CN102494614A - High-precision digital speckle related measurement method - Google Patents

High-precision digital speckle related measurement method Download PDF

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CN102494614A
CN102494614A CN2011103593433A CN201110359343A CN102494614A CN 102494614 A CN102494614 A CN 102494614A CN 2011103593433 A CN2011103593433 A CN 2011103593433A CN 201110359343 A CN201110359343 A CN 201110359343A CN 102494614 A CN102494614 A CN 102494614A
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speckle
displacement
vortex
testee
matrixes
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CN102494614B (en
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李新忠
李立本
台玉萍
王晓飞
尹更新
陈庆东
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Henan University of Science and Technology
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Abstract

A high-precision digital speckle related measurement method adopts a measuring device consisting of a CW (continuous wave) laser, a collimated beam expander, a converging lens, a CCD (charge coupled device) camera and a computer for measurement, and is realized through adopting the following steps: filtering speckle images arranged in a generation plane of a to-be-tested object before and after the displacement and recorded by the CCD camera, so as to obtain the complex signal distribution of light intensity; performing interpolation after analyzing the phase position distribution, so as to obtain the phase position distribution matrix with the sub-pixel accuracy; utilizing the phase position vortex topological charge numbers plus 1 and minus 1 to replace the original phase position values, and replacing other points with 0, so as to build two sparse matrixes; and finally performing related operation to the two sparse matrixes so as to obtain the in-plane displacement information of the to-be-tested object. The method can realize the high computational efficiency and high measuring accuracy at the same time, has the characteristics of compactness in optical path, simplicity and feasibility, and is suitable for the real-time and on-line detection in the field of photoelectric nondestructive detection.

Description

A kind of high accuracy number speckle relevant measurement method
Technical field
The present invention relates to a kind of digital speckle relevant measurement method that is applied to the Measuring Object in-plane displacement in fields such as photoelectricity Non-Destructive Testing, a kind of specifically high accuracy number speckle relevant measurement method.
Background technology
Laser speckle is meant when laser radiation is on the rough object surface, the light and dark spot that diffuses and interfere the back to form each other at reflection space.Speckle has carried testee information, through can obtain the change information of testee to the analysis of speckle field.The digital speckle relevant measurement method is that twentieth century progressively grew up after the eighties, is used for the non-contact optical measuring method of Measuring Object in-plane displacement.It has that light path is simple, measurement of full field, noncontact and to advantages such as requirement on measurement environment are low; Thereby obtained in the Non-Destructive Testing field using widely.
In the digital speckle relevant measurement method, under the identical situation of other conditions, measuring accuracy is directly proportional with counting of correlation computations, and calculating is counted many more, and measuring accuracy is high more; And calculate increasing of counting, make the counting yield of related operation reduce; Therefore, realize that simultaneously Computationally efficient and high measurement accuracy are difficult problems to be solved in this technology.
In the counting yield research of digital speckle relevant measurement method; Mostly concentrate on and how to select on the best relevant search subarea; As: document [photoelectric project 34; 53-58 (2007], document [Optics Express 16,7037-7048 (2008)] and document [Optics and Lasers in Engineering 45,967-974 (2007)] etc.Even but after finding best relevant search subarea size, when big displacement, calculate and count still very highly, counting yield can not satisfy in a lot of engineerings Testing requirement in real time.In the measuring accuracy research of digital speckle relevant measurement method; Mainly contain method of interpolation, surface fitting method and gradient algorithm etc.; These traditional digital speckle relevant measurement methods all are based on speckle field gray scale correlation computations; Through improving algorithm, although its precision can reach sub-pix, it is low that counting yield also becomes thereupon.
