CN102410809B - Complete common-path type microchip laser feedback interferometer - Google Patents
Complete common-path type microchip laser feedback interferometer Download PDFInfo
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Abstract
The invention relates to a complete common-path type microchip laser feedback interferometer which comprises a microchip laser, wherein a first spectroscope is arranged on an axis at an emitting end of the microchip laser; a first holophote is arranged on a reflected light path of the first spectroscope; a second holophote is arranged on the reflected light path of the first holophote; a first acousto-optic frequency shifter, a second acousto-optic frequency shifter and a second spectroscope are arranged on the reflected light path of the second holophote in turn; the second spectroscope is arranged on a transmission light path of the first spectroscope; a photoelectric detector is arranged on the transmission light path of the second spectroscope; a circular light path is formed by the first spectroscope, the first holophote, the second holophote, the first acousto-optic frequency shifter, the second acousto-optic frequency shifter and the second spectroscope; the laser emitted by the microchip laser once returns to a resonant cavity of the microchip laser through the circular light path, thereby modulating an output power of the laser and forming the reference feedback light; and the laser once passing by a circular path is reflected by a to-be-detected object and returns to the resonant cavity of the microchip laser through the circular light path again, thereby modulating the output power of the laser and forming the measuring feedback light. The complete common-path type microchip laser feedback interferometer can be widely applied to the unmatched target non-contact type accurate displacement measurement.
Description
Technical field
The present invention relates to a kind of micro-slice laser feedback interferometer, particularly about a kind of complete common path type feedback interferometer of laser in microchip for the contactless accurate displacement measurement of non-cooperation target.
Background technology
Micro-slice laser has high light feedback susceptibility, and shift frequency light feedback system and the phase place heterodyne measurement technology moving displacement that can realize high displacement resolution that combines is measured.Common micro-slice laser feedback interferometer is because whole feedback exocoel all belongs to dead journey, the air refraction fluctuation, the components and parts distortion that temperature variation causes and the factors such as instability of laser instrument self all can cause the exocoel phase place of feedback light to be drifted about, and have a strong impact on the precision of displacement measurement.In order to eliminate the negative effect that the dead journey of common micro-slice laser feedback interferometer is brought, improve the anti-environmental interference ability of feedback interferometer, there is the people to propose on the basis of original measurement feedback light in the prior art, in shift frequency light feedback system, increase by one the tunnel with reference to feedback light, measure feedback light and be accurate road altogether relation with reference to feedback light, survey by heterodyne and to measure the phase changing capacity of measuring feedback light mutually respectively and with reference to the phase changing capacity of feedback light, the difference of the two is the displacement variable of determinand.
But when utilizing quasi-common path type feedback interferometer of laser in microchip that determinand is carried out displacement measurement, find that the reference mirror that arranges in the quasi-common path type feedback interferometer of laser in microchip is an extremely unsettled optical element, it largely influences the job stability of whole feedback interferometer, and when measuring, owing to measure feedback light and very little with reference to the angle between the feedback light, reference mirror is when selecting to measurement feedback light with reference to feedback light, show very strong angle sensitivity, cause easily when the deflection angle of reference mirror or angle of pitch generation subtle change that namely reference optical signal and measuring light signal crosstalk.
Summary of the invention
At the problems referred to above, the purpose of this invention is to provide and a kind ofly can effectively eliminate the unstable and signal cross-talk phenomenon of reference mirror and can further improve the job stability of micro-slice laser feedback interferometer and the complete common path type feedback interferometer of laser in microchip of anti-environmental interference ability.
