CN102707345A - Polarization-maintaining semi-transmissive semi-reflective mirror for 45-degree linearly polarized light - Google Patents
Polarization-maintaining semi-transmissive semi-reflective mirror for 45-degree linearly polarized light Download PDFInfo
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- CN102707345A CN102707345A CN2012101835818A CN201210183581A CN102707345A CN 102707345 A CN102707345 A CN 102707345A CN 2012101835818 A CN2012101835818 A CN 2012101835818A CN 201210183581 A CN201210183581 A CN 201210183581A CN 102707345 A CN102707345 A CN 102707345A
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Abstract
A polarization-maintaining semi-transmissive semi-reflective mirror for 45-degree linearly polarized light structurally comprises a prism with a small edge angle and an optical film system, wherein the wedge face of the prism and a plane opposite to the wedge face are respectively plated with a first optical film and a second optical film; the first optical film belongs to a reflective film system to which the reflectivity of p light and s light both with the center wavelength of incident laser is 50 percent when the incidence angle is 9 degree; and the second optical film belongs to an anti-reflecting film system to which the transmissivity of the p light and s light both with the center wavelength of incident laser is larger than or equal to 99.5 percent. The semi-transmissive semi-reflective mirror can not only achieve 50-percent transmission and 50-percent reflection of 45-degree linearly polarized light but also enable the transmission light and the reflected light to keep the same polarization state as the incident light, has simple manufacturing technology and low cost, is more suitable for optical systems demanding more on the polarization state of light.
Description
Technical field
The present invention relates to the spectroscopical design of optical system, particularly a kind of to 45 ° of inclined to one side semi-transparent semi-reflecting lens of linearly polarized lights guarantor.
Background technology
Light-dividing device is a part indispensable in some light path, and light-dividing device is mainly realized through polarizing prism or coating process now.To be the birefringence effect that utilizes birefringece crystal separate the light of different polarization states polarization spectroscope, can not play reflected light and transmitted light had and protect inclined to one side effect; When light beam with than 15 ° of wide-angles (>) oblique incidence is during to optical thin film, electric field and the magnetic field tangential component on each interface is all continuous, makes film system to p component and s component performance different effective refractive index, film is the stronger polarization characteristic of demonstration.Therefore, be that the spectroscope that polarizing prism or coating process produce all is difficult to accomplish polarization property.Concerning some optical system, what polarization separation was brought is the bad change of Performance of Optical System, must eliminate or reduce, and therefore must use to have the optics light-dividing device of protecting inclined to one side effect.For example, KDP crystal II class frequency multiplication be the component of requirement p light and s light near 1:1, also have optical current mutual inductor for the faraday rotation mirror formula, having the light-dividing device of protecting inclined to one side effect is vital optical element.
Keeping polarization problem is a very thorny optical thin film design problem; Attracted many scholars' concern; Present research mainly is to set about from the relation of transmissivity and degree of polarization and refractive index and incident angle, through the optimization numerical method optical film is carried out design studies.In the decades in past, all never stop film being protected the research of inclined to one side problem both at home and abroad, also obtained many achievements in research; But still lack a kind of blanket general approach at present, and technology is immature, technical difficulty is high; Cost price is high, can not be widely used in the experiment.
Summary of the invention
The objective of the invention is to be to provide a kind of semi-transparent semi-reflecting lens of protecting inclined to one side effect that 45 ° of linearly polarized lights are had.This spectroscope is 50% reflection and 50% transmission to 45 ° of linearly polarized lights; And make reflected light keep the polarization state identical with incident light with transmitted light; This spectroscope processing technology is simple; Realize easily, and with low cost, in the optical system that relatively is fit to be applied to polarization state is had higher requirements.
Technical solution of the present invention is following:
A kind of to 45 ° of inclined to one side semi-transparent semi-reflecting lens of linearly polarized lights guarantor; Its characteristics are that this semi-transparent semi-reflecting lens is the wedge shape mirror with the little angle of wedge
; The wedge surface of this wedge shape mirror and relative plane thereof are coated with first optical thin film, second optical thin film respectively; Described first optical thin film is the p light of incident laser centre wavelength and s light reflectivity when incident angle is 9 ° to be 50% reflectance coating system, and described second optical thin film is that the transmitance to the p light of incident laser centre wavelength and s light is 99.5% anti-reflection film system.
