CN102437080A - Hand-held suction pen free of charging - Google Patents
Hand-held suction pen free of charging Download PDFInfo
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- CN102437080A CN102437080A CN2011104016683A CN201110401668A CN102437080A CN 102437080 A CN102437080 A CN 102437080A CN 2011104016683 A CN2011104016683 A CN 2011104016683A CN 201110401668 A CN201110401668 A CN 201110401668A CN 102437080 A CN102437080 A CN 102437080A
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Abstract
The invention relates to a hand-held suction pen free of charging. The suction pen comprises a piston device, a suction nozzle device and a hand held device. The piston device includes: a cavity; a piston, which is arranged in the cavity; and a connecting rod, which is connected with the piston. The suction nozzle device is arranged at one end of the piston device as well as is ventilated with the piston device. And the hand held device is connected with the connecting rod and is used for pulling the connecting rod, thereby pushing the piston to make movements in the cavity. According to the hand-held suction pen free of charging in the invention, a piston device is utilized to generate a negative pressure so as to suck a silicon chip; and the suction pen can be carried conveniently and there is no need for charging.
Description
Technical field
The present invention relates to field of IC technique, relate in particular to a kind of hand-hold type and exempt from charging suction pen.
Background technology
Follow the continuous progress of integrated circuit fabrication process, semiconductor manufacturing automation degree is increasingly high, and this makes that chip transmission is all carried out by board automatically in most cases.But, often need artificial manually transmission silicon chip for the laboratory back warp of some small-sized companies that do not have automatic production line and some colleges and universities and research institute.Even if the large-scale company that automaticity is high; Need the situation of artificial manually transmission and processing silicon chip also to happen occasionally; A kind of situation is when carrying out some special process, in order to stain control, prevents cross pollution; Can not use public board to carry out chip transmission, can only use manual mode to transmit silicon chip; A kind of in addition situation is because high accuracy, high complexity and the high integration of semiconductor equipment cause the overall high failure rate of semiconductor equipment; The generation of board fault often causes the ongoing silicon chip of technology or transmits ongoing silicon chip resting on board inside and can't sending out automatically; Need the Facilities Engineer to carry out that fault is got rid of and put into film magazine after manually taking out silicon chip from board is inner; Owing to there is not proper tools; The Facilities Engineer often directly takes out silicon chip with hand, although the protection of gloves is arranged, it all is very high to the infringement of board with to the scratch or the risk of contamination of silicon chip surface.
Manually the main tool of transmission silicon chip has following several kinds at present: first kind is the suction pen that directly is connected clean room's vacuum system through flexible pipe; Its shortcoming is to move; Can only carry out chip transmission in fixing, limited place, and the tie point of setting up clean room's vacuum system with inhale pen and all can promote cost the loss that vacuum continues; Second kind is to need charging; Produce negative pressure through the motor rotation, thereby the hand-hold type that produces suction is inhaled pen, its shortcoming is to need to be equipped with special charging socket and base; Thereby the electric weight deficiency often takes place during use the danger that causes silicon chip to drop is arranged, and its manufacturing cost is also higher; The third is the silicon chip clip that shape is similar to tweezers; Although this clip cost is low and easy to carry and use; But its mode is not the absorption silicon chip back, but moves silicon chip through the edge of clamping silicon chip, and this is easy to cause situation such as positive pollution of silicon chip or scratch to take place.
Summary of the invention
The object of the present invention is to provide a kind of hand-hold type to exempt from charging and inhale pen, hold silicon chip thereby utilize piston apparatus to produce negative pressure, not only easy to carry but also do not need to charge.
