CN102419154B - Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device) - Google Patents

Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device) Download PDF

Info

Publication number
CN102419154B
CN102419154B CN 201110267091 CN201110267091A CN102419154B CN 102419154 B CN102419154 B CN 102419154B CN 201110267091 CN201110267091 CN 201110267091 CN 201110267091 A CN201110267091 A CN 201110267091A CN 102419154 B CN102419154 B CN 102419154B
Authority
CN
China
Prior art keywords
array ccd
line array
output
threshold
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201110267091
Other languages
Chinese (zh)
Other versions
CN102419154A (en
Inventor
阮林波
李海涛
田耕
渠红光
王晶
霍宏发
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northwest Institute of Nuclear Technology
Original Assignee
Northwest Institute of Nuclear Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northwest Institute of Nuclear Technology filed Critical Northwest Institute of Nuclear Technology
Priority to CN 201110267091 priority Critical patent/CN102419154B/en
Publication of CN102419154A publication Critical patent/CN102419154A/en
Application granted granted Critical
Publication of CN102419154B publication Critical patent/CN102419154B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention provides a non-contact micro displacement measuring device and method based on a linear array CCD (charge coupled device). Laser emitted by a horizontal linear laser is irradiated on the linear array CCD, and a light sensing pixel outputs a signal under the action of a drive pulse; when the output signal exceeds a set background threshold voltage, a threshold comparator outputs rectangular pulse strings; and after the rectangular pulse strings at different moments are processed, the central positions of the rectangular pulse strings are respectively obtained, thus obtaining the absolute displacement of the linear array CCD between different moments. The number of rectangular pulse signals output by a threshold adjuster is determined by the comparison result of the threshold voltage and the output signal voltage of the linear array CCD; and a central processing unit is mainly used for concerning the number of the rectangular pulse signals output by the threshold adjuster, therefore the device provided by the invention facilitates the process control regulation, is high in precision and small in noise, can store optimal operating point data output by a digital potentiometer, and provides data supports for regulating the output of the digital potentiometer in different environments.

