CN102464359A - Waste water discharge control system and waste water discharge system - Google Patents
Waste water discharge control system and waste water discharge system Download PDFInfo
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- CN102464359A CN102464359A CN2010105310063A CN201010531006A CN102464359A CN 102464359 A CN102464359 A CN 102464359A CN 2010105310063 A CN2010105310063 A CN 2010105310063A CN 201010531006 A CN201010531006 A CN 201010531006A CN 102464359 A CN102464359 A CN 102464359A
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Abstract
The invention discloses a waste water discharge control system, comprising a sewage discharge pipe, and a technical water discharge pipe and a control unit. The control unit controls opening and closure of the sewage discharge pipe and the technical water discharge pipe respectively, according to a system control signal. The waste water discharge system realizes reasonable discharge of waste water from chemically mechanical polishing equipment, not only reduces working pressure of a waste water processing system but also recovers the technical water, so as to reduce system operating cost and save resource. The invention also provides a waste water discharge system.
Description
[technical field]
The present invention relates to a kind of discharge of wastewater system and discharge of wastewater system.
[background technology]
Chemically machinery polished is a kind of technology of disk being carried out planarization process.Chemical-mechanical polisher uses NH when running goods
4OH cleans disk, produce to comprise the sewage of ammoniacal liquor, and do not run goods only produce process water (Ultra pure water, UPW).The waste water that the traditional chemical mechanical polishing device is produced (comprising ammoniacal liquor and process water) all inserts the ammoniacal liquor discharge pipe, finally flows into ammonia disposal system together.And in fact having only ammoniacal liquor just need be discharged in the ammonia disposal system, process water need not handled especially.
[summary of the invention]
Based on this, be necessary to provide a kind of discharge of wastewater system that ammoniacal liquor and process water is discharged into different pipelines.
In addition, a kind of discharge of wastewater system that ammoniacal liquor and process water is discharged into different pipelines also is provided.
A kind of discharge of wastewater system comprises the sewage discharge pipeline, in addition, also comprises process water discharge pipe and control unit, and said control unit is controlled the opening and closing of sewage discharge pipeline and process water discharge pipe respectively according to system control signal.
Preferably, on said sewage discharge pipeline and the process water discharge pipe operated pneumatic valve is set respectively, said control unit is realized the opening and closing of sewage discharge pipeline and process water discharge pipe through the said operated pneumatic valve of control.
Preferably, said system control signal comprises the process water discharging signal of sewage discharge signal when stopping to produce sewage when producing sewage;
Said control unit is opened and is arranged on the operated pneumatic valve on the sewage discharge pipeline according to said sewage discharge signal, closes the operated pneumatic valve that is arranged on the process water discharge pipe; Said control unit is closed the operated pneumatic valve that is arranged on the sewage discharge pipeline according to said process water discharging signal, opens the operated pneumatic valve that is arranged on the process water discharge pipe.
Preferably, it is characterized in that said control unit comprises the programmable logic controller of receiving system wave and the SV of the said operated pneumatic valve opening and closing of control.
A kind of discharge of wastewater system; Comprise and produce waste water and send the chemical-mechanical polisher of system control signal, the sewage discharge pipeline that is connected with said chemical-mechanical polisher; In addition; Also comprise the process water discharge pipe and the control unit that are connected with said chemical-mechanical polisher, said control unit is controlled the opening and closing of sewage discharge pipeline and process water discharge pipe respectively according to system control signal.
Preferably, on said sewage discharge pipeline and the process water discharge pipe operated pneumatic valve is set respectively, said control unit is realized the opening and closing of sewage discharge pipeline and process water discharge pipe through the said operated pneumatic valve of control.
Preferably, said system control signal comprises the process water discharging signal of sewage discharge signal when stopping to produce sewage when producing sewage;
Said control unit is opened and is arranged on the operated pneumatic valve on the sewage discharge pipeline according to said sewage discharge signal, closes the operated pneumatic valve that is arranged on the process water discharge pipe; Said control unit is closed the operated pneumatic valve that is arranged on the sewage discharge pipeline according to said process water discharging signal, opens the operated pneumatic valve that is arranged on the process water discharge pipe.
Preferably, said control unit comprises the programmable logic controller of receiving system wave and the SV of the said operated pneumatic valve opening and closing of control.
Preferably, said discharge of wastewater system also comprises the WWT pipeline that is connected with the sewage discharge pipeline and sewage is carried out harmless treatment.
Preferably, said discharge of wastewater system also comprises the recycling pipeline that is connected with the process water discharge pipe and the process water of discharging is reclaimed.
This discharge of wastewater system lets chemical-mechanical polisher waste water rationally discharge, and has not only reduced the WP of Waste Water Treatment, can also reclaim process water, has saved resource when having reduced system operation cost.