In order to reach above-mentioned purpose, the present invention provides a kind of hand-hold type to exempt from charging suction pen, comprises piston apparatus, nozzle unit and hand-held device; Said piston apparatus comprises cavity, is arranged on piston and the connecting rod that is connected with said piston in the said cavity; Said hand-held device is arranged at an end of said cavity, and is connected with said connecting rod, and said hand-held device is used to spur said connecting rod, moves in said cavity thereby promote said piston; Said nozzle unit is arranged at the other end of said cavity, and ventilates with said cavity.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, and wherein, said piston is separated into two not connected air cavitys with said cavity: first air cavity and second air cavity, said second air cavity are near said hand-held device, and said first air cavity is near said nozzle unit; Said connecting rod is positioned at said second air cavity, and the one of which end is connected with said piston, and its other end stretches out outside said second air cavity and is connected with said hand-held device; Said second air cavity is provided with first air vent hole, makes said second air cavity and atmosphere; Said first air cavity is provided with second air vent hole, and said second air vent hole is used for and said nozzle unit ventilation.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen; Wherein, said nozzle unit comprises siphunculus and sucker, and an end of said siphunculus is connected with said first air cavity; And communicate with said first air cavity; Said sucker is arranged on the other end of said siphunculus, and said sucker is provided with the 3rd air vent hole, and said the 3rd air vent hole communicates with said siphunculus.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, and wherein, said sucker is an arc-shaped curved surface.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen; Wherein, Said hand-held device comprises first holding rod, second holding rod, the 3rd holding rod and the 4th holding rod; One end of said first holding rod and said cavity flexibly connect; One end of the other end of said first holding rod and said second holding rod flexibly connects, and an end of said the 3rd holding rod and said cavity flexibly connect, and an end of the other end of said the 3rd holding rod and said the 4th holding rod flexibly connects; The other end of said second holding rod is movably connected in said connecting rod and stretches out on the outer end of second air cavity, and the other end of said the 4th holding rod is movably connected in said connecting rod and stretches out on the outer end of second air cavity.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, wherein, is provided with first spring in said first air cavity, and an end of said first spring is connected on the inwall of said cavity, and the other end of said first spring is connected on the said piston.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, and wherein, said hand-held device comprises first handle, second handle, second spring and whirligig; Said first handle is fixedly installed on an end of said cavity; Said whirligig and said first handle are rotationally connected, and said whirligig can rotate by said relatively first handle; Said second handle is connected with said whirligig; Said second spring connects said first handle and second handle; Said connecting rod is connected with said whirligig; The motion of said second handle drives said whirligig and rotates, and then drives said connecting rod and move, and moves in said cavity thereby promote said piston.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, and wherein, said first handle comprises first-hand button and first handle bar, and said first-hand button is arranged on an end of said first handle bar, and the other end of said first handle bar is fixedly mounted on the outer surface of said cavity.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen, and wherein, said whirligig comprises rotating disk and dwang, and said rotating disk is fixedly installed on an end of said dwang, and the other end of said dwang and said first handle are rotationally connected.
Above-mentioned hand-hold type is exempted from charging and is inhaled pen; Wherein, Said second handle comprises second-hand's button, second handle bar and annular end; Said second-hand's button is arranged on an end of said second handle bar, and said annular end is arranged on the other end of said second handle bar, and said annular end is fixedly connected with said whirligig.
Hand-hold type of the present invention is exempted to charge and is inhaled the vacuum system that pen does not need to inhale pen access clean room; Also need not charge; Easy to use, production and maintenance cost are low, lightweight and portable in volume; Deposit with easy to carry and durability is high; Do not have the shortcoming of traditional wafer chuck to the contamination and the scratch of silicon chip surface yet, hand-hold type of the present invention exempted to charge inhale pen compatible the existing several kinds of instruments that manually transmit silicon chip advantage and improved the shortcoming of these instruments, hand-hold type of the present invention exempts to charge, and to inhale pen be that the demand side of the convenience that uses of demand side or personnel in cost control all is very big help.
Description of drawings
Hand-hold type of the present invention is exempted to charge and is inhaled pen and provided by following embodiment and accompanying drawing.
Fig. 1 is that the embodiment of the invention one hand-hold type is exempted to charge and inhaled the structural representation of a unused state.
Fig. 2 is that the embodiment of the invention one hand-hold type is exempted to charge and inhaled the structural representation of a user mode.
Fig. 3 is that the embodiment of the invention two hand-hold types are exempted to charge and inhaled the structural representation of a unused state
Fig. 4 is the structural representation of whirligig in the embodiment of the invention two.
Fig. 5 is the structural representation of second handle in the embodiment of the invention two.
Fig. 6 is that the embodiment of the invention two hand-hold types are exempted to charge and inhaled the structural representation of a user mode
Embodiment
Below will combine Fig. 1～Fig. 6 that hand-hold type of the present invention is exempted from charging suction pen does further to describe in detail.
Hand-hold type of the present invention is exempted from charging suction pen and is comprised piston apparatus, nozzle unit and hand-held device;
Said piston apparatus comprises cavity, is arranged on piston and the connecting rod that is connected with said piston in the said cavity;
Said nozzle unit is arranged at an end of said piston apparatus, and ventilates with said piston apparatus;
Said hand-held device is connected with said connecting rod, and said hand-held device can spur said connecting rod, moves in said cavity thereby promote said piston.
