CN102486617A - Precise adjusting apparatus - Google Patents
Precise adjusting apparatus Download PDFInfo
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- CN102486617A CN102486617A CN2010105752355A CN201010575235A CN102486617A CN 102486617 A CN102486617 A CN 102486617A CN 2010105752355 A CN2010105752355 A CN 2010105752355A CN 201010575235 A CN201010575235 A CN 201010575235A CN 102486617 A CN102486617 A CN 102486617A
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Abstract
The invention provides a precise adjusting apparatus used for adjusting a position of a silicon chip. The precise adjusting apparatus comprises a vertical adjusting module. From bottom to top, the vertical adjusting module sequentially comprises an adjusting pedestal, a fastening threaded sleeve, a movable column, and an adjusting threaded sleeve, the adjusting pedestal is fixed on a base. The adjusting pedestal is provided with an outer conical section and through grooves. The through grooves are vertically arranged, and penetrate the outer conical section. The fastening threaded sleeve and the adjusting pedestal are threadedly connected. The fastening threaded sleeve comprises an inner conical section which fits into the outer conical section. Along the vertical direction, the movable column movably penetrates the adjusting pedestal and the fastening threaded sleeve. The adjusting threaded sleeve is arranged outside the movable column, and is threadedly connected with the movable column. The precise adjusting apparatus provided by the invention is suitable to be used for adjusting the silicon ship in a horizontal direction and a vertical direction. During a vertical adjusting procedure, with thread structures, vertical adjusting is realized; the stability is good, and the precision is high. After the vertical adjustment is finished, with conical surface interference, the movable column is fastened. The apparatus is advantaged in simple structure and easy operation.
Description
Technical field
The present invention relates to a kind of position regulator, and be particularly related to a kind of precision adjustment unit.
Background technology
The object lens of litho machine need to detect its object distance after assembling is accomplished, need this moment a kind of adjustment frock simulation work stage to carry silicon chip.For this adjustment work, need to guarantee under the certain situation of itself and benchmark table top verticality can be in real time along Z to the Z of steady and trickle adjusting silicon chip to the position.Whether clear through the imaging on the sensor silicon chip when regulating.When forming images clearly, then can record the object distance of object lens.
Existing governor motion such as electric hoist, hydraulic pressure, air pressure, motor etc. can only be realized Z to motion, but can not finely tune, and more can't guarantee the verticality of object lens and work stage.In addition, use mode such as hydraulic pressure also can't satisfy litho machine to environment requirement.
Utility model patent CN2866930 has proposed a kind of telescopic tube latch mechanism; This mechanism is the overcoat through screws clamp fluting mainly, owing to be not very big through the clamping force of tightening screw and providing, only is applicable to the clamping of thin-walled overcoat; And parts are many, can increase operating difficulties.
Utility model patent CN201358982 has proposed a kind of fine-tuning positioning adjusting gear; This device adopts backstay to insert in the pilot hole of uniformly-spaced arranging and locatees, and realizes the positioning and locking of inner and outer pipes, because pilot hole has certain interval; Continuous adjusting can not be realized, the fine setting purpose can't be reached.
Summary of the invention
To the problems referred to above, the present invention provides a kind of precision adjustment unit, and tight function with lock can be implemented under the prerequisite that satisfies flatness, for silicon chip provides z to fine setting, and can be after fine setting finishes, fast and stable.
In order to achieve the above object, the present invention proposes a kind of precision adjustment unit, is used to adjust the position of silicon chip, it is characterized in that precision adjustment unit comprises:
Vertical adjusting module comprises from bottom to up successively:
Regulate seat, be fixed on the pedestal, regulate seat and have male cone (strobilus masculinus) section and through slot, through slot is along vertical setting and run through the male cone (strobilus masculinus) section;
Clamp swivel nut, screw with regulating seat, clamp swivel nut and have the inner conical surface section, inner conical surface section and male cone (strobilus masculinus) section are fitted;
Motor column was regulated seat and is clamped swivel nut along vertical running through movably; And
Adjusting bolt Adjusting screw, it is outside and be threaded with motor column to be arranged on motor column.
