CN102426007B - High-precision method for measuring attitude angle of triaxial air bearing table and measurement device thereof - Google Patents

High-precision method for measuring attitude angle of triaxial air bearing table and measurement device thereof Download PDF

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CN102426007B
CN102426007B CN 201110249979 CN201110249979A CN102426007B CN 102426007 B CN102426007 B CN 102426007B CN 201110249979 CN201110249979 CN 201110249979 CN 201110249979 A CN201110249979 A CN 201110249979A CN 102426007 B CN102426007 B CN 102426007B
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bearing table
axis air
marker
video camera
bearing
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CN102426007A (en
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夏红伟
李莉
马广程
王常虹
陆智俊
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Harbin Institute of Technology
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Abstract

The invention provides a high-precision method for measuring the attitude angle of a triaxial air bearing table and a measurement device thereof. The measurement device is characterized in that: a guide rail and a window shade are arranged at the perimeter of the bottom of the triaxial air bearing table, an artificial illumination system is arranged on a liftable platform, the guide rail of the bottom of the triaxial air bearing table is used for installing the window shade, a marker is fixed on the bottom surface of the table facet of the triaxial air bearing table, a digital CCD camera is arranged on the liftable platform. The measurement method comprises the following steps: marking the digital CCD camera; collecting the images of the marker and transmitting to a computer which is responsible for image processing by the digital CCD camera; carrying out sub-pixel positioning on the mark point on the marker, and acquiring the precise coordinate of the mark point in the image; and calculating the relative attitude angle between the marker and the digital CCD camera. The measurement device has the advantages of simple installation, and high measurement precision, and can complete the high-precision attitude measurement of the air bearing table. The invention also can be used for the precision measurement of a uniaxial air bearing table.