The preparation method of described semi-transparent semi-reflecting lens, characteristics are that the concrete steps of this method are following:
1. earlier angle of wedge of processing is the wedge of glass mirror of
, and guarantees that the face type and the machining precision on described wedge surface and relative plane thereof satisfy requirement of experiment;
2. be 50% reflecting medium film at the p light and the s light reflectivity under 9 ° of incidents that plate incident laser centre wavelength on the wedge surface of described wedge shape mirror;
3. plating is 99.5% anti-reflection deielectric-coating to the p light of incident laser centre wavelength and s optical transmission rate on the plane of described wedge shape Fang Jing.
The method of application of described semi-transparent semi-reflecting lens comprises the following steps:
1. with the light path level-off;
2. described semi-transparent semi-reflecting lens is placed described light path, make the featheredge of wedge shape mirror and webbing be in horizontal direction, wedge surface is the light beam incidence surface, and described plane is the exit facet of transmitted light beam;
3. regulate the pitching and the deflection of described wedge shape mirror, making incident angle is 9 °.
Technique effect of the present invention:
The present invention protects inclined to one side semi-transparent semi-reflecting lens to 45 ° of linearly polarized lights, and this semi-transparent semi-reflecting lens not only can make 45 ° of linearly polarized lights realize 50% transmission and 50% reflection, and can guarantee that transmitted light and reflected light are 45 ° of purer linearly polarized lights.
The present invention's difficulty that possesses skills is low, realizes than being easier to, and is with low cost, in the optical system that relatively is fit to be applied to polarization state is had higher requirements.
Description of drawings
Fig. 1 protects inclined to one side semi-transparent semi-reflecting spectroscope light path synoptic diagram for the present invention to 45 ° of linearly polarized lights
Fig. 2 has the semi-transparent semi-reflecting spectroscopical p light of the inclined to one side effect of guarantor and the mensuration figure of s light transmission to 45 ° of linearly polarized lights
Embodiment
See also Fig. 1; Fig. 1 protects inclined to one side semi-transparent semi-reflecting spectroscope light path synoptic diagram for the present invention to 45 ° of linearly polarized lights; Visible by figure; The present invention protects inclined to one side semi-transparent semi-reflecting lens to 45 ° of linearly polarized lights; This semi-transparent semi-reflecting lens is the wedge shape mirror 1 with the little angle of wedge
; Be coated with first optical thin film 3, second optical thin film 4 respectively on the wedge surface 7 of this wedge shape mirror and relative plane 8 thereof; Described first optical thin film 3 is the p light of incident laser centre wavelength and the reflectivity of s light when incident angle 4 is 9 ° to be 50% reflectance coating system, and described second optical thin film 4 is that the transmitance to the p light of incident laser centre wavelength and s light is 99.5% anti-reflection film system.
Fig. 1 also is the light path synoptic diagram of the semi-transparent semi-reflecting spectroscope embodiment of the present invention; The angle of wedge of this embodiment
is 9 °, and the centre wavelength of incident laser is 1053nm.
The preparation method of described semi-transparent semi-reflecting lens embodiment is characterised in that the concrete steps of this method are following:
1. earlier angle of wedge 2 of processing is the trapezoidal glass side mirror 1 of
, and guarantees that the face type and the machining precision on described wedge surface 7 and relative plane 8 thereof satisfy requirement of experiment;
2. plating is that p light and the s light of 1053nm is that 9 ° of following reflectivity are 50% reflecting medium film (3) in incident angle 2 to incident laser centre wavelength on the wedge surface 7 of described wedge shape side mirror 1; Concrete film is to be GHLLHHLLHH; G wherein: glass substrate; H: high-index material, L: be low-index material;
3. plating is the p light of 1053nm and the anti-reflection deielectric-coating 4 of s optical transmission rate >=99.5% to incident laser centre wavelength on the plane 8 of described wedge shape Fang Jing, and concrete film is to be GHLLA, wherein; G: glass substrate; H: high-index material, L: low-index material, A: air.
The method of application of described semi-transparent semi-reflecting lens comprises the following steps:
1. with the light path level-off;
2. described semi-transparent semi-reflecting lens is placed described light path, make the featheredge 5 of wedge shape mirror 1 be in horizontal direction with webbing 6, wedge surface 7 is the light beam incidence surface, and described plane 8 is the exit facet of transmitted light beam;
3. regulate the pitching and the deflection of described wedge shape mirror, making incident angle is 9 °.