[description of drawings]
Fig. 1 is the structure iron of an embodiment of discharge of wastewater system.
Fig. 2 is the structure iron of an embodiment of discharge of wastewater system.
[embodiment]
Mainly combine accompanying drawing that discharge of wastewater system, discharge of wastewater system are further explained below.
Discharge of wastewater system as shown in Figure 1, comprise sewage discharge pipeline 120, process water discharge pipe 130, programmable logic controller 140, SV 150 and be separately positioned on the sewage discharge pipeline and the process water discharge pipe on operated pneumatic valve 162,164.
The programmable logic controller 140 receiving system waves of above-mentioned discharge of wastewater system, and the system control signal that receives sent to SV 150, SV 150 is according to the opening and closing of system control signal control operated pneumatic valve 142,144.
As shown in Figure 2 a kind of discharge of wastewater system; Comprise chemical-mechanical polisher 210, the sewage discharge pipeline 220 that is connected with chemical-mechanical polisher 210, the process water discharge pipe 230 that is connected with chemical-mechanical polisher 210, receiving system wave and the programmable logic controller 240 that said system control signal is sent, receive the SV 250 of the system control signal that programmable logic controller 240 sends and be separately positioned on sewage discharge pipeline 220 and process water discharge pipe 130 on be used for two operated pneumatic valves 262,264 of pilot piping opening and closing, the opening and closing of SV 250 control operated pneumatic valves 262,264.
Preferably, the discharge of wastewater system also comprise be connected with the sewage discharge pipeline sewage is carried out the WWT pipeline of harmless treatment and the recycling pipeline that is connected with the process water discharge pipe and the process water of discharging is reclaimed.
Discharge of wastewater system works detailed process is following:
When chemical-mechanical polisher 210 begins to run goods; Send the sewage discharge signal; Programmable logic controller 240 receives the sewage discharge signal and the sewage discharge signal is sent to SV 250; SV 250 receives the sewage discharge signal and controls the operated pneumatic valve 262 that is arranged at sewage discharge pipeline 220 and open sewage discharge pipelines 220; The operated pneumatic valve 264 that is arranged at process water discharge pipe 230 is closed process water discharge pipe 230, and chemical-mechanical polisher 210 runs the sewage entering sewage discharge pipeline 220 that goods produces;
When chemical-mechanical polisher 210 stops to run goods; Send process water discharging signal; Programmable logic controller 240 receiving process water discharge signal and process water are discharged signal and send to SV 250; SV 250 receiving process water discharging signal and control are arranged at the operated pneumatic valve 262 of sewage discharge pipeline 220 and close sewage discharge pipeline 220; The operated pneumatic valve 264 that is arranged at process water discharge pipe 230 is opened process water discharge pipe 230, and the process water that chemical-mechanical polisher 210 produces gets into process water discharge pipe 230.
Preferably, inflow was carried out harmless treatment WWT pipeline to sewage after sewage got into the sewage discharge pipeline, and process water flows into the recycling pipeline that reclaims process water after getting into the process water discharge pipe.
In the present embodiment, sewage is ammoniacal liquor, and in other embodiment, sewage can be ammonium sulfate waste water, ammonium chloride waste-water etc.
In concrete embodiment, when chemical-mechanical polisher ammoniacal liquor shower nozzle ejection ammoniacal liquor cleans disk, send the sewage discharge signal; When chemical-mechanical polisher ammoniacal liquor shower nozzle stops to spray ammoniacal liquor, send process water discharging signal.
Through adopting the solenoid control discharge of wastewater, can be effectively with effluent segregation.
The waste water that this discharge of wastewater system lets chemical-mechanical polisher produce is rationally discharged, and has not only reduced the WP of Waste Water Treatment, can also reclaim process water, has saved resource when having reduced system operation cost.
The above embodiment has only expressed one or more embodiments of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to claim of the present invention.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the present invention's design, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with accompanying claims.
Claims (10)
1. discharge of wastewater system; Comprise the sewage discharge pipeline; It is characterized in that, also comprise process water discharge pipe and control unit, said control unit is controlled the opening and closing of sewage discharge pipeline and process water discharge pipe respectively according to system control signal.
2. discharge of wastewater system as claimed in claim 1; It is characterized in that; On said sewage discharge pipeline and the process water discharge pipe operated pneumatic valve is set respectively, said control unit is realized the opening and closing of sewage discharge pipeline and process water discharge pipe through the said operated pneumatic valve of control.
