CN102411372A - Combined driving micro-displacement regulation device - Google Patents
Combined driving micro-displacement regulation device Download PDFInfo
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- CN102411372A CN102411372A CN2011103406329A CN201110340632A CN102411372A CN 102411372 A CN102411372 A CN 102411372A CN 2011103406329 A CN2011103406329 A CN 2011103406329A CN 201110340632 A CN201110340632 A CN 201110340632A CN 102411372 A CN102411372 A CN 102411372A
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Abstract
The invention relates to a combined driving micro-displacement regulation device, which consists of a worm gear and worm drive module, a worm gear shaft, a rotating shaft, a key, a rolling bearing, a grating ruler, a bearing retainer, a slide block, a shell, a third oil cylinder, a hydraulic drive module, a worktable and a drive control system, wherein the worm gear shaft is fixedly connected with the worm gear and worm drive module through a screw; one end of the rotating shaft is connected with the worm gear shaft and the other end of the rotating shaft is connected with a nut screw thread pair; the rotating shaft is positioned in the rolling bearing; the bottom end of a nut is in rigid connection with the slide block; the slide block linearly reciprocates along a guide rail; the right end of the nut is provided with an equivalent piston and is connected with the third oil cylinder; the third oil cylinder is positioned in the shell and is communicated with an oil cylinder of the hydraulic drive module through a hydraulic circuit; a piston of the hydraulic drive module is connected with the worktable; the grating ruler is arranged on the worktable; and the worm gear and worm drive module consists of a motor, a motor bracket, a coupler, a worm-gear case, a first radial bearing, a first retainer ring, a second radial bearing, a second retainer ring, a worm gear and a worm. By the device, precise displacement of the worktable can be regulated, stable displacement regulation is realized, and a reduction ratio of static hydraulic drive is regulated.
Description
Technical field
The present invention relates to a kind of displacement adjustment device, be specifically related to a kind of combination and drive micrometric displacement regulation device.
Background technology
Accurate displacement is adjusted in fields such as precision optical machinery manufacturing, MEMS, optical element adjustment, Robotics and has a wide range of applications.Mechanical type displacement adjusting gear is widely used, and has advantages such as simple in structure, convenient operation and control, and common mechanical type displacement method of adjustment comprises: (1) two screw thread transmissions; (2) differential screw mandrel transmission; (3) multistage accurate gear drive; (4) worm-and-wheel gear etc.
Technology (patent such as He Yusheng formerly; Application number: 03203863.1; In February, 2003 applying date " a kind of micrometric displacement regulation device ") in; Regulating device is made up of set collar, regulating ring and displacement ring, adopts two engage thread, realizes the trickle and accurate adjusting of displacement through the pitch difference of two screw threads.
Technology (patent such as Li Anhu formerly; Application number: 200910196308.7; In September, 2009 applying date " combined type transmission variable-angle displacement adjustment device ") in, regulating device adopts the combination kind of drive of worm-and-wheel gear and screw drive mechanism to realize different angles or displacement adjustment.
Said mechanism has satisfied the request for utilization of different occasions, but single mechanical type displacement adjustment device causes shortcomings such as its dynamic property is relatively poor, transmission is not steady, noise is bigger owing to there is more structure coupling; In addition, single mechanical type displacement conditioning equipment often can not realize accurately, steadily regulate, and have the device structure of accurately steadily regulating complicated, involve great expense.What therefore, single mechanical type displacement adjustment device was difficult to satisfy the complex mechanism micrometric displacement accurately, steadily regulates requirement.
Although single fluid pressure type displacement adjustment device stable drive, simple to operate because its energy loss is big, transmission efficiency is lower, also is difficult to satisfy the accurate adjusting requirement of complex mechanism micrometric displacement.
In order to overcome above-mentioned defective, the present invention proposes a kind of combination and drives micrometric displacement regulation device, double reduction transmission through worm-and-wheel gear and leading screw and nut mechanism and hydrostatic gearing-down realization complex mechanism micrometric displacement accurately, steadily regulate requirement.
Summary of the invention
The objective of the invention is to propose a kind of combination and drive micrometric displacement regulation device, regulate through mechanical, electrical, the precision that the liquid combination drives the realization worktable, steady displacement.
