CN102445187A - Level measuring equipment - Google Patents
Level measuring equipment Download PDFInfo
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- CN102445187A CN102445187A CN2010105047684A CN201010504768A CN102445187A CN 102445187 A CN102445187 A CN 102445187A CN 2010105047684 A CN2010105047684 A CN 2010105047684A CN 201010504768 A CN201010504768 A CN 201010504768A CN 102445187 A CN102445187 A CN 102445187A
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Abstract
The invention relates to level measuring equipment, which comprises: a measured plane; an optical autocollimating system for generating an autocollimating reference ray and a measuring ray; and a multiple reflection system used for reflecting the measuring ray for multiple stable times. The rays generated by a light source in the autocollimating system pass through a beam splitting prism so as to obtain a reference ray and a measuring ray, which is amplified by the multiple reflection system and then compared with the reference ray. The level measuring equipment of the invention is suitable for measuring the inclination angle of the lower surface of a measured object, can be used in a narrow and small space, and is also suitable for measuring the degree of parallelism between two planes horizontally disposed in a space. Meanwhile, the measuring accuracy of the multiple reflection system can be improved by changing the reflection time of the system without changing other optical paths. Besides, the level measuring equipment provided in the invention is easy to dispose and install, and has high measuring accuracy.
Description
Technical field
The present invention relates to field of measuring technique, particularly, the present invention relates to a kind of level measurement device that utilizes autocollimation systematic survey level.
Background technology
Horizontal adjustment is the engineering step of often running in the middle of engineering practice, especially in the engineering practice of precision.Need the precision of adjustment different in the different engineering practices, generally adopt leveling device, comprising: the bubble level instrument; The electronic horizon instrument; The inductance level appearance, a common characteristic of this type leveling device can only be placed on the testee exactly, when testee is that following surface is when being benchmark; And when the space of measuring lower surface was narrower and small, the leveling device of more than mentioning just can't directly use.
Can also utilize auto-collimation collimator, also can realize the measurement of level, expend time in, adjust cumbersomely, influence work efficiency but carry out light path adjustment in this way with the autocollimatic principle of optics.
Summary of the invention
The objective of the invention is to propose a kind of convenient level measurement device and method of using.
A kind of level measurement device comprises:
One tested plane;
One optical autocollimating system produces the autocollimation reference ray and measures light; And
More than one reflecting system carries out repeatedly stablizing the reflection of number of times with said measurement light;
Said autocollimation system is used for the light that light source produces is divided into reference ray and measures light, and said measurement light amplifies through said repeatedly reflecting system, with said reference ray comparison.
Preferably, said tested plane is provided with catoptron.
Wherein, said autocollimation system comprises light-source system along optical axis direction, beam splitter prism system, and imaging system successively; Light-source system sends parallel beam and forms said reference ray and measure light through the beam splitter prism system; Said reference ray forms images through imaging system; Said measurement light amplifies through said repeatedly reflecting system through said tested plane reflection, forms images through imaging system again.
Wherein, said light-source system comprises light source, the first differentiation plate, first lens combination; Said imaging system comprises second lens combination, second differentiation plate and the eyepiece.
Wherein, said eyepiece is a ccd image sensor imaging system.
Wherein, said repeatedly reflecting system is had angle by two catoptrons and forms, and adjusts the number of times that light reflects through the angle of adjusting two catoptrons, reaches the purpose of Adjustment System measuring accuracy.
Preferably, this device also comprises a system frame and adjusting mechanism.
Wherein, said level measurement device can a plurality ofly use simultaneously.
Level measurement device of the present invention be fit to be measured the angle of inclination of testee lower surface, can be used for the space when narrower and small, also is applicable to the two interplanar depth of parallelisms of measurement space horizontal positioned.Simultaneously can be under the situation that does not change other light paths, the order of reflection that changes repeatedly reflecting system improves the measuring accuracy of system.And place easily and install, measuring accuracy is high.
Description of drawings
Can graphicly further be understood through following detailed Description Of The Invention and appended about advantage of the present invention and spirit.