Aspect the patent documentation of digital speckle measurement of correlation; (Granted publication number is CN101158679B to patent " bone trabecular extraction and mechanical property measuring method and measurement mechanism thereof "; Granted publication day is 2011.04.27); A kind of method and device that utilizes the digital speckle correlation technique that bone trabecular mechanical property is measured disclosed; This patent is the new application of digital speckle relevant measurement method, and does not pay close attention to the certainty of measurement and the computational efficiency of this method itself; (publication number is CN101788427A to patent " a kind of device for detecting mechanical property of multifunctional film "; Open day is 2010.07.28); This device adopts the distortion of digital speckle correlation technique MEASUREMENTS OF THIN, moves a layer method in conjunction with Bubbling method and improvement, can obtain the mechanical property of film and coating; This device also is to utilize the speckle intensity map directly to carry out relevant search, and its certainty of measurement and computational efficiency are not all analyzed in detail.
To sum up analyze and to know, in existing disclosed background technology, realize that simultaneously Computationally efficient and high measurement accuracy are technical barriers to be solved in the digital speckle relevant measurement method always.
Summary of the invention
The objective of the invention is the deficiency for solving the problems of the technologies described above, a kind of high accuracy number speckle relevant measurement method is provided, this method can realize the measurement of the nano level high resolution precision of in-plane displacement when high-level efficiency is calculated.
Deficiency for solving the problems of the technologies described above of the present invention; The technical scheme that is adopted is: utilization of the present invention is measured by the measurement mechanism that continuous wave laser, collimator and extender device, convergent lens, CCD camera and computing machine constitute; Light beam working direction at this continuous wave laser is provided with collimator and extender device and testee successively, and light beam is after the testee scattering, and light beam gets into the CCD camera imaging after convergent lens is assembled; Computing machine is advanced in storage then, and measuring process is following:
1, with a CCD camera records the measured object plane displacement occurred before and after the displacement of the speckle intensity diagram? ?
Figure 855707DEST_PATH_IMAGE001
,
Figure 764495DEST_PATH_IMAGE002
, in order to ensure measurement accuracy, the speckle pattern of the speckle particles having an average diameter of 5? Pixels, speckle image size is 1024 × 1024? Pixels; would two speckle intensity map
Figure 877944DEST_PATH_IMAGE001
and
Figure 740858DEST_PATH_IMAGE002
stored in the computer for further processing;
2, with the special complex filter of Gauss-Hull rice; To before the testee generating plane intrinsic displacement with displacement after speckle plot of light intensity ,
Figure 964346DEST_PATH_IMAGE002
carry out filtering, the light intensity complex signal that obtains them distribute
Figure 186380DEST_PATH_IMAGE003
and ;
3, then; Obtain its PHASE DISTRIBUTION
Figure 300957DEST_PATH_IMAGE005
and
Figure 200779DEST_PATH_IMAGE006
according to light intensity complex signal distribution
Figure 54335DEST_PATH_IMAGE003
and
Figure 235918DEST_PATH_IMAGE004
;
Figure 704573DEST_PATH_IMAGE005
and
Figure 442460DEST_PATH_IMAGE006
carried out the bicubic spline interpolation, obtain having PHASE DISTRIBUTION matrix
Figure 803034DEST_PATH_IMAGE007
and
Figure 127836DEST_PATH_IMAGE008
of sub-pixel precision;
4, according to the definition of phase place vortex, utilize formula To the PHASE DISTRIBUTION matrix
Figure 325916DEST_PATH_IMAGE007
With
Figure 122971DEST_PATH_IMAGE008
Carry out the search of phase place vortex point, wherein,
Figure 669490DEST_PATH_IMAGE010
For comprising the closed curve integration of this search point; When s=+1, this vortex is positive vortex, and when s=-1, this vortex is negative vortex; Replace the PHASE DISTRIBUTION matrix with+1 or-1
Figure 842982DEST_PATH_IMAGE007
With
Figure 292812DEST_PATH_IMAGE008
In original this numerical value, matrix
Figure 260768DEST_PATH_IMAGE007
With
Figure 294583DEST_PATH_IMAGE008