Furtherly, precision adjustment unit also comprises the leveling module, and said leveling module comprises:
Upper plate carries said silicon chip;
Base is fixedly connected on said motor column; And
A plurality of regulating elements,, connect said upper plate and base, and be evenly distributed on said upper plate and the base, in order to regulate the levelness of said upper plate.
Furtherly, each said regulating element comprises:
Set screw runs through said upper plate and base;
Setting nut is socketed in the end of said set screw, is positioned at the outside of said upper plate and base; And
Spring is socketed on the said set screw, is arranged between said upper plate and the base.
Furtherly, rotate said Adjusting bolt Adjusting screw, it is vertical mobile to drive said motor column.
Furtherly, precision adjustment unit also comprises screw and nut, and said screw passes said adjusting seat, and an end of said screw is positioned at the U-lag of said motor column, and said nut is arranged on the other end of said screw, is positioned at the said outside of regulating seat.
Precision adjustment unit provided by the present invention comprises leveling module and vertical adjusting module, be suitable for level to vertical on adjust silicon chip.In vertical adjustment process, realize vertical adjusting through helicitic texture, stability is good, and precision is high.After vertical adjustment finishes, interfere the effect that realizes clamping mobile post through the conical surface, simple for structure, processing ease.
Description of drawings
Shown in Figure 1 for having the structural representation of the litho machine of precision adjustment unit in the embodiment of the invention.
Shown in Figure 2 is the perspective view of precision adjustment unit in the embodiment of the invention.
Shown in Figure 3 is the cross-sectional view of precision adjustment unit in the embodiment of the invention.
Shown in Figure 4 is the decomposition texture synoptic diagram of vertical adjustment module in the precision adjustment unit of the present invention.
Embodiment
In order more to understand technology contents of the present invention, special act specific embodiment also cooperates appended graphic explanation following.
Please, shown in Figure 1 for having the structural representation of the litho machine of precision adjustment unit in the embodiment of the invention referring to Fig. 1.
Litho machine comprises object lens 1, precision adjustment unit 2, pedestal 3, sensor 4 and silicon chip 5.
Precision adjustment unit 2 is used for simulating the work stage of existing litho machine, carries silicon chip 5.Precision adjustment unit 2 is fixed on the pedestal 3, and silicon chip 5 is fixed on the precision adjustment unit 2.Utilize the horizontal level and the vertical position of precision adjustment unit 2 adjustment silicon chips 5.Be in course of adjustment, it is clear whether sensor 4 sensing silicon chips 5 form images, and when imaging is clear, stops to adjust silicon chip 5, and sensor 4 is measured distance---the object distance PO of object lens 1 camera lens to silicon chip 5 simultaneously.
Precision adjustment unit 2 comprises leveling module 2a and vertical adjusting module 2b.The detailed structure of leveling module 2a and vertical adjusting module 2b please refer to Fig. 2.
Shown in Figure 2 is the perspective view of precision adjustment unit in the embodiment of the invention.
Leveling module 2a in the precision adjustment unit 2 comprises upper plate 21, base 22 and a plurality of regulating element 230.Upper plate 21 carries silicon chips 5, the levelness that can regulate silicon chip 5 through the levelness of regulating upper plate 21.
A plurality of regulating element 230 uniform branches connect upper plate 21 and base 22 movably on upper plate 21 and base 22, move the levelness that regulating element 230 can be regulated upper plate 21.
In the present embodiment, regulating element 230 comprises set screw 23, setting nut 24 and spring 25.Set screw 23 runs through upper plate 21 and base 22; Setting nut 24 is socketed in the end of set screw 23; Set screw 23 and setting nut 24 lay respectively at the outside of upper plate 21 and base 22; Through the change of the position of setting nut 24 on set screw 23, can adjust the position relation between upper plate 21 and the base 22, thus the levelness of regulating silicon chip 5.Spring 25 is a compression spring, is socketed on the said set screw 23, is arranged on upper plate 21 and base 22 to keep the interval between upper plate 21 and the base 22.
Vertical adjusting module 2b in the precision adjustment unit 2 comprises bearing 30 and motor column 26 at least.Bearing 30 is fixed on the pedestal 3 (figure does not show), and motor column 26 can move along vertical with respect to pedestal 3, thereby regulates silicon chip 5 vertical positions.The detailed structure of vertical adjusting module 2b please be simultaneously with reference to figure 3-Fig. 4.
Shown in Figure 3 is the cross-sectional view of precision adjustment unit in the embodiment of the invention.Shown in Figure 4 is the decomposition texture synoptic diagram of vertical adjustment module in the precision adjustment unit of the present invention.
Vertical adjusting module 2b also comprises Adjusting bolt Adjusting screw 27, clamps swivel nut 28 and regulates seat 29.
The motor column 26 of vertical adjusting module 2b is fixedly connected on base 22.Motor column 26 comprises small axle diameter section and large-diameter section.The large-diameter section has external thread, and Adjusting bolt Adjusting screw 27 screws with the external thread of motor column 26.When rotating Adjusting bolt Adjusting screw 27, motor column 26 is driven and vertical moving.
Adjusting bolt Adjusting screw 27, clamp swivel nut 28 and regulate seat 29 and be hollow structure, the small axle diameter section of motor column 26 runs through Adjusting bolt Adjusting screw 27, clamps swivel nut 28 and regulates seat 29.And be clearance fit with the small-bore section of regulating seat 29 particularly, motor column 26 is suitable for respect to regulate seat 29 vertical moving.
Clamp swivel nut 28 and screw, clamp swivel nut 28, clamp swivel nut 28 and relatively move with adjusting seat 29 along vertical through rotation with regulating seat 29.Clamp swivel nut 28 and comprise inner conical surface section 281, regulate seat 29 and comprise through slot 291 and male cone (strobilus masculinus) section 292, inner conical surface section 281 is fitted with male cone (strobilus masculinus) section 292.When clamp swivel nut 28 along vertical when regulating seat 29 and relatively move, inner conical surface section 281 be close to male cone (strobilus masculinus) section 292 or away from.Through slot 291 is along vertical settings and run through the surface of the male cone (strobilus masculinus) section 292 of regulating seat 29; When inner conical surface section 281 is close to male cone (strobilus masculinus) section 292; Through slot 291 is extruded and reduces self gap; Thereby reduce the diameter of section of small-bore section, the small axle diameter section of motor column 26 is clamped in the small-bore section of regulating seat 29 the most at last.
Selectable, in order to strengthen clamping effect, a plurality of through slots 291 can be set on male cone (strobilus masculinus) section 292.
Selectable, the small axle diameter section of motor column 26 has U-lag 261.Regulate seat 29 and have screw 293, screw 32 screws in the screw 293, and screw 32 1 ends are arranged in the U-lag 261 of motor column 26.Nut 31 is arranged on the other end of screw 32, is positioned to regulate seat 29 outsides nut 31 lock screw 32 and fixed positions.Because screw 32 is arranged in U-lag 261, vertical deviation that can constrained motion post 26.
When needs were adjusted the position of silicon chip 5, the user can regulate a plurality of regulating elements 230 of leveling module 2a earlier; After being positioned at horizontal level to upper plate 21, rotate Adjusting bolt Adjusting screw 27 with along vertical moving movement post 26; Behind motor column 26 arrival target locations, rotate and clamp swivel nut 28, make inner conical surface 281 and male cone (strobilus masculinus) 292 be close to, with locking motor column 26.
The precision adjustment unit that present embodiment provided comprises leveling module and vertical adjusting module, be suitable for level to vertical on the adjustment silicon chip 5.In vertical adjustment process, realize vertical adjusting through helicitic texture, stability is good, and precision is high.After vertical adjustment finishes, interfere the effect that realizes clamping mobile post through the conical surface, simple for structure, processing ease.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.Have common knowledge the knowledgeable in the technical field under the present invention, do not breaking away from the spirit and scope of the present invention, when doing various changes and retouching.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (5)
1. precision adjustment unit is used to adjust the position of silicon chip, it is characterized in that said precision adjustment unit comprises:
Vertical adjusting module comprises from bottom to up successively:
Regulate seat, be fixed on the pedestal, said adjusting seat has male cone (strobilus masculinus) section and through slot, and said through slot is along vertical setting and run through said male cone (strobilus masculinus) section;
Clamp swivel nut, screw with said adjusting seat, said clamping swivel nut has the inner conical surface section, and said inner conical surface section and said male cone (strobilus masculinus) section are fitted;
Motor column is along vertical said adjusting seat and the said clamping swivel nut of running through movably; And
Adjusting bolt Adjusting screw, it is outside and be threaded with said motor column to be arranged on said motor column.
2. precision adjustment unit according to claim 1 is characterized in that, also comprises the leveling module, and said leveling module comprises:
Upper plate carries said silicon chip;
Base is fixedly connected on said motor column; And
A plurality of regulating elements,, connect said upper plate and base, and be evenly distributed on said upper plate and the base, in order to regulate the levelness of said upper plate.
3. precision adjustment unit according to claim 2 is characterized in that, each said regulating element comprises:
Set screw runs through said upper plate and base;
Setting nut is socketed in the end of said set screw, is positioned at the outside of said upper plate and base; And
Spring is socketed on the said set screw, is arranged between said upper plate and the base.
4. precision adjustment unit according to claim 1 is characterized in that, rotates said Adjusting bolt Adjusting screw, and it is vertical mobile to drive said motor column.
5. precision adjustment unit according to claim 1 is characterized in that, also comprises screw and nut; Said screw passes said adjusting seat; And an end of said screw is positioned at the U-lag of said motor column, and said nut is arranged on the other end of said screw, is positioned at the said outside of regulating seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105752355A CN102486617B (en) | 2010-12-06 | 2010-12-06 | Precise adjusting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105752355A CN102486617B (en) | 2010-12-06 | 2010-12-06 | Precise adjusting apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102486617A true CN102486617A (en) | 2012-06-06 |
| CN102486617B CN102486617B (en) | 2013-11-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105752355A Active CN102486617B (en) | 2010-12-06 | 2010-12-06 | Precise adjusting apparatus |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111002217A (en) * | 2019-11-25 | 2020-04-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Leveling mounting frame and sheet bearing device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003156014A (en) * | 2001-11-19 | 2003-05-30 | Takano Co Ltd | Clamp device, and table and connecting device having it |
| CN1711154A (en) * | 2002-11-06 | 2005-12-21 | 东京毅力科创株式会社 | High pressure compatible vacuum check for semiconductor wafer including lift mechanism |
| JP2010036291A (en) * | 2008-08-04 | 2010-02-18 | Disco Abrasive Syst Ltd | Cutting device |
| CN101738869A (en) * | 2008-11-20 | 2010-06-16 | 上海华虹Nec电子有限公司 | Silicon wafer bearing table for photoetching machine and use method thereof |
| CN201658501U (en) * | 2009-12-23 | 2010-12-01 | 厦门纬嘉运动器材有限公司 | Ascending and descending rotary clamping structure of walking aid |
-
2010
- 2010-12-06 CN CN2010105752355A patent/CN102486617B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003156014A (en) * | 2001-11-19 | 2003-05-30 | Takano Co Ltd | Clamp device, and table and connecting device having it |
| CN1711154A (en) * | 2002-11-06 | 2005-12-21 | 东京毅力科创株式会社 | High pressure compatible vacuum check for semiconductor wafer including lift mechanism |
| JP2010036291A (en) * | 2008-08-04 | 2010-02-18 | Disco Abrasive Syst Ltd | Cutting device |
| CN101738869A (en) * | 2008-11-20 | 2010-06-16 | 上海华虹Nec电子有限公司 | Silicon wafer bearing table for photoetching machine and use method thereof |
| CN201658501U (en) * | 2009-12-23 | 2010-12-01 | 厦门纬嘉运动器材有限公司 | Ascending and descending rotary clamping structure of walking aid |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111002217A (en) * | 2019-11-25 | 2020-04-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Leveling mounting frame and sheet bearing device |
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| Publication number | Publication date |
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| CN102486617B (en) | 2013-11-13 |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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