The combination that the present invention proposes drives micrometric displacement regulation device; Form by worm and gear transmission module, worm-wheel shaft 6, turning axle 4, key 5, rolling bearing 21, grating chi 22, end ring 20, slide block 19, housing 16, the 3rd oil cylinder 17, hydrostatic transmission module, worktable 11 and driving control system, wherein:
Worm-wheel shaft 6 is fixedly connected with the worm and gear transmission module through screw 3; One end of turning axle 4 is a polished rod, connects worm-wheel shaft 6 through key 5, and the other end of turning axle 4 is a threaded rod, is connected with nut 18 screw thread pairs, and turning axle 4 is arranged in rolling bearing 21, and rolling bearing 21 is positioned at the stomidium of housing 16, and fixing with end ring 20; Nut 18 bottoms and slide block 19 rigid connections, housing 16 inner bottom surfaces are provided with guide rail, and slide block 19 is done straight reciprocating motion along said guide rail, and nut 18 right-hand members are equivalent piston, connect the 3rd oil cylinder 17, and through packing washer 31 sealings; The 3rd oil cylinder 17 is positioned at housing 16, is communicated with through the oil cylinder of hydraulic circuit 32 with the hydrostatic transmission module; The piston of hydrostatic transmission module connects worktable 11, realizes that the micrometric displacement of worktable 11 is regulated; Grating chi 22 is housed on the worktable 11, is used for the actual displacement amount of surveying work platform 11;
Said worm and gear transmission module is made up of motor 23, electric machine support 24, shaft coupling 25, worm gear case 26, first radial bearing 28, first back-up ring 27, second radial bearing 30, second back-up ring 29, worm gear 1 and worm screw 2; Wherein: motor 23 is fixed on the electric machine support 24; Motor 23 1 ends connect shaft coupling 25; The other end connects driving control system, and shaft coupling 25 connects worm screw 2; Worm screw 2 both sides are respectively equipped with first radial bearing 28 and second radial bearing, 30, the first radial bearings 28 and second radial bearing 30 and lay respectively in a pair of coaxial aperture of worm gear case 26, and fixing with first back-up ring 27 and second back-up ring 29 respectively; Worm screw 2 and worm gear 1 engaged transmission, worm gear 1 is fixed on the intermediate annular face of worm-wheel shaft 6 through screw 3.
Among the present invention, said motor 23 can adopt stepper motor.
Among the present invention, said hydrostatic transmission module also can be determined on a case-by-case basis for single or a plurality of hydrostatic transmission modules.Said hydrostatic transmission module is made up of oil cylinder, casing, piston, compression spring and dividing plate; Oil cylinder is arranged in the casing, and communicates with the 3rd oil cylinder 17 through hydraulic circuit; Dividing plate is fixed in the casing; Be with compression spring on the piston, compression spring one end withstands on the left end face of piston, and the other end is fixed on the dividing plate; Piston one end in contact oil cylinder, the other end connects worktable 11.
Among the present invention; Said driving control system is made up of computing machine 35, I/O control circuit 36, motor driver 37, signal Processing and control circuit 38; Driving control system can be realized open loop or closed-loop control; Computing machine 35, I/O control circuit 36, motor driver 37, motor 23 and signal Processing and control circuit 38 connect and compose open loop control successively, and computing machine 35 is through I/O control circuit 36 control motor drivers 37, and driving motor 23 rotates; Through engaged transmission, the turning axle 4 and the screw thread transmission of nut 18 and the synergy of hydrostatic transmissions of worm gear 1, realize that the micrometric displacement of worktable 11 is regulated with worm screw 2.Grating chi 22 is installed on the worktable 11, is used for the actual displacement regulated quantity of surveying work platform 11.
In order further to improve control accuracy; Computing machine 35, I/O control circuit 36, motor driver 37, motor 23, grating chi 22 and signal Processing are connected with control circuit 38 successively; Make driving control system constitute closed-loop system; Grating chi 22 measured displacements feed back to computing machine 35 through signal Processing and control circuit 38; Compare with theoretical amount and to draw error amount, closed loop realizes the real-time correction to the anglec of rotation of motor 23, thereby the precision micro-displacement of realizing worktable 11 is regulated.
Technique effect of the present invention:
1. the double reduction transmission of worm-and-wheel gear and leading screw and nut mechanism, the displacement minute adjustment of realization worktable.