Description

Noncontact micro-displacement measurement device and method based on line array CCD
Technical field
The present invention relates to a kind of measurement mechanism and method, the device and method of a kind of Real-Time Monitoring device micro-displacement to be measured or deformation quantity relates in particular to data acquisition system (DAS) and the passage expansion technique of this measurement mechanism.
Background technology
The measurement of displacement and deformation quantity plays a part more and more important in numerous applications such as surface measurement, Materials Measurement, precision optical machinery measurements.Measure displacement or deformation quantity, can adopt contact type measurement method and non-contact type measuring method.Traditional contact measurement method has a lot of limitation, is difficult to realize that the high precision to small displacement detects; Contactless measuring method has the characteristics such as apparatus structure is simple, speed is fast, measuring accuracy is high, application is convenient, flexible, is widely used at present.
Existing Contactless displacement measurement device great majority use more leg-of-mutton principles, obtain the information of displacement with laser positioning, and can only support the measurement of single-point, and data also are not easy to long-distance transmissions.Be 200820151430 patented claim " CCD laser triangle displacement sensor " such as application number, utilization be that leg-of-mutton principle has realized the displacement measurement to single-point.
ADC chip and exclusive data Acquisition Circuit are used in analog to digital conversion, data acquisition mostly in the present Contactless displacement measurement device, data transmission is used the RS232 bus, whole measurement mechanism is not easy to expansion, data can not be carried out long-distance transmissions, be patented claim ccd data collection and the treating apparatus of high-speed displacement measuring " be used for " of " 200710092425 " such as application number, utilization be exactly foregoing circuit.
Summary of the invention
The purpose of this invention is to provide one measures in real time and shows, 256 nodes of maximum support, measurement parameter can be set, data can long-distance transmissions, based on the noncontact micro-displacement measurement device and method of line array CCD, its solved existing method and apparatus be not easy to the expansion, do not support multistation, measurement data can not carry out the technical matterss such as long-distance transmissions.
Technical solution of the present invention is:
A kind of noncontact micro-displacement measurement device based on line array CCD, its special character is: comprise be used to the horizontal line laser instrument that the horizontal line laser beam is provided, multichannel measurement unit, communication module, computer control module; Described horizontal line laser instrument fixed placement, described multichannel measurement cell distribution are on device to be measured, and described measuring unit comprises line array CCD, data acquisition module, the protocol conversion module that connects successively; The protocol conversion module of described multichannel measurement unit communicates by communication module and computer control module; Described line array CCD is used for the laser that the sensitive level laser line generator sends; Described data acquisition module comprises primary signal conditioning unit, CPU (central processing unit) and the sheet external memory unit that connects successively; Used primary signal conditioning unit comprises threshold adjuster, digital regulation resistance and programmable logic device (PLD), described digital regulation resistance is used for the threshold voltage of setting threshold regulator, and described threshold adjuster is according to threshold voltage and Output Signal of Linear CCD's voltage comparative result output rect.p. string; The numerical value that described programmable logic device (PLD) is set according to computer control module, the output voltage of adjusting digital regulation resistance; Described external memory unit is used for the data that the storage test obtains; Described CPU (central processing unit) provides read-write sequence and the realization hardware medium filtering of rect.p. string determined level line laser on the center on the line array CCD, control strip external memory unit of driving pulse, the output of passing threshold regulator for line array CCD.
Above-mentioned measurement mechanism also comprises the optical filter that is arranged on before the line array CCD.
Above-mentioned digital regulation resistance is the digital regulation resistance of 256 taps.
Above-mentioned protocol conversion module comprises RS485 protocol conversion chip and microcontroller; Above-mentioned RS485 protocol conversion chip is realized the conversion between RS485 and the RS232 agreement; Above-mentioned microcontroller is converted to the RS232 agreement with the data that obtain in the CPU (central processing unit) and is transferred in the RS485 protocol conversion chip, controls simultaneously the sequential of the communication between each line array CCD to prevent the timing conflict on the bus; Above-mentioned communication module comprises transmission cable and usb protocol conversion chip, and above-mentioned usb protocol conversion chip is realized the mutual conversion between usb protocol and RS485, the RS232 agreement, and communicates by transmission cable and computer control module.
A kind of noncontact micro-displacement measurement method based on line array CCD may further comprise the steps:
1) install and measure device: whole measurement mechanism is arranged in will carries out in the environment of displacement measurement, wherein the horizontal line laser instrument is fixed, and a plurality of line array CCDs are arranged on the measured device, and is in the position that can receive the laser that the horizontal line laser instrument sends;
2) carrying out the background threshold voltage in measurement environment demarcates: the horizontal line laser instrument of not fetching boiling water first, the output voltage of digital regulation resistance is delivered to threshold adjuster as the threshold voltage of threshold adjuster, regulate the output voltage of digital regulation resistance,, the threshold voltage of threshold adjuster is no more than the analog electrical signal voltage of line array CCD output so that approaching, namely do not produce the output of rect.p. string, the output voltage of the digital regulation resistance of this moment is the background threshold voltage;
3) measure displacement: the horizontal line laser instrument of fetching boiling water, regulate the output intensity of horizontal line laser instrument, make it to surpass background threshold voltage 20% to 100%, the Ear Mucosa Treated by He Ne Laser Irradiation that the horizontal line laser instrument sends is on line array CCD, line array CCD sensitization pixel is exported the analog electrical pulse signal under the driving pulse effect, when output signal voltage surpasses the background threshold voltage of setting, threshold value comparer output rect.p. string, the number of rect.p. depends on background threshold voltage and the comparative result of Output Signal of Linear CCD's voltage in threshold adjuster;
4) data are processed in real time: the rect.p. string outputs in the CPU (central processing unit), CPU (central processing unit) is through processing, obtain the center of rect.p. string, CPU (central processing unit) as corresponding with it line array CCD relative position at this moment, and is stored with the communication of this relative position this position in sheet external memory unit; When next rect.p. string arrives, in like manner can obtain again the relative position of this line array CCD and store it, both relatively obtain the absolute displacement of this line array CCD between two moment.
Above-mentioned displacement measurement method is further comprising the steps of: after all position datas of the certain hour of sheet external memory unit storage, to computer control module, realize the aftertreatment of data by the RS485 bus transfer.
The advantage that the present invention has:
1, the Ear Mucosa Treated by He Ne Laser Irradiation that sends of horizontal line laser instrument of the present invention is on line array CCD, the sensitization pixel is output signal under the driving pulse effect, when output signal surpasses the background threshold voltage of setting, threshold value comparer output rect.p. string, obtain respectively the center of rect.p. string after the different rect.p. string manipulation constantly, thereby obtain this line array CCD in the absolute displacement of difference between the moment.The present invention has adopted the threshold value adjusting, and the number of the output rectangular pulse signal of threshold adjuster depends on the threshold voltage of threshold adjuster and the comparative result of Output Signal of Linear CCD's voltage; It is main in the CPU (central processing unit) that what pay close attention to is the number of rectangular pulse signal in the rect.p. string of threshold value regulation output; So the device threshold value is convenient to program control adjusting, precision is high, and noise is little, can preserve the data of the best operating point of digital regulation resistance output, for the output of regulating digital regulation resistance in varying environment provides Data support;
2, the present invention has adopted the RS485 bus interface technology at data transfer, the RS485 bus interface technology has the advantages such as ability, long distance for data, the transfer rate of supporting multistation be fast, in use can support 256 nodes, data transmission distance is 1.2km;
3, the present invention has adopted on-site programmable gate array FPGA as core parts at data collecting card, so that device can online programming, is easy to expanded application;
4, the present invention uses jumbo peripheral storage device in the data storage, can store the 64k*16bits data, controls the read-write of data and the sequential between the different line array CCD with microcontroller, has simplified control;
5, the present invention has easily computer control software, friendly human-computer interaction interface, the user can finish by computing machine the functions such as control, demonstration and record easily away from the on-the-spot rear of experiment, by software can setting device sampling parameter, show in real time and analog vibration;
6, because existing Contactless displacement measurement device complex structure, expensive, be not easy to debugging and expansion, the present invention adopts circuit common to realize accurate measurement to displacement effectively reducing experimental cost;
7, the invention solves do not support in the displacement measuring device multistation, data can not long-distance transmissions, be not easy to the problem such as expansion, have friendly control interface, can in real time, accurately finish the accurate measurement of displacement and deformation quantity.
8, the present invention supports 256 nodes, sampling rate is the highest 5000 times/second, be 10 seconds writing time to the maximum, there are three kinds of triggering modes available, be respectively automatic triggering, manual triggers and external trigger, the data transfer distance is greater than 1.2km, and the rear end recording control apparatus can carry out demonstration and the three-dimensional vibrating simulation of Wave data after the information that receives data collecting card output.Through the contrast experiment, the measuring accuracy of device reaches 0.1mm.