For achieving the above object, the present invention takes following technical scheme: a kind of complete common path type feedback interferometer of laser in microchip, it is characterized in that: it comprises a micro-slice laser, the transmitting terminal axis of described micro-slice laser is provided with first spectroscope, described first spectroscopical reflected light path is provided with first completely reflecting mirror, the described first completely reflecting mirror reflected light path is provided with second completely reflecting mirror, be disposed with first acousto-optic frequency shifters on the described second completely reflecting mirror reflected light path, second sound optical frequency shifter and second spectroscope, described second spectroscope is on described first spectroscopical transmitted light path simultaneously, and the described second spectroscope transmitted light path is provided with a photodetector; The laser of described micro-slice laser emission is modulated formation with reference to feedback light to output power of laser in the annular light path that described first spectroscope, first completely reflecting mirror, second completely reflecting mirror, first acousto-optic frequency shifters, second sound optical frequency shifter and second spectroscope constitute is once got back to the resonator cavity of described micro-slice laser; Process loop checking installation laser once reflects in the resonator cavity of getting back to described micro-slice laser again through annular light path through determinand modulates formation measurement feedback light to output power of laser.
Be provided with one between described first spectroscope and first completely reflecting mirror and assemble lens.
Be provided with one between described first spectroscope and the determinand and assemble lens.
It also comprises a signal controlling and disposal system, described signal controlling and disposal system comprise that the source takes place first sinusoidal signal, source, reference electrical signal generation circuit, first phase-sensitive detector (PSD) and second phase-sensitive detector (PSD) take place second sinusoidal signal, wherein, the output terminal in described first sinusoidal signal generation source connects the input end of described first acousto-optic frequency shifters, and output frequency is Ω
1The driving signal; The output terminal in described second sinusoidal signal generation source connects the input end of described second sound optical frequency shifter, and output frequency is Ω
2The driving signal; The source takes place with described first sinusoidal signal respectively and is connected with the frequency monitoring end that the source takes place second sinusoidal signal in two input ends of described reference electrical signal generation circuit, and output frequency is the two-way reference electrical signal of Ω and 2 Ω, wherein Ω=Ω
1-Ω
2One input end of described first phase-sensitive detector (PSD) connects an output terminal of described photodetector, the frequency that another input end connects described reference electrical signal generation circuit is the output terminal of the reference electrical signal of Ω, exports described exocoel phase changing capacity with reference to feedback light; One input end of described second phase-sensitive detector (PSD) connects another output terminal of described photodetector, the frequency that another input end connects described reference electrical signal generation circuit is the output terminal of the measurement electric signal of 2 Ω, export the exocoel phase changing capacity of described measurement feedback light, the output terminal of described first phase-sensitive detector (PSD) and second phase-sensitive detector (PSD) is connected respectively on the computing machine.
When+1 order diffraction took place described first acousto-optic frequency shifters ,-1 order diffraction took place in described second sound optical frequency shifter; Or-1 order diffraction is when taking place in described first acousto-optic frequency shifters, and+1 order diffraction takes place described second sound optical frequency shifter, and described shift frequency amount with reference to feedback light is the poor of two acousto-optic frequency shifters driving frequencies.
The laser that described micro-slice laser sends is through the shift frequency amount of described first acousto-optic frequency shifters and second sound optical frequency shifter and the relaxation oscillation frequency coupling of described micro-slice laser.