Through the synergy of worm gear 1, realize the displacement minute adjustment of worktable 11 among the present invention with the screw thread transmission of engaged transmission, turning axle 4 and the nut 18 of worm screw 2.Wherein: the engaged transmission of worm gear 1 and worm screw 2 both can realize the gearing-down than big speed ratio, self-locking effect that also can implement device; Through the draw of slide block 19, the screw thread transmission of turning axle 4 and nut 18 can realize the straight reciprocating motion of nut 19.
2. hydrostatic gearing-down realizes that the displacement of worktable is steady, minute adjustment.
3. handle in the crack that disappears of piston axially-movable
On the first piston 8 and second piston 12, be with first compression spring 9 and second compression spring 14 respectively; Can realize that through implementing certain pretightning force first piston 8, second piston 9 contact with the hydraulic oil of first oil cylinder 33, second oil cylinder 34 all the time all the time, guarantee the degree of regulation of worktable 11.
4. driving control system of the present invention can be carried out open loop or closed-loop control.
Grating chi 22 is installed on the worktable 11, is used for the actual displacement amount of surveying work platform 11.Grating chi 11 measured actual displacement amounts both can directly be exported; Implementation open loop control; Also can pass through signal Processing and control circuit 38 feeds back to computing machine 35; Compare with theoretical amount and to draw error amount, closed loop realizes the real-time correction to the anglec of rotation of motor 23, thereby realizes the precision micro-displacement adjustment of worktable 11.
5. this device can be realized the accurate displacement adjustment to single or a plurality of worktable
Among the present invention, the hydrostatic transmission module can be for single, two or more, and the displacement of worktable adjustment can be used single or a plurality of hydrostatic transmission modules, so this device can be realized the accurate displacement adjustment to single or a plurality of worktable.
Technological merit of the present invention:
Technological with respect to formerly, through using the double reduction transmission of worm-and-wheel gear and leading screw and nut mechanism, reduction gear ratio is big among the present invention, can realize that the accurate displacement of worktable is regulated; Hydrostatic transmissions relies on the continuous flow of fluid and carries out transmission among the present invention, and fluid has vibration absorption ability, and transmission very steadily can realize the steady adjusting of displacement; Through the diameter ratio of change the 3rd oil cylinder, can realize that the reduction gear ratio of hydrostatic transmissions is regulated simultaneously with first oil cylinder; The present invention guarantees that through compression spring piston contacts with oil cylinder all the time, has improved the degree of regulation of device; The self-locking that worm-and-wheel gear can implement device among the present invention.The present invention can realize the accurate displacement adjustment to single or a plurality of worktable, to satisfy the different adjustment control requirement of complex mechanism; In addition, through changing the cylinder cavity diameter of different hydraulic modules, the present invention also can realize the multidimensional angular adjustment to worktable.
Description of drawings
Fig. 1 is the general structure cut-open view that the embodiment of the invention 1 combination drives micrometric displacement regulation device.
Fig. 2 is the partial view of worm and gear transmission module among the present invention.
Fig. 3 is a driving control system open loop control flow chart.
Fig. 4 is a driving control system closed-loop control process flow diagram.
Label among the figure: 1 is worm gear, and 2 is worm screw, and 3 is screw, and 4 is turning axle, and 5 is key, and 6 is worm-wheel shaft, and 7 is first casing; 8 is first piston, and 9 is first compression spring, and 10 is first dividing plate, and 11 is worktable, and 12 is second piston, and 13 is second partition, and 14 is second compression spring; 15 is second casing, and 16 is housing, and 17 is the 3rd oil cylinder, and 18 is nut, and 19 is slide block, and 20 is end ring; 21 is rolling bearing, and 22 is the grating chi, and 23 is motor, and 24 is electric machine support, and 25 is shaft coupling, and 26 is turbine box; 27 is first back-up ring, and 28 is first radial bearing, and 29 is second back-up ring, and 30 is second radial bearing, and 31 is packing washer, and 32 is hydraulic circuit; 33 is first oil cylinder, and 34 is second oil cylinder, and 35 is computing machine, and 36 is the I/O control circuit, and 37 is motor driver, and 38 is signal Processing and control circuit.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is made up and to drive micrometric displacement regulation device and further specify, but should not limit protection scope of the present invention with this.
