CN102480285B - 红外传感器开关器件及其制作方法 - Google Patents
红外传感器开关器件及其制作方法 Download PDFInfo
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- CN102480285B CN102480285B CN201010572107.5A CN201010572107A CN102480285B CN 102480285 B CN102480285 B CN 102480285B CN 201010572107 A CN201010572107 A CN 201010572107A CN 102480285 B CN102480285 B CN 102480285B
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- cantilever beam
- metal
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- infrared sensor
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- 238000000034 method Methods 0.000 claims description 38
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000004411 aluminium Substances 0.000 claims description 11
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- 239000010931 gold Substances 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
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- 229920001721 polyimide Polymers 0.000 claims description 5
- 229910021426 porous silicon Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 2
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- 229910052755 nonmetal Inorganic materials 0.000 abstract 2
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- 206010028980 Neoplasm Diseases 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
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- Micromachines (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Description
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Priority Applications (1)
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CN201010572107.5A CN102480285B (zh) | 2010-11-29 | 2010-11-29 | 红外传感器开关器件及其制作方法 |
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CN201010572107.5A CN102480285B (zh) | 2010-11-29 | 2010-11-29 | 红外传感器开关器件及其制作方法 |
Publications (2)
Publication Number | Publication Date |
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CN102480285A CN102480285A (zh) | 2012-05-30 |
CN102480285B true CN102480285B (zh) | 2014-07-09 |
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CN201010572107.5A Expired - Fee Related CN102480285B (zh) | 2010-11-29 | 2010-11-29 | 红外传感器开关器件及其制作方法 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103449356B (zh) * | 2012-05-31 | 2016-03-30 | 中国科学院微电子研究所 | 双材料悬臂梁应力匹配方法 |
CN104229726B (zh) * | 2013-06-21 | 2016-07-06 | 中国科学院微电子研究所 | 应力匹配的悬臂梁结构及其制造方法 |
CN105329845B (zh) * | 2014-07-31 | 2017-10-27 | 中芯国际集成电路制造(上海)有限公司 | 悬臂梁的制作方法、悬臂梁及mems器件 |
CN105523519B (zh) * | 2014-09-29 | 2017-08-25 | 中芯国际集成电路制造(上海)有限公司 | Mems器件及其形成方法 |
CN108562360B (zh) * | 2018-03-20 | 2020-11-27 | 上海集成电路研发中心有限公司 | 一种新型红外传感器结构 |
CN111486973B (zh) * | 2020-03-30 | 2024-07-19 | 四川新辉医疗科技有限公司 | 一种全柔性热释电红外探测器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101008694A (zh) * | 2006-01-26 | 2007-08-01 | 中国科学院微电子研究所 | 一种光开关的设计及制作工艺 |
CN101274739A (zh) * | 2007-03-28 | 2008-10-01 | 中国科学院微电子研究所 | 非接触式微电子机械系统红外温度报警器的制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5844238A (en) * | 1996-03-27 | 1998-12-01 | David Sarnoff Research Center, Inc. | Infrared imager using room temperature capacitance sensor |
US5917226A (en) * | 1997-10-24 | 1999-06-29 | Stmicroelectronics, Inc. | Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods |
US8957485B2 (en) * | 2009-01-21 | 2015-02-17 | Cavendish Kinetics, Ltd. | Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme |
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- 2010-11-29 CN CN201010572107.5A patent/CN102480285B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101008694A (zh) * | 2006-01-26 | 2007-08-01 | 中国科学院微电子研究所 | 一种光开关的设计及制作工艺 |
CN101274739A (zh) * | 2007-03-28 | 2008-10-01 | 中国科学院微电子研究所 | 非接触式微电子机械系统红外温度报警器的制备方法 |
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