In other numerical value of having a few replace with 0; Two phase place vortex matrixes representing testee generating plane intrinsic displacement forward and backward have finally been obtained X 1( x, y) and X 2( x, y); Because 0 value accounts for the overwhelming majority in these two matrixes, so, these two matrixes X 1( x, y) and X 2( x, y) be sparse matrix;
5, selecting size is that the subarea of 51 * 51 Pixels is as the region of search, to two forward and backward sparse matrixes of object generating plane intrinsic displacement X 1( x, y) and X 2( x, y) carry out related operation, obtain speckle field and exist
Figure 943870DEST_PATH_IMAGE011
The in-plane displacement with sub-pixel precision of direction , the enlargement factor of imaging optical path does M, then the in-plane displacement amount of testee generation does
Figure 885598DEST_PATH_IMAGE013
The present invention at first utilizes the speckle plot of light intensity picture of former and later two states of CCD cameras record testee generating plane intrinsic displacement; Utilize the special complex filter of Gauss-Hull rice that this two width of cloth image is carried out the complex signal distribution that filtering obtains light distribution then, and then obtain the PHASE DISTRIBUTION of speckle field; PHASE DISTRIBUTION is carried out the PHASE DISTRIBUTION matrix that interpolation obtains having sub-pixel precision; Confirm the position and topological charge number ± 1 of each vortex point then according to the definition of phase place vortex; In the PHASE DISTRIBUTION matrix, utilize+1 or-1 to replace original phase value respectively; The numerical value of other points is replaced with 0, has so just constructed two sparse matrixes; At last, these two sparse matrixes are carried out related operation, obtain the in-plane displacement information of testee.
Principle of work of the present invention is:
In the digital speckle measurement of correlation; Utilize forward and backward two width of cloth speckle light intensity gray-scale maps of CCD cameras record object generating plane intrinsic displacement, use
Figure 469026DEST_PATH_IMAGE001
respectively,
Figure 154960DEST_PATH_IMAGE002
expression; Store computing machine then and carry out related operation.Be that to get size be that the subarea A of n * n is as the relevant search subarea at the center with the center point P point in the speckle pattern before the generating plane intrinsic displacement
Figure 140234DEST_PATH_IMAGE001
; After testee generation deformation, subarea A moves to the position of subarea B, and the P point moves to P ' point.By the statistics Xue Zhi, the related coefficient of these two sample spaces of A and B is maximum; Utilize standardization autocovariance related function to ask its related coefficient,
Figure 387675DEST_PATH_IMAGE014
(1)
Wherein,
Figure 458400DEST_PATH_IMAGE012
For from P ' of P point search the time
Figure 449489DEST_PATH_IMAGE011
The displacement that produces on the direction, Be the related coefficient of this point,
Figure 707612DEST_PATH_IMAGE016
Be respectively each pixel gray scale in the speckle image of the forward and backward acquisition of generating plane intrinsic displacement,
Figure 439201DEST_PATH_IMAGE017
Be respectively relevant search subarea A, the average gray value of B; Confirm the position of subarea B according to the maximal value of related coefficient, finally obtain speckle field and move P ' of back and exist x, yThe displacement of direction
Figure 296299DEST_PATH_IMAGE012
In the formula (1),
Figure 928269DEST_PATH_IMAGE018
In the digital speckle correlation measurement, CCD camera records the speckle pattern of light intensity distribution, the phase information is lost; present invention by first Gauss - Hull Mitt transform speckle intensity distribution
Figure 579830DEST_PATH_IMAGE019
redeveloped into a complex signal distribution
Figure 562829DEST_PATH_IMAGE020
,
Figure 958039DEST_PATH_IMAGE021
(2)
Wherein, For
Figure 532556DEST_PATH_IMAGE019
Fourier transform,
Figure 235808DEST_PATH_IMAGE023
Be respectively
Figure 372391DEST_PATH_IMAGE011
The frequency of direction, step ( f) be step function, be defined as,
Figure 775691DEST_PATH_IMAGE024
(3)
(3) in the formula, fFor xThe frequency of direction f x Or yThe frequency of direction f y
After obtaining the complex signal distribution
Figure 972317DEST_PATH_IMAGE020
of speckle pattern light intensity, extract its PHASE DISTRIBUTION
Figure 726646DEST_PATH_IMAGE025
(4)
Wherein, arg (...) represent plural number is asked phase angle.
