CN102435962B - The bias-field of Magnetic Sensor generates - Google Patents

Abstract

Describe and depict the embodiment of the generation relating to the magnetic bias field for Magnetic Sensor.The present invention provides a kind of equipment, comprising: bias-field maker, for providing magnetic bias field for Magnetic Sensor, wherein said bias-field maker is configured to provide the magnetic-field component making described sensor bias in a first direction, wherein said bias-field maker includes the main body with cavity, described main body includes magnetic material or magnetisable material, described cavity is in described first direction and the transversely extension of described first direction, so that described cavity at least in second direction and third direction laterally with the material of described main body as boundary, described second direction is orthogonal to described first direction and described third direction is orthogonal to described second direction and described first direction.

Description

The bias-field of Magnetic Sensor generates

Related application is quoted

This application is the part continuation case of the U. S. application 12/885,349 of JIUYUE in 2010 submission on the 17th, wherein U.S. Shen Please 12/885,349 be the part continuation case of U. S. application 12/130,571 submitted to May 30 in 2008, their content be passed through Quote and be herein incorporated.

Technical field

The present invention relates to the field of sensor, and the bias-field more particularly to Magnetic Sensor generates.

Background technology

Now, sensor is used in the many application for monitoring, detect and analyzing.A type of sensor includes Magnetic Sensor (magnetic sensor), it can detect the change in magnetic field or magnetic field.The magnetic resistance used in magnetoresistive transducer Effect includes but not limited to GMR(giant magnetoresistance), AMR(anisotropic magnetic resistance), TMR(magnetic-tunnel-effect), CMR(Pang magnetic resistance).Separately The Magnetic Sensor of one type is based on Hall effect.Magnetic Sensor is such as detecting motion or the position of rotating object, gig The speed of body or rotary speed etc..

Magnetoresistive transducer is generally sensitive to x-component and y-component in the plane in magnetic field, in described plane x-component and y-component this Place can be referred to as the cross stream component in magnetic field.Magnetic field, one-component that y-component can be referred to as without limitation change sensitive Degree, and another component x has linear relationship with resistance after the match less than the low of such as 5 mT.This component is typically used as sensing field and divides Amount.

Generally, magnetoresistance has working range, at the electricity that this working range medium sensitivity such as changes relative to magnetic field It is high that resistance changes.Outside this working range, the unfavorable behavior (the most saturated restriction) of magnetoresistance does not allow sensor to use Apply in many.For some reluctance machines, working range can also be referred to as anisotropic scope.Examine being the most such as used for In the application of the rotary speed surveying object, magnetoresistive transducer is applied bias magnetic field to avoid the saturated of magnetoresistive transducer.Allusion quotation The example of type includes such as reverse bias magnet apparatus (back bias magnet arrangement).At reverse bias magnet apparatus In, Magnetic Sensor provides between object to be sensed and lift magnet.

Summary of the invention

According to an aspect, embodiment includes a kind of equipment, and it has for providing the inclined of magnetic bias field for Magnetic Sensor Putting a maker, wherein bias-field maker is configured to provide the magnetic field for making sensor bias to divide in a first direction Amount.Bias-field maker has the main body with cavity, and this main body includes magnetic material or magnetisable material, and this cavity is in first party To the transversely extension with first direction so that cavity at least in second direction and third direction laterally with the material of main body Material is boundary, and second direction is orthogonal to first direction and third direction is orthogonal to second direction and first direction.

According on the other hand, a kind of manufacture method includes: formed in a first direction for Magnetic Sensor (magneto Sensor) the bias-field maker of bias magnetic field is provided.The formation of bias-field maker include with cavity, permanent magnet material or The main body of magnetisable material formed so that this cavity at least on second and third direction laterally material with main body be Boundary, second direction is orthogonal to first direction and third direction is orthogonal to second direction and first direction.Additionally, this manufacture method Including placement sensor so that the sensing element of sensor is biased by the magnetic field generated by main body.

According on the other hand, a kind of method includes: rotating object and operation Magnetic Sensor are to sense this rotation, sensor Biased by bias magnetic field device.Bias magnetic field device has the main body with cavity, and this main body includes magnetic material or magnetisable Material, this cavity in a first direction with the transversely extension of first direction so that cavity is at least at second direction and third direction On laterally with the material of main body as boundary, wherein second direction is corresponding to the peak response direction of sensor and third direction It is orthogonal to second direction and first direction.

According on the other hand, a kind of equipment has sensor and for the lift magnet making sensor bias, this sensor Changing for the magnetic field that caused by the rotation of object of sensing, this lift magnet includes main body, and this main body includes permanent magnet material or can Magnetized Material, this main body has maximum the second maximum extended in (extension), second direction of first on first direction and prolongs Stretch and the 3rd maximum extending on third direction.So that passing in main body has an opening, and sensor is placed on this opening Sensor upwardly extends first, second, and third side respectively in the first, second, and third of main body maximum extension.

Accompanying drawing explanation

Figure 1A to 1H is the schematic section of embodiment；

Fig. 2 A to 2C is the top schematic view of embodiment；

Fig. 3 A and 3B is the 3-D view of embodiment；

Fig. 4 A is the schematic diagram of the system according to embodiment；And

Fig. 4 B is the emulation illustrating the magnetic field line according to embodiment.

Fig. 5 A-5D shows the schematic diagram according to embodiment and figure.

Detailed description of the invention

The exemplary embodiment illustrating the present invention described in detail below.Describe and do not think in a limiting sense, but Being only used for illustrating the purpose of the General Principle of embodiments of the invention, protection domain is only determined by claims simultaneously.

It being understood that the element shown in the figure of exemplary embodiment or feature be not likely to be drawn to scale and May be of different sizes in one direction relative to other element or different extension.

Furthermore, it is to be understood that described in each exemplary embodiment or the feature that illustrates can be with combination with one another, unless separately Outer concrete dated.

In each figure, same or similar entity, module, equipment etc. can distribute identical reference.

Referring now to Figure 1A, it is shown that according to the first sectional view of embodiment.This sectional view is arranged at sensor Position, A-A ' along the line obtain.Plane shown in Figure 1A crosses over the first axle and the second axle, this first axle may be otherwise by It is referred to as vertical axis or vertical direction.Second axle is the lateral shaft of the vertical direction relative to the first axle definition, and the most also The second lateral shaft or the second horizontal direction can be referred to as.First axle is also referred to as z-axis or z direction, the second axle herein Y-axis or y direction it is also referred to as herein.

As will be described in further detail after a while, Figure 1A shows the equipment 100 with main body 102, and main body 102 is by permanent magnetism material Material or magnetisable material (such as soft magnetic materials) or combination are formed.Main body 102 is constituted for being such as magneto-resistive transducing The Magnetic Sensor 106 of device provides the magnet of magnetic bias field.In an embodiment, the magnetic bias field generated at sensor 106 along x-axis Can be about 5 mT(milli teslas) or more than 5 mT, and 100 mT can be higher than along the main bias-field of direction of magnetization z.Figure 1A Shown in main body 102 there is the opening 104 that form is the cavity not completely penetrating through main body 102.Opening makes the master of main body 102 The geometric format of surface 102A is configured to on-plane surface.In figure ia, first type surface 102A be main body 102 near sensor 106 First type surface, and first type surface 102B is away from sensor 106 corresponding main surfaces farther out.

Cavity can include the shallow cavity of such as shallow concave recess in an embodiment.When measuring (take) from x-axis, cavity become The angle of inclination of the surface section (section) of shape in one embodiment can be selected from the scope between 5 ° and 65 °.A reality Executing in example, angle of inclination can select between 5 ° and 40 °.In one embodiment, angle of inclination can be between 5 ° and 20 ° Select.

In the embodiment being described more particularly below, cavity can be to have pyramid form, conical form or polyhedron Form.As will be described in further detail after a while, sensor 106 can be fully located in main body 102, is i.e. positioned at main body 102 In big extension.Therefore, the z-axis position of sensor 106 can be below the maximum z-axis of main body 102 extends in one embodiment.

Sensor 106 can include being provided with at least one the half of magnetoresistive sensor element or Hall sensor element on it Conductor chip.Sensor 106 can include integrated circuit.Reluctance sensing element can be GMR, MTR, CMR, AMR element or The magnetoresistive sensor element of other form any.Magnetoresistive transducer can have two sensings provided with gradiometer device Part.Additionally, in one embodiment, can be from least two sensing element supply differential signal for sensing object.One In individual embodiment, sensor includes the multiple reluctance sensing element arranged with wheatstone (Wheatstone) bridge arrangement.One In individual embodiment, sensor 106 can include at least one Hall effect sensing element.

As it can be seen in fig. 1 that the opening 104 of main body 102 along the z-axis region 108 along two ends with the table of main body 102 Face section 110a and 110b are boundary.Therefore, opening 104 at least for z-axis region 108 in y-direction by surface section 110a and 110b Surround.

Figure 1B shows the identical device as shown in Figure 1A at sensing station, in crossing over the plane of z-axis and x-axis The sectional view of 100.X-axis may be considered the lateral shaft being orthogonal to z-axis and y-axis.As it can be seen from figure 1b the opening of main body 102 Mouthfuls 104 at least for z-axis region 108 the most in the direction of the x axis with surface section 110c and 110d as boundary.Therefore, opening 104 is at least Z-axis region 108 is surrounded by surface section 110c and 110d in the x direction.

In certain embodiments, opening 104 can be with neither magnetic be not its of magnetizable, such as mold materials Its material is filled.

From the cross section of Figure 1A it can be seen that when moving up at the Vertical Square away from sensor 106, opening 104 is in y-axis Transverse width on direction reduces.Additionally, from the cross section of Figure 1B it can be seen that work as on the vertical direction away from sensor 106 Time mobile, opening 104 transverse width in the direction of the x axis reduces.In other words, the sectional view of Figure 1A and 1B shows main body 102 Formation so that the surface 102A of main body 102 has conical by its shape in the vertical direction away from sensor 106.

Although Figure 1A and 1B by having surface section 110a, the integral surface 102A of 110b, 110c and 110d is shown as respectively Relative to y-axis or x-axis, there is nonopiate inclination, it is to be appreciated that, first type surface 102A can be additionally in other embodiments There is one or more section being parallel to x-axis.

There is provided first type surface 102A so that the separate two-dimensional forming the magnetic field that opening 104 allows to be generated by main body 102 shapes, This provides the bias-field with that reduce on x direction and y direction or zero transversal field component for sensor 106.

In figs. 1 a and 1b, the bias-field of sensor 106 to apply in a z-direction.Therefore, the direction of magnetization of main body 102 It is essentially provided on z direction.The operating point that sensor 106 is the sensitiveest is two cross stream component (that is, x-component when magnetic field And y-component) when being zero.But, for undersized main body 102, the character of the magnetic field line owing to only occurring with closed loop, therefore The such as plane as the surface 102 of the cubic form of the main body 102 magnetized in a z-direction extends at sensor 106 Position produces the magnetic field of the notable transversal field component having on x direction and y direction.When the size of main body 102 is hour, such as Such as when main body 102 and sensor 106 are integrated, the magnetic field line returned in the space outside main body 102 is in the position of sensor 106 The place of putting realize from/go to z direction, the notable curvature of field wire towards horizontal direction.The cross stream component of magnetic field line is for typical case It is so strong that for the cube lift magnet of size that the field intensity of y-component the most in the case of gmr sensors can be led Cause sensitivity and decline 4 times.

Opening 104 in main body 102 solves to be avoided transversal field component and provides the shaping again of field, so that At least cross stream component on x direction and y direction in the magnetic field, position of sensor 106 is zero or is reduced to almost zero.

Due to opening 104 at least on x direction and y direction laterally with permanent magnet material or the magnetisable material of main body 102 Material is boundary, therefore makes the x-component in magnetic field and y-component shape.Especially, can according to the shape of opening 104 independently of one another X-component and y-component is made to shape.This allows by the geometry independently controlled magnetic x-component on surface and y-component, with up to Less the transversal field component caused by little size of main body effect is reduced or eliminated for the two transverse dimensions.Magnetic x-component and y-component Independence control can be such as by providing different inclining with on y direction for opening 104 in the fabrication process the most in the x direction Tiltedly obtain.Independent control offers the advantage that and solves the magnetic field impact on sensor 106 characteristic for x direction and y side To being different.The independent region controlling to allow to increase by zero transversal field component, thus alleviate sensor 106 relative to main body The most pinpoint needs of 102, and increase sensor 106 by the magnetic field needed for accurately providing maximum operation in addition Sensitivity.It is, however, to be noted that sensor 106 is not likely to be with peak response work in certain embodiments, i.e. Eccentric from the center obtaining peak response.As being more fully described continuing after a while, this can by transversely x direction or One of y direction slide sensor 106 and realize in a convenient way.

In certain embodiments, the vertical area that opening 104 can be at least positioned at sensor 106 is with main body 102 For boundary.Additionally, in an embodiment, for extending beyond the vertical area of sensing station, opening 104 can also be laterally with master Body 102 is boundary.Additionally, in an embodiment, opening 104 can be surrounded by the material of main body 102 completely.

By above-described embodiment, therefore can avoid the use of large-sized lift magnet and sensor can be kept 106 and main body 102 be little performance or sensitivity deterioration without making sensor 106.Furthermore, it is possible to have increased access to zero transverse field Component or the region of the transversal field component close to zero, this can relax the pole to sensor 106 and be accurately positioned to obtain maximum spirit The requirement of sensitivity.In certain embodiments, such region can have and prolongs from cavity maximum in the x direction in the x direction The extension of about 1/8 to 1/2 stretched.Additionally, this region can have in y-direction from cavity maximum in y-direction simultaneously The extension of about 1/8 to about 1/2 extended.

Therefore, compared with using big lift magnet, it is possible to achieve price advantage, and the size of equipment 100 can be kept For little.In one embodiment, main body 102 has the lateral dimension on x direction and y direction less than 15mm.An enforcement In example, main body 102 has the lateral dimension on x direction and y direction less than 10mm.In one embodiment, main body 102 has X direction and y direction are less than the lateral dimension of 7.5mm.In certain embodiments, main body 102 size in a z-direction is permissible Less than 10mm.Main body 102 can such as have rectangle or a cubic form, wherein each in x dimension, y-dimension and z-dimension The 1/2 of the maximum extension that extension in dimension is not shorter than on the x dimension of main body 102, y-dimension and z-dimension.

Although Figure 1A and 1B shows the main body 102 formed completely by the permanent magnet material of such as hard magnetic material, but Fig. 1 is C Showing another embodiment with 1D, wherein main body 102 includes part 202A formed by magnetisable material and by permanent magnet material shape Part 202B become.Part 202A has and extends vertically the plate form less than part 202B.But, other embodiments can have Other form of part 202A and 202B and shape.The magnetisable material of part 202A can be such as ferrum, steel, steel alloy etc. Soft magnetic materials.Magnetic material provides magnetization for magnetisable material, so that part 202A can be sensor 106 generates biasing magnetic ?.It can be seen that the embodiment split shed 104 at Fig. 1 C and 1D is made only in part 202A.But, in other embodiments In, opening 104 can also be partially formed in part 202B.Furthermore, it is noted that, can include in other embodiments Multiple magnetisable material parts and multiple magnetic material part are to form composite host 102.

In the embodiment of Figure 1A to 1D, sensor 106 is arranged relative to vertical direction (z-axis), so that sensor 106 In main body 102.In other words, sensor 106 at least on x direction and y direction laterally with main body 102 as boundary.

Fig. 1 E shows embodiment, and wherein sensor 106 is placed on the top of flat table face 112A and 112B in the x direction Portion.Flat table face 112A and 112B provides at the horizontal boundary of main body 102.

Fig. 1 F shows another embodiment, wherein main body 102 include in the x direction two relative projections 114A and 114B.Projection 114A and the 114B that are positioned at respective transversal end are that main body 102 provides edge or " border ear (border ear) ", Thus allow the linearity more effectively shaping and providing for magnetic field increase of the x-component in magnetic field.It is placed on border or border Projection at district causes the maximum extension at the regional area on border or close border with main body 102.Projection 114A and 114B can also be formed the most fixing or support to maintain and to be maintained at suitable position by sensor device 106 in a lateral direction Put.Projection 114A and 114B can also be provided for keeping sensor 106 position in y-direction.But, an enforcement In example, projection 114A and 114B only may be provided such that sensor 106 at least can slide into master from side along y direction In body 102.

Fig. 1 G shows another embodiment, and wherein projection 114A and 114B have with overhanging (overhanging) surface Suspension bracket shape (crane-like) form.Projection 114A and the suspension bracket shape form of 114B in Fig. 1 G allow to obtain magnetic field even Increase the more effective shaping in the more linearity and therefore magnetic field.Except provide magnetic field there is the more effective of more high linearity Outside shaping, it is thus achieved that the synergy that position in the x direction is fixed and position in vertical direction is fixing.Position is solid Surely such as can advantageously use during molding process, wherein utilize mold materials that sensor 106 is crossed together with magnet mould System (over molded) is to obtain sensor 106 and the protection of main body 102.

Fig. 1 H shows embodiment, and its split shed 104 penetrates whole main body 102 in vertical direction with in main body 102 Form hole.In the embodiment according to Fig. 1 H, sensor 106 is completely placed in main body 102.Fig. 1 H shows that opening 104 has There is the inclined surface relative to vertical direction, so that the width on x direction increases towards sensor 106.But, other is implemented Example can provide other inclination relative to vertical direction or not inclination.

Have now been described the sectional view of embodiment, Fig. 2 A to 2C shows and can apply to about Figure 1A to 1H description The exemplary top view of each embodiment.

Fig. 2 A shows the top view of main body 102, and its split shed 104 has pyramidal shape or the shape of octahedral half Shape.The 3-D view of pyramidal shape when providing in the embodiment described about Fig. 1 E is provided in figure 3 a.Additionally, at figure 3B shows when be applied to as about described in Fig. 1 G, at horizontal boundary, have a bossed embodiment time pyramidal shape 3-D view.

Although with top view, Fig. 2 A shows that pyramidal shape has square form, but it is to be noted that in embodiment In can also provide in the x and y direction extend to different rectangular in form.

Fig. 2 B shows the top view of main body 102, and its split shed 104 has the polyhedral half with 16 surfaces Shape.In an embodiment, opening 104 can be to have the form of the part of regular polyhedron or regular polyhedron.

Fig. 2 C shows the top view of the main body 102 according to another embodiment, and its split shed 104 has when moving along vertical line The circular form that time dynamic, radius reduces.Fig. 2 C shows the opening 104 of conical form.In another embodiment, opening 104 is permissible There is conical form.

The every kind of top view illustrated about Fig. 2 A to 2C and describe can have about Figure 1A to 1H illustrate and describe One of sectional view.Such as, the projection shown in Fig. 1 F and 1G can be provided for as illustrate about Fig. 2 A and described in rib Cone-shaped, for as illustrate about Fig. 2 B and described in polyhedron-shaped or for as illustrate about Fig. 2 C and described in circular cone Shape.

Each embodiment shown in Fig. 2 A to 2C has the symmetrical junction of the symmetrical centre that band is defined in an x-y plane Structure.For such structure, be zero or the region of substantially zeroed magnetic x-component and y-component include symmetrical centre.But, its Its embodiment can have asymmetrical structure when watching from top.

In one embodiment, formed sensor 106 lift magnet main body 102 can by hard magnetic material and/ Or soft magnetic materials carries out moulding manufacturing.The molding of main body 102 and geometry thereof can be directly in the top of sensor 106 profit Carry out with mould, using as additional encapsulation step.In certain embodiments, main body 102 and sensor 106 can collect Become.In certain embodiments, main body 102 and sensor 106 can be integrated in encapsulation jointly, and this jointly encapsulates and can pass through Carry out moulding being formed in main body 102 and sensor 106.In certain embodiments, main body 102 can by use adhesive glue or Person is assemblied in merely with machine clamping mechanism on sensor 106.In certain embodiments, main body 102 can be with sensor 106 Assemble together and utilize mold materials to fix, such as, moulding this mould material with thermoplastic materials molding process around whole system Material.

The embodiment of the exemplary operation illustrating the sensor 106 biased by main body 102 will be described now about Fig. 4 A.

Fig. 4 A shows and makes sensor 106 be arranged in the system rotating near element 402 rotation with detecting element 402 400.System 400 provides in reverse bias mode, and wherein sensor 106 is arranged in the main body 102 generating bias magnetic field and rotates unit Between part 402.Although the main body 102 shown in Fig. 4 A is corresponding to the device shown in Fig. 1 G, it will be obvious that can also be real Existing each described embodiment.

Sensor 106 can be provided as being centered in the region with zero x field component and y field component, to obtain maximum spirit Sensitivity.In other embodiments, sensor 106 can deviate the region with zero x field component and y field component center or To reduce sensitivity outside this region.This such as can be by making sensor 106 along being formed by projection 114A and 114b Guider (guide) or support and move away from and there is the region of zero x-component and y-component realize.

As can be seen from Figure 4A, rotating element 402 can rotate, so that rotary shaft orients in y-direction.Rotate unit Part 402 has multiple magnet 404, wherein provides alternating magnetization in the surface rotating element 402.Rotate when rotating element 402 Time, the magnetic field that magnet 404 generates is applied to sensor 106.Sensor 106 has sensing direction in the x-direction.Sensor The direction of 106 x-component that experienced by magnetic field changes, and the direction changes to be examined by its sensing direction sensor 106 in the x direction Survey.The bias magnetic field that main body 102 generates provides sensor 106, to avoid saturated and/or other adverse effect at operating point.

Fig. 4 B shows the magnetic generated by similar with Fig. 1 G, to have the mobile element 408 including permeability magnetic material device The example simulation of field.It can be seen that main body 102 generates x field component substantially zeroed in main body 102 and y in region 406 Field component.It can be seen that region 406 extends laterally beyond the half of the size more than opening 104.As it has been described above, according to purposes, The sensing element of sensor 106 can be provided as in region 406 with obtain peak response or region 406 outside with Obtain the sensitivity reduced.

Fig. 5 A shows another example of the sectional view of the main body 102 for generating bias magnetic field.As it has been described above, it is real at this Executing in example, sensor 106 is arranged to be included in the extension of main body 102.In other words, the sensor 106 in Fig. 5 A is at three Extend in the maximum extension of main body on each direction in direction (x direction, y direction and z direction).As the most permissible Finding out, as summarized above with respect to Fig. 1 F, 1G, 3A and 3B, sensor 106 is laterally surrounded by projection 114A and 114B, described prominent Play 114A and 114B by lateral arrangement for forming edge or guider.Opening 104 can be included in side in certain embodiments The cavity of opening.

Embodiment shown in Fig. 5 A such as can be used in the configuration with Hall sensor element sensing magnetic field.? Fig. 5 A show in phantom the sensor 106 in main body 102, and the position of the sensor element of sensor in fig. 5 with Reference 502 indicates.Sensor element relative to the position 502 of opening in the sectional views at least one horizontal direction It it is center.In certain embodiments, position 502 is center about two horizontal directions (x-axis and y-axis).

In the embodiment of Fig. 5 A, main body 102 includes the opening 104 in the sectional views with surface 504A, wherein surface 504A has the angle 508 at least two turning recessed bending of 506(more than 180 °).In some embodiments (z direction), when along such as When vertical direction shown in Fig. 5 A is seen, at least two turning 506 may be located at position of sensor element less than 502.Real at some Executing in example, at least two turning 506 can have the angle 508 in the scope between 240 ° and 300 °.

In certain embodiments, as shown in Figure 5A, the surface 504 of opening 104 have two in a lateral direction towards in Section 504A that the heart 510 extends.Show in phantom centrage in fig. 5.In the embodiment of Fig. 5 A, section 504A is sensor 106 provide support.At the end of section 504A, position turning 506.Turning 506 is in vertical direction towards back surface 102B The opening 104 of 4mm is provided so that strengthen below sensor element without material space.As the following more detailed description, This provides magnetic forming effect.Although Fig. 5 A shows that turning is brink, but it is understood that, it is provided that all Such as fillet or rounded surfaces or other form of the curved surface with multiple step, with provide open surfaces recessed bending thus Opening 104 is extended as described above further towards back surface 102B.

Opening 104 can be considered as including upper part 512 and lower part 514, and its lower middle portion 514 starts from turning 506.As Above already in connection with Fig. 1 F, 1G, 3A, 3B explanation, upper part is surrounded along at least one direction by projection 114A, 114B.Second Part includes the cavity in the circular cone hole that can be e.g. formed in main body 102.

Sensor element can be in the single sensor element at the center of upper part.In an embodiment, single sensing Device element can be single Hall sensor element.In certain embodiments, the upper part of opening and the lower part of opening All can be placed in the middle about identical central line.

Second segment 514 is formed, in order to make the z-component in magnetic field shape at sensing station in the embodiment of Fig. 5 A.The Extending that two-stage nitration 514 provides obtains the magnetic field in second segment 514 with negative field component.The magnetic field line with negative field component is passing Intersect with the magnetic field line with positive field component at sensor component position 502, to have zero vertical in main body 102 magnetic field that generates Magnetic-field component (z-component).It being understood that zero vertical component can include accurately to be the vertical component of zero and substantially close to zero Vertical component.

Furthermore, it is to be understood that in the case of there is not external magnetic field, i.e. not by (all by such as surrounding objects Rotation element such as such as Fig. 4 B) in the case of the external magnetic fields that causes, the magnetic field that main body 102 is generated, sensor Perpendicular field components at position of components is provided as zero.Once there is the such as element rotating element shown in Fig. 4 A, this yuan The magnetic field that part generates makes to be different from zero at sensing element position perpendicular magnetic component, and this allows sensing magnetic field such as with detection The rotation of element or position.

Zero perpendicular field components at position of sensor element allows sensor 106 about by variations in temperature or other environment shadow Ring the impact on sensor (such as drift) caused and there is the sensor signal stability of improvement.The impact of such change with Absolute signal amplitude in proportion.For Hall sensor element, perpendicular magnetic component determines this detection.Therefore, by sensing Device element is placed on the position with zero perpendicular magnetic component, and impact on sensor signal can be reduced or eliminated.

In fig. 5, the second segment 514 of opening 104 is formed as cone type.But, can provide in other embodiments Other form, the such as rectangular in form shown in Fig. 5 B.Furthermore, it is possible to form other projection 114A, 114B to be sensor 106 provide edge or guider.

Fig. 5 B shows the embodiment of the main body 102 of the second segment 514 of the opening 104 with rectangular shape.Additionally, with figure The embodiment of 5A is compared, and the embodiment of Fig. 5 B has slightly different projection 114A, 114B.

In figure 5b, the magnetic field line that main body 102 generates is depicted.From Fig. 5 B it is observed that have the magnetic of negative field component Field wire 520 extends in second segment 514.Additionally, show the magnetic field with positive field component in figure 5b with reference 522 Line.The position 502 of sensing element is provided as on the limit having between the region of negative field component and the region with positive field component At boundary.

Fig. 5 C shows that exemplary plot is to illustrate perpendicular field components (being shown as vertical coordinate in Fig. 5 C) and (as a function Of) dependency of the vertical dimension (being shown as abscissa in Fig. 5 C) away from back surface 102B.It is observed that near dorsal part table Face 102b obtains first distance 524 with zero perpendicular field components.But, owing to sensor element is away from generating magnetic to be detected The element (the rotation element shown in the most such as Fig. 4 A) of field, can not use this position the most in actual applications.Such as figure Shown in 5C, it is thus achieved that there is the second distance 526 of zero perpendicular field components.This second distance 526 is corresponding to shown in Fig. 5 A and 5B Position of sensor element 502, and provide sensing station as briefly mentioned above to have highly sensitive to magnetic field to be sensed to obtain The improvement stability of degree.

Fig. 5 D shows the 3-D view of the main body 102 corresponding with the embodiment described about Fig. 5 A.The most permissible Finding out, 3 sides along main body 102 form transverse projections 114A, 114B.At least side of main body is formed without projection 114A, 114B, So that sensor 104 be directed in main body 102.At final position, sensor 104 is at least one direction (in figure 5d for x direction) is laterally surrounded by the material of main body 102.On other direction (y direction), sensor 104 only exists As downside is laterally defined: when sensor is introduced in main body, this side can also form stops (stop).

In certain embodiments, the main body 102 described in the embodiment above can be formed by molding process.So And, in certain embodiments, main body 102 can be by such as to other of the machining of original host or other mechanical treatment Technology is formed.

In the above description, the most enough it is illustrated in detail in and describes embodiment so that those skilled in the art's energy Enough put into practice teaching disclosed herein.Other embodiments can be utilized and other embodiments can be derived from this, so that permissible In the case of without departing substantially from the scope of the present disclosure, carry out structure and logic is replaced and changes.

Therefore, this detailed description of the invention is not considered as in a limiting sense, and the scope of each embodiment is only by appended The gamut of the equivalent that claim and these claim are given limits.

These embodiments of subject matter can be quoted by " inventing " individually and/or jointly by term herein, This is only used to convenient and is not intended to scope of the present application be limited on one's own initiative any single invention or inventive concept, such as fruit Disclose on border more than one if.Therefore, although specific embodiment illustrated and described herein, however, it is understood that be considered Can be with in place of specific embodiment for realizing any device of identical purpose.The disclosure is intended to cover each embodiment Any and all modifications or change.When looking back above description, above example and other reality herein not specifically described The combination executing example will be apparent from for a person skilled in the art.

Furthermore, it is noted that, the embodiment described in conjunction with special entity also may be used in addition to the realization in these entities Realize with one or more being included in one or more sporophore of described description entity or subdivision.

The accompanying drawing of the part forming the present invention is shown in which by way of illustration and not by way of limitation can be with practical matter Specific embodiment.

In the foregoing Detailed Description, it can be seen that, in order to simplify the purpose of the disclosure, each feature is divided together Group is in single embodiment.Disclosed the method is not construed as the claimed embodiment of reflection and requires to want than each right The intention of the more feature being expressly recited in asking.On the contrary, as claims reflect, subject matter is less than single Whole features of individual disclosed embodiment.Therefore, it is integrated in detailed description of the invention in these claims, the most each Claim oneself can be as single embodiment.Although each claim oneself can as single embodiment, but Although being it should be noted that dependent claims can be quoted and has other claim one or more in the claims Particular combination, but other embodiments can also include the group of dependent claims and the theme of other dependent claims each Close.Propose such combination herein, unless what statement particular combination was not intended to.

Furthermore, it is noted that, the method in description or disclosed in claim can be realized by following equipment: This equipment has the device of each step in the corresponding steps for performing these methods.

Claims (33)

1. for generating an equipment for bias magnetic field, including:

Bias-field maker, for providing bias magnetic field for Magnetic Sensor, wherein said bias-field maker is configured to the Thering is provided the magnetic-field component making described sensor bias on one direction, wherein said bias-field maker includes:

Having the main body of cavity, described main body includes magnetic material or magnetisable material, and described cavity is in described first direction and institute State the transversely extension of first direction so that described cavity at least in second direction and third direction laterally with described master The material of body is boundary, and described second direction is orthogonal to described first direction and described third direction is orthogonal to described second direction With described first direction, wherein said sensor be placed on have in said first direction zero or close to zero magnetic-field component Position cavity in,

Wherein said first direction is vertically oriented, and

Wherein said main body includes at least four inclined surface formed by described cavity relative to described vertical direction.

Equipment the most according to claim 1, wherein said cavity at least for the section along described first direction by magnetic main body Or the material of magnetisable main body surrounds.

Equipment the most according to claim 1, wherein said cavity is the shallow concave recess in described main body.

Equipment the most according to claim 1, wherein said cavity is to provide the magnetic master for making described bias magnetic field shape Unique opening in body or magnetisable main body.

Equipment the most according to claim 1, wherein said main body include the Part I that formed by magnetisable material and by The Part II that permanent magnet material is formed, wherein said Part I is magnetized by described Part II and wherein said cavity is formed In described Part I.

Equipment the most according to claim 1, wherein said sensor is placed at sensing station, wherein said cavity Transverse width increases on the direction towards described sensing station.

Equipment the most according to claim 6, wherein said sensor is the most laterally by described master Body surrounds.

Equipment the most according to claim 7, wherein said sensor is the most completely by institute State body envelopes.

Equipment the most according to claim 1, the bias magnetic field that wherein said main body generates is so shaped that at least in office In region, portion, the magnetic-field component in described second direction is substantially zeroed and magnetic-field component on described third direction essentially Zero.

Equipment the most according to claim 9, wherein said sensor be arranged such that second and third direction on magnetic Field component is zero in the position of described sensor.

11. equipment according to claim 9, wherein said sensor is to deviate the center of described regional area and position , so that the magnetoresistive element of described sensor is at least biased by the non-zero magnetic field component on described third direction, the described 3rd Described non-zero magnetic field component on direction makes to reduce the sensitivity of described sensor compared with peak response.

12. equipment according to claim 1, wherein said main body includes by dashing forward that permanent magnet material or magnetisable material are formed Rise, described projection be configured to make described bias magnetic field to shape and maintain described sensor second and third direction at least Position on one direction.

