1, crystal dish, 2, bare fibre, 3, crystal dish one side, 4, crystal dish another side, 5, fiber reel internal diameter, 6, fiber reel external diameter, 7, optical fiber enters groove, the 8, first baffle plate, 9, second baffle, 10, miniature boss, 11, lysing chamber, the 12, first pulley, 13, fix the first pulley baffle plate, the 14, second pulley, 15, fix the second pulley baffle plate, 16, the first fiber reel, the 17, second fiber reel, 18, drip sebific duct, 19, turntable, 20, be insoluble to the colloid of organic solvent, 21, boss.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is further illustrated
As shown in Figure 1, Figure 2,, at crystal dish 1, please both parties and be carved with miniature boss 10, between miniature boss, form screw type groove, in groove, use the colloid 20 that is insoluble to organic solvent, as the fixing individual layer bare fibre 2 of ultra-violet curing glue, the determining positions of miniature boss the position of bare fibre 2.On crystal dish 1 two sides, form respectively the first fiber reel 16 and the second fiber reel 17 that are arranged symmetrically with.As shown in Figure 7, in screw type groove, with colloid, be fixed with respectively individual layer bare fibre 2, left end is fiber reel outer radius, without miniature boss 10, bare fibre 2 freely can be drawn.
If the diameter of bare fibre is
Figure 231819DEST_PATH_IMAGE004
micron, the height of miniature boss is hmicron.Under rectangular coordinate system with side
Journey
Figure 2011103510500100002DEST_PATH_IMAGE006
as bare fibre end face equation, according to reality, during photoetching, miniature boss height is less, wherein h ﹤
Figure 618063DEST_PATH_IMAGE004
/ 2.Will y=hbe updated to equation, obtain
Figure 2011103510500100002DEST_PATH_IMAGE008
, the width of known groove is
Figure DEST_PATH_IMAGE010
, can obtain the width of miniature boss wfor
Figure 9730DEST_PATH_IMAGE002
micron, adjacent two miniature boss distance between center lines are micron.
Concrete production program for the low creep fiber reel of fibre optic accelerometer is as follows:
Figure DEST_PATH_IMAGE012
The outer overlay of removing optical fiber obtains bare fibre 2, as shown in Figure 9, optical fiber is put in to the lysing chamber 11(that acetone soln is housed and refers to patent ZL200910098016.X).In lysing chamber inside, fill the first pulley 12, with fixing the inside that the first pulley baffle plate 13 is fixed on lysing chamber 11.The second pulley 14 use are fixed to the inside that the second pulley baffle plate 15 is also fixed on lysing chamber 11.As shown in figure 10, in the upper surface middle part of lysing chamber 11, have a slit, be convenient to optical fiber to be fixed on pulley.The solvable outer overlay of optical fiber of taking off of acetone obtains bare fibre 2 like this.
As shown in Figure 4, boss 21 diameters between two locating surfaces are 10mm, are highly 125 μ m, and making like this first baffle plate 8 and the two locating surface gaps that second baffle 9 forms is the diameter of bare fibre 2 just.As shown in Figure 3, using the diameter of boss 21 as fiber reel internal diameter 5, have a degree of depth to the edge of the first baffle plate 8 with the tangent place of fiber reel internal diameter 5, be that the optical fiber of bare fibre diameter 125 μ m enters groove 7, for placing upstream end tail optical fiber, guarantee that bare fibre 2 can be covered with between two locating surfaces by individual layer.
Bare fibre length gauge is as required calculated the size of required winding zone, according to required precision, makes the required bare fibre length of fiber reel l, unit is rice, the length of bare fibre is the bare fibre length being wrapped on crystal dish 1 here, because bare fibre diameter is very little, spirality is approximately to circular.If fiber reel internal diameter 5 is d, unit is millimeter.Bare fibre 2 centers are overlapped with fiber reel internal diameter 5, and the bare fibre length of first lap is π dmillimeter, the diameter of bare fibre 2 is φ, the second circle length is (d+ φ) πmillimeter, by that analogy, can be according to the length of required bare fibre by the approximate number of turns of making bare fibre winding of following formula
Figure DEST_PATH_IMAGE014
:
Figure DEST_PATH_IMAGE016
(2)
Wherein
Figure DEST_PATH_IMAGE018
represent fractions omitted part, only retain integer.Calculate
Figure 500678DEST_PATH_IMAGE014
numerical value is generally decimal, can be divided into integer
Figure 556358DEST_PATH_IMAGE018
and fraction part b:
Figure 310688DEST_PATH_IMAGE014
=
Figure DEST_PATH_IMAGE020
+ b (3)
The complete number of turns Q of coiling is
Figure 110017DEST_PATH_IMAGE018
, when bwhen non-vanishing, outmost turns can't be around complete.During design, consider certain surplus, crystal dish diameter is not more than y, be expressed from the next:
y= d+( +2) φ (4)
During concrete enforcement, length is controlled by winder, the decimal after the number of turns bit not emphasis.When
Figure DEST_PATH_IMAGE022
time, when also less than one is enclosed, for fiber reel, be nonsensical, can not produce sensitivity, so this situation is just no longer described.
For example: establish the bare fibre length that needs winding lfor 15m, fiber reel internal diameter dfor 10mm, the diameter of bare fibre 2 φbe 125 μ m, substitution formula (2) has:
Can obtain ,
Figure 751662DEST_PATH_IMAGE018
be 208, maximum number of turns Q is 208, and by formula (4), obtaining fiber reel external diameter 6 is 36.25mm.Crystal dish diameter is greater than 36.25mm, so can select 2 inches of disks.Form the first baffle plate 8 of two locating surfaces and the diameter of second baffle 9 and be also greater than 36.25mm.
On the first baffle plate 8, spin coating one deck is soluble in the colloid of organic solvent, forms and is with sticking base plate.The optical fiber that in lysing chamber 11, the bare fibre 2 by pulley is bare fibre diameter 125 μ m along the degree of depth is entered to groove 7 to be put between locating surface, with winder along fiber reel internal diameter 5, by certain orientation, be covered with whole fiber reel internal diameter 5, by certain orientation, can be clockwise or counterclockwise, form the innermost circle of the first fiber reel 16, continuous winding is until fiber reel external diameter 6, and end free is drawn, the colloid that is soluble in organic solvent being heating and curing on the first baffle plate 8, as acrylate.There are two locating surfaces of the first fiber reel 16 to take off from winder centre, remove the second baffle 9 with boss.
Support with silicon chip as crystal dish 1.Utilizing the dry etch process of standard to process is highly the miniature boss 10 of 2 μ m.The size 125 μ m of bare fibre 2 diameters used, can be calculated the width of miniature boss by formula (1) wbe about 93.6 μ m, the distance between miniature boss is 125 μ m, and the center line of initial miniature boss is positioned at
Figure DEST_PATH_IMAGE028
place, by above dfor 10mm.As shown in Figure 5, crystal dish is set level on turntable 19, by dripping sebific duct 18 crystal disk center, drip the photosensitive colloid 20 that is insoluble to organic solvent, as ultra-violet curing glue, the method of similar resist coating is (5000rpm) rotating crystal panel surface at a high speed, makes the colloid that is insoluble to organic solvent be covered with uniformly crystal dish, forms thin film as shown in Figure 6.As shown in Figure 8, by one surface the 3 and first baffle plate 8 laminatings of crystal dish, by the method for illumination, solidify the colloid that is insoluble to organic solution between crystal dish and bare fibre 2, as ultra-violet curing glue.With organic solvent-acetone bubble, except the colloid that is soluble in organic solvent on the first baffle plate 8, as acrylate, bare fibre 2 is departed from it, form the first fiber reel 16.The second fiber reel 17 is also made as such scheme, finally on crystal dish one side 3 and crystal dish another side 4, forms the crystal dish 1 that is arranged symmetrically with the first fiber reel 16 and the second fiber reel 17.