Consult Fig. 1-shown in Figure 2 earlier.Fig. 1 makes up the general structure cut-open view that drives micrometric displacement regulation device for the present invention.Fig. 2 is the partial view of worm and gear transmission module among the present invention.Visible by Fig. 1-Fig. 2, the present invention makes up and drives micrometric displacement regulation device and comprise worm and gear transmission module, worm-wheel shaft 6, turning axle 4, screw 3, key 5, rolling bearing 21, grating chi 22, end ring 20, nut 18, slide block 19, housing 16, the 3rd oil cylinder 17, two hydrostatic transmission modules and worktable 11.Wherein:
Worm-wheel shaft 6 is fixedly connected with the worm and gear transmission module through screw 3; One end of turning axle 4 is a polished rod, connects worm-wheel shaft 6 through key 5, and the other end of turning axle 4 is a threaded rod, is connected with nut 18 screw thread pairs, and turning axle 4 is arranged in rolling bearing 21, and rolling bearing 21 is positioned at housing 16 stomidiums, and with end ring 20 axial restraints; Nut 18 bottoms and slide block 19 rigid connections are done straight reciprocating motion along the guide rail of housing 16 bottom surfaces together, and nut 18 right-hand members are equivalent piston, connect the 3rd oil cylinder 17, and use packing washer 31 sealings; The 3rd oil cylinder 17 is positioned at housing 16, is communicated with the oil cylinder of two hydrostatic transmission modules respectively through hydraulic circuit 32; The piston of two hydrostatic transmission modules connects worktable 11 respectively, realizes that the accurate displacement of worktable 11 is regulated; Grating chi 22 is housed on the worktable 11, is used for the practical adjustments displacement of surveying work platform 11;
Described worm and gear transmission module is made up of motor 23, electric machine support 24, shaft coupling 25, worm gear case 26, first radial bearing 28, first back-up ring 27, second radial bearing 30, second back-up ring 29, worm gear 1 and worm screw 2; Wherein: motor 23 is fixing by electric machine support 24; Motor 23 connects shaft coupling 25, and shaft coupling 25 connects worm screw 2; Worm screw 2 both sides lay respectively in first radial bearing 28 and second radial bearing 30, lay respectively in a pair of coaxial aperture of worm gear case 26 in first radial bearing 28 and second radial bearing 30, and fixing with first back-up ring 27 and second back-up ring 29 respectively; Worm screw 2 and worm gear 1 engaged transmission, worm gear 1 is fixed on the intermediate annular face of worm-wheel shaft 6 through screw 3;
In the present embodiment, described two hydrostatic transmission modules are respectively the first hydrostatic transmission module and the second hydrostatic transmission module, wherein:
The described first hydrostatic transmission module is made up of first oil cylinder 33, first casing 7, first piston 8, first compression spring 9 and first dividing plate 10; Wherein: first oil cylinder 33 is arranged in first casing 7, and communicates with the 3rd oil cylinder 17 through hydraulic circuit 32; First dividing plate 10 is fixed in first casing 7; Be with first compression spring, 9, the first compression springs, 9 one ends on the first piston 8 and withstand on the left end face of first piston 8, the other end is fixed on first dividing plate 10; First piston 8 one end in contact first oil cylinder 33, the other end connects worktable 11.
The described second hydrostatic transmission module is made up of second oil cylinder 34, second casing 15, second piston 12, second compression spring 14 and second partition 13; Wherein: second oil cylinder 34 is arranged in second casing 15, and communicates with the 3rd oil cylinder 17 through hydraulic circuit 32; Second partition 13 is fixed in second casing 15; Be with second compression spring, 14, the second compression springs, 14 1 ends on second piston 12 and withstand on the left end face of second piston 12, the other end is fixed on the second partition 13; Second piston, 12 1 end in contact, second oil cylinder 34, the other end connects worktable 11.
Said motor 23 adopts stepper motor.
According to Fig. 1-shown in Figure 2, this embodiment worktable displacement adjustment process is:
When motor 23 is just changeing; Receive engaged transmission, the turning axle 4 and the screw thread transmission of nut 18 and the draw of slide block 19 of worm gear 1 and worm screw 2; Realization nut 18 is done rectilinear motion to the right; The volume of oil cylinder reduces, pressure increases, and first compression spring 9 and second spring 14 promote first piston 8 respectively, second piston 12 is done rectilinear motion to the right, realizes that the micrometric displacement to the right of worktable 11 is regulated; When motor 23 counter-rotatings; Through worm gear 1 and the engaged transmission of worm screw 2, the draw of slide block 19 and the screw thread transmission of turning axle 4 and nut 18; Realization nut 19 is done rectilinear motion left; The volume of oil cylinder increases, pressure reduces, and first compression spring 9 and second compression spring 14 promote first piston 8 respectively, second piston 12 is done rectilinear motion left, realizes that the micrometric displacement left of worktable 11 is regulated.