Use hand-hold type of the present invention to exempt from charging when inhaling; Said nozzle unit contacts with the silicon chip back side, to the said hand-held device application of force, spurs said connecting rod and moves; Thereby promoting said piston moves; Take the gas between the said nozzle unit and the silicon chip back side away, between the said nozzle unit and the silicon chip back side, produce negative pressure and make said nozzle unit firmly hold the silicon chip back side, thereby reach the purpose of manual transmission silicon chip.
Hand-hold type of the present invention is exempted from charging suction pen and is utilized piston apparatus to produce negative pressure, thereby holds silicon chip, does not need to inhale the vacuum system that pen inserts the clean room; Can optionally move and inhale pen, be convenient for carrying, also not need the consume electric power drive motors to produce negative pressure; Need not charging, reduce manufacturing cost greatly.
Specify hand-hold type of the present invention with specific embodiment at present and exempt from charging suction pen:
Embodiment one
Referring to Fig. 1, the hand-hold type of present embodiment is exempted from charging suction pen and is comprised piston apparatus 110, nozzle unit 120 and hand-held device 200;
Said piston apparatus 110 comprises cavity 111, is arranged on piston 112 and the connecting rod 113 that is connected with said piston 112 in the said cavity 111;
Said nozzle unit 120 is arranged at an end of said piston apparatus 110, and ventilates with said piston apparatus 110;
Said hand-held device 200 is connected with said connecting rod 113, and said hand-held device 200 can spur said connecting rod 113, moves in said cavity 111 thereby promote said piston 112.
The piston 112 that is arranged in the said cavity 111 is separated into two not connected air cavitys with said cavity 111: first air cavity 114 and second air cavity 115; Promptly because the iris action of said piston 112; Gas can not flow between said first air cavity 114 and second air cavity 115; And said second air cavity 115 is near said hand-held device 200, and said first air cavity 114 is near said nozzle unit 120; Said connecting rod 113 is positioned at said second air cavity 115, and the one of which end is connected with said piston 112, and its other end stretches out outside said second air cavity 115 and is connected with said hand-held device 200; Said second air cavity 115 is provided with first air vent hole 116, makes said second air cavity 115 and the atmosphere, and the air pressure of promptly said second air cavity 115 equals atmospheric pressure all the time; Said first air cavity 114 is provided with second air vent hole 117, and said second air vent hole 117 is used for and said nozzle unit 120 ventilations.
Said nozzle unit 120 comprises siphunculus 121 and sucker 122; One end of said siphunculus 121 is connected with said first air cavity 114; And communicate with said first air cavity 114 through said second air vent hole 117, said sucker 122 is arranged on the other end of said siphunculus 121, and said sucker 122 is provided with the 3rd air vent hole 123; The position of said the 3rd air vent hole 123 is corresponding with said siphunculus 121, and promptly said the 3rd air vent hole 123 communicates with said siphunculus 121; The plane at place, the edge of said sucker 122 is parallel to each other with the straight line that said siphunculus 121 belongs to, and said nozzle unit 120 can be stretched in the brilliant boat in the gap between adjacent two wafer.
Preferably, said sucker 122 is an arc-shaped curved surface, and can make between the said sucker 122 and the silicon chip back side has certain space, and said the 3rd air vent hole 123 is arranged on the central authorities of arc-shaped curved surface, and the diameter of said the 3rd air vent hole 123 equals the internal diameter of said siphunculus 121.
In the present embodiment; Said hand-held device 200 comprises first holding rod 210, second holding rod 220, the 3rd holding rod 230 and the 4th holding rod 240; One end of said first holding rod 210 and said cavity 111 flexibly connect; One end of the other end of said first holding rod 210 and said second holding rod 220 flexibly connects; One end of said the 3rd holding rod 230 and said cavity 111 flexibly connect; One end of the other end of said the 3rd holding rod 230 and said the 4th holding rod 230 flexibly connects, and the other end of said second holding rod 220 is movably connected in said connecting rod 113 and stretches out on the end outside second air cavity 115, and the other end of said the 4th holding rod 240 is movably connected in said connecting rod 113 and stretches out on the end outside second air cavity 115.Said first holding rod 210 and the 3rd holding rod 230 can rotate by said relatively cavity 111; Can rotate each other between said first holding rod 210 and second holding rod 220; Can rotate each other between said the 3rd holding rod 230 and the 4th holding rod 240; Said second holding rod 220 can rotate by said relatively connecting rod 113, and said the 4th holding rod 230 can rotate by said relatively connecting rod 113.