After obtaining its PHASE DISTRIBUTION; Utilize the bicubic spline interpolation, obtain having the PHASE DISTRIBUTION
Figure 401341DEST_PATH_IMAGE026
of sub-pixel precision.Then, confirm the position of each phase place vortex point through following formula
Figure 924726DEST_PATH_IMAGE027
(5)
Wherein,
Figure 793719DEST_PATH_IMAGE010
is for comprising the closed curve integration of this search point; S is topological charge number, is an integer.In the normal state speckle field, s gets ± and 1; When s=+1, phase place increases around this point counterclockwise, is positive vortex; When s=-1, phase place increases around this point clockwise, is negative vortex.Utilize+1 or-1 to remove to replace phasing matrix In this numerical value, In other have a fews replace with 0 value, last, constituted a vortex distribution matrix with sub-pixel precision X( x, y).Because the value of most points is 0 in this matrix, so X( x, y) be sparse matrix.
Utilize (2)-(5) formula, to the forward and backward speckle plot of light intensity of object generating plane intrinsic displacement
Figure 891622DEST_PATH_IMAGE001
, Handle, obtain representing two sparse matrixes of the forward and backward information of object generating plane intrinsic displacement X 1( x, y) and X 2( x, y); Then, select suitable search subarea to these two sparse matrixes X 1( x, y) and X 2( x, y) carry out related operation, obtain speckle field and exist
Figure 831076DEST_PATH_IMAGE011
Direction has the displacement of sub-pixel precision
Figure 909890DEST_PATH_IMAGE012
If the enlargement factor of imaging optical path does M, then the in-plane displacement amount of testee does Because 0 value point was not participated in computing when sparse matrix was relevant, therefore, had improved the efficient of correlation computations greatly.
With compared with techniques in the past, advantage of the present invention: the inventive method has simple, characteristics fast and accurately, and its measuring accuracy can reach tens nanometers, and simultaneously, its counting yield improves more than 10 times than traditional digital speckle correlation technique phase specific energy.That is to say that the purpose that this method realizes is: can when high-level efficiency is calculated, realize the measurement of the nano level high resolution precision of in-plane displacement.Can be widely used in fields such as photoelectricity Non-Destructive Testing, be particularly suitable for real-time, the high precision reliable measuring of the micro-displacement in these fields.
Description of drawings
Fig. 1 is the structural representation of measurement mechanism among the present invention.
Reference numeral: 1, continuous wave laser, 2, the collimator and extender device, 3, testee, 4, convergent lens, 5, the CCD camera, 6, computing machine.
Embodiment
Utilization of the present invention is measured by the measurement mechanism that continuous wave laser 1, collimator and extender device 2, convergent lens 4, CCD camera 5 and computing machine 6 constitute; As shown in the figure; The continuous wave laser of wherein selecting for use 1 is the He-Ne laser instrument, and optical maser wavelength is 632.8nm, and power is 10mW.At first measure index path according to above-mentioned structural arrangement, the laser beam that continuous wave laser 1 sends becomes directional light behind collimator and extender device 2, be radiated on the testee 3; Laser beam forms the speckle light field in the echo area after treating testee 3 scatterings; Behind convergent lens 4, get into 5 imagings of CCD camera, store computing machine 6 then and handle, concrete measuring process is following:
At first; With before the CCD camera 5 record testees 3 generating plane intrinsic displacements with displacement after speckle plot of light intensity ,
Figure 504055DEST_PATH_IMAGE002
; For guaranteeing measuring accuracy; The mean diameter that should make the speckle particle in the speckle pattern is 5 Pixels, and speckle image is of a size of 1024 * 1024 Pixels; Storing two width of cloth speckle plot of light intensity into, computing machine 6 carries out subsequent treatment;
Adopt with the special complex filter of Gauss-Hull rice; To before the testee 3 generating plane intrinsic displacements with displacement after speckle plot of light intensity
Figure 386560DEST_PATH_IMAGE001
,
Figure 676727DEST_PATH_IMAGE002
carry out filtering, the light intensity complex signal that obtains them distribute ,
Figure 994893DEST_PATH_IMAGE004
;
Then; Obtain its PHASE DISTRIBUTION
Figure 124500DEST_PATH_IMAGE005
and according to light intensity complex signal distribution
Figure 866377DEST_PATH_IMAGE003
and
Figure 338946DEST_PATH_IMAGE004
;
Figure 211721DEST_PATH_IMAGE005
and carried out the bicubic spline interpolation, obtain having PHASE DISTRIBUTION matrix
Figure 760831DEST_PATH_IMAGE007
and
Figure 173358DEST_PATH_IMAGE008
of sub-pixel precision;
Definition according to the phase place vortex utilizes formula
Figure 371996DEST_PATH_IMAGE009
To the PHASE DISTRIBUTION matrix
Figure 553579DEST_PATH_IMAGE007
With
Figure 946514DEST_PATH_IMAGE008
Carry out the search of phase place vortex point, wherein,
Figure 784020DEST_PATH_IMAGE010
For comprising the closed curve integration of this search point; When s=+1, this vortex is positive vortex, and when s=-1, this vortex is negative vortex; Replace the PHASE DISTRIBUTION matrix with+1 or-1
Figure 350131DEST_PATH_IMAGE007
With In original this numerical value, matrix
Figure 950056DEST_PATH_IMAGE007
With
Figure 776323DEST_PATH_IMAGE008
In other numerical value of having a few replace with 0; Two phase place vortex matrixes representing testee generating plane intrinsic displacement forward and backward have finally been obtained X 1( x, y) and X 2( x, y); Because 0 value accounts for the overwhelming majority in these two matrixes, so, these two matrixes X 1( x, y) and X 2( x, y) be sparse matrix;
Selecting size is that the subarea of 51 * 51 Pixels is as the region of search, to two forward and backward sparse matrixes of testee 3 generating plane intrinsic displacements X 1( x, y) and X 2( x, y) carry out related operation, obtain speckle field and exist
Figure 880545DEST_PATH_IMAGE011
The in-plane displacement with sub-pixel precision of direction
Figure 974403DEST_PATH_IMAGE012
, the enlargement factor of the convergent lens of selecting for use 4 is 10 times, then the in-plane displacement amount of testee 3 generations does
Figure 771458DEST_PATH_IMAGE029
The pixel size of the CCD camera of selecting for use 5 is 10mm, and the measuring accuracy of this inventive method is 0.01mm, i.e. 10nm; Under the identical condition of the Hardware configuration of computing machine 6, the counting yield of this inventive method is 10 times of conventional digital speckle correlation technique counting yield.
Show through experiment: the counting yield of the inventive method can improve more than 10 times, and simultaneously, its measuring accuracy can reach the resolution below the 10nm; In addition, this inventive method also has succinct, the simple characteristics of light path, is suitable for real-time, the online detection in commercial production field.

