CN102495437A - Ultraviolet high-performance polarization light splitting prism - Google Patents
Ultraviolet high-performance polarization light splitting prism Download PDFInfo
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- CN102495437A CN102495437A CN2011104003804A CN201110400380A CN102495437A CN 102495437 A CN102495437 A CN 102495437A CN 2011104003804 A CN2011104003804 A CN 2011104003804A CN 201110400380 A CN201110400380 A CN 201110400380A CN 102495437 A CN102495437 A CN 102495437A
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Abstract
The invention discloses an ultraviolet high-performance polarization light splitting prism which is characterized in that: angles of a pair of triangular prisms are processed into Brewster angles; Brewster faces are plated with polarization light splitting films; the two faces are butted with each other through an air gap so as to form a sandwich structure; with a high injury threshold value, the air gap does not have any influence on an ultraviolet or deep ultraviolet wavebands; and an anti-reflection film is plated on a light transmission face, so that surface loss is reduced. The ultraviolet high-performance polarization light splitting prism has a simple structure and extremely low cost, is convenient to process, and is convenient for batch production.
Description
Technical field
The present invention relates to laser field, especially a kind of ultraviolet high-performance polarization splitting prism in the laser components and parts.
Background technology
Polarizing prism is a kind of device that often uses in the polarization light path; Mainly play the effect of polarization spectro; In laser system, during especially Ultra-Violet Laser is used, require height to see through; The polarization splitting prism of High Extinction Ratio, high damage threshold, at present more is glass polarization splitting prism or the plain film polarization spectro that adopts α-BBO Glan laser prism, optical cement.
Existing glass polarization splitting prism; Structure is: be made up of a pair of 45 ° of right-angle prisms; The inclined-plane of one of them right-angle prism is coated with polarization beam splitter, and the inclined-plane of a slice right-angle prism is a polished surface in addition, and the inclined-plane butt joint gummed or the optical cement of two prisms form; Four right angle faces are coated with anti-reflection film, the reflection loss when passing through prism to reduce light.Natural light incident, outgoing be two bundle degree of polarizations very high linearly polarized lights: Tp:Ts 1000:1, this two bundles polarized light is vertical each other.But in the Ultra-Violet Laser system applies, the polarization splitting prism of gummed almost can not use in ultraviolet, and glue commonly used sees through hardly; The damage threshold of optical cement polarization splitting prism is not high, and the optical cement technology of polarization beam splitter bothers very much, and bad optical cement requires flatness to reach that λ/more than 10, smooth finish requires high.
Adopt existing plain film beam split, incident light need be adjusted to the Brewster angle, bad adjusting, and extinction ratio is not high, and S reflection of light direction is fixed.
In addition, existing α-BBO Glan laser prism is although extinction ratio is greater than 10
6: 1, but the crystalline material price is very expensive, is prone to cleavage, deliquescence, bad processing.
Summary of the invention
The object of the present invention is to provide a kind of ultraviolet high-performance polarization splitting prism, make things convenient for incident light to regulate, simple in structure, be easy to processing, assembling, damage threshold is high, and extinction ratio is high.
The technical solution adopted for the present invention to solve the technical problems is: a kind of ultraviolet high-performance polarization splitting prism, comprise that an angle is processed into the triangular prism of Brewster angle, and the Brewster face of said triangular prism is coated with polarization beam splitter; Said two Brewster faces adopt air-gap to connect; The material of said triangular prism can be that ultraviolet is melted quartz, CaF2; The angle of said a pair of triangular prism all is a Brewster angle, and the another one angle can be the right angle, also can be arbitrarily angled; The structure of said ultraviolet high-performance polarization splitting prism is glass/polarization beam splitter/air/polarization beam splitter/glass.The employing air-gap connects, and the air chamber damage threshold is high, uses at ultraviolet, deep ultraviolet wave band to have no influence; The face that all the other light paths are passed through is coated with anti-reflection film, reduces the surface reflection loss.
Light path principle of the present invention is: incidence natural lights vertical surface incident (making things convenient for the incident light debugging); Get into glass, to the inclined-plane, get into the ground floor polarization beam splitter with Brewster angle incidence; The P transmittance; S light reflection, P light once more with Brewster angle incidence to the second polarization spectro rete, P light is vertically from the vertical transmission of another prism surface; The outgoing from the side of S polarized light.
Description of drawings
Fig. 1 is one of structural representation of a kind of ultraviolet high-performance polarization splitting prism of the present invention.
Embodiment
Like Fig. 1, choose the optical glass ultraviolet and melt quartz, be processed into two same right- angle prisms 101 and 102, an angle θ of right-angle prism is the Brewster angle; The mirror polish of face 201 to 206; Face 203 and 206 is coated with polarization beam splitter, and incident angle is a Brewster angle, goes out incident medium to be: melt quartzy to air; Two Brewster face 203,206 butt joints adopt air-gap to connect, and the air chamber damage threshold is high; Face 201,202,204,205 in addition, the plating anti-reflection film reduces the surface reflection loss.