Fig. 3 is the open-loop control system of motion.Fig. 4 is the closed-loop control system of motion.
As shown in Figure 3; Computing machine 35 is through I/O control circuit 36 control motor drivers 37; Driving motor 23 rotates, and through the screw thread transmission and the hydraulicdriven synergy of worm and gear engaged transmission, turning axle and nut, realizes the displacement adjustment of worktable 11.Grating chi 22 is installed on the worktable 11, is used for the actual displacement amount of surveying work platform 11;
In order further to improve control accuracy; Control system also can constitute closed-loop system: grating chi 22 measured displacements feed back to computing machine 35 through signal Processing and control circuit 38; Compare with theoretical amount and to draw error amount; Closed loop realizes the real-time correction to the anglec of rotation of motor 23, thereby the displacement of accurate Control work platform 11 is regulated.
The adjustment amount of realizing among the present invention can calculate as follows:
S is the axial displacement resolution (μ m) of screw rod in the formula;
P is the helical pitch (mm) of screw rod;
I is a worm gear transmission ratio;
δ is motor elongation (degree);
N is a motor-driven segmentation number;
D
1Be nut right-hand member equivalent piston diameter;
D
2It is first oil cylinder (second oil cylinder) intracavity diameter;
Getting worm gear transmission ratio is 50, and the screw rod helical pitch of turning axle is 2mm, and the motor step elongation is 1.8 °, and motor-driven segmentation number is 4, and nut right-hand member equivalent piston diameter is 50mm, and the cylinder cavity diameter is 60mm, and it is following then can to obtain result of calculation:
Consider actual manufacturing, assembling error factors, this device can satisfy the adjusting resolution requirement of sub-micrometer scale.
Claims (4)
1. a combination drives micrometric displacement regulation device; Form by worm and gear transmission module, worm-wheel shaft (6), turning axle (4), key (5), rolling bearing (21), grating chi (22), end ring (20), slide block (19), housing (16), the 3rd oil cylinder (17), hydrostatic transmission module, worktable (11) and driving control system, it is characterized in that:
Worm-wheel shaft (6) is fixedly connected with the worm and gear transmission module through screw (3); One end of turning axle (4) is a polished rod, connects worm-wheel shaft (6) through key (5), and the other end of turning axle (4) is a threaded rod; Be connected with nut (18) screw thread pair; Turning axle (4) is arranged in rolling bearing (21), and rolling bearing (21) is positioned at the stomidium of housing (16), and fixing with end ring (20); Nut (18) bottom and slide block (19) rigid connection, housing (16) inner bottom surface is provided with guide rail, and slide block (19) is done straight reciprocating motion along said guide rail, and nut (18) right-hand member is an equivalent piston, connects the 3rd oil cylinder (17), and through packing washer (31) sealing; The 3rd oil cylinder (17) is positioned at housing (16), is communicated with the oil cylinder of hydrostatic transmission module through hydraulic circuit (32); The piston of hydrostatic transmission module connects worktable (11), realizes that the micrometric displacement of worktable (11) is regulated; Grating chi (22) is housed on the worktable (11), is used for the actual displacement amount of surveying work platform (11);
Said worm and gear transmission module is made up of motor (23), electric machine support (24), shaft coupling (25), worm gear case (26), first radial bearing (28), first back-up ring (27), second radial bearing (30), second back-up ring (29), worm gear (1) and worm screw (2); Wherein: motor (23) is fixed on the electric machine support (24); Motor (23) one ends connect shaft coupling (25); The other end connects driving control system, and shaft coupling (25) connects worm screw (2); Worm screw (2) both sides are respectively equipped with first radial bearing (28) and second radial bearing (30); First radial bearing (28) and second radial bearing (30) lay respectively in a pair of coaxial aperture of worm gear case (26), and use first back-up ring (27) and second back-up ring (29) to fix respectively; Worm screw (2) and worm gear (1) engaged transmission, worm gear (1) is fixed on the intermediate annular face of worm-wheel shaft (6) through screw (3).
2. combination according to claim 1 drives micrometric displacement regulation device, it is characterized in that said motor (23) adopts stepper motor.
