CN102442774A - Method for manufacturing ultra-low birefringence optical fibre and rotary stretching tower - Google Patents

Method for manufacturing ultra-low birefringence optical fibre and rotary stretching tower Download PDF

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Publication number
CN102442774A
CN102442774A CN2011103106150A CN201110310615A CN102442774A CN 102442774 A CN102442774 A CN 102442774A CN 2011103106150 A CN2011103106150 A CN 2011103106150A CN 201110310615 A CN201110310615 A CN 201110310615A CN 102442774 A CN102442774 A CN 102442774A
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preform
ultra
low birefringence
fiber
optical fibre
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CN102442774B (en
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汪洪海
皮亚斌
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Wuhan changyingtong Optoelectronic Technology Co., Ltd
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WUHAN YANGTZE OPTICAL ELECTRONIC CO Ltd
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Abstract

The invention relates to a method for manufacturing an ultra-low birefringence optical fibre, which comprises a step of manufacturing an optical fibre preform and a step of drawing the optical fibre preform and is characterized by further comprising the following steps of: before the step of drawing the optical fibre perform, at least locally heating and softening the manufactured optical fibre preform and rotating and stretching the manufactured optical fibre preform along an axial direction, and rotating, stretching and fixing the formed optical fibre preform in the cooling process of the optical fibre preform. A rotary stretching tower for manufacturing the ultra-low birefringence optical fibre comprises an upper clamping head, a lower clamping head, an upper end and a lower end, wherein the upper clamping head and the lower clamping head are vertically arranged; the upper end and the lower end are respectively used for clamping the optical fibre preform; the upper clamping head and the lower clamping head can rotate about the axis of the optical fibre preform respectively; furthermore, the upper clamping head and the lower clamping head can translate along the axis of the optical fibre perform respectively; and a heating furnace capable of translating along the axis of the optical fibre preform is also arranged between the upper clamping head and the lower clamping head and used for at least locally heating and softening the optical fibre preform.