According to refraction law, another angle beta is processed into (180 °-2 θ), guarantees the 202 vertical outgoing from the side of S polarized light.
Light path is: the incident of incidence natural lights vertical plane; Vertical surface goes into to inject glass, to the inclined-plane, gets into the ground floor polarization beam splitter with Brewster angle incidence; The P transmittance; S light reflection, P light once more with Brewster angle incidence to the second polarization spectro rete, P light is vertically from the vertical transmission of another prism surface; The vertical from the side outgoing of S polarized light.
For example: wavelength is 355nm, this moment θ=55.9 °, β=68.2 °, the extinction ratio of the polarization beam splitter of individual layer reaches 200:1.
Claims (5)
1. a ultraviolet high-performance polarization splitting prism comprises that an angle is processed into the triangular prism of Brewster angle, it is characterized in that the Brewster face of said triangular prism is coated with polarization beam splitter.
2. a kind of ultraviolet high-performance polarization splitting prism according to claim 1 is characterized in that said two Brewster faces adopt air-gap to connect.
3. a kind of ultraviolet high-performance polarization splitting prism according to claim 1, the material that it is characterized in that said triangular prism can be that ultraviolet is melted quartz, CaF2.
4. a kind of ultraviolet high-performance polarization splitting prism according to claim 1, the angle that it is characterized in that said a pair of triangular prism all is a Brewster angle, the another one angle can be the right angle, also can be arbitrarily angled.
5. a kind of ultraviolet high-performance polarization splitting prism according to claim 1, the structure that it is characterized in that said ultraviolet high-performance polarization splitting prism is glass/polarization beam splitter/air/polarization beam splitter/glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104003804A CN102495437A (en) | 2011-12-06 | 2011-12-06 | Ultraviolet high-performance polarization light splitting prism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104003804A CN102495437A (en) | 2011-12-06 | 2011-12-06 | Ultraviolet high-performance polarization light splitting prism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102495437A true CN102495437A (en) | 2012-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN2011104003804A Withdrawn CN102495437A (en) | 2011-12-06 | 2011-12-06 | Ultraviolet high-performance polarization light splitting prism |
Country Status (1)
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| CN (1) | CN102495437A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424878A (en) * | 2012-12-02 | 2013-12-04 | 上海理工大学 | Polarization light-splitting device |
| CN109143597A (en) * | 2018-11-12 | 2019-01-04 | 福建福特科光电股份有限公司 | Laser depolarization light-dividing device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1361436A (en) * | 2000-12-28 | 2002-07-31 | 云南大学 | Making process of polarizing and beam splitting prism |
| US20030086158A1 (en) * | 2000-02-24 | 2003-05-08 | Silicon Valley Group, Inc. | Polarization beam splitter for photolithography |
| JP2006153913A (en) * | 2004-11-25 | 2006-06-15 | Kogaku Giken:Kk | Polarizer |
| CN201489132U (en) * | 2009-06-24 | 2010-05-26 | 福州高意通讯有限公司 | crystal polarizer |
| CN201820036U (en) * | 2010-01-22 | 2011-05-04 | 红蝶科技(深圳)有限公司 | Wide-angle polarization spectrometer and optical projection engine using same |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
| CN202362477U (en) * | 2011-12-06 | 2012-08-01 | 福建福晶科技股份有限公司 | Ultraviolet high-performance polarization beam-splitting prism |
-
2011
- 2011-12-06 CN CN2011104003804A patent/CN102495437A/en not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030086158A1 (en) * | 2000-02-24 | 2003-05-08 | Silicon Valley Group, Inc. | Polarization beam splitter for photolithography |
| CN1361436A (en) * | 2000-12-28 | 2002-07-31 | 云南大学 | Making process of polarizing and beam splitting prism |
| JP2006153913A (en) * | 2004-11-25 | 2006-06-15 | Kogaku Giken:Kk | Polarizer |
| CN201489132U (en) * | 2009-06-24 | 2010-05-26 | 福州高意通讯有限公司 | crystal polarizer |
| CN201820036U (en) * | 2010-01-22 | 2011-05-04 | 红蝶科技(深圳)有限公司 | Wide-angle polarization spectrometer and optical projection engine using same |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
| CN202362477U (en) * | 2011-12-06 | 2012-08-01 | 福建福晶科技股份有限公司 | Ultraviolet high-performance polarization beam-splitting prism |
Non-Patent Citations (1)
| Title |
|---|
| 黄波: "《固体材料及其应用》", 31 December 1994, article "偏振分光膜", pages: 320 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103424878A (en) * | 2012-12-02 | 2013-12-04 | 上海理工大学 | Polarization light-splitting device |
| CN103424878B (en) * | 2012-12-02 | 2015-11-25 | 上海理工大学 | Light splitting device |
| CN109143597A (en) * | 2018-11-12 | 2019-01-04 | 福建福特科光电股份有限公司 | Laser depolarization light-dividing device |
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| C04 | Withdrawal of patent application after publication (patent law 2001) | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20120613 |