Description

Three-axis air-bearing table high-precision attitude angle measuring method and device thereof
(1) technical field
The present invention relates to space technology, is exactly a kind of three-axis air-bearing table high-precision attitude angle measuring method and device thereof specifically.
(2) background technology
The air film that three-axis air-bearing table relies on pressurized air to form between air-bearing and bearing seat, making to simulate stage body floats, thereby realize approximate friction free relative motion condition, with the spacecrafts such as analog satellite in outer space the very little mechanical environment of suffered disturbance torque.As the spacecraft motion simulator, three-axis air-bearing table carries out the performance of Physical Simulation for Satellite Control Systems experimental check system, is important means and method in the spacecraft development process.
Three-axis air-bearing table needs dynamically to provide by attitude measurement system the attitude information such as angle, angular velocity of air floating table in process of the test, in order to complete Control loop, special construction due to three-axis air-bearing table, the inapplicable measurement with three-axis air-bearing table of the device (as rotary transformer, inductosyn, photoelectric code disk, grating etc.) of in the past measuring for turntable, need to consider new measuring method and device.And, in practical application at present, the height of measuring system measuring accuracy is directly connected to the effect of l-G simulation test.
Through searching document, find, Chinese invention patent application number: 200610010260.2, patent name is attitude angle of three-axis air-bearing table device and measuring method thereof, this patent is equipped with ccd video camera above three-axis air-bearing table, the LED cursor system of measuring is installed on the air floating table table top, utilize theory on computer vision in conjunction with the range information of measuring the cursor point part, calculate the relative movement parameters of air floating table table top with respect to video camera, but due to the defect on system constructing, measuring accuracy is restricted, thereby affects its actual usable range.
Chinese invention patent application number: 200410009086.7, patent name is: rigid space pose measuring apparatus and measuring method thereof, this patent adopts the stay-supported scrambler to realize a kind of measurement of rigid space position and attitude of contact, but because three-axis air-bearing table can not allow external touch metering system, because contact has brought interference to air floating table, so the method is not suitable for the attitude information measurement of three-axis air-bearing table.
(be published in aerospace journal .1996 at document " the servo angle measurement systematic research of three-axis air-bearing table single frame ", 17 (4): 71-74), the Li Jisu of the Zhang Xiaoyou of Harbin Institute of Technology, Liu Dun and Beijing Control Engineering Inst. etc. has proposed the servo measurement scheme of a kind of single frame, this system is installed an arc arms that can rotate around air floating table center pedal line on the air floating table base, and transportable balladeur train is installed, the attitude information of the rotation by responsive arc arms and the traverse measurement air floating table of balladeur train thereon.When this system need to increase complicated mechanical system and sensor system, mechanism's complexity, and its precision is subject to the restriction of mechanical hook-up and sensor, can only reach 0.01 °, is difficult to reach high precision.
(3) summary of the invention
The object of the present invention is to provide a kind of three-axis air-bearing table high-precision attitude angle measuring method and device thereof.
The object of the present invention is achieved like this: a kind of three-axis air-bearing table high-precision attitude angle measuring device, it is by the three-axis air-bearing table table top, three-axis air-bearing table sphere air-bearing, the three-axis air-bearing table bearing base, marker, the digital CCD video camera, the artificial light system, window-blind, guide rail and form for the lifting platform that video camera and artificial light source are installed, three-axis air-bearing table table top bottom surrounding mounting guide rail and window-blind, the artificial light system is arranged on lifting platform, three-axis air-bearing table table top bottom guide track is for installing window-blind, window-blind for forming the vision measurement space of sealing when measuring, marker is fixed on the base plane of three-axis air-bearing table table top, both angular motions are identical, be arranged on the three-axis air-bearing table bearing base for the lifting platform that video camera and artificial light source are installed, the digital CCD video camera is arranged on lifting platform.
A kind of measuring method realized by described three-axis air-bearing table high-precision attitude angle measuring device of the present invention, step is as follows:
Step 1: digital ccd video camera is demarcated;
Step 2: close window-blind and form the sealing image capture environment, open artificial light source;
Step 3: the image of digital CCD camera acquisition marker also is transferred to the computing machine of being responsible for the image processing;
Step 4: computing machine is processed the image information of marker, and the gauge point on marker is carried out to sub-pixel positioning, obtains the accurate coordinates of gauge point in image;
Step 5: according to principle of computer vision, the relative attitude angle between calculation flag device and digital CCD video camera.
The invention provides a kind of attitude angle information that can the kinetic measurement three-axis air-bearing table, and can not produce three-axis air-bearing table high-precision attitude angle measuring device and the measuring method of disturbing to air floating table.At the table top bottom of three-axis air-bearing table Installation Mark device, and at three-axis air-bearing table table top bottom surrounding mounting guide rail and window-blind; On the three-axis air-bearing table pedestal, lifting platform is installed, and on this platform, digital CCD video camera and light source is installed, video camera is connected with the image pick-up card in computing machine by data line.The present invention's video camera used is installed on the three-axis air-bearing table stage body, and marker is installed on three-axis air-bearing table table top bottom, and the space length between video camera and marker shortens.Increased artificial light source, artificial light source unique point and window-blind, set up the image capture environment of a sealing,, eliminated the external light source interference.The present invention has adopted the board-like measurement feature device of calibration mold, with the measurement cursor system that light emitting diode forms, compares, and precision is higher.Camera lens has been used the object space telecentric lens, is applicable to precise vision and measures.
Three-axis air-bearing table high-precision attitude measuring method of the present invention, measuring equipment is installed simply, measuring accuracy is high, can measure the high-precision attitude of air floating table and measure.The present invention is also for the accurate measurement of single axle table attitude angle.
(4) accompanying drawing explanation
Fig. 1 is that the attitude angle of three-axis air-bearing table system forms schematic diagram;
Fig. 2 is for measuring characteristic indication and camera position schematic diagram;
Fig. 3 is three-axis air-bearing table angle measurement process flow diagram.
(5) embodiment
Below in conjunction with accompanying drawing, the invention will be further described for example.
Embodiment 1: in conjunction with Fig. 1, a kind of three-axis air-bearing table high-precision attitude angle measuring of the present invention device, it is by three-axis air-bearing table table top (1), three-axis air-bearing table sphere air-bearing (2), three-axis air-bearing table bearing base (3), marker (4), digital CCD video camera (5), artificial light system (6), window-blind, guide rail (7) and form for lifting platform (8) that video camera and artificial light source are installed, three-axis air-bearing table table top (1) bottom surrounding mounting guide rail and window-blind, the artificial light system is arranged on lifting platform, three-axis air-bearing table table top bottom guide track is for installing window-blind, window-blind for forming the vision measurement space of sealing when measuring, marker (4) is fixed on the base plane of three-axis air-bearing table table top (1), both angular motions are identical, be arranged on three-axis air-bearing table bearing base (3) for the lifting platform (8) that video camera and artificial light source are installed, digital CCD video camera (5) is arranged on lifting platform (8).
A kind of three-axis air-bearing table high-precision attitude angle measuring method of the present invention, step is as follows:
Step 1: digital ccd video camera is demarcated;
Step 2: close window-blind and form the sealing image capture environment, open artificial light source;
Step 3: the image of digital CCD camera acquisition marker also is transferred to the computing machine of being responsible for the image processing;
Step 4: computing machine is processed the image information of marker, and the gauge point on marker is carried out to sub-pixel positioning, obtains the accurate coordinates of gauge point in image;