Shown in Figure 1 is level measurement device measuring principle structural drawing of the present invention;
Shown in Figure 2 is level measurement device measuring principle index path of the present invention;
Shown in Figure 3 is that level measurement device of the present invention is measured the light path index path;
Shown in Figure 4 is that level measurement device of the present invention is measured the light path isoboles;
Shown in Figure 5 is that level measurement device reference image of the present invention leaves synoptic diagram with the measurement kine bias;
Shown in Figure 6 is another example structure of level measurement device of the present invention figure.
Embodiment
Specify specific embodiment of the present invention below in conjunction with accompanying drawing.
Referring to Fig. 1 and Fig. 2.Fig. 1 and 2 is depicted as level measurement device measuring principle structural drawing of the present invention and index path.The irradiate light that light source 7 sends is carved with cross division line on first differentiation plate 6, the first differentiation plates 6 of cross division line through first lens combination 5, forms directional light, images in infinite distant place.Directional light is divided into two-beam: a branch of reference ray, a branch of measurement light through beam splitter prism 3.Wherein reference ray looks like the cross of the first differentiation plate 6 to be imaged on the center of the second differentiation plate 9 directly through second lens combination 8.Measure light through the measured plane 1 of irradiation, beam splitter prism 3 back; In the time of 1 desirable level of measured plane; Reflection ray turns back to beam splitter prism 3 along former road, gets into repeatedly reflecting system 4 through reflection, in reflecting system 4 repeatedly repeatedly after the reflection; Directly pass beam splitter prism 3, be imaged on the second differentiation plate 9 through second lens combination 8.At this time reference image overlaps with the measurement picture.When measured plane 1 is out-of-level; Supposing has an angle theta with surface level; Reflection ray will depart from the beam-splitting surface that former road turns back to beam splitter prism 3, and then through after repeatedly reflecting system reflects for more than 4 time, when getting into beam splitter prism 3 again; Departed from ideal light rays 2N θ, be imaged on the second differentiation plate 9 through second lens combination 8 again.At this time reference image leaves with the measurement kine bias.Directly observe reference image and the deviation distance d that measures picture through eyepiece system 10 at last:
D=f * 2N θ formula (1)
N is the order of reflection in reflecting system 4 repeatedly; 2N θ is last equivalent incident angle; D is for measuring the deviation distance of picture with respect to reference image; F is the focal length of second lens combination 8.Solve θ through formula (1).
The present invention can be through increasing or reduce the precision that order of reflection N adjusts measurement.Repeatedly reflecting system 4 as shown in fig. 1 is made up of two catoptron angle β; Then the number of times
of reflection when N hour; N=1, β=90 degree; When N=3, β=30 degree; When N=6, β=15 degree; When N=9, β=10 degree.
In preferred embodiment of the present invention, when the reflectivity on measured plane 1 hangs down, a catoptron 2 can be set on measured plane 1, to improve the precision of measuring.
In addition, level measurement device of the present invention also comprises a system frame 11 and adjusting mechanism 12.On the appearance structure that cooperatively interacts with optical texture, system frame 11 and three adjustable adjusting mechanisms 12 of being used for the adjusting gear level are housed.Adjusting mechanism 12 is a set screw etc., and purpose is through regulating adjustment structure 12, makes level measurement device placements that can be the level of state, thereby makes measurement light can shine measured plane 1 vertically upward.
Referring to Fig. 3 and Fig. 4.Fig. 3 and 4 is depicted as level measurement device of the present invention and measures light path index path and light path isoboles.As can be seen from the figure, the distance L on the measured surface of measurement mechanism distance just can have influence on range for measuring to not influence of measuring accuracy.Because in formula: d=f * 2N θ, it doesn't matter for the angle of measurement and L.
Shown in Figure 5 is that level measurement device reference image of the present invention leaves synoptic diagram with the measurement kine bias.As can be seen from the figure, when measured plane is not surface level, have one apart from d between the first differentiation plate process measurement picture that irradiate light became and the reference image.