Description of drawings
Fig. 1 is principle of the invention figure;
Fig. 2 is the schematic diagram of data collecting card of the present invention;
Fig. 3 is the schematic diagram that threshold value of the present invention is regulated;
Fig. 4 is the schematic diagram of protocol conversion module of the present invention;
Fig. 5 is the process flow diagram of computer control software.
Embodiment
A kind of device for measuring displacement and deformation quantity comprises be used to the horizontal line lasing light emitter U1 that the horizontal line laser beam is provided, multichannel measurement unit, is used for communication module U5 and computer control software U6 that data receiver and steering order are sent; Wherein: every drive test amount unit comprises line array CCD U2, be used for the data acquisition module U3 of data acquisition process, be used for the protocol conversion module U4 of transmission and communication.
Data acquisition card module U3 has comprised primary signal conditioning P1, CPU (central processing unit) P2 and sheet external memory unit P3.Primary signal conditioning unit P1 mainly is comprised of digital regulation resistance, threshold adjuster and programmable logic device (PLD), wherein the output voltage of digital regulation resistance is as the threshold voltage of threshold adjuster, the output voltage of digital regulation resistance is controlled by programmable logic device (PLD), primary signal processing unit P1 processes Output Signal of Linear CCD's voltage, after Output Signal of Linear CCD's voltage surpassed the threshold voltage of threshold adjuster, threshold value is regulated chip the output of rect.p. string; CPU (central processing unit) P2 uses is EP1C6Q144 in the Cyclone Series FPGA of altera corp, and Main Function has: for line array CCD provide driving pulse, by the output behind the signal condition judge horizontal line laser on the center on the line array CCD, control SRAM read-write sequence and realize hardware medium filtering etc.; Sheet external memory unit P3 is used for storing the data that vibration-testing obtains, and the chip model of use is IS61LV6416, and memory capacity is 64K*16bits.
Protocol conversion module U4 mainly is comprised of RS485 protocol conversion C1 and microcontroller C2.What RS485 protocol conversion C1 used is the MAX485 chip of MAXIM company, and major function is the conversion that realizes between RS485 and the RS232 agreement; What microcontroller C2 used is the C8051F340 chip of Silicon Laboratories company, major function has: the data that will obtain from CPU (central processing unit) P2 are converted to the RS232 agreement and are transferred among the RS485 protocol conversion C1 and go, and control simultaneously the sequential of the communication between each line array CCD node to prevent the timing conflict on the bus.
The information output of line array CCD induction carries out signal at data acquisition module and processes to data acquisition module U3, and the numerical information that obtains after processing is stored on the large capacity SRAM;
Protocol conversion module U4 with the RS485 bus as between the different line array CCDs, the bus that communicates between line array CCD and the control recording unit, realized the long-distance transmissions of multi-point and data, with the control device of microcontroller as communication, control bus sequential;
Communication module U5 mainly is comprised of transmission cable and usb protocol conversion chip, the chip model FT232 that usb protocol conversion is used, and its major function is the mutual conversion that realizes between usb protocol and RS485, the RS232 agreement; Data communicate with computer control module after process FT232 chip is converted to usb protocol after cable carries out long-distance transmissions;
Computer control module U6 controls logging software based on the control software that VB6.0 realizes as the rear end of device, the process flow diagram of Software for Design is referring to Fig. 5, computer control software can setting device acquisition parameter, acquisition parameter has comprised the setting of setting, the setting of writing time and triggering mode of selection, the sampling rate of line array CCD node, can also realize that Wave data shows simultaneously and the function such as three-dimensional vibrating simulation.
Measuring process of the present invention:
1, installs and measures device
Whole measurement mechanism is arranged in will carries out in the environment of displacement measurement, wherein the horizontal line laser instrument is fixed on outside the measured device, and a plurality of line array CCDs are arranged on the measured device, and is in the position that can receive the laser that the horizontal line laser instrument sends;
2, carrying out the background threshold voltage in measurement environment demarcates
Whole measurement mechanism is arranged in will carries out in the environment of displacement measurement, the horizontal line laser instrument of not fetching boiling water first, the output voltage of operand word potentiometer is to threshold adjuster, as the threshold voltage of threshold adjuster; When Output Signal of Linear CCD's voltage during greater than threshold voltage, threshold adjuster output rect.p. string, adjusting threshold voltage is so that threshold voltage approaches but is no more than Output Signal of Linear CCD's voltage, namely do not produce the output of rect.p. string, voltage at this moment is exactly the background threshold voltage; Threshold voltage needs adjusting repeatedly, if threshold voltage is excessive, can lose a lot of Useful Informations; If threshold voltage is too small, can in system, introduce a lot of undesired signals;