3. discharge of wastewater system as claimed in claim 2 is characterized in that, said system control signal comprises the process water discharging signal of sewage discharge signal when stopping to produce sewage when producing sewage;
Said control unit is opened and is arranged on the operated pneumatic valve on the sewage discharge pipeline according to said sewage discharge signal, closes the operated pneumatic valve that is arranged on the process water discharge pipe; Said control unit is closed the operated pneumatic valve that is arranged on the sewage discharge pipeline according to said process water discharging signal, opens the operated pneumatic valve that is arranged on the process water discharge pipe.
4. like any described discharge of wastewater system in the claim 1～3, it is characterized in that said control unit comprises the programmable logic controller of receiving system wave and the SV of the said operated pneumatic valve opening and closing of control.
5. discharge of wastewater system; Comprise and produce waste water and send the chemical-mechanical polisher of system control signal, the sewage discharge pipeline that is connected with said chemical-mechanical polisher; It is characterized in that; Also comprise the process water discharge pipe and the control unit that are connected with said chemical-mechanical polisher, said control unit is controlled the opening and closing of sewage discharge pipeline and process water discharge pipe respectively according to system control signal.
6. discharge of wastewater as claimed in claim 5 system; It is characterized in that; On said sewage discharge pipeline and the process water discharge pipe operated pneumatic valve is set respectively, said control unit is realized the opening and closing of sewage discharge pipeline and process water discharge pipe through the said operated pneumatic valve of control.
7. discharge of wastewater as claimed in claim 6 system is characterized in that, said system control signal comprises the process water discharging signal of sewage discharge signal when stopping to produce sewage when producing sewage;
Said control unit is opened and is arranged on the operated pneumatic valve on the sewage discharge pipeline according to said sewage discharge signal, closes the operated pneumatic valve that is arranged on the process water discharge pipe; Said control unit is closed the operated pneumatic valve that is arranged on the sewage discharge pipeline according to said process water discharging signal, opens the operated pneumatic valve that is arranged on the process water discharge pipe.
8. like any described discharge of wastewater system of claim 5～7, it is characterized in that said control unit comprises the programmable logic controller of receiving system wave and the SV of the said operated pneumatic valve opening and closing of control.
9. discharge of wastewater as claimed in claim 8 system is characterized in that, said discharge of wastewater system also comprises the WWT pipeline that is connected with the sewage discharge pipeline and sewage is carried out harmless treatment.
10. discharge of wastewater as claimed in claim 9 system is characterized in that, said discharge of wastewater system also comprises the recycling pipeline that is connected with the process water discharge pipe and the process water of discharging is reclaimed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105310063A CN102464359A (en) | 2010-11-03 | 2010-11-03 | Waste water discharge control system and waste water discharge system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105310063A CN102464359A (en) | 2010-11-03 | 2010-11-03 | Waste water discharge control system and waste water discharge system |
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| Publication Number | Publication Date |
|---|---|
| CN102464359A true CN102464359A (en) | 2012-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105310063A Pending CN102464359A (en) | 2010-11-03 | 2010-11-03 | Waste water discharge control system and waste water discharge system |
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| CN (1) | CN102464359A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202369A (en) * | 2015-08-20 | 2015-12-30 | 武汉新芯集成电路制造有限公司 | Wafer cleaning equipment wastewater discharge system and application thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5097857A (en) * | 1991-08-02 | 1992-03-24 | John Mayhew | Electro-hydraulic valve-actuator system |
| CN2825641Y (en) * | 2005-05-12 | 2006-10-11 | 常州奥图威尔自控设备工程有限公司 | Safety protector for oil dehydrating |
| CN1986158A (en) * | 2005-12-19 | 2007-06-27 | 中芯国际集成电路制造(上海)有限公司 | Separating collector and collecting method for waste chemico-mechanical polishing liquid |
| CN101786675A (en) * | 2010-03-09 | 2010-07-28 | 清华大学 | Device and method for separating multi-parameter wastewater sources |
-
2010
- 2010-11-03 CN CN2010105310063A patent/CN102464359A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5097857A (en) * | 1991-08-02 | 1992-03-24 | John Mayhew | Electro-hydraulic valve-actuator system |
| CN2825641Y (en) * | 2005-05-12 | 2006-10-11 | 常州奥图威尔自控设备工程有限公司 | Safety protector for oil dehydrating |
| CN1986158A (en) * | 2005-12-19 | 2007-06-27 | 中芯国际集成电路制造(上海)有限公司 | Separating collector and collecting method for waste chemico-mechanical polishing liquid |
| CN101786675A (en) * | 2010-03-09 | 2010-07-28 | 清华大学 | Device and method for separating multi-parameter wastewater sources |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105202369A (en) * | 2015-08-20 | 2015-12-30 | 武汉新芯集成电路制造有限公司 | Wafer cleaning equipment wastewater discharge system and application thereof |
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Application publication date: 20120523 |