CN102392223A - Preparation method of wear-resistant coatings on surfaces of tools and dies - Google Patents
Preparation method of wear-resistant coatings on surfaces of tools and dies Download PDFInfo
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- CN102392223A CN102392223A CN2011103485585A CN201110348558A CN102392223A CN 102392223 A CN102392223 A CN 102392223A CN 2011103485585 A CN2011103485585 A CN 2011103485585A CN 201110348558 A CN201110348558 A CN 201110348558A CN 102392223 A CN102392223 A CN 102392223A
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Abstract
The invention discloses a preparation method of wear-resistant coatings on the surfaces of tools and dies. Materials of the coatings are high-purity Ti, metal Cr, N2 and Ar; Ti, Cr, Ar and N2 are ionized into ions in unbalanced magnetron sputtering ion plating equipment under the effects of an electromagnetic field and a plasma field, and reacts on the surfaces of the tools and the dies to generate TiN/CrN composite membranes under the effect of an electric field; and Ti and metal Cr are arrayed in the unbalanced magnetron sputtering ion plating equipment according to a certain law, the tools and the dies rotate along with a work piece frame of the unbalanced magnetron sputtering ion plating equipment, and the TiN/CrN composite membranes are prepared. Compared with the prior art, the preparation method of the wear-resistant coatings on the surfaces of the tools and the dies, which is provided by the invention, has the advantages that the components, the thicknesses and the membrane coating transition layers of the TiN/CrN composite membrane coatings can be adjusted according to different conditions, so as to reduce the internal stress of the membrane coatings and fully play the advantages of high hardness of TiN and low friction force of CrN; and waste water and waste gas are not produced in the production process of the TiN/CrN composite membrane coatings, so that the environmental cannot not polluted, and the environmental benefit is high.
Description
Technical field
The present invention relates to plated film field, metallic surface, relate in particular to a kind of preparation method of tool and mould surface wearable coating.
Background technology
At present, along with the development of advanced machining technology, the tool and mould performance of products is had higher requirement.The tool and mould product mainly adopts and is coated with hard films now, improves its working life and efficient.In tool and mould product surface coatings art; Extensively adopt multi-arc ion plating equipment and technology, hallow cathode deposition, HCD coating apparatus and technology etc. both at home and abroad; Coatings such as preparation TiN, AlN, CrN, TiC, TiCN, TiAlN; Because its oxidation resistance temperature is low, frictional force is big, with reasons such as basal body binding force is little, application is restricted.Simple substance film coatings such as the main both at home and abroad TiN of employing, AlN, CrN, TiC, TiCN, TiAlN improve its working life and efficient.But existing tool and mould product mainly adopts simple substance film coatings such as TiN, AlN, CrN, TiC, TiCN, TiAlN, because reason such as its oxidation resistance temperature is low or frictional force is big, internal stress is big is peeled off during use easily.
Summary of the invention
To above-mentioned defective, the technical problem that the present invention solves is to provide a kind of preparation method of tool and mould surface wearable coating, and TiN/CrN composite package coating can be according to different condition; Composition, thickness and the rete transition layer of adjustment rete; Thereby reduce the internal stress of rete, give full play to the advantage of low-frictional force of high firmness, the CrN of TiN, and TiN/CrN composite package coating does not have waste water and gas in process of production; Environmentally safe, environmental benefit is high.
In order to solve above technical problem, the preparation method of tool and mould surface wearable coating provided by the invention comprises the steps:
(1) impurity such as the surperficial oxide debris of tool and mould, dirt settling are removed in the cleaning of tool and mould;
(2) remove the surperficial grease of tool and mould;
(3) rinse the residue of tool and mould surface degreasing material;
(4) tool and mould dewaters and is dry;
(5) tool and mould is put on the work rest of non-balance magnetically controlled sputter ion plating equipment, makes the non-balance magnetically controlled sputter ion plating equipment reach certain vacuum tightness;
(6) utilize the pair ion tool and mould surface etch of Ar, Ti, AL, Cr, make it expose clean surface;
(7) coated material is highly purified Ti, Cr metal and N2, Ar, in the non-balance magnetically controlled sputter ion plating equipment, and under the effect of EM field and argon-arc plasma field, Ti, Cr, Ar and N
2Be ionized into ion, under electric field action, generate the composite package of TiN/Cr in the tool and mould surface reaction;
(8) Ti, Cr metal are arranged in the non-balance magnetically controlled sputter ion plating equipment according to certain rules, and tool and mould is prepared the composite package of TiN/Cr along with the work rest of non-balance magnetically controlled sputter ion plating equipment rotates together.
Preferably, in the step (2), remove the surperficial grease of tool and mould with the ultrasonic metal cleaner that involves.
Preferably, in the step (3), fall the residue of tool and mould surface degreasing material with pure water or rinsed with deionized water.
Preferably, in the step (5), the vacuum tightness of non-balance magnetically controlled sputter ion plating equipment reaches more than the 6.7E-3Pa.
Preferably, in the step (6), etching temperature reaches 200 ℃～520 ℃, improves the bonding force on coating and tool and mould surface.
Preferably, in the step (8), the velocity of rotation and the coating time of the work rest of adjustment non-balance magnetically controlled sputter ion plating equipment, 0～10 rev/min of velocity of rotation, 60～120 minutes coating time, the number of plies of the composite package of control TiN/Cr.
Preferably, in the step (8), the number of plies of the composite package of tool and mould TiN/Cr is generally 2～1000 layers.