The present invention is owing to take above technical scheme, it has the following advantages: 1, light path of the present invention is propagated and is adopted annular light path, in the annular light path reference mirror is not set, reference light once passes through annular light path, twice annular light path of process of measuring light, returning the resonator cavity of micro-slice laser respectively modulates laser output frequency, and then the reference feedback light of output different frequency and measurement feedback light, therefore thoroughly eliminates signal crosstalk and reference mirror problem of unstable on the optical principle have reduced measuring error effectively.2, measurement feedback light signal of the present invention has comprised the displacement of determinand and the drift of environment, phase place with reference to the feedback light signal changes the drift that only reflects environment, since measure feedback only twice through first acousto-optic frequency shifters and second sound optical frequency shifter shift frequency, and with reference to feedback only once through first acousto-optic frequency shifters and second sound optical frequency shifter shift frequency, the phase place of namely measuring feedback light changes the displacement variable that the difference that changes with reference to the feedback light phase with twice can accurately reflect determinand, therefore more effectively suppresses environmental interference.3, in the annular light path of the present invention a branch of light is only arranged, measure feedback light and spatially be road fully altogether with reference to feedback light, namely measure feedback light and overlap fully with reference to feedback light, by detect measuring feedback light simultaneously and with reference to the exocoel phase changing capacity of feedback light, the displacement variable that can accurately measure determinand has not only been eliminated dead journey error, and has further improved precision and the stability of feedback interferometer.4, the present invention utilizes heterodyne to survey to obtain measurement result mutually only relevant with the phase place of feedback signal, and irrelevant with the amplitude of signal, the drift of micro-slice laser self power does not influence measurement result, has therefore further improved the antijamming capability of instrument.5, the present invention is owing to adopt annular light path, successively through first acousto-optic frequency shifters and second sound optical frequency shifter without the light of the diffraction annular light path that can be reflected out, light barrier can be set specially, therefore make structure simpler.6, measuring light of the present invention is directly reflected by determinand, because the reflectivity of determinand is generally all smaller, ignoring under two-fold and the situation of multiple feedback, the present invention only measures the signal of the primary event of determinand, has effectively guaranteed the accuracy of measurement result.The present invention has high sensitivity and high displacement resolving power, therefore can be widely used in the contactless accurate displacement measurement of non-cooperation target.
Description of drawings
Fig. 1 is displacement measuring device principle schematic of the present invention
Embodiment
Below in conjunction with drawings and Examples the present invention is described in detail.
As shown in Figure 1, the present invention includes a micro-slice laser 1, the laser of micro-slice laser 1 emission is propagated along annular light path (loop), the annular light path in optical element specifically arrange as follows: the transmitting terminal axis of micro-slice laser 1 is provided with first spectroscope 2, be disposed with one on the reflected light path of first spectroscope 2 and assemble lens 3 and first completely reflecting mirror 4, first completely reflecting mirror, 4 reflected light paths are provided with second completely reflecting mirror 5, be disposed with first acousto-optic frequency shifters 6 on second completely reflecting mirror, 5 reflected light paths, second sound optical frequency shifter 7 and second spectroscope 8, second spectroscope, 8 transmitted light paths are provided with a photodetector 9, and wherein second spectroscope 8 is simultaneously on the transmitted light path of first spectroscope 2.
In above-described embodiment, the present invention also comprises a signal controlling and disposal system 10, and signal controlling and disposal system 10 comprise that source 101 takes place first sinusoidal signal, source 102, reference electrical signal generation circuit 103, first phase-sensitive detector (PSD) 104 and second phase-sensitive detector (PSD) 105 take place second sinusoidal signal.Wherein, the output terminal in first sinusoidal signal generation source 101 connects the input end of first acousto-optic frequency shifters 6, and output frequency is Ω
1The driving signal; The input end of the output terminal connection second sound optical frequency shifter 7 in source 102 takes place in second sinusoidal signal, and output frequency is Ω
2The driving signal; Source 101 takes place with first sinusoidal signal respectively and is connected with the frequency monitoring end that source 102 takes place second sinusoidal signal in two input ends of reference electrical signal generation circuit 103, and output frequency is the two-way reference electrical signal of Ω and 2 Ω, wherein Ω=Ω
1-Ω
2One input end of first phase-sensitive detector (PSD) 104 connects an output terminal of photodetector 9, and it is the output terminal of the reference electrical signal of Ω that another input end connects frequency, and output is with reference to the exocoel phase changing capacity of feedback light; One input end of second phase-sensitive detector (PSD) 105 connects another output terminal of photodetector 9, it is the output terminal of the reference electrical signal of 2 Ω that another input end connects frequency, the exocoel phase changing capacity of feedback light is measured in output, and the output terminal of first phase-sensitive detector (PSD) 104 and second phase-sensitive detector (PSD) 105 is connected respectively to a computing machine 106 and finishes displacement result calculating and demonstration.