In the present embodiment; Said second holding rod 220 is connected with said connecting rod 113 in same point with said the 4th holding rod 240; But the invention is not restricted to this, said second holding rod 220 can not be connected with said connecting rod 113 in same point with said the 4th holding rod 240 yet.
Preferably, be provided with first spring 300 in said first air cavity 114, an end of said first spring 300 is connected on the inwall of said cavity 111, and the other end of said first spring 300 is connected on the said piston 112.
The hand-hold type of the present embodiment method for using of inhaling pen of exempting to charge is: do the time spent in no external force; Said first spring 300 is in contraction state; Under the effect of said first spring 300, said piston 112 is closer from said nozzle unit 120, and said first holding rod 210 and second holding rod 220 are turned up relatively; Said the 3rd holding rod 230 and the 4th holding rod 240 are turned up relatively, and be as shown in Figure 1; When needing to draw silicon chip; Hand-screw changes holds said second holding rod 220 and the 4th holding rod 240; The sucker 122 of said nozzle unit 120 is attached to the silicon chip back side, and firmly hold with a firm grip gradually said second holding rod 220 and the 4th holding rod 240, make said second holding rod 220 and the 4th holding rod 240 move toward one another; Simultaneously; Said first holding rod 210 and second holding rod 220, said the 3rd holding rod 230 and the 4th holding rod 240 are straightened gradually, under the acting in conjunction of said first holding rod 210, second holding rod 220, the 3rd holding rod 230 and the 4th holding rod 240, spur said connecting rod 113 to the direction motion away from said nozzle unit 120; Move to direction thereby promote said piston 112 away from said nozzle unit 120, as shown in Figure 2; Because the space between said sucker 122 and the silicon chip back side communicates with said first air cavity 114 through said the 3rd air vent hole 123, siphunculus 121; And form closed environment with said first air cavity 114; When said piston 112 when the direction away from said nozzle unit 120 moves; Gas between the said sucker 122 and the silicon chip back side is pumped in said first air cavity 114; Between the said sucker 122 and the silicon chip back side, produce negative pressure, the negative pressure of generation makes said sucker 122 produce suction and hold silicon chip; After inhaling pen and holding silicon chip and accomplish the transmission operation; Unclamp said second holding rod 220 and the 4th holding rod 240; The elastic force of said spring 300 makes said piston 112 move to the direction near said nozzle unit 120, gets back to initial condition, thereby makes said first holding rod 210, second holding rod 220, the 3rd holding rod 230 and the 4th holding rod 240 also get back to initial position; Pressure and atmospheric pressure balance between this moment said sucker 122 and the silicon chip back side; The said 122 pairs of silicon chip back sides of sucker of stating no longer include suction, and said sucker 122 is removed from the silicon chip back side, accomplish manually transmission silicon chip operation.
Embodiment two
Referring to Fig. 3, embodiment two is that with the difference of embodiment one structure of hand-held device is different, and spring no longer is set in first air cavity described in the embodiment two.
In the present embodiment, said hand-held device comprises first handle 410, second handle 420, second spring 430 and whirligig 440;
Said first handle 410 is fixedly installed on an end of cavity;
Said whirligig 440 is rotationally connected with said first handle 410, and said whirligig 440 can rotate by said relatively first handle 410;
Said second handle 420 is connected with said whirligig 440, and said second handle 420 can drive the said relatively first handle 410 of said whirligig 440 and rotate;
Said second spring 430 connects said first handle 410 and second handle 420;
Connecting rod is connected with said whirligig 440, and the rotation of said whirligig 440 can drive connecting rod and move, and moves in cavity thereby promote piston.
Continuation is referring to Fig. 3; Preferably; Said first handle 410 comprises first-hand button 411 and first handle bar 412, and said first-hand button 411 is arranged on an end of said first handle bar 412, and the other end of said first handle bar 412 is fixedly mounted on the outer surface of cavity.
Referring to Fig. 4, preferably, said whirligig 440 comprises rotating disk 441 and dwang 442, and said rotating disk 441 is fixedly installed on an end of said dwang 442, and the first handle bar 412 of the other end of said dwang 442 and said first handle 410 is rotationally connected.