This device not only can make 45 ° of linearly polarized lights realize 50% transmission and 50% reflection, and can make transmitted light and reflected light for keeping 45 ° of pure linearly polarized lights.This device technique difficulty is low, realizes than being easier to, and is with low cost, in the optical system that relatively is fit to be applied to polarization state is had higher requirements.The p light of the light-dividing device of present embodiment and s optical transmission rate are measured the result and are seen accompanying drawing 2.According to experimental result Fig. 2, we find that about laser center wavelength 1000nm this semi-transparent semi-reflecting light-dividing device supports the 100nm broadband to protect inclined to one side effect ∣ T
p-50%|≤2.5% and | T
s-50% ∣≤2.5%.
Claims (4)
1. one kind 45 ° of linearly polarized lights are protected inclined to one side semi-transparent semi-reflecting lens; It is characterized in that this semi-transparent semi-reflecting lens has the wedge shape mirror (1) of the little angle of wedge
; Wedge surface of this wedge shape mirror (7) and relative plane (8) thereof are coated with first optical thin film (3), second optical thin film (4) respectively; Described first optical thin film (3) is the p light of incident laser centre wavelength and s light reflectivity when incident angle (2) is 9 ° to be 50% reflectance coating system, and described second optical thin film (4) is more than or equal to 99.5% anti-reflection film system to the transmitance of the p light of incident laser centre wavelength and s light.
3. the preparation method of the described semi-transparent semi-reflecting lens of claim 1 is characterised in that the concrete steps of this method are following:
1. earlier angle of wedge of processing is the glass wedge shape mirror (1) of
, and guarantees that the face type and the machining precision on described wedge surface (7) and relative plane (8) thereof satisfy requirement of experiment;
2. going up the p light and the s light that plate incident laser centre wavelength at the wedge surface (7) of described wedge shape mirror (1) is that 9 ° of following reflectivity are 50% reflecting medium film (3) in incident angle;
3. go up plating on the plane (8) of described wedge shape mirror and be 99.5% anti-reflection deielectric-coating (4) to the p light of incident laser centre wavelength and s optical transmission rate.
4. the method for application of the described semi-transparent semi-reflecting lens of claim 1 is characterised in that this method comprises the following steps:
1. with the light path level-off;
2. described semi-transparent semi-reflecting lens is placed described light path, make the featheredge (5) of wedge shape mirror (1) and webbing (6) be in horizontal direction, wedge surface (7) is the light beam incidence surface, and described plane (8) are the exit facet of transmitted light beam;
3. regulate the pitching and the deflection of described wedge shape mirror, making incident angle is 9 °.
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106199991A (en) * | 2015-09-18 | 2016-12-07 | 王治霞 | Light splitting piece and the coaxial diastimeter of laser thereof and application |
CN108139508A (en) * | 2015-08-05 | 2018-06-08 | 光谱 Optix 有限公司 | Plane wedge lens and image processing method |
CN109883542A (en) * | 2019-03-29 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | No Wavefront detecting expands the laser beam expanding transmission method and system of optical path compensation |
CN110673351A (en) * | 2019-10-31 | 2020-01-10 | 杭州昕磁科技有限公司 | Polarization-maintaining thin film laser beam splitting system capable of setting different splitting ratios |
WO2023115949A1 (en) * | 2021-12-21 | 2023-06-29 | 睿励科学仪器(上海)有限公司 | Ellipsometry measurement system based on synchronous reference light correction |
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2012
- 2012-06-06 CN CN2012101835818A patent/CN102707345A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108139508A (en) * | 2015-08-05 | 2018-06-08 | 光谱 Optix 有限公司 | Plane wedge lens and image processing method |
CN108139508B (en) * | 2015-08-05 | 2020-06-30 | 光谱 Optix 有限公司 | Planar wedge lens and image processing method |
CN106199991A (en) * | 2015-09-18 | 2016-12-07 | 王治霞 | Light splitting piece and the coaxial diastimeter of laser thereof and application |
CN106199991B (en) * | 2015-09-18 | 2020-04-21 | 王治霞 | Laser coaxial distance measuring instrument |
CN109883542A (en) * | 2019-03-29 | 2019-06-14 | 中国科学院长春光学精密机械与物理研究所 | No Wavefront detecting expands the laser beam expanding transmission method and system of optical path compensation |
CN110673351A (en) * | 2019-10-31 | 2020-01-10 | 杭州昕磁科技有限公司 | Polarization-maintaining thin film laser beam splitting system capable of setting different splitting ratios |
WO2023115949A1 (en) * | 2021-12-21 | 2023-06-29 | 睿励科学仪器(上海)有限公司 | Ellipsometry measurement system based on synchronous reference light correction |
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Application publication date: 20121003 |