In another preferred embodiment of the present invention, as shown in Figure 6, can directly receive the picture of the second differentiation plate with ccd image sensor, and be connected with computer system, use software directly to obtain the angle of inclination on measured plane.
In addition, when measured plane is bigger, when requiring whole plane all to satisfy the level requirement, can use 3 of three covering devices to measure simultaneously.Three covering devices all are connected with computer, on computer screen, can show the skew situation of three hot spots in real time about center spot.Adjust measured plane, three hot spots of view screen are about the skew situation of center spot, and horizontal adjustment finishes when 3 measuring accuracy all meet the demands.In like manner, can increase the quantity of level measurement device according to the actual size on measured plane.
Described in this instructions is preferred embodiment of the present invention, and above embodiment is only in order to explain technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within scope of the present invention under this invention's idea through the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (8)
1. level measurement device is characterized in that comprising:
One tested plane;
One optical autocollimating system produces the autocollimation reference ray and measures light; And
More than one reflecting system carries out repeatedly stablizing the reflection of number of times with said measurement light;
Said autocollimation system is used for the light that light source produces is divided into reference ray and measures light, and said measurement light amplifies through said repeatedly reflecting system, with said reference ray comparison.
2. level measurement device as claimed in claim 1 is characterized in that said tested plane is provided with catoptron.
3. level measurement device as claimed in claim 1 is characterized in that said autocollimation system comprises light-source system along optical axis direction, beam splitter prism system, and imaging system successively; Light-source system sends parallel beam and forms said reference ray and measure light through the beam splitter prism system; Said reference ray forms images through imaging system; Said measurement light amplifies through said repeatedly reflecting system through said tested plane reflection, forms images through imaging system again.
4. level measurement device as claimed in claim 3 is characterized in that said light-source system comprises light source, the first differentiation plate, first lens combination; Said imaging system comprises second lens combination, second differentiation plate and the eyepiece.
5. level measurement device as claimed in claim 4 is characterized in that said eyepiece is a ccd image sensor imaging system.
6. level measurement device as claimed in claim 1 is characterized in that said repeatedly reflecting system is had angle by two catoptrons to form, and adjusts the number of times of light reflection through the angle of adjusting two catoptrons, reaches the purpose of Adjustment System measuring accuracy.
7. level measurement device as claimed in claim 1 is characterized in that also comprising a system frame and adjusting mechanism.
8. like each described level measurement device of claim 1-7, it is characterized in that said level measurement device can a plurality ofly use simultaneously.
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CN2010105047684A CN102445187B (en) | 2010-10-12 | 2010-10-12 | Level measuring equipment |
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CN2010105047684A CN102445187B (en) | 2010-10-12 | 2010-10-12 | Level measuring equipment |
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CN102445187A true CN102445187A (en) | 2012-05-09 |
CN102445187B CN102445187B (en) | 2013-11-13 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103743384A (en) * | 2013-12-24 | 2014-04-23 | 江苏永钢集团有限公司 | Method for measuring installation level of base by using equal height ruler |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020138997A1 (en) * | 2001-03-28 | 2002-10-03 | Fumio Ohtomo | Laser sighting device |
US20020139940A1 (en) * | 2001-03-28 | 2002-10-03 | Fumio Ohtomo | Tilt detecting device |
EP1914564A1 (en) * | 2006-10-19 | 2008-04-23 | Sick Ag | Optical detection device |
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2010
- 2010-10-12 CN CN2010105047684A patent/CN102445187B/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020138997A1 (en) * | 2001-03-28 | 2002-10-03 | Fumio Ohtomo | Laser sighting device |
US20020139940A1 (en) * | 2001-03-28 | 2002-10-03 | Fumio Ohtomo | Tilt detecting device |
EP1914564A1 (en) * | 2006-10-19 | 2008-04-23 | Sick Ag | Optical detection device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103743384A (en) * | 2013-12-24 | 2014-04-23 | 江苏永钢集团有限公司 | Method for measuring installation level of base by using equal height ruler |
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Address after: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 1525 Zhang Dong Road, Zhangjiang hi tech park, Pudong District, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |