CN102435065B - High-temperature vacuum furnace heating chamber - Google Patents
High-temperature vacuum furnace heating chamber Download PDFInfo
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- CN102435065B CN102435065B CN2011104156316A CN201110415631A CN102435065B CN 102435065 B CN102435065 B CN 102435065B CN 2011104156316 A CN2011104156316 A CN 2011104156316A CN 201110415631 A CN201110415631 A CN 201110415631A CN 102435065 B CN102435065 B CN 102435065B
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Abstract
The invention discloses a high-temperature vacuum furnace heating chamber. The high-temperature vacuum furnace heating chamber comprises a cylindrical stainless steel outer shell, an upper thermal insulation screen, a side thermal insulation screen and a lower insulation screen, wherein the upper thermal insulation screen, the side thermal insulation screen and the lower insulation screen are arranged in the outer shell; a plurality of lead-out notches used for positioning a heater are formed in the side wall of the outer shell and the side thermal insulation screen; through-feeding openings are formed in the bottom of the outer shell and the lower thermal insulation screen; a moveable stainless steel plate is arranged in the feeding openings; the moveable stainless steel plate is provided with a moveable thermal insulation screen; a material-placing seat is arranged on the moveable thermal insulation screen; each thermal insulation screen comprises a plurality of thermal insulation single layers; the thermal insulation single layers respectively are a tungsten thermal insulation piece, a high temperature molybdenum thermal insulation piece and a molybdenum thermal insulation piece; cushion blocks are respectively arranged among the thermal insulation pieces; and the thermal insulation pieces are integrally connected by a tungsten pull rod and are fixed on the outer shell through an insulating ceramic ring at the end of the tungsten pull rod. The high-temperature vacuum furnace heating chamber is suitable for a high-temperature high vacuum environment, has small deformation after the temperature being raised, and has convenient use and long service life.
Description
Technical field
The invention belongs to the high-temperature vacuum field, relate in particular to heating chamber of high-temperature vacuum furnace.
Background technology
Heating chamber of high-temperature vacuum furnace structure commonly used as shown in Figure 1, comprise stainless steel casing, in the enclosure upper heat protection screen, side heat protection screen are set, be provided with some breach of drawing for the location heater on side wall of outer shell and side heat protection screen, outer shell bottom wall is movably arranged on outer cover body, lower heat protection screen is arranged on outer shell bottom wall, each heat protection screen comprises some insulation individual layers, the insulation individual layer is followed successively by tungsten insulation sheet, High-Temperature Mo insulation sheet and molybdenum insulation sheet from inside to outside, and each insulation sheet connects and by nut, is fixed on stainless steel casing with the tungsten pull bar.
The deficiency of its existence is: because outer shell bottom wall is movably arranged on outer cover body, lower heat protection screen is arranged on outer shell bottom wall, need open whole outer shell bottom wall and lower heat protection screen during the feeding discharging, easily makes the damage of colliding with of lower heat protection screen.And heat protection screen directly is fixed on the heating clamber shell by nut with the tungsten pull bar, after heating up, the heating clamber thermal deformation is larger, nut is the fixed tungsten pull bar effectively, make heat protection screen sagging more, temperature homogeneity in stove there is considerable influence, and easy and heater short circuit, cause equipment fault, so the heating chamber of high-temperature vacuum furnace of this structure can't permanently effective work under hot environment.
Summary of the invention
Technical problem to be solved by this invention is: the heating chamber of high-temperature vacuum furnace that is out of shape little, easy to use and long service life after providing a kind of and be applicable to the high temperature high vacuum environment, heating up.
for addressing the above problem, the technical solution used in the present invention is: a kind of heating clamber of vacuum high temperature furnace, comprise cylindric stainless steel casing, upper heat protection screen in the enclosure is set, the side heat protection screen, lower heat protection screen, be provided with some breach of drawing for the location heater on side wall of outer shell and side heat protection screen, be provided with the feeding port that connects on described outer casing bottom and described lower heat protection screen, be provided with movable corrosion resistant plate in feeding port, be provided with the moving thermal insulation screen on movable corrosion resistant plate, be provided with on the moving thermal insulation screen and put the material seat, described upper heat protection screen, the side heat protection screen, lower heat protection screen and moving thermal insulation screen comprise respectively some insulation individual layers, the insulation individual layer is followed successively by the tungsten insulation sheet from inside to outside, High-Temperature Mo insulation sheet and molybdenum insulation sheet, be respectively arranged with cushion block between each insulation sheet, the tungsten pull bar connects as one each insulation sheet and the insulation porcelain ring by end is fixed on shell.
Described drawing in breach is provided with insulated porcelain sleeve, and described shell inboard is drawn indentation, there and is provided with the molybdenum catch.
Be provided with some reinforcing rings on described heating clamber shell, also be provided with several on described heating clamber shell and be used for the fixedly bearing of heating clamber.
Described reinforcing ring is the reinforcing ring that the stainless steel angle steel is made.
Described bearing quantity is 6, and circumferentially is distributed in outer surface of outer cover.
The invention has the beneficial effects as follows: owing to being provided with the feeding port that connects on described outer casing bottom and described lower heat protection screen, be provided with movable corrosion resistant plate in feeding port, be provided with the moving thermal insulation screen on movable corrosion resistant plate, moving thermal insulation screen small volume, easily adjust to rigging position preferably with lower heat protection screen, and not fragile.
Because described each heat protection screen comprises some insulation individual layers, the insulation individual layer is followed successively by tungsten insulation sheet, High-Temperature Mo insulation sheet and molybdenum insulation sheet from inside to outside, is conducive to improve the heat insulation effect of heating clamber; The tungsten pull bar connects as one each insulation sheet and the insulation porcelain ring by end is fixed on shell, and the insulation porcelain ring has increased contact area with shell greatly than nut, makes heat protection screen be difficult for producing deformation under gravity or thermodynamic activity.
Be provided with insulated porcelain sleeve owing to drawing in breach, the shell inboard is drawn indentation, there and is provided with the molybdenum catch, can effectively prevent the heat loss at perforate position.
Owing to being provided with some stainless steel angle steel reinforcing rings on shell, and 6 seat supports are arranged, can effectively control the thermal deformation of heating clamber, the configuration state while guaranteeing after heating clamber heats up to keep cold conditions.
Description of drawings
Fig. 1 is the structural representation of the heating chamber of high-temperature vacuum furnace commonly used.
Fig. 2 is sectional structure schematic diagram of the present invention.
Fig. 3 is that A-A of the present invention cuts open schematic diagram.
In Fig. 1-3: 1. shell, 2. go up heat protection screen, 3. the side heat protection screen, 4. descend heat protection screen, 5. draw breach, 6. heater, 7. insulated porcelain sleeve, 8. molybdenum catch.9. feeding port, 10. moving thermal insulation screen, 11. put the material seat.12. the tungsten pull bar, 13. insulation porcelain rings, 14. reinforcing rings, 15. bearings.
The specific embodiment
Below in conjunction with accompanying drawing, structure of the present invention is described in further detail.
As Figure 2-3, a kind of heating clamber of vacuum high temperature furnace, comprise cylindric stainless steel casing 1, be arranged on upper heat protection screen 2, side heat protection screen 3, lower heat protection screen 4 in shell 1, be provided with on shell 1 sidewall and side heat protection screen 3 and somely for location heater 6, draw breach 5, draw in breach 5 and be provided with insulated porcelain sleeve 7, described shell 1 inboard is drawn breach 5 places and is provided with molybdenum catch 8.Be provided with the feeding port 9 that connects on described shell 1 bottom and described lower heat protection screen 4, be provided with movable corrosion resistant plate in feeding port 9, be provided with moving thermal insulation screen 10 on movable corrosion resistant plate, be provided with on moving thermal insulation screen 10 and put material seat 11.Described upper heat protection screen 2, side heat protection screen 3, lower heat protection screen 4 and moving thermal insulation screen 10 comprise respectively some insulation individual layers, the insulation individual layer is followed successively by tungsten insulation sheet, High-Temperature Mo insulation sheet and molybdenum insulation sheet from inside to outside, be respectively arranged with cushion block between each insulation sheet, tungsten pull bar 12 connects as one each insulation sheet and the insulation porcelain ring 13 by end is fixed on shell 1.
Be provided with some stainless steel angle steel reinforcing rings 14 on described heating clamber shell 1, also circumferentially be evenly equipped with 6 on described heating clamber shell 1 and be used for the fixedly bearing 15 of heating clamber.
Owing to being provided with the feeding port 9 that connects on described shell 1 and described lower heat protection screen 4, be provided with movable corrosion resistant plate in feeding port 9, be provided with moving thermal insulation screen 10 on movable corrosion resistant plate, moving thermal insulation screen 10 small volumes, easily adjust to rigging position preferably with lower heat protection screen 4, and not fragile.
Because described each heat protection screen comprises some insulation individual layers, the insulation individual layer is followed successively by tungsten insulation sheet, High-Temperature Mo insulation sheet and molybdenum insulation sheet from inside to outside, is conducive to improve the heat insulation effect of heating clamber; Tungsten pull bar 12 connects as one each insulation sheet and the insulation porcelain ring 13 by end is fixed on shell 1, and insulation porcelain ring 13 has increased contact area with shell 1 greatly than nut, makes heat protection screen be difficult for producing deformation under gravity or thermodynamic activity.
Be provided with insulated porcelain sleeve 7 owing to drawing in breach 5, shell 1 inboard is drawn breach 5 places and is provided with molybdenum catch 8, can effectively prevent the heat loss at perforate position.
Owing to being provided with some stainless steel angle steel reinforcing rings 14 on shell 1, and there are 6 bearings 15 to support, can effectively control the thermal deformation of heating clamber, the configuration state while guaranteeing after heating clamber heats up to keep cold conditions.
Claims (5)
1. the heating clamber of a vacuum high temperature furnace, comprise cylindric stainless steel casing, upper heat protection screen in the enclosure is set, the side heat protection screen, lower heat protection screen, be provided with some breach of drawing for the location heater on side wall of outer shell and side heat protection screen, it is characterized in that: be provided with the feeding port that connects on described outer casing bottom and described lower heat protection screen, be provided with movable corrosion resistant plate in feeding port, be provided with the moving thermal insulation screen on movable corrosion resistant plate, be provided with on the moving thermal insulation screen and put the material seat, described upper heat protection screen, the side heat protection screen, lower heat protection screen and moving thermal insulation screen comprise respectively some insulation individual layers, the insulation individual layer is followed successively by the tungsten insulation sheet from inside to outside, High-Temperature Mo insulation sheet and molybdenum insulation sheet, be respectively arranged with cushion block between each insulation sheet, the tungsten pull bar connects as one each insulation sheet and the insulation porcelain ring by end is fixed on shell.
2. the heating clamber of vacuum high temperature furnace according to claim 1, it is characterized in that: described drawing in breach is provided with insulated porcelain sleeve, and described shell inboard is drawn indentation, there and is provided with the molybdenum catch.
3. the heating clamber of vacuum high temperature furnace according to claim 1, is characterized in that: be provided with some reinforcing rings on described heating clamber shell, also be provided with several on described heating clamber shell and be used for the fixedly bearing of heating clamber.
4. the heating clamber of vacuum high temperature furnace according to claim 3, it is characterized in that: described reinforcing ring is the reinforcing ring that the stainless steel angle steel is made.
5. the heating clamber of vacuum high temperature furnace according to claim 3, it is characterized in that: described bearing quantity is 6, and circumferentially is distributed in outer surface of outer cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104156316A CN102435065B (en) | 2011-12-14 | 2011-12-14 | High-temperature vacuum furnace heating chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104156316A CN102435065B (en) | 2011-12-14 | 2011-12-14 | High-temperature vacuum furnace heating chamber |
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| CN102435065A CN102435065A (en) | 2012-05-02 |
| CN102435065B true CN102435065B (en) | 2013-11-13 |
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| CN2011104156316A Active CN102435065B (en) | 2011-12-14 | 2011-12-14 | High-temperature vacuum furnace heating chamber |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729298A (en) * | 2015-04-19 | 2015-06-24 | 宁夏昇力恒真空设备有限公司 | High temperature vacuum sintering furnace with heat shield positioning device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111260A (en) * | 1998-10-08 | 2000-04-18 | Daido Steel Co Ltd | Heating facility |
| CN2662171Y (en) * | 2003-10-24 | 2004-12-08 | 北京七星华创电子股份有限公司 | Heat insulation assembly and heat preservation and thermal shielding apparatus for its high temperature vacuum furnace |
| CN101319272B (en) * | 2008-07-18 | 2010-06-02 | 沈阳恒进真空科技有限公司 | Vertical vacuum heavy pressure gas quenching furnace with rotatable material rest |
| CN201660714U (en) * | 2010-02-09 | 2010-12-01 | 宁波晶元太阳能有限公司 | Follow-up heat insulation ring thermal field structure for vertical and directional polycrystalline growth |
| CN201942738U (en) * | 2010-10-18 | 2011-08-24 | 北京有色金属研究总院 | Heating device for vacuum annealing furnace |
| CN201942778U (en) * | 2011-02-17 | 2011-08-24 | 李欣 | Multi-temperature zone sapphire single crystal growth furnace |
| CN202329078U (en) * | 2011-12-14 | 2012-07-11 | 张家港圣汇气体化工装备有限公司 | Heating chamber of high-temperature vacuum furnace |
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2011
- 2011-12-14 CN CN2011104156316A patent/CN102435065B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729298A (en) * | 2015-04-19 | 2015-06-24 | 宁夏昇力恒真空设备有限公司 | High temperature vacuum sintering furnace with heat shield positioning device |
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Owner name: CSSC SHENGHUI EQUIPMENT CO., LTD. Free format text: FORMER NAME: SHENGHUI GAS + CHEMICAL SYSTEMS (ZHANGJIAGANG) CO., LTD. |
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Address after: 215634, Linjiang Road, 3 Jin Gang Town, Suzhou, Jiangsu, Zhangjiagang Patentee after: CSSC SHENGHUI EQUIPMENT CO., LTD. Address before: 215600, Suzhou, Jiangsu, Zhangjiagang Linjiang Road, No. 3, Zhangjiagang Gas Chemical Equipment Co., Ltd. Patentee before: Shenghui Gas & Chemical Systems (Zhangjiagang) Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |
Address after: 215634 Zhangjiagang Shenghui Gas Chemical Equipment Co., Ltd., No. 3 Linjiang Road, Jinggang Road, Zhangjiagang, Suzhou, Jiangsu Patentee after: Suzhou Saint remittance Equipment Co., Ltd. Address before: 215634 Zhangjiagang Shenghui Gas Chemical Equipment Co., Ltd., No. 3 Linjiang Road, Jinggang Road, Zhangjiagang, Suzhou, Jiangsu Patentee before: CSSC SHENGHUI EQUIPMENT CO., LTD. |