CN102476092A - Coating method - Google Patents
Coating method Download PDFInfo
- Publication number
- CN102476092A CN102476092A CN2010105637380A CN201010563738A CN102476092A CN 102476092 A CN102476092 A CN 102476092A CN 2010105637380 A CN2010105637380 A CN 2010105637380A CN 201010563738 A CN201010563738 A CN 201010563738A CN 102476092 A CN102476092 A CN 102476092A
- Authority
- CN
- China
- Prior art keywords
- lcos
- liner
- suspension
- pearl
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000000725 suspension Substances 0.000 claims abstract description 18
- 239000003960 organic solvent Substances 0.000 claims abstract description 10
- 239000013078 crystal Substances 0.000 claims description 16
- 238000010422 painting Methods 0.000 claims description 12
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000004448 titration Methods 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000003756 stirring Methods 0.000 abstract description 3
- 239000011324 bead Substances 0.000 abstract 4
- 239000007788 liquid Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000004506 ultrasonic cleaning Methods 0.000 abstract 1
- 239000011049 pearl Substances 0.000 description 26
- 125000006850 spacer group Chemical group 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 210000002858 crystal cell Anatomy 0.000 description 3
- 239000004579 marble Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention belongs to the technical field of manufacturing of a silicon-based liquid crystal on silicon (LCoS) micro display device, and particularly relates to a coating method applied to manufacturing of an LCoS liquid crystal box, which comprises the following steps: placing the liner beads in a volatile organic solvent to form a suspension; placing the suspension in an ultrasonic cleaning machine, and dispersing the liner beads by using ultrasonic waves; fully stirring the turbid liquid by using a magnetic stirrer; rotating the LCoS wafer with the surface titrating turbid liquid by using a spin coater to form a layer of solution film on the surface of the LCoS wafer; and after the organic solvent in the solution film on the surface of the LCoS wafer is volatilized, the process of coating the liner beads on the surface of the LCoS wafer is completed. The coating method adopted by the invention ensures that the gasket beads are dispersed more uniformly and have lower density, and the luminous performance of the device is obviously improved.
Description
Technical field
The invention belongs to the technical field that liquid crystal on silicon (LCoS) micro-display device is made, be specifically related to the painting method that a kind of LCoS of being applied to liquid crystal cell is made.
Background technology
The little demonstration of liquid crystal on silicon (LCoS) is the little Display Technique of a kind of novel reflection type liquid crystal.It utilizes the CMOS technology that active matrix is produced on the silicon substrate, and end face is used as the reflecting layer.Display floater is through adorning ito glass at LCoS wafer end face lid, and the can liquid crystal is processed.
In the manufacturing process of LCoS liquid crystal cell, thick and play a supporting role for accurate control box, use cushioning strip or liner pearl (Spacer), and box is thick many with liner pearl (Spacer) below 10 μ m.Because box thickness is less,, need to adopt small-sized glass marble as the liner pearl in order to obtain uniform gap size.The painting method of general general LCoS liquid crystal cell liner pearl (Spacer) is the method for spray solution, because liner pearl size is less, when the LCoS crystal column surface applies, is prone to liner pearl skewness and several liner pearls are piled up phenomenon.Colour 800 * 600 resolution ratio of display device make each pixel size also for micron dimension, therefore can influence the device luminescent properties, can cause thickness of liquid crystal box inhomogeneous when serious, and produce more serious problem such as bubbles of vacuum thus.
Summary of the invention
The technical problem that the present invention will solve provides a kind of painting method, makes the liner pearl can be coated in the surface of LCoS wafer uniformly.
In order to achieve the above object, the technical scheme of the present invention's employing is:
A kind of painting method comprises the steps:
(1) the liner pearl is put into volatile organic solvent, form suspension;
(2) suspension is put into supersonic wave cleaning machine, use ultrasonic dispersing liner pearl;
(3) use magnetic stirrer that suspension is fully stirred;
(4) the LCoS wafer of use sol evenning machine surface of revolution titration suspension forms one deck solution film at the LCoS crystal column surface;
(5) after the volatilization of the organic solvent in the LCoS crystal column surface solution film, promptly accomplished the process that the liner pearl is coated in the LCoS crystal column surface.
In the such scheme, said organic solvent is carrene or isopropyl alcohol.