3, measure displacement
The horizontal line laser instrument of fetching boiling water, the output intensity of regulating the horizontal line laser instrument makes it to surpass between the background threshold voltage 20% to 100%, and the horizontal line laser illumination is on line array CCD, and line array CCD produces response, output analog electrical pulse signal.Line array CCD realizes that the unit of opto-electronic conversion is pixel.The sensitization pixel is the output electric pulse signal under the driving pulse effect, and the amplitude of signal has been reacted the power of corresponding pixel sensitization, and the output order of pulse is consistent with the position of sensitization pixel; When Output Signal of Linear CCD's voltage surpasses the background threshold voltage of setting, threshold value comparer output rect.p. string, the number of rect.p. depends on background threshold voltage and the comparative result of Output Signal of Linear CCD's voltage in threshold adjuster;
Line array CCD output analog electrical pulse signal is to the threshold value comparable chip, and when signal voltage surpassed the background threshold voltage of setting, the threshold value comparable chip was exported the rect.p. string, the specific works process:
A) the analog electrical output of pulse signal of line array CCD is to threshold adjuster, and the threshold value of threshold adjuster is demarcated under basis;
B) threshold adjuster receives signal, after signal surpasses threshold voltage, and chip output rect.p. string, the number of rect.p. depends on the comparative result of threshold voltage and Output Signal of Linear CCD's voltage.
Because the intensity of horizontal line laser and width are along with change of distance, cause Output Signal of Linear CCD's voltage to change, this can have influence on the number of the rect.p. of threshold adjuster output, exerts an influence finally can for the center of CPU (central processing unit) determined level line laser on line array CCD.By theoretical analysis, calculate to obtain the number that CPU (central processing unit) is accurately judged horizontal line laser needed rect.p. in center on line array CCD that this numerical value sends to CPU (central processing unit) by computing machine.The numerical value that CPU (central processing unit) is set according to computer control module, number to rect.p. is added up, if number is than lacking of setting in advance, send instructions to digital regulation resistance by programmable logic device (PLD) so, stepping reduces the output voltage of digital regulation resistance, and is final so that the number of the rect.p. of threshold adjuster output reaches the value that sets in advance; If number is more than what set in advance, on the regulating step class.
Add an optical filter before the line array CCD, can further reduce the interference of parasitic light.
4, data are processed in real time
The rect.p. string outputs in the CPU (central processing unit) through processing, obtain the center of rect.p. string, CPU (central processing unit) as this line array CCD relative position at this moment, and is transferred to this position in the sheet external memory unit with this digital position information and stores; When next rect.p. string arrives, in like manner can obtain again the relative position of this line array CCD and store it, both relatively just can obtain the absolute displacement of this line array CCD between two moment;
5, the aftertreatment of data
After the position data of sheet external memory unit storage certain hour, to computer control module, realize the aftertreatment of data by 485 bus transfer.
Certain cylindrical platform to be measured, high about 20 meters, 10 meters of diameters.The miniature deformation amount of this test platform all can be by the upper measured record of non-contact measurement apparatus of arranging of device.For the deformation quantity of Real-Time Monitoring platform, along having arranged the measurement mechanism in the inventive method on certain four optical measurement axial location.
Arrange separately 8 line array CCD U2 on every optical measurement axis, each line array CCD U2 has a with it data acquisition module U3 of correspondence, place a horizontal line laser instrument U1 on the every monitoring line, all measuring points all adopt magnetic bases to be fixed on the test platform.Horizontal line laser instrument U1 is placed on an end of monitoring axis, and all the other each line array CCD U2 measuring points place on other positions of monitoring axis, specifically lay the location positioning that the position is paid close attention to according to actual optical measuring device itself.Each measuring point near linear distributes, and attention should slightly be staggered, and can receive visual-field beam with each line array CCD U2 and be as the criterion.
In the test, line array CCD U2 is converted into corresponding charge signal with displacement information, output among the data acquisition module U3, conversion through data acquisition module U3, obtain digital signal, under the control of protocol conversion module U4, this digital signal process communication module U5 long-distance transmissions in the computer control module U6 of rear end, is observed and record.
In this experiment, the sampling rate of setting is 5000 times/second, and acquisition time is 5 seconds, and triggering mode is automatically to trigger, and the data transfer distance is 1.2km.The line array CCD pixel spacing of selecting is 14um, is 2-4mm with horizontal line laser instrument live width in surveyed area.At four road axis of measuring in totally 32 test points, by with the Mechanical Method correlation calibration, measuring accuracy reaches 0.1mm.In the deformation quantity Real-Time Monitoring of the large-scale optic test platform of packaged type, obtained good effect.