Claims (2)

1. the method for making for the low creep fiber reel of fibre optic accelerometer, at crystal dish (1), please both parties and be carved with miniature boss (10), between miniature boss, form screw type groove, with the fixing individual layer bare fibre (2) of colloid, on crystal dish (1) two sides, form respectively the first fiber reel (16) and the second fiber reel (17) being arranged symmetrically with in groove; It is characterized in that, the step of the method is as follows:
1) the outer overlay of removing optical fiber obtains bare fibre (2);
2) one side at the first baffle plate (8) scribbles the colloid that is soluble in organic solvent, and the one side that scribbles the colloid that is soluble in organic solvent with the first baffle plate (8) has the second baffle (9) of boss (21) to form two locating surfaces around bare fibre ring with center, two locating surface spacings are determined by boss (21), with winder by bare fibre (2) along boss (21) external diameter, boss (21) external diameter is that fiber reel internal diameter (5) is covered with between two locating surfaces with spiral individual layer, forms the first fiber reel (16);
3) in the middle of winder takes off, there are two locating surfaces of the first fiber reel (16), are heating and curing and are soluble in the colloid of organic solvent;
4) at crystal dish front surface (3), above by the method for photoetching, make miniature boss (10), in screw type groove, get rid of and be coated with the colloid that one deck is insoluble to organic solvent;
5) second baffle (9) after solidifying is removed, will be with first baffle plate (8) of the first fiber reel (16) and the colloid that is insoluble to organic solvent between crystal dish one side (3) laminating curing crystal dish (1) and bare fibre (2);
6) with organic solvent-acetone, soak the colloid that is soluble in organic solvent of removing on the first baffle plate (8), the first fiber reel (16) and the first baffle plate (8) are departed from;
7) repeat above-mentioned 1), 2) step obtain the second fiber reel (17), recycle its and repeat 3)-6) step must arrive the crystal dish (1) that two sides glues bare fibre.
2. by the method for making of a kind of low creep fiber reel for fibre optic accelerometer claimed in claim 1, it is characterized in that: the described colloid that is soluble in organic solvent is acrylate, the described colloid that is insoluble to organic solvent is ultra-violet curing glue.
CN201110351050.0A 2011-11-09 2011-11-09 Low-creep optical fiber disk for optical fiber accelerometer and manufacturing method thereof Expired - Fee Related CN102507968B (en)

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CN105300505A (en) * 2015-10-14 2016-02-03 中国船舶重工集团公司第七一五研究所 Wide-band high-sensitivity planar optical fiber vector hydrophone
CN107843963B (en) * 2017-12-05 2023-11-28 无锡统力电工有限公司 Lay frock of fixed optic fibre
CN109883461B (en) * 2019-03-15 2021-02-02 哈尔滨工程大学 Method and device for manufacturing multilayer optical fiber strain disc

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CN101782595A (en) * 2010-02-02 2010-07-21 浙江大学 Multiplexing fiber-optic inertial sensing unit capable of simultaneously measuring acceleration and palstance
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