Referring to Fig. 3 and Fig. 5; Preferably, said second handle 420 comprises second-hand's button 421, second handle bar 422 and annular end 423, and said second-hand's button 421 is arranged on an end of said second handle bar 422; Said annular end 423 is arranged on the other end of said second handle bar 422; Said annular end 423 is enclosed within on the said rotating disk 441, and is fixedly connected with said rotating disk 441, and said second handle 420 capable of using rotates said rotating disk 441; When said rotating disk 441 rotates, drive said dwang 442 and rotate together.
Continuation is referring to Fig. 3, and preferably, an end of said second spring 430 is connected on the said first handle bar 412, and the other end of said second spring 430 is connected on the said second handle bar 422.
The hand-hold type of the present embodiment method for using of inhaling pen of exempting to charge is: do the time spent in no external force, because the elastic force effect of said second spring 430, said first handle 410 and second handle 420 are in the initial condition of opening; In the time of need holding silicon chip, the hand-held pen of inhaling is attached to the silicon chip back side with the sucker of nozzle unit, and the handle of firmly holding with a firm grip gradually, makes said second handle 420 gradually near said first handle 410, makes said first handle 410 and second handle 420 be tending towards closed; Said second handle 420 is in the process near said first handle 410 gradually; The rotating disk 441 that the annular end 423 of said second handle 420 drives said whirligig 440 rotates; And then the dwang 442 that drives said whirligig 440 rotates; The connecting rod that the rotation of said dwang 442 drives piston apparatus moves to handle orientations; The mobile promotion piston of connecting rod moves to handle orientations in cavity, shown in the arrow among Fig. 6 (dotted line among Fig. 6 is represented the initial position of piston near an end of nozzle unit); Because said sucker communicates with said first air cavity through said the 3rd air vent hole, siphunculus with space between the silicon chip back side; And form closed environment with said first air cavity; When piston when handle orientations moves; Gas between the sucker and the silicon chip back side is pumped in first air cavity, between the sucker and the silicon chip back side, produces negative pressure, and the negative pressure of generation makes sucker produce suction and holds silicon chip; After inhaling pen and holding silicon chip and accomplish the transmission operation; Unclamp said second handle 420, the elastic force of said second spring 430 makes said first handle 410 be returned to the initial condition of opening with second handle 420, thereby makes piston also get back to initial position; Pressure and atmospheric pressure balance between this moment sucker and the silicon chip back side; Sucker no longer includes suction to the silicon chip back side, and sucker is removed from the silicon chip back side, accomplishes manually transmission silicon chip operation.
Hand-hold type of the present invention is exempted to charge and is inhaled the vacuum system that pen does not need to inhale pen access clean room; Also need not charge; Easy to use, production and maintenance cost are low, lightweight and portable in volume; Deposit with easy to carry and durability is high; Do not have the shortcoming of traditional wafer chuck to the contamination and the scratch of silicon chip surface yet, hand-hold type of the present invention exempted to charge inhale pen compatible the existing several kinds of instruments that manually transmit silicon chip advantage and improved the shortcoming of these instruments, hand-hold type of the present invention exempts to charge, and to inhale pen be that the demand side of the convenience that uses of demand side or personnel in cost control all is very big help.
Claims (10)
1. a hand-hold type is exempted from charging suction pen, it is characterized in that, comprises piston apparatus, nozzle unit and hand-held device;
Said piston apparatus comprises cavity, is arranged on piston and the connecting rod that is connected with said piston in the said cavity;
Said hand-held device is arranged at an end of said cavity, and is connected with said connecting rod, and said hand-held device is used to spur said connecting rod, moves in said cavity thereby promote said piston;
Said nozzle unit is arranged at the other end of said cavity, and ventilates with said cavity.
2. hand-hold type as claimed in claim 1 is exempted from charging and is inhaled pen; It is characterized in that; Said piston is separated into two not connected air cavitys with said cavity: first air cavity and second air cavity, said second air cavity are near said hand-held device, and said first air cavity is near said nozzle unit; Said connecting rod is positioned at said second air cavity, and the one of which end is connected with said piston, and its other end stretches out outside said second air cavity and is connected with said hand-held device; Said second air cavity is provided with first air vent hole, makes said second air cavity and atmosphere; Said first air cavity is provided with second air vent hole, and said second air vent hole is used for and said nozzle unit ventilation.