Claims (6)

1. noncontact micro-displacement measurement method based on line array CCD may further comprise the steps:
1) installs and measures device
Whole measurement mechanism is arranged in will carries out in the environment of displacement measurement, wherein the horizontal line laser instrument is fixed, and a plurality of line array CCDs are arranged on the measured device, and is in the position that can receive the laser that the horizontal line laser instrument sends;
2) carrying out the background threshold voltage in measurement environment demarcates
The first horizontal line laser instrument of not fetching boiling water, the output voltage of digital regulation resistance is delivered to threshold adjuster as the threshold voltage of threshold adjuster, regulate the output voltage of digital regulation resistance by programmable logic device (PLD),, the threshold voltage of threshold adjuster is no more than the analog electrical signal voltage of line array CCD output so that approaching, namely do not produce the output of rect.p. string, the output voltage of the digital regulation resistance of this moment is the background threshold voltage;
3) measure displacement
The horizontal line laser instrument of fetching boiling water, regulate the output intensity of horizontal line laser instrument, make it to surpass background threshold voltage 20% to 100%, the Ear Mucosa Treated by He Ne Laser Irradiation that the horizontal line laser instrument sends is on line array CCD, line array CCD sensitization pixel is exported the analog electrical pulse signal under the driving pulse effect, when output signal voltage surpasses the background threshold voltage of setting, threshold value comparer output rect.p. string, the number of rect.p. depends on background threshold voltage and the comparative result of Output Signal of Linear CCD's voltage in threshold adjuster;
4) data are processed in real time
The rect.p. string outputs in the CPU (central processing unit), CPU (central processing unit) is through processing, obtain the center of rect.p. string, CPU (central processing unit) as corresponding with it line array CCD relative position at this moment, and is stored with the communication of this relative position this position in sheet external memory unit; When next rect.p. string arrives, in like manner can obtain again the relative position of this line array CCD and store it, both relatively obtain the absolute displacement of this line array CCD between two moment.
2. the noncontact micro-displacement measurement method based on line array CCD according to claim 1, further comprising the steps of: after all position datas of the certain hour of sheet external memory unit storage, to computer control module, realize the aftertreatment of data by the RS485 bus transfer.
3. the noncontact micro-displacement measurement method based on line array CCD according to claim 1 and 2, it is characterized in that: described measurement mechanism comprises be used to the horizontal line laser instrument that the horizontal line laser beam is provided, multichannel measurement unit, communication module, computer control module; Described horizontal line laser instrument fixed placement, described measuring unit is distributed on the device to be measured, and described measuring unit comprises line array CCD, data acquisition module, the protocol conversion module that connects successively; The protocol conversion module of described measuring unit communicates by communication module and computer control module;
Described line array CCD is used for receiving the laser that the horizontal line laser instrument sends;
Described data acquisition module comprises primary signal conditioning unit, CPU (central processing unit) and the sheet external memory unit that connects successively;
Used primary signal conditioning unit comprises threshold adjuster, digital regulation resistance and programmable logic device (PLD), described digital regulation resistance is used for the threshold voltage of setting threshold regulator, and described threshold adjuster is according to threshold voltage and Output Signal of Linear CCD's voltage comparative result output rect.p. string; The numerical value that described programmable logic device (PLD) is set according to computer control module, the output voltage of adjusting digital regulation resistance;
Described external memory unit is used for the data that the storage test obtains;
Described CPU (central processing unit) provides read-write sequence and the realization hardware medium filtering of rect.p. string determined level line laser on the center on the line array CCD, control strip external memory unit of driving pulse, the output of passing threshold regulator for line array CCD.
4. the noncontact micro-displacement measurement method based on line array CCD according to claim 3 is characterized in that: also comprise being arranged on the front optical filter of line array CCD.
5. the noncontact micro-displacement measurement method based on line array CCD according to claim 4, it is characterized in that: described digital regulation resistance is the digital regulation resistance of 256 taps.
6. the noncontact micro-displacement measurement method based on line array CCD according to claim 5, it is characterized in that: described protocol conversion module comprises RS485 protocol conversion chip and microcontroller; Described RS485 protocol conversion chip is realized the conversion between RS485 and the RS232 agreement; Described microcontroller is converted to the RS232 agreement with the data that obtain in the CPU (central processing unit) and is transferred in the RS485 protocol conversion chip, controls simultaneously the sequential of the communication between each line array CCD to prevent the timing conflict on the bus;
Described communication module comprises transmission cable and usb protocol conversion chip, and described usb protocol conversion chip is realized the mutual conversion between usb protocol and RS485, the RS232 agreement, and communicates by transmission cable and computer control module.
CN 201110267091 2011-09-09 2011-09-09 Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device) Expired - Fee Related CN102419154B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201110267091 CN102419154B (en) 2011-09-09 2011-09-09 Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201110267091 CN102419154B (en) 2011-09-09 2011-09-09 Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device)