Description

The method of manufacture of ultra-low birefringence fiber and circumgyration stretch tower
Technical field
The present invention relates to low birefringent fiber, refer to a kind of method of manufacture of ultra-low birefringence fiber particularly and be used for the circumgyration stretch tower of this method.
Background technology
Since optical fiber is invented, obtain to use in many technical fields, especially at fiber optic communication field, various fiber products comprise that multimode optical fibers, single-mode fiber, dispersion compensating fiber etc. are by a large amount of uses.At sensory field, optical fiber also shows its unique effect.The sensor fibre technology comprises many aspects; Utilize the susceptibility of optical fiber for different physical quantities; There is the Fibre Optical Sensor product of measuring to different physical quantities to be developed, for example Fibre Optical Sensors such as temperature, humidity, pH value, specific refractory power, stress and circular frequency.
As everyone knows, single-mode fiber can only conduct pattern, i.e. a LP 01Pattern.But from the angle analysis of polarization state, LP 01Pattern in fact comprises two polarization modes, i.e. LP 01 xAnd LP 01 yPattern, therefore in fact single-mode fiber transmits two polarization modes, is not real single mode transport.In general telecommunication optical fiber; Because the existence of various asymmetric factors; Like the imparity of the bending of the non-circular symmetry of fibre core and covering, optical fiber, external stress even variation of temperature etc., can make that all the specific refractory power of two polarization modes of single-mode fiber is different, thereby cause LP 01 xAnd LP 01 yThe transfer rate of pattern in optical fiber is different, produces so-called polarization mode dispersion (PMD:Polarization Mode Dispersion).The refractive index difference of this different polarization pattern in the optical fiber is called as the birefringent phenomenon of optical fiber, LP 01 xAnd LP 01 yThe refringence of pattern is called as the double refraction of optical fiber.
Double refraction size according to optical fiber is divided into high birefringence optical fiber and low birefringent fiber with optical fiber.In general, double refraction is greater than 10 -6Optical fiber be considered to high birefringence optical fiber, and double refraction is lower than 10 -6Optical fiber be considered to low birefringent fiber.Polarization maintaining optical fibre is the high birefringence optical fiber of a quasi-representative, and its double refraction is generally greater than 10 -5And the single mode telecommunication optical fiber belongs to the low birefringent fiber product, and its double refraction is generally 10 -8To 10 -6Between.In some Application Areas, in coherent communication and sensory field of optic fibre, need ultralow birefringent fiber optic materials, the double refraction that promptly requires optical fiber is less than 10 -9, even reach 10 -10It is unapproachable for the conventional fiber ME that this ultralow double refraction requires, and must take special drawing optical fibers technology or special optical fiber structure design.Current, the method for making ultra-low birefringence fiber generally is the double refraction that the spin fiber prefabricated rods reduces optical fiber in drawing optical fibers; Aspect optical fiber structure, ultra-low birefringence fiber is generally two kinds of structures, i.e. common single mode optical fibres structure and keep optical fiber structure in the so-called circular polarization that fibre cladding partly includes stress element.For this reason, some optical fiber and ME thereof are suggested.Granted publication number has proposed multiple circular polarization maintenance optical fiber structure and its ME for the Chinese patent of CN 1041129 " keeping the optical fiber of circular polarization state and its preparation method " and Granted publication number for the Chinese patent of CN 1242280 " practical circular polarization state-maintaining fiber and method of manufacture thereof " for the Chinese patent of CN 1036488 " keeping the optical fiber of circular polarization state and its preparation method ", Granted publication number; Principal feature comprises: centrifugal stress element in addition in optical fiber; The quantity of stress element can be one, two or more; And making the centrifugal stress element around fibre core rotation through rotation prefabricated rods in the drawing process of optical fiber, the guide line polarization mode is transformed into circular polarisation mode and obtains circular polarization and keep fiber products.
Publication number is the method that the one Chinese patent application " the optical fiber production equipment and the method for the preparatory type of spin fiber during the drawing " of CN 1663922 has proposed in the stringy process, to rotate preform, reduces the double refraction size of optical fiber.Can be through rotating prefabricated rods technology so that the double refraction of prepared optical fiber is reduced to 10 -8~ 10 -7
The circular polarization that above-mentioned patent proposed keeps optical fiber and ME thereof to have some problems that can't overcome: owing among optical fiber, used the not stress element of determined number; Make manufacturing processed, drawing process and the follow-up fused fiber splice treating processes of preform all compare difficulty; The manufacturing difficulty of especially special-shaped prefabricated rods bursts easily and scraps.In addition, through rotating the method for preform reduction fiber birefringence, in the optical fiber production process of reality, also be difficult to realize.As publication number is that the patent application document of CN 1663922 is pointed; Owing to being heated to more than 1800 ℃, the part of the prefabricated rods in the drawing process in fiber drawing furnace be molten state; The cf-that any spinning movement of prefabricated rods produced all can make its disalignment position and have influence on the quality of optical fiber; Facts have proved that the prefabricated rods speed of rotation under the wire drawing state must be controlled in below the 100r/min; Otherwise the high-temperature fusion of prefabricated rods part possibly be thrown off medullary ray and cause fiber drawing furnace to be scrapped, and the swivel distance (swivel is apart from the length that is defined as the rotation of fiber-optic periodic property) of considering birefringence fiber is about 3mm, therefore through rotating the method for prefabricated rods; Drawing speed of optical fiber is only about 0.3m/min, and so the lower velocity optical fiber that draws is the demand that can't satisfy actual use on mechanical property.
Summary of the invention
Technical problem to be solved by this invention just provides a kind of method of manufacture of ultra-low birefringence fiber and is used for the circumgyration stretch tower of this method, can produce low-birefringence and ultra-low birefringence fiber according to request for utilization.