3. combination according to claim 1 drives micrometric displacement regulation device, it is characterized in that said hydrostatic transmission module is single or a plurality of hydrostatic transmission modules, and said hydrostatic transmission module is made up of oil cylinder, casing, piston, compression spring and dividing plate; Oil cylinder is arranged in the casing, and communicates with the 3rd oil cylinder (17) through hydraulic circuit; Dividing plate is fixed in the casing; Be with compression spring on the piston, compression spring one end withstands on the left end face of piston, and the other end is fixed on the dividing plate; Piston one end in contact oil cylinder, the other end connects worktable (11).
4. combination according to claim 1 drives micrometric displacement regulation device; It is characterized in that said driving control system is made up of computing machine (35), I/O control circuit (36), motor driver (37), signal Processing and control circuit (38), computing machine (35), I/O control circuit (36), motor driver (37), motor (23) and signal Processing and control circuit (38) connect and compose open loop control successively; Perhaps: computing machine (35), I/O control circuit (36), motor driver (37), motor (23), grating chi (22) and signal Processing are connected with control circuit (38) successively, make driving control system constitute closed-loop system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110340632 CN102411372B (en) | 2011-11-02 | 2011-11-02 | Combined driving micro-displacement regulation device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110340632 CN102411372B (en) | 2011-11-02 | 2011-11-02 | Combined driving micro-displacement regulation device |
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| CN102411372A true CN102411372A (en) | 2012-04-11 |
| CN102411372B CN102411372B (en) | 2013-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201110340632 Expired - Fee Related CN102411372B (en) | 2011-11-02 | 2011-11-02 | Combined driving micro-displacement regulation device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102955251A (en) * | 2012-11-07 | 2013-03-06 | 同济大学 | Coarse and fine scanning rotating prism device |
| CN108413924A (en) * | 2018-05-25 | 2018-08-17 | 郑州机械研究所有限公司 | A kind of high-accuracy circular dividing device of two-dimensional pointing mechanism |
| CN109516394A (en) * | 2018-09-30 | 2019-03-26 | 武汉船用机械有限责任公司 | The installation method of winch and winch |
| CN110328728A (en) * | 2019-07-24 | 2019-10-15 | 镇江中福马机械有限公司 | A kind of control mechanism for the feeding of defibrator mill |
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| EP0045463A1 (en) * | 1980-07-24 | 1982-02-10 | Messerschmitt-Bölkow-Blohm Gesellschaft mit beschränkter Haftung | Driving unit for a heliostat |
| CN2596326Y (en) * | 2003-02-14 | 2003-12-31 | 中国科学院物理研究所 | Micro displacement regulator |
| CN101673118A (en) * | 2009-09-24 | 2010-03-17 | 同济大学 | Combined type transmission variable-angle micrometric displacement regulation device |
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2011
- 2011-11-02 CN CN 201110340632 patent/CN102411372B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0045463A1 (en) * | 1980-07-24 | 1982-02-10 | Messerschmitt-Bölkow-Blohm Gesellschaft mit beschränkter Haftung | Driving unit for a heliostat |
| CN2596326Y (en) * | 2003-02-14 | 2003-12-31 | 中国科学院物理研究所 | Micro displacement regulator |
| CN101673118A (en) * | 2009-09-24 | 2010-03-17 | 同济大学 | Combined type transmission variable-angle micrometric displacement regulation device |
Non-Patent Citations (1)
| Title |
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| 周俊峰等: "《查动微位移机构在激光板厚测量中的应用》", 《机床与液压》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102955251A (en) * | 2012-11-07 | 2013-03-06 | 同济大学 | Coarse and fine scanning rotating prism device |
| CN102955251B (en) * | 2012-11-07 | 2014-10-22 | 同济大学 | Coarse and fine scanning rotating prism device |
| CN108413924A (en) * | 2018-05-25 | 2018-08-17 | 郑州机械研究所有限公司 | A kind of high-accuracy circular dividing device of two-dimensional pointing mechanism |
| CN109516394A (en) * | 2018-09-30 | 2019-03-26 | 武汉船用机械有限责任公司 | The installation method of winch and winch |
| CN110328728A (en) * | 2019-07-24 | 2019-10-15 | 镇江中福马机械有限公司 | A kind of control mechanism for the feeding of defibrator mill |
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| CN102411372B (en) | 2013-02-13 |
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