Publications (2)

Publication Number Publication Date
CN102419154A CN102419154A (en) 2012-04-18
CN102419154B true CN102419154B (en) 2013-10-30

Family

ID=45943683

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201110267091 Expired - Fee Related CN102419154B (en) 2011-09-09 2011-09-09 Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device)

Country Status (1)

Country Link
CN (1) CN102419154B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104796689B (en) * 2015-04-07 2017-01-11 中国科学院空间科学与应用研究中心 Method for computing position deviation of pixels of CCD (charge coupled device)
CN109238143A (en) * 2018-04-04 2019-01-18 上海市政工程设计研究总院(集团)有限公司 The horizontal displacement variation measuring method of large scale range

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1743800A (en) * 2005-10-12 2006-03-08 浙江大学 Micro angular displacement measuring device based on linear array charge-coupled device
CN101915551A (en) * 2010-06-22 2010-12-15 北京航空航天大学 Non-contact on-line detection device of micro gap of wire wrapped screen

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000065539A (en) * 1998-08-19 2000-03-03 Daido Steel Co Ltd Method and device for detecting constriction of wire

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1743800A (en) * 2005-10-12 2006-03-08 浙江大学 Micro angular displacement measuring device based on linear array charge-coupled device
CN101915551A (en) * 2010-06-22 2010-12-15 北京航空航天大学 Non-contact on-line detection device of micro gap of wire wrapped screen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2000-65539A 2000.03.03

Also Published As

Publication number Publication date
CN102419154A (en) 2012-04-18

Similar Documents

Publication Publication Date Title
CN201155969Y (en) Device for utilizing two-dimension PSD position sensor for measuring rectangular guiding rail linearity
CN102288777B (en) Portable high-precision three-dimensional anemoscope
CN103630076A (en) Method and device for calibrating laser displacement sensor
CN102419154B (en) Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device)
CN106679703A (en) Data reading device of vibrating wire sensor and working method of data reading device
CN202048888U (en) High speed displacement laser detecting system
CN216144954U (en) Laser scanning device for measuring biological disturbance microtopography
CN202869779U (en) Device for measuring divergence angle and light spot pattern of laser
CN202420549U (en) Transformer multi-parameter fiber on-line monitoring system
CN102435219A (en) Aerospace camera focusing encoder debugging, measurement and control system
CN101726267B (en) Living leaf area tester and leaf area testing method
CN203216865U (en) Dirt monitoring device for insulators on power transmission line
CN102445265A (en) Method and system for measuring amplitude curve of mechanical vibration
CN101078690A (en) Laser sensor power transmission and transformation equipment filth on-line monitoring system
CN202404027U (en) Online fluorescent dissolved oxygen analyzer
CN205027314U (en) Novel experiment of fiber grating displacement sensing device
CN202266832U (en) Load test device for water supply network
CN100595526C (en) Dry calibrating method and apparatus of portable electromagnetic flowmeter
CN107304747B (en) Main wind energy testing method and device for yaw system and yaw system
CN101482390B (en) Wireless fruit expansion sensor and its control method
CN105094046B (en) A kind of piezoelectric ceramic actuator console
CN202770526U (en) Mechanical vibration amplitude curve measurement system
CN106989700B (en) A kind of plant canopy leaf area index TRAC measuring instrument based on smart phone
CN209432303U (en) A kind of water environment temperature gradient monitoring device based on dim light grid
CN202075038U (en) Automatic detection device for relative light intensity distribution of light diffraction

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131030

Termination date: 20160909

CF01 Termination of patent right due to non-payment of annual fee