Step 5: according to principle of computer vision, the relative attitude angle between calculation flag device and digital CCD video camera.
Embodiment 2: in conjunction with Fig. 1-Fig. 3, the present invention mainly is comprised of following part: three-axis air-bearing table table top (1), three-axis air-bearing table sphere air-bearing (2), three-axis air-bearing table bearing base (3), marker (4), digital CCD video camera (5), artificial light source (6), window-blind guide rail (7),, for the lifting platform (8) that video camera and artificial light source are installed.Marker (4) is fixed on the base plane of three-axis air-bearing table table top (1), and both angular motions are identical.It is upper that lifting platform (8) is arranged on three-axis air-bearing table bearing base (3), can move up and down as required to suitable position and fix.It is upper that video camera (5) is arranged on lifting platform (8), gathers the image information of upper each mark of marker (4), and artificial light source (6) provides constant, reliable illumination for image acquisition.Video camera is selected black and white digital CCD video camera, uses CameraLink to be connected with computing machine, anti-interference.Resolution of video camera is considered in conjunction with the marker size.Camera lens is selected the object space telecentric lens; The geometry of marker and number determined by the measuring precision and selected algorithm etc., and a kind of embodiment is the installations of arranging in a line of three unique points, forms isosceles triangle on short transverse; Fig. 2 is video camera and characteristic point position schematic diagram.The material of template can be used the materials such as glass, metal, aluminium base, and precision can reach 0.0005 micron.
Embodiment 3: as shown in Figure 3, concrete disposal route is groundwork flow process of the present invention:
1. video camera is demarcated: gather the scaling board image, as uncalibrated image, so that video camera is demarcated, quantity is more than 4 pairs; Extract in uncalibrated image, determine the image coordinate of each calibration point on scaling board; According to the physical size of scaling board, determine the world coordinates of each calibration point on scaling board; For video camera desired center perspective imaging model, according to above data, use least square method to try to achieve homography matrix H, reflected the relation between world coordinate system and image coordinate system; By homography matrix H, can solve intrinsic parameters of the camera, thereby obtain each parameter of desirable perspective model of video camera; On the basis of video camera desired center perspective imaging model, use maximum likelihood method can try to achieve distortion parameter, thereby set up video camera actual imaging model, complete calibration process.
2. close window-blind and form the sealing image capture environment, open artificial light source;
3. gather the image of measuring feature device (being marker);
4. computing machine is processed the image information of marker, and the gauge point on marker is carried out to sub-pixel positioning, obtains the accurate coordinates of gauge point in image.In marker, the image coordinate You Qi center of gauge point characterizes, and the center of each gauge point is accurately located, and need to carry out the following steps:
(1) image pre-service, remove picture noise.
(2) image is cut apart, and all pixel pixel values of statistical picture, determine segmentation threshold, according to threshold value, each pixel binaryzation is sorted out.Owing to there being noise in image, after binaryzation, can there be some burrs in the edge of cursor, in order to eliminate the impact of these burrs, carries out the morphologic filtering processing.
(3) extract the cursor feature.According to image segmentation result, adopt 8 neighborhood region-growing methods to determine the cursor character pixel.
(4) cursor sub-pixel positioning.Sub-pixel positioning needs two pacing itemss: the first, and target is comprised of a plurality of points, and has certain geometry and intensity profile characteristic; The second, must the particular location of hard objectives positioning datum point on target.Meet this two conditions in the present invention, use centroid method to carry out the sub-pixel hi-Fix to cursor.Cursor is characterized as circle, during location, is applicable to adopting centroid method to determine the cursor centre coordinate.According to centre of form formula, calculate the centre of form of cursor feature.When cursor feature area is of moderate size, the precision of centroid method can reach 0.2~0.5 pixel.
5. according to principle of computer vision, the relative attitude angle between calculation flag device and video camera.
Utilizing video camera to realize the process of attitude angle of three-axis air-bearing table, is oppositely to recover the inverse process of its three-dimensional structure from the two dimensional image of gauge point, relates to following coordinate system in this process:
(1) air floating table base coordinate system
(2) air floating table table top coordinate system
(3) camera coordinate system
(4) photo coordinate system
(5) measure feature device coordinate system
Because the transformational relation between air floating table table top coordinate system and measurement feature device coordinate system is the concrete amount that can measure in advance, and also have definite transformational relation between camera coordinate system and air floating table base coordinate system, so air floating table table top coordinate system can obtain by the relative rotation parameter that calculates camera coordinate system and measure between property coordinate system with the relative rotary motion parameter between the air floating table base coordinate system.
The ultimate principle of vision measurement three-axis air-bearing table attitude angle of the present invention is as follows:
As shown in Figure 2, wherein AK is perpendicular to AC, and AJ is perpendicular to AB, and AK, AJ is on the ABC of plane, and straight line L crosses an A and perpendicular to plane ABC, straight line L and ray AK form plane α, and straight line L and ray AJ form the folded area of space of β, plane, plane αHe plane β and be called V.During at SPACE V or W, can unique solution obtain unique point A, B, 3 coordinates in camera coordinate system of C when video camera.
Unique point A, B, 3 coordinates in the measurement mechanism coordinate system of C are known, suppose that unique point A, B, the C coordinate in camera coordinate system is X a, c=x a, c, y a, c, z a, c) t, X b, c=x b, c, y b, c, z b, c) t, X c=x c, c, y c, c, z c, c) t, the coordinate in the measurement mechanism coordinate system is x a, m=(x a, m, y a, m, z a, m) t, X b, m=(x b, m, y b, m, z b, m) t, X c, m=(x c, m, y c, m, z c, m) t, camera coordinate system O so cx cy cz cwith measurement feature device coordinate system O mx my mz mbetween there is the following rotation matrix R that concerns
[x A,cX B,cX C,c]=R[x A,mX B,mX C,m] (1)
By X a, c, X b, c, X c, cand X a, m, X b, m, X c, mcan the column vector n of the unit of calculating a, c, n b, c, n c, cand n a, m, n b, m, n c, m, rotation matrix R:
R=[n A,cn B,cn C,c][n A,mn B,mn C,m] -1 (2)
Can be decomposited camera coordinate system and be measured the three axle anglecs of rotation between property coordinate system by rotation matrix R, concrete derivation is as follows:
R ( γ , β , α ) = r 11 r 12 r 13 r 21 r 22 r 23 r 31 r 32 r 33 - - - ( 3 )
, in cos β ≠ 0 o'clock, the calculating formula that can obtain each Eulerian angle is as follows:
β = - arctan r 31 r 11 2 + r 21 2 α = arctan r 32 r 33 γ = arctan r 21 r 11 - - - ( 4 )
Embodiment 4: in conjunction with Fig. 1, the present invention is at the table top bottom of three-axis air-bearing table Installation Mark device, and at three-axis air-bearing table table top bottom surrounding mounting guide rail and window-blind; On the three-axis air-bearing table pedestal, lifting platform is installed, and on this platform, digital CCD video camera and light source is installed, video camera is connected with the image pick-up card in computing machine by data line.The digital CCD video camera is installed on the three-axis air-bearing table stage body, and marker is installed on three-axis air-bearing table table top bottom, and the space length between video camera and marker shortens.Increased artificial light source, artificial light source unique point and window-blind, set up the image capture environment of a sealing,, eliminated the external light source interference.The present invention has adopted the board-like measurement feature device of calibration mold, with the measurement cursor system that light emitting diode forms, compares, and precision is higher.Camera lens has been used the object space telecentric lens, is applicable to precise vision and measures.Marker is arranged on three-axis air-bearing table table top bottom, has on template and measures required mark, and the geometric configuration of mark, geometry and number are as required and different.
The artificial light system is arranged on lifting platform, the selection of artificial light system need to be according to the visual field of camera lens, the distance of illuminator and cursor system, profile condition and the color of cursor, 4 fundamentals such as image-forming objective lens, determine and select corresponding lighting device.Its lifting platform is arranged on the three-axis air-bearing table pedestal, and three-axis air-bearing table table top bottom slide rail is for window-blind is installed, and window-blind for forming the vision measurement space of sealing when measuring.