In the various embodiments described above, because the luminance factor of determinand 11 is less, convergent lens 3 mainly is for the light of dispersing being assembled, therefore can also being arranged between first spectroscope 2 and the determinand 11.
In the various embodiments described above, when laser mates through the relaxation oscillation frequency of two acousto-optic frequency shifters 6,7 shift frequency amount and micro-slice laser 1 after laser is through two acousto-optic frequency shifters 6,7 shift frequencies and when feeding back to frequency that resonator cavity causes laser frequency modulation near the relaxation oscillation of micro-slice laser 1, the sensitivity that the dynamic perfromance of micro-slice laser 1 is very high to the feedback light signal.For example the relaxation oscillation frequency of micro-slice laser 1 is about 200KHz, the driving frequency of first acousto-optic frequency shifters 6 is 70MHZ, the frequency of second sound optical frequency shifter 7 is 70.4MHZ, both differences are 40KHZ, the shift frequency amount of reference light behind first acousto-optic frequency shifters 6 and second sound optical frequency shifter 7 is 40KHZ, measuring light is owing to be 80KHZ through first acousto-optic frequency shifters 6 and second sound optical frequency shifter 7 back shift frequency amounts twice, the shift frequency amount of reference light and measuring light is near the relaxation oscillation frequency 200KHZ of the resonator cavity of micro-slice laser 1, can modulate well laser output power, can amplify formation with reference to feedback light and measure feedback light reference light and measuring light.
In the various embodiments described above, because propagating, light path of the present invention adopts annular light path, when light is propagated in annular light path, reflection and transmission can take place at first spectroscope, 2 places, reflected light can be propagated along different directions with transmitted light, when being carried out displacement measurement, determinand can have six kinds of light path travel paths, light all can turn back in the resonator cavity of micro-slice laser 1 laser output frequency modulated through these six kinds of light path travel paths and constitute feedback light, and six kinds of light path travel paths are as shown in the table:
Six kinds of travel paths of table 1 light
Because the present invention is when carrying out displacement measurement to determinand 11, only need obtain causing that owing to the variation of determinand displacement the signal of the variable quantity of exocoel light path gets final product, the path of propagating with light has nothing to do, so propagation path of light in the table 11,2,3 and 4 merged in a kind of situation is about to feed back to micro-slice laser 1 after the determinand reflection the resonator cavity light after the laser output power modulation is defined as measures feedback light, measure feedback only earlier, twice of back be by annular light path, the shift frequency amount is 2 Ω accordingly.Equally, it will be with reference to feedback light without the light that determinand reflects after the resonator cavity of directly getting back to micro-slice laser 1 is modulated laser output power soon that propagation path of light 5 and 6 in the last table is merged into a kind of situation, only pass through once annular light path with reference to feedback light, corresponding shift frequency amount is Ω, wherein, loop refers to laser clockwise through the annular light path travel path of first spectroscope, 2 back transmitted lights in the last table, and loop refers to that counterclockwise laser is through the annular light path travel path of first spectroscope, 2 back reflection light.
With the laser that sends from micro-slice laser 1 along the path 6 and the optical path direction in path 4 to propagate be that embodiment specifies the method that the present invention measures determinand 11 displacement variable, its detailed process is as follows:
1) micro-slice laser 1 sends the single longitudinal mode laser that frequency is ω, and laser through first spectroscope 2 transmission and reflection takes place, and reflected light is propagated in annular light path along the direction in path 6.
2) be divided into two-way through the light of convergent lens 3, first completely reflecting mirror 4, second completely reflecting mirror 5 through first acousto-optic frequency shifters 6 successively, the one tunnel is the light without diffraction, and frequency is ω, and another road is ω-Ω for-1 order diffraction frequency
1, frequency is ω-Ω
1Light behind second sound optical frequency shifter, be divided into two-way again, the one tunnel for being ω-Ω without the light frequency of diffraction
1, another road is ω-Ω for the light frequency of+1 order diffraction, wherein Ω=Ω
1-Ω
2, be that the light of ω-Ω is as reference light with frequency.
3) frequency is that first spectroscope 2 is got back in ω-Ω reference light emission, propagate according to path 1 through determinand 11 reflections that are arranged on first spectroscope, 2 transmitted light paths, according to above-mentioned steps 2) successively by first acousto-optic frequency shifters and second sound optical frequency shifter again behind the shift frequency, be that the light of ω-2 Ω is as measuring light with frequency behind the shift frequency again.
4) frequency is that ω-Ω reference light is got back in the resonator cavity of micro-slice laser 1 through path 6, forms with reference to feedback light, and frequency is that the photo measure light of ω-2 Ω turns back in the resonator cavity of micro-slice laser 1 through path 4, forms to measure feedback light.
5) photodetector 9 will and be measured feedback light with reference to feedback light and be converted to electric signal, to be that the reference electrical signal of Ω sends to first phase-sensitive detector (PSD) 104 simultaneously with reference to feedback photosignal and frequency, calculate phase changing capacity with reference to feedback light through the phase place heterodyne measurement
Be that the reference electrical signal of 2 Ω sends to second phase-sensitive detector (PSD) 105 with measuring feedback photosignal and frequency, calculate the phase changing capacity of measurement feedback light through the phase place heterodyne measurement
6) owing to pass through once annular light path with reference to feedback light, measure feedback light by twice annular light path, namely measure the feedback light signal
With twice with reference to the feedback light signal
Difference be the phase changing capacity of final exocoel
Computing machine 106 is according to the phase changing capacity of reference feedback light
With the phase changing capacity of measuring feedback light
Calculate phase changing capacity
Obtain the displacement variable Δ L of determinand 11 according to the corresponding relation of exocoel phase changing capacity and exocoel change in optical path length:
Wherein, c is the light velocity in the vacuum, and n is air refraction.
In the various embodiments described above, micro-slice laser 1 of the present invention can adopt Nd:YAG (neodymium-doped yttrium-aluminum garnet) micro-slice laser, wavelength is 1064nm, and photodetector 9 can adopt photoelectric cell, and first phase-sensitive detector (PSD) 104 and second phase-sensitive detector (PSD) 105 can adopt lock-in amplifier.
In the various embodiments described above, before determinand 11 is carried out displacement measurement, can adjust angle and the position of all optical elements, the laser that micro-slice laser 1 is sent can be propagated according to annular light path, can utilize this moment the oscillograph (not shown) on first phase-sensitive detector (PSD) 104 of being connected of a peripheral hardware to come observation signal and annular light path is adjusted, if observed amplitude maximum with reference to the feedback light signal on oscillograph is propagated in strict accordance with annular light path when then thinking the propagation of light path.
In the various embodiments described above, before determinand 11 is carried out displacement measurement, need to adjust the axis of first acousto-optic frequency shifters 6 and second sound optical frequency shifter 7 and the position relation of optic path direction, making the another one acousto-optic frequency shifters that-1 order diffraction take place when making one of them acousto-optic frequency shifters that+1 order diffraction take place, is the poor of two acousto-optic frequency shifters driving frequencies with reference to feedback light through the shift frequency amount of annular light path once.
The various embodiments described above only are used for explanation the present invention; wherein each optical element structure, set-up mode and implementation method etc. all can change to some extent; every equivalents and improvement of carrying out on the basis of technical solution of the present invention all should do not got rid of outside protection scope of the present invention.