13. equipment according to claim 12, wherein said projection is further configured to maintain described sensor described Position on one direction.

14. equipment according to claim 1, wherein said sensor includes two magnetoresistive elements for gradiometer device.

15. equipment according to claim 1, wherein said sensor includes Hall effect sensing element.

16. equipment according to claim 1, wherein said at least four inclined surface is arranged to form pyramidal shape.

17. equipment according to claim 1, wherein said cavity width in this second direction and described cavity exist Width on described third direction increases towards described sensor in said first direction.

18. 1 kinds are used for the method generating bias magnetic field, including:

Forming the bias-field maker for providing bias magnetic field in a first direction for Magnetic Sensor, wherein said bias-field is raw The formation grown up to be a useful person includes being formed with cavity, permanent magnet material or magnetisable material main body so that described cavity is at least the Two and third direction on laterally with the material of described main body as boundary, described second direction is orthogonal to described first direction and institute State third direction and be orthogonal to described second direction and described first direction；And

Arrange described sensor so that the sensing element of described sensor be placed on have in said first direction zero or In the cavity of the position of the magnetic-field component of zero,

Wherein said first direction is vertically oriented, and

Wherein said main body includes at least four inclined surface formed by described cavity relative to described vertical direction.

19. methods according to claim 18, the formation of wherein said main body includes forming described main body by molding.

20. methods according to claim 18, the formation of wherein said main body is included in the widthwise edge that at least two is relative Projection is formed at boundary.

21. methods according to claim 18, wherein said main body is formed so that the magnetic field quilt that described main body generates It is configured in regional area, at least provide the most substantially zeroed magnetic-field component and described third party The most substantially zeroed magnetic-field component.

22. methods according to claim 19, wherein by carrying out moulding and shape around described sensor and described main body Become encapsulation.

23. 1 kinds are used for the method generating bias magnetic field, including:

Object is made to rotate；

Operation Magnetic Sensor is to sense described rotation, and described sensor is biased by bias magnetic field device, and described bias magnetic field fills Put and include:

Having the main body of cavity, described main body includes magnetic material or magnetisable material, and described cavity is in a first direction with described One direction transversely extend so that described cavity at least in second direction and third direction laterally with described main body Material is boundary, and wherein said second direction is corresponding to the direction of peak response of described sensor and described third direction just Meet at described second direction and described first direction, wherein said sensor be placed on have in said first direction zero or In the opening of the position of the magnetic-field component of zero,

Wherein said first direction is vertically oriented, and

Wherein said main body includes at least four inclined surface formed by described cavity relative to described vertical direction.

24. 1 kinds of equipment being used for generating bias magnetic field, including:

Sensor, for the change in the magnetic field that sensing is caused by the rotation of object；

Lift magnet, is used for making described sensor bias, described lift magnet include main body, described main body include permanent magnet material or Magnetisable material, described main body have first on first direction maximum extend, in second direction second maximum extend and On third direction the 3rd is maximum to be extended；And

Opening in described main body,

It is interior so that described sensor is respectively first, second He of described main body that wherein said sensor is placed on described opening 3rd inherent first, second, and third side of maximum extension upwardly extends and has zero in said first direction or close to zero Magnetic-field component,

Wherein said first direction is vertically oriented, and

Wherein said main body includes at least four inclined surface formed by described opening relative to described vertical direction.

25. equipment according to claim 24, wherein said sensor is placed such that the position at described sensor Place obtain zero or perpendicular magnetic component close to zero.

26. equipment according to claim 24, the surface of wherein said opening includes first extended towards central cross Section and second segment, the described surface of wherein said opening has recessed bending in the end of the section of each horizontal expansion.

27. equipment according to claim 26, wherein said recessed bending is have angle between 240 ° and 300 ° curved Bent.

28. equipment according to claim 24, wherein said opening is cavity, or wherein said opening is described The hole of described main body is completely penetrated through on one direction.

29. equipment according to claim 24, wherein said opening has on the direction being perpendicular to described first direction Transverse width, wherein said transverse width changes along described first direction.

30. equipment according to claim 24, wherein said main body is magnetized in said first direction, and wherein institute State sensor and be arranged to have the peak response direction being perpendicular to described first direction.

31. 1 kinds of equipment being used for generating bias magnetic field, including:

Magnetoresistive transducer, including at least one magnetoresistive element；

Having the main body of opening, described main body includes magnetic material or magnetisable material, and described opening is in a first direction with described One direction transversely extend so that described opening is laterally completely with the material of described main body as boundary, wherein said sensor It is placed on and has zero in said first direction or close in the opening of the position of the magnetic-field component of zero,

Wherein said first direction is vertically oriented, and

Wherein said main body includes at least four inclined surface formed by described opening relative to described vertical direction.

32. equipment according to claim 31, wherein said magnetoresistive transducer is fully disposed in described main body.

33. equipment according to claim 31, wherein said opening is cavity or the hole completely penetrating through described main body.