Claims (2)

1. a three-axis air-bearing table high-precision attitude angle measuring device, it is by three-axis air-bearing table table top (1), three-axis air-bearing table sphere air-bearing (2), three-axis air-bearing table bearing base (3), marker (4), digital CCD video camera (5), artificial light system (6), window-blind, guide rail (7) and form for the lifting platform (8) that digital CCD video camera and artificial light system are installed, it is characterized in that: three-axis air-bearing table table top (1) bottom surrounding mounting guide rail and window-blind, artificial light system (6) is arranged on lifting platform, three-axis air-bearing table table top bottom guide track is for installing window-blind, window-blind for forming the vision measurement space of sealing when measuring, marker (4) is fixed on the base plane of three-axis air-bearing table table top (1), both angular motions are identical, be arranged on three-axis air-bearing table bearing base (3) for the lifting platform (8) that digital CCD video camera and artificial light system are installed, digital CCD video camera (5) is arranged on lifting platform (8).
2. a three-axis air-bearing table high-precision attitude angle measuring method of being realized by three-axis air-bearing table high-precision attitude angle measuring device claimed in claim 1, it is characterized in that: step is as follows:
Step 1: digital ccd video camera is demarcated;
Step 2: close window-blind and form the sealing image capture environment, open the artificial light system;
Step 3: the image of digital CCD camera acquisition marker also is transferred to the computing machine of being responsible for the image processing;
Step 4: computing machine is processed the image information of marker, and the gauge point on marker is carried out to sub-pixel positioning, obtains the accurate coordinates of gauge point in image;
Step 5: according to principle of computer vision, the relative attitude angle between calculation flag device and digital CCD video camera.
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