Claims (1)

1. high accuracy number speckle relevant measurement method; It is characterized in that: this method utilizes the measurement mechanism that is made up of continuous wave laser (1), collimator and extender device (2), convergent lens (4), CCD camera (5) and computing machine (6) to measure; Light beam working direction at this continuous wave laser (1) is provided with collimator and extender device (2) and testee (3) successively; Light beam is after the testee scattering; Light beam gets into CCD camera (5) imaging after convergent lens (4) is assembled, and computing machine (6) is advanced in storage then, and measuring process is following:
Step one, with a CCD camera records the measured object plane displacement occurred before and after the displacement of the speckle intensity diagram
Figure 434384DEST_PATH_IMAGE001
, , to ensure accuracy, should make the speckle pattern of speckles The average diameter of 5? Pixels, speckle image size of 1024 × 1024? Pixels; the two speckle intensity map
Figure 68944DEST_PATH_IMAGE001
and stored in the computer for further processing;
Step 2, with the special complex filter of Gauss-Hull rice; To before the testee generating plane intrinsic displacement with displacement after speckle plot of light intensity
Figure 655357DEST_PATH_IMAGE001
,
Figure 477819DEST_PATH_IMAGE002
carry out filtering, the light intensity complex signal that obtains them distribute
Figure 682536DEST_PATH_IMAGE003
and
Figure 881436DEST_PATH_IMAGE004
;
Step 3, then; Obtain its PHASE DISTRIBUTION
Figure 173374DEST_PATH_IMAGE005
and
Figure 346604DEST_PATH_IMAGE006
according to light intensity complex signal distribution
Figure 487998DEST_PATH_IMAGE003
and
Figure 419045DEST_PATH_IMAGE004
;
Figure 869989DEST_PATH_IMAGE005
and carried out the bicubic spline interpolation, obtain having PHASE DISTRIBUTION matrix
Figure 416825DEST_PATH_IMAGE008
and
Figure 691949DEST_PATH_IMAGE009
of sub-pixel precision;
Step 4, according to the definition of phase place vortex, utilize formula
Figure 273103DEST_PATH_IMAGE010
To the PHASE DISTRIBUTION matrix
Figure 608269DEST_PATH_IMAGE008
With
Figure 776339DEST_PATH_IMAGE009
Carry out the search of phase place vortex point, wherein,
Figure 792836DEST_PATH_IMAGE011
For comprising the closed curve integration of this search point; When s=+1, this vortex is positive vortex, and when s=-1, this vortex is negative vortex; Replace the PHASE DISTRIBUTION matrix with+1 or-1
Figure 290814DEST_PATH_IMAGE008
With
Figure 144DEST_PATH_IMAGE009
In original this numerical value, matrix
Figure 950782DEST_PATH_IMAGE008
With
Figure 770971DEST_PATH_IMAGE009
In other numerical value of having a few replace with 0; Two phase place vortex matrixes representing testee generating plane intrinsic displacement forward and backward have finally been obtained X 1( x, y) and X 2( x, y); Because 0 value accounts for the overwhelming majority in these two matrixes, so, these two matrixes X 1( x, y) and X 2( x, y) be sparse matrix;
Step 5, to select size be that the subarea of 51 * 51 Pixels is as the region of search, to two forward and backward sparse matrixes of object generating plane intrinsic displacement X 1( x, y) and X 2( x, y) carry out related operation, obtain speckle field and exist
Figure 559673DEST_PATH_IMAGE012
The in-plane displacement with sub-pixel precision of direction
Figure 502221DEST_PATH_IMAGE013
, the enlargement factor of imaging optical path does M, then the in-plane displacement amount of testee generation does
Figure 877839DEST_PATH_IMAGE014
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CN103020907A (en) * 2012-12-04 2013-04-03 上海交通大学 DSPI (digital speckle pattern interferometry) fringe filtering system based on BEEMD (bidimensional ensemble empirical mode decomposition)
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CN103383353A (en) * 2013-07-02 2013-11-06 河南科技大学 Optical vortices-based dynamic speckle test method
CN103383353B (en) * 2013-07-02 2015-04-22 河南科技大学 Optical vortices-based dynamic speckle test method
CN104634281A (en) * 2015-02-15 2015-05-20 上海理工大学 Drum machine and measuring method
CN105157588A (en) * 2015-09-05 2015-12-16 辽宁工程技术大学 Multi-dimensional synchronous optimized measurement method for strain localization band interval evolution rule
CN105157588B (en) * 2015-09-05 2018-01-26 辽宁工程技术大学 A kind of multidimensional Synchronous fluorimetry measuring method of strain localization band spacing development law
CN110631487A (en) * 2019-11-08 2019-12-31 济南大学 Method for measuring transverse micrometric displacement by utilizing laser speckle autocorrelation technology
CN111856480A (en) * 2020-07-29 2020-10-30 南京工程学院 Rapid detection method and detection system for equipment displacement
CN111856480B (en) * 2020-07-29 2023-11-10 南京工程学院 Rapid detection method and detection system for equipment displacement

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