3. hand-hold type as claimed in claim 2 is exempted from charging and is inhaled pen; It is characterized in that said nozzle unit comprises siphunculus and sucker, an end of said siphunculus is connected with said first air cavity; And communicate with said first air cavity; Said sucker is arranged on the other end of said siphunculus, and said sucker is provided with the 3rd air vent hole, and said the 3rd air vent hole communicates with said siphunculus.
4. hand-hold type as claimed in claim 3 is exempted from charging and is inhaled pen, it is characterized in that said sucker is an arc-shaped curved surface.
5. exempt from charging like the described hand-hold type of arbitrary claim in the claim 2～4 and inhale pen; It is characterized in that; Said hand-held device comprises first holding rod, second holding rod, the 3rd holding rod and the 4th holding rod; One end of said first holding rod and said cavity flexibly connect; One end of the other end of said first holding rod and said second holding rod flexibly connects, and an end of said the 3rd holding rod and said cavity flexibly connect, and an end of the other end of said the 3rd holding rod and said the 4th holding rod flexibly connects; The other end of said second holding rod is movably connected in said connecting rod and stretches out on the outer end of second air cavity, and the other end of said the 4th holding rod is movably connected in said connecting rod and stretches out on the outer end of second air cavity.
6. hand-hold type as claimed in claim 5 is exempted from charging and is inhaled pen, it is characterized in that be provided with first spring in said first air cavity, an end of said first spring is connected on the inwall of said cavity, and the other end of said first spring is connected on the said piston.
7. exempt from charging like the described hand-hold type of arbitrary claim in the claim 1～4 and inhale pen, it is characterized in that said hand-held device comprises first handle, second handle, second spring and whirligig;
Said first handle is fixedly installed on an end of said cavity;
Said whirligig and said first handle are rotationally connected, and said whirligig can rotate by said relatively first handle;
Said second handle is connected with said whirligig;
Said second spring connects said first handle and second handle;
Said connecting rod is connected with said whirligig;
The motion of said second handle drives said whirligig and rotates, and then drives said connecting rod and move, and moves in said cavity thereby promote said piston.
8. hand-hold type as claimed in claim 7 is exempted from charging and is inhaled pen; It is characterized in that; Said first handle comprises first-hand button and first handle bar, and said first-hand button is arranged on an end of said first handle bar, and the other end of said first handle bar is fixedly mounted on the outer surface of said cavity.
9. hand-hold type as claimed in claim 7 is exempted from charging and is inhaled pen, it is characterized in that said whirligig comprises rotating disk and dwang, and said rotating disk is fixedly installed on an end of said dwang, and the other end of said dwang and said first handle are rotationally connected.
10. hand-hold type as claimed in claim 7 is exempted from charging and is inhaled pen; It is characterized in that; Said second handle comprises second-hand's button, second handle bar and annular end; Said second-hand's button is arranged on an end of said second handle bar, and said annular end is arranged on the other end of said second handle bar, and said annular end is fixedly connected with said whirligig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110401668.3A CN102437080B (en) | 2011-12-06 | 2011-12-06 | Hand-held suction pen free of charging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110401668.3A CN102437080B (en) | 2011-12-06 | 2011-12-06 | Hand-held suction pen free of charging |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102437080A true CN102437080A (en) | 2012-05-02 |
| CN102437080B CN102437080B (en) | 2016-08-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110401668.3A Active CN102437080B (en) | 2011-12-06 | 2011-12-06 | Hand-held suction pen free of charging |
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| Country | Link |
|---|---|
| CN (1) | CN102437080B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5799994A (en) * | 1997-05-23 | 1998-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer handling tool with vacuum pickup |
| KR100574955B1 (en) * | 2003-11-20 | 2006-04-28 | 삼성전자주식회사 | Vacuum pen for handling semiconductor products |
| CN102024679A (en) * | 2010-09-19 | 2011-04-20 | 扬州杰利半导体有限公司 | Grain sorting suction pen |
-
2011
- 2011-12-06 CN CN201110401668.3A patent/CN102437080B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5799994A (en) * | 1997-05-23 | 1998-09-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer handling tool with vacuum pickup |
| KR100574955B1 (en) * | 2003-11-20 | 2006-04-28 | 삼성전자주식회사 | Vacuum pen for handling semiconductor products |
| CN102024679A (en) * | 2010-09-19 | 2011-04-20 | 扬州杰利半导体有限公司 | Grain sorting suction pen |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102437080B (en) | 2016-08-24 |
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