For solving the problems of the technologies described above; The method of manufacture of a kind of ultra-low birefringence fiber provided by the invention; Comprise preform making step and with the drawing step of preform; Its special feature is: it also is included in before the drawing step of preform, and local heating is softening and rotate vertically and stretches at least with the preform of making, and rotation that in the process of cooling of preform, will form and stretching are fixed.
In the technique scheme, adopt a kind of deposition method among MCVD, PCVD, OVD and the VAD in the making step of said preform.
In the technique scheme, the mode of said heating is a kind of in induction furnace heating, LASER HEATING, the plasma heating.
In the technique scheme, the rotary course of said preform is for only end rotation or two ends rotate in opposite direction.
Further, the speed of rotation of the arbitrary end of said preform is 0 ~ 500r/min.
In the technique scheme, the process of cooling of said preform institute fixed rotates to be left-handed or dextrorotation.
In the technique scheme, the draw speed of said preform is 0. ~ 2mm/min.
In the technique scheme, the cooled external diameter of said preform is 1 ~ 10mm, and swivel is apart from the pitch that is single pitch or variation, and the swivel distance is 0.01 ~ 10mm.
A kind of circumgyration stretch tower that is used for the manufacturing of ultra-low birefringence fiber provided by the invention; The upper end chuck and the lower end chuck that comprise vertical layout; Be respectively applied for the top and bottom of grip optical fiber prefabricated rods; Said upper end chuck and lower end chuck can be respectively around the axis rotation of preform, and upper end chuck and lower end chuck can be respectively along the axis translation of preform; Also be provided with between said upper end chuck and the lower end chuck and can be used for the softening preform of local heating at least along the process furnace of the axis translation of preform.
In the technique scheme, said process furnace is a kind of in induction heater, graphite furnace, superpower laser or the high-temperature plasma producer.
Beneficial effect of the present invention is:
1) adopting the ultra-low birefringence fiber of Processes and apparatus manufacturing of the present invention is preform circumgyration stretch under soft state; And the curing that is cooled; The fiber products that on fiber drawing tower, is drawn into then; Because the circumgyration stretch process of preform is separated with the drawing optical fibers process fully; So the ultra-low birefringence fiber of manufacturing can keep all optics and the mechanics feature of ordinary optic fibre, make finished product optical fiber have secular reliability and stability, satisfy the requirement that sensor fibre uses under severe environment;
2) ultra-low birefringence fiber of manufacturing has the prefabricated rods deposition identical with other fiber products and drawing process and other identical constructional features except that rotation; As: cross-sectional shape, optical fiber material, index distribution etc.; The processing of being convenient to manufacturing optical fiber is used; And easily with other fiber products compatibility, be convenient to the integrated application of ultra-low birefringence fiber;
3) swivel of manufacturing optical fiber is apart from can between less than one millimeter to tens millimeters, freely being adjusted; Minimum even can reach below the 0.5mm; In drawing process, rotate prefabricated rods or the obtainable swivel distance of spin fiber, so the double refraction of the ultra-low birefringence fiber of manufacturing of the present invention can be according to request for utilization 10 -10To 10 -6Between regulate; Can be used to the optical fibre device and the fibre system of all optical fibre structure fully; Be compared to the optical fibre device and the fibre system of conventional composite (generally including optical fiber, crystalline material, Coating Materials etc.), have better properties stability and work reliability;
4) method of manufacture of ultra-low birefringence fiber provided by the invention; Be compatible with the traditional fiber manufacturing process flow fully; Have the advantages that continuous and automatic is made, can satisfy the production of length ultra-low birefringence fiber, and can realize the large-scale production demand of this optical fiber;
5) use the length ultra-low birefringence fiber of the inventive method and the manufacturing of circumgyration stretch tower can satisfy fiber optic gyro etc., have great importance for development high stability, high-precision optical fiber gyro for of the user demand of continuous hundreds of rice to several kilometers ultra-low birefringence fibers.
Description of drawings
Fig. 1 is the structural representation of single-mode fiber.
Fig. 2 is the spin fiber structural representation, and its swivel distance is L1.
Fig. 3 is the preform structural representation behind the circumgyration stretch, and its swivel distance is L2.
Fig. 4 is the structural representation of an embodiment of circumgyration stretch tower.
Among the figure: 1-covering, 2-fibre core, 3-single-mode fiber, 4-spin fiber; 5-rotation, 6-prefabricated rod cladding, 7-plug, the rotation of 8-prefabricated rods; Preform behind 9-circumgyration stretch, 10-preform, 11-upper end chuck; 12-lower end chuck, 13-process furnace, 14-circumgyration stretch tower.
Embodiment
Below in conjunction with accompanying drawing specific embodiment of the present invention is done further to describe in detail.
As shown in Figure 1, general single-mode fiber 3 comprises covering 1 and fibre core 2 at least, and the covering 1 here is round rotational symmetry structure with fibre core 2, and covering 1 is concentric with fibre core 2.This single-mode fiber comprises LP 01 xAnd LP 01 yTwo polarization modes, when optical fiber 3 because when having asymmetric situation such as structure and stress, LP 01 xAnd LP 01 yThe specific refractory power of pattern is unequal, its refringence | n LP01x-n LP01y| be the double refraction of single-mode fiber 3.
As shown in Figure 2; The spin fiber 4 that utilizes method of manufacture manufacturing of the present invention is still for the structure of covering 1 and fibre core 2, and is different with general single mode fiber 3, is solidified with rotation 5 in this spin fiber 4; Generally at 0.5mm ~ 1m, I reaches below the 0.5mm its swivel apart from L1.Swivel refers to solidify the spacing between two adjacent rotations 5 of spin fiber 4 apart from L1.
As shown in Figure 3; Want wire drawing to form spin fiber shown in Figure 24; The present invention is employed in before the drawing step of preform; At least local heating is softening and rotate vertically and stretch rotation that in the process of cooling of preform, will form and stretching fixed method with the preform of making.Preform 9 behind the circumgyration stretch comprises prefabricated rod cladding 6 and plug 7; Its external diameter is generally 1 ~ 10mm, and is solidified with left-handed or dextral prefabricated rods rotation 8, and its swivel distance can be single periodic for L2; It also can be variable period; Swivel is apart from the pitch that for L2 can be single pitch or variation simultaneously, and swivel is 0.01 ~ 10mm apart from L2, and swivel is apart from refer to solidify the spacing between two contiguous prefabricated rod rotations 8 of the preform behind the circumgyration stretch 9 for L2.
Fig. 4 has illustrated a kind of circumgyration stretch tower 14 that is used for the manufacturing of ultra-low birefringence fiber of the present invention, and it comprises the upper end chuck 11 and lower end chuck 12 of vertical layout, is respectively applied for the top and bottom of grip optical fiber prefabricated rods 10.Upper end chuck 11 and lower end chuck 12 can be respectively around the axis rotation of preform 10, and upper end chuck 11 and lower end chuck 12 can be respectively along the axis translation of preform 10.Between upper end chuck 11 and lower end chuck 12, also be provided with process furnace 13, be used for the softening preform 10 of local heating at least.The process furnace 13 of present embodiment adopts induction heater.
What this equipment was directed against is with good preforms 10 of conventional deposition method manufacturing such as MCVD, PCVD, OVD and VAD.Process furnace 13 is the softening preform 10 of local heating at least; 12 rotations produce rotation with the softening part that drives preform 10 to upper end chuck 11 with the lower end chuck; Rotary course is that a rotation or two chucks 11,12 in upper end chuck 11 or the lower end chuck 12 rotate in opposite direction; Upper end chuck 11 is 0 ~ 500r/min with lower end chuck 12 speed of rotation separately; For shortening swivel apart from being L2, when two chucks 11,12 rotated in opposite direction, the composite rotating speed of preform 10 softening parts can reach 1000r/min like this.Meanwhile; Upper end chuck 11 elongates the softening part that perhaps shortens preform 10 with lower end chuck 12 along the axis translation of preform 10 with 0.5 ~ 2mm/min speed; When process furnace 13 is closed or is left; Preform 10 cooling obtains the preform 9 behind the circumgyration stretch shown in Figure 3.Preform 9 behind the circumgyration stretch is handled through wire drawing and promptly can be made into double refraction 10 -10To 10 -6Optical fiber, made optical fiber can be used for the manufacturing of optical fibre devices such as fiber coupler, fiber grating, full optical-fibre wave plate, full fibre optic isolater.Corresponding optical fibre device has the characteristics of all optical fibre structure, and the easy and integrated use of integrated optical device in addition, also can be used for optical fiber sensing system and coherent fiber communication systems such as optical fiber current mutual inductor, fiber optic gyro.
The control of circumgyration stretch tower 14 is integrated in its control platform; The wherein temperature and the translatory velocity of the speed of rotation of two chucks 11,12 and translatory velocity, process furnace 13; And other subsidiary functions; Like the flow velocity of the flow velocity of process furnace 13 sealed inert gases and flow, water coolant and flow etc., all can be by computer controlled automatic, to optimize each parameter to produce the low-refraction fiber products that reaches design requirements.
Embodiment 1 ~ 9:
Select the G.652D single-mode fiber prefabricated rods of type for use; Preform 10 is placed stretching on the circumgyration stretch tower 14 of the present invention; And while spin fiber prefabricated rods 10; It is littler and solidified the preform of rotation that manufacturing obtains external diameter, i.e. preform behind the circumgyration stretch 9 places the preform behind the circumgyration stretch 9 fiber drawing tower be drawn into to have the single-mode fiber of low-birefringence even ultralow birefringent characteristic then.The double refraction size that table 1 has provided the single-mode fiber that manufacturing obtains when different stretching rotation parameters and tested each optical fiber of gained.
Table one
Embodiment Optical fiber prefabricating rod outside diameter (mm) before stretching Back optical fiber prefabricating rod outside diameter (mm) stretches Optical fiber preform bar stretching speed (mm/min) Preform composite rotating speed (r/min) Draw back fibre cladding diameter (μ m) Draw back optical fiber swivel apart from L1 (mm) The fiber birefringence that test obtains
1 40 10 1.6 1000 125 10 ~5.3×10 -7
2 40 5 0.5 800 125 1 ~3.1×10 -8
3 40 1 1 600 125 0.1 ~6.2×10 -10
4 30 10 1.6 1000 125 10 ~3.8×10 -7
5 30 5 0.5 800 125 1 ~2.5×10 -8
6 30 1 1 600 125 0.1 ~8.0×10 -10
7 20 10 0.7 1000 80 10 ~6.2×10 -7
8 20 5 0.6 800 80 3 ~1.5×10 -7
9 20 1 1.9 600 80 0.5 ~3.8×10 -9
Can find out that by the test result in the table one double refraction of spin fiber 4 can be far smaller than the double refraction size of non-rotation single-mode fiber, and along with the optical fiber swivel apart from the reducing of L1, the double refraction of optical fiber is also along with reduction.Select appropriate parameters, promptly can produce double refraction 10 -10To 10 -6Fiber products.The result shows, uses method of manufacture provided by the present invention and circumgyration stretch tower, can produce the low-birefringence and the ultra-low birefringence fiber that meet Fibre Optical Sensor and fiber optic communication field actual needs according to actual needs.
Core of the present invention is through before the drawing step of preform; At least local heating is softening and rotate vertically and stretch with the preform of making 10; Rotation that in the process of cooling of preform 10, will form and stretching are fixing; Has rotation 8 spin fiber 4 with drawing, so its protection domain is not limited to the foregoing description.Obviously, those skilled in the art can carry out various changes and distortion and do not depart from the scope of the present invention and spirit the present invention, and for example: the making step of preform 10 can adopt any conventional deposition method; The mode of heating also is not limited to the described induction heating of embodiment, and it also all is feasible adopting heating means such as LASER HEATING, plasma heating; Processing parameters such as the temperature of the speed of rotation of two chucks 11,12 and translatory velocity, process furnace 13 and translatory velocity also can be regulated according to the optical fiber of required double refraction size etc.If these changes and distortion belong in the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and is out of shape interior.

Claims (10)

1. the method for manufacture of a ultra-low birefringence fiber; Comprise preform making step and with the drawing step of preform; It is characterized in that: it also is included in before the drawing step of preform; At least local heating is softening and rotate vertically and stretches with the preform of making, and rotation that in the process of cooling of preform, will form and stretching are fixed.
2. the method for manufacture of ultra-low birefringence fiber according to claim 1 is characterized in that: adopt a kind of deposition method among MCVD, PCVD, OVD and the VAD in the making step of said preform.
3. the method for manufacture of ultra-low birefringence fiber according to claim 1 is characterized in that: the mode of said heating is a kind of in induction furnace heating, LASER HEATING, the plasma heating.
4. the method for manufacture of ultra-low birefringence fiber according to claim 1 is characterized in that: the rotary course of said preform is for only end rotation or two ends rotate in opposite direction.
5. the method for manufacture of ultra-low birefringence fiber according to claim 4, it is characterized in that: the speed of rotation of the arbitrary end of said preform is 0 ~ 500r/min.
6. the method for manufacture of ultra-low birefringence fiber according to claim 1, it is characterized in that: the process of cooling institute fixed of said preform rotates to be left-handed or dextrorotation.
7. the method for manufacture of ultra-low birefringence fiber according to claim 1, it is characterized in that: the draw speed of said preform is 0.5 ~ 2mm/min.
8. the method for manufacture of ultra-low birefringence fiber according to claim 1, it is characterized in that: the cooled external diameter of said preform is 1 ~ 10mm, and swivel is apart from be single pitch or the pitch that changes, and the swivel distance is 0.01 ~ 10mm.
9. circumgyration stretch tower that is used for the manufacturing of ultra-low birefringence fiber; It is characterized in that: it comprises the upper end chuck (11) and the lower end chuck (12) of vertical layout; Be respectively applied for the top and bottom of grip optical fiber prefabricated rods (10); Said upper end chuck (11) and lower end chuck (12) can be respectively around the axis rotation of preform (10), and upper end chuck (11) and lower end chuck (12) can be respectively along the axis translation of preform (10); Also be provided with between said upper end chuck (11) and the lower end chuck (12) and can be used for the softening preform (10) of local heating at least along the process furnace (13) of the axis translation of preform (10).
10. the circumgyration stretch tower of the manufacturing of ultra-low birefringence fiber according to claim 9 is characterized in that: a kind of in induction heater, graphite furnace, superpower laser or the high-temperature plasma producer of said process furnace (13).
CN201110310615.0A 2011-10-14 2011-10-14 Method for manufacturing ultra-low birefringence optical fibre and rotary stretching tower Active CN102442774B (en)

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
CN103030271A (en) * 2012-12-19 2013-04-10 江苏亨通光电股份有限公司 Method and device for producing low polarization mode dispersion optical fiber
CN106597601A (en) * 2015-10-20 2017-04-26 武汉长盈通光电技术有限公司 Microstructural low birefringence optical fiber and manufacturing method thereof
CN106746593A (en) * 2016-12-08 2017-05-31 长飞光纤光缆股份有限公司 A kind of spin fiber preparation method and equipment
CN106950643A (en) * 2017-04-20 2017-07-14 湖北工业大学 A kind of new big covering sensor fibre and its Fibre Optical Sensor ring
CN111451082A (en) * 2020-04-09 2020-07-28 杭州辉吉信息技术有限公司 Equipment for manufacturing large optical fiber by using gear meshing pressure
CN113643839A (en) * 2020-04-27 2021-11-12 中国科学院微电子研究所 Center structure preparation method, X-ray zone plate preparation method and X-ray zone plate

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US20030126890A1 (en) * 2001-10-12 2003-07-10 The Furukawa Electric Co., Ltd. Optical fiber drawing method
CN1472153A (en) * 2003-03-28 2004-02-04 �ӳɹ� Manufacture of low polarization mode dispersion single mode optical fibers and products thereby
CN1663922A (en) * 2004-03-01 2005-09-07 古河电子北美公司 Apparatus and method for manufacturing optical fiber including rotating optical fiber preforms during draw

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JPH08259253A (en) * 1995-03-24 1996-10-08 Sumitomo Electric Ind Ltd Optical fiber drawing method and drawing device
US20030126890A1 (en) * 2001-10-12 2003-07-10 The Furukawa Electric Co., Ltd. Optical fiber drawing method
CN1472153A (en) * 2003-03-28 2004-02-04 �ӳɹ� Manufacture of low polarization mode dispersion single mode optical fibers and products thereby
CN1663922A (en) * 2004-03-01 2005-09-07 古河电子北美公司 Apparatus and method for manufacturing optical fiber including rotating optical fiber preforms during draw

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103030271A (en) * 2012-12-19 2013-04-10 江苏亨通光电股份有限公司 Method and device for producing low polarization mode dispersion optical fiber
CN106597601A (en) * 2015-10-20 2017-04-26 武汉长盈通光电技术有限公司 Microstructural low birefringence optical fiber and manufacturing method thereof
CN106746593A (en) * 2016-12-08 2017-05-31 长飞光纤光缆股份有限公司 A kind of spin fiber preparation method and equipment
CN106950643A (en) * 2017-04-20 2017-07-14 湖北工业大学 A kind of new big covering sensor fibre and its Fibre Optical Sensor ring
CN106950643B (en) * 2017-04-20 2019-06-11 湖北工业大学 The novel big covering sensor fibre of one kind and its Fibre Optical Sensor ring
CN111451082A (en) * 2020-04-09 2020-07-28 杭州辉吉信息技术有限公司 Equipment for manufacturing large optical fiber by using gear meshing pressure
CN111451082B (en) * 2020-04-09 2021-11-02 安徽诚意电气科技有限公司 Equipment for manufacturing large optical fiber by using gear meshing pressure
CN113643839A (en) * 2020-04-27 2021-11-12 中国科学院微电子研究所 Center structure preparation method, X-ray zone plate preparation method and X-ray zone plate

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