Compared with prior art, the beneficial effect that technical scheme produced of the present invention's employing is following:
The painting method that the present invention adopts makes the more even of liner pearl dispersion, and density is lower simultaneously, and the device luminescent properties is significantly improved.
The specific embodiment
Through embodiment technical scheme of the present invention is described in detail below.
Embodiment 1:
The embodiment of the invention provides a kind of painting method, and step is following:
The glass marble that adopts 3.00 ± 0.02 μ m is put into dichloromethane solution as liner pearl (Spacer) with the liner pearl, forms suspension; Then suspension is put into supersonic wave cleaning machine for a moment, utilize ultrasonic wave that the liner pearl is scatter one by one, then again suspension is placed on the magnetic stirrer and fully stirs; To place with the LCoS wafer after the acetone on the sol evenning machine turntable; After the unlatching air pump is fixing, draws an amount of liner pearl suspension with the rubber suction pipe and drop in the LCoS crystal column surface, drive the LCoS wafer at the sol evenning machine rotary table top and rotate at a high speed down; To form one deck solution film as thin as a wafer at the LCoS crystal column surface; Liner pearl (Spacer) has obtained comparatively ideal distribution, treat the organic solvent volatilization in the solution film of LCoS crystal column surface after, promptly accomplish the process that the liner pearl is coated in the LCoS crystal column surface.
Embodiment 2:
The embodiment of the invention provides a kind of painting method, and step is following:
The glass marble that adopts 3.00 ± 0.02 μ m is as liner pearl (Spacer), and the liner pearl is put into aqueous isopropanol, forms suspension; Then suspension is put into supersonic wave cleaning machine for a moment, utilize ultrasonic wave that the liner pearl is scatter one by one, then again suspension is placed on the magnetic stirrer and fully stirs; To place with the LCoS wafer after the acetone on the sol evenning machine turntable; After the unlatching air pump is fixing, draws an amount of liner pearl suspension with the rubber suction pipe and drop in the LCoS crystal column surface, drive the LCoS wafer at the sol evenning machine rotary table top and rotate at a high speed down; To form one deck solution film as thin as a wafer at the LCoS crystal column surface; Liner pearl (Spacer) has obtained comparatively ideal distribution, treat the organic solvent volatilization in the solution film of LCoS crystal column surface after, promptly accomplish the process that the liner pearl is coated in the LCoS crystal column surface.
Use painting method provided by the invention, can be so that the liner pearl be coated in the LCoS crystal column surface uniformly, adhesion phenomenon reduces significantly, and the control of liner pearl density is also comparatively desirable, is about 360/mm
2Therefore, use the device of this painting method preparation, luminescent properties is significantly improved.
The above is merely the preferred embodiments of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (2)
1. a painting method is characterized in that, comprises the steps:
(1) the liner pearl is put into volatile organic solvent, form suspension;
(2) suspension is put into supersonic wave cleaning machine, use ultrasonic dispersing liner pearl;
(3) use magnetic stirrer that suspension is fully stirred;
(4) the LCoS wafer of use sol evenning machine surface of revolution titration suspension forms one deck solution film at the LCoS crystal column surface;
(5) after the volatilization of the organic solvent in the LCoS crystal column surface solution film, promptly accomplished the process that the liner pearl is coated in the LCoS crystal column surface.
2. painting method as claimed in claim 1 is characterized in that: said organic solvent is carrene or isopropyl alcohol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105637380A CN102476092A (en) | 2010-11-29 | 2010-11-29 | Coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105637380A CN102476092A (en) | 2010-11-29 | 2010-11-29 | Coating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102476092A true CN102476092A (en) | 2012-05-30 |
Family
ID=46088945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105637380A Pending CN102476092A (en) | 2010-11-29 | 2010-11-29 | Coating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102476092A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1492261A (en) * | 2003-09-04 | 2004-04-28 | 复旦大学 | Method for controlling liquid crystal device box thickness |
-
2010
- 2010-11-29 CN CN2010105637380A patent/CN102476092A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1492261A (en) * | 2003-09-04 | 2004-04-28 | 复旦大学 | Method for controlling liquid crystal device box thickness |
Non-Patent Citations (1)
| Title |
|---|
| 代永平,宋丹娜,刘艳艳: "硅基液晶显示器液晶盒贴合工艺研究", 《液晶与显示》 * |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120530 |