Claims (6)
1. complete common path type feedback interferometer of laser in microchip, it is characterized in that: it comprises a micro-slice laser, the transmitting terminal axis of described micro-slice laser is provided with first spectroscope, described first spectroscopical reflected light path is provided with first completely reflecting mirror, the described first completely reflecting mirror reflected light path is provided with second completely reflecting mirror, be disposed with first acousto-optic frequency shifters on the described second completely reflecting mirror reflected light path, second sound optical frequency shifter and second spectroscope, when+1 order diffraction takes place in described first acousto-optic frequency shifters,-1 order diffraction takes place in described second sound optical frequency shifter, or-1 order diffraction is when taking place in described first acousto-optic frequency shifters, and+1 order diffraction takes place described second sound optical frequency shifter; Described second spectroscope is on described first spectroscopical transmitted light path simultaneously, and the described second spectroscope transmitted light path is provided with a photodetector; The laser of described micro-slice laser emission is modulated formation with reference to feedback light to output power of laser in the annular light path that described first spectroscope, first completely reflecting mirror, second completely reflecting mirror, first acousto-optic frequency shifters, second sound optical frequency shifter and second spectroscope constitute is once got back to the resonator cavity of described micro-slice laser, described shift frequency amount with reference to feedback light is the poor of two acousto-optic frequency shifters driving frequencies; Process loop checking installation laser once reflects in the resonator cavity of getting back to described micro-slice laser again through annular light path through determinand modulates formation measurement feedback light to output power of laser.
2. a kind of complete common path type feedback interferometer of laser in microchip as claimed in claim 1 is characterized in that: be provided with one between described first spectroscope and first completely reflecting mirror and assemble lens.
3. a kind of complete common path type feedback interferometer of laser in microchip as claimed in claim 1 is characterized in that: be provided with one between described first spectroscope and the determinand and assemble lens.
4. as claim 1 or 2 or 3 described a kind of complete common path type feedback interferometer of laser in microchip, it is characterized in that: it also comprises a signal controlling and disposal system, described signal controlling and disposal system comprise that the source takes place first sinusoidal signal, source, reference electrical signal generation circuit, first phase-sensitive detector (PSD) and second phase-sensitive detector (PSD) take place second sinusoidal signal, wherein, the output terminal in described first sinusoidal signal generation source connects the input end of described first acousto-optic frequency shifters, and output frequency is Ω
1The driving signal; The output terminal in described second sinusoidal signal generation source connects the input end of described second sound optical frequency shifter, and output frequency is Ω
2The driving signal; The source takes place with described first sinusoidal signal respectively and is connected with the frequency monitoring end that the source takes place second sinusoidal signal in two input ends of described reference electrical signal generation circuit, and output frequency is the two-way reference electrical signal of Ω and 2 Ω, wherein Ω=Ω
1-Ω
2One input end of described first phase-sensitive detector (PSD) connects an output terminal of described photodetector, the frequency that another input end connects described reference electrical signal generation circuit is the output terminal of the reference electrical signal of Ω, exports described exocoel phase changing capacity with reference to feedback light; One input end of described second phase-sensitive detector (PSD) connects another output terminal of described photodetector, the frequency that another input end connects described reference electrical signal generation circuit is the output terminal of the measurement electric signal of 2 Ω, export the exocoel phase changing capacity of described measurement feedback light, the output terminal of described first phase-sensitive detector (PSD) and second phase-sensitive detector (PSD) is connected respectively on the computing machine.
5. as claim 1 or 2 or 3 described a kind of complete common path type feedback interferometer of laser in microchip, it is characterized in that: the laser that described micro-slice laser sends is through the shift frequency amount of described first acousto-optic frequency shifters and second sound optical frequency shifter and the relaxation oscillation frequency coupling of described micro-slice laser.
6. a kind of complete common path type feedback interferometer of laser in microchip as claimed in claim 4 is characterized in that: the relaxation oscillation frequency coupling of laser described first acousto-optic frequency shifters of process that described micro-slice laser sends and the shift frequency amount of second sound optical frequency shifter and described micro-slice laser.
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| CN111678892B (en) * | 2020-06-19 | 2021-07-27 | 清华大学 | Refractive index sensing device and measuring method |
| CN112799089B (en) * | 2021-02-07 | 2023-06-13 | 苏州同人激光科技有限公司 | Eye-safe laser range finder and method |
| CN113465550B (en) * | 2021-06-30 | 2022-08-05 | 清华大学 | Non-contact type rotating angular displacement measuring device and measuring method |
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