Preferably, in the step (8), the sputtering power of adjustment Ti, Cr metal, sputtering power is 0～30KW, the thickness of control superhard thin film TiN, CrN simple substance membrane.
Preferably, in the step (8), the thickness of superhard thin film TiN, CrN simple substance membrane is 1～70 nanometer.
Preferably, in the step (8), the composite package of TiN/Cr thickness be generally 3～15 microns.
Compared with prior art; The preparation method of tool and mould surface wearable coating provided by the invention, multi-component multi-layer TiN/Cr composite package coating can be adjusted composition, thickness and the rete transition layer of rete at any time according to different machining conditions; The versatility of coating tool and mould is better; And the composite package coating does not have waste water and gas in process of production, environmentally safe, and environmental benefit is high.
Embodiment
For those skilled in the art can understand technical scheme provided by the present invention better, set forth below in conjunction with specific embodiment.
The preparation method of tool and mould surface wearable coating of the present invention comprises the steps:
(1) impurity such as the surperficial oxide debris of tool and mould, dirt settling are removed in the cleaning of tool and mould;
(2) remove the surperficial grease of tool and mould with the ultrasonic metal cleaner that involves;
(3) fall the residue of tool and mould surface degreasing material with pure water or rinsed with deionized water;
(4) tool and mould dewaters with dewatering agent and is dry;
(5) tool and mould is put on the work rest of non-balance magnetically controlled sputter ion plating equipment, makes the non-balance magnetically controlled sputter ion plating equipment reach certain vacuum tightness, and the vacuum tightness of non-balance magnetically controlled sputter ion plating equipment reaches more than the 6.7E-3Pa;
(6) utilize the pair ion tool and mould surface etch of Ar, Ti, AL, Cr, make it expose clean surface, etching temperature reaches 200 ℃～520 ℃, improves the coating bonding force surperficial with tool and mould;
(7) coated material is highly purified Ti, Cr metal and N2, Ar, in the non-balance magnetically controlled sputter ion plating equipment, and under the effect of EM field and argon-arc plasma field, Ti, Cr, Ar and N
2Be ionized into ion, under electric field action, generate the composite package of TiN/Cr in the tool and mould surface reaction;
(8) Ti, Cr metal are arranged in the non-balance magnetically controlled sputter ion plating equipment according to certain rules, and tool and mould is prepared the composite package of TiN/Cr along with the work rest of non-balance magnetically controlled sputter ion plating equipment rotates together.
In the step (8), the velocity of rotation and the coating time of the work rest of adjustment non-balance magnetically controlled sputter ion plating equipment, 0～10 rev/min of velocity of rotation, 60～120 minutes coating time, the number of plies of the composite package of control TiN/Cr; The number of plies of the composite package of tool and mould TiN/Cr is generally 2～1000 layers.The sputtering power of adjustment Ti, Cr metal, sputtering power is 0～30KW, the thickness of control superhard thin film TiN, CrN simple substance membrane; In the step (8), the thickness of superhard thin film TiN, CrN simple substance membrane is 1～70 nanometer; In the step (8), the composite package of TiN/Cr thickness be generally 3～15 microns.
Compared with prior art, the preparation method of tool and mould surface wearable coating provided by the invention, TiN/CrN composite package coating can be according to different condition; Composition, thickness and the rete transition layer of adjustment rete; Thereby reduce the internal stress of rete, give full play to the advantage of low-frictional force of high firmness, the CrN of TiN, and TiN/CrN composite package coating does not have waste water and gas in process of production; Environmentally safe, environmental benefit is high.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation that does not break away from the spirit or scope of the present invention in other embodiments among this paper.Therefore, the present invention will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. the preparation method of a tool and mould surface wearable coating is characterized in that, comprises the steps:
(1) impurity such as the surperficial oxide debris of tool and mould, dirt settling are removed in the cleaning of tool and mould;
(2) remove the surperficial grease of tool and mould;
(3) rinse the residue of tool and mould surface degreasing material;
(4) tool and mould dewaters and is dry;
(5) tool and mould is put on the work rest of non-balance magnetically controlled sputter ion plating equipment, makes the non-balance magnetically controlled sputter ion plating equipment reach certain vacuum tightness;
(6) utilize the pair ion tool and mould surface etch of Ar, Ti, AL, Cr, make it expose clean surface;
(7) coated material is highly purified Ti, Cr metal and N2, Ar, in the non-balance magnetically controlled sputter ion plating equipment, and under the effect of EM field and argon-arc plasma field, Ti, Cr, Ar and N
2Be ionized into ion, under electric field action, generate the composite package of TiN/Cr in the tool and mould surface reaction;
(8) Ti, Cr metal are arranged in the non-balance magnetically controlled sputter ion plating equipment according to certain rules, and tool and mould is prepared the composite package of TiN/Cr along with the work rest of non-balance magnetically controlled sputter ion plating equipment rotates together.
2. the preparation method of tool and mould surface wearable coating according to claim 1 is characterized in that, in the step (2), removes the surperficial grease of tool and mould with the ultrasonic metal cleaner that involves.
3. the preparation method of tool and mould surface wearable coating according to claim 1 is characterized in that, in the step (3), falls the residue of tool and mould surface degreasing material with pure water or rinsed with deionized water.
4. the preparation method of tool and mould surface wearable coating according to claim 1 is characterized in that, in the step (5), the vacuum tightness of non-balance magnetically controlled sputter ion plating equipment reaches more than the 6.7E-3Pa.
5. the preparation method of tool and mould surface wearable coating according to claim 1 is characterized in that, in the step (6), etching temperature reaches 200 ℃～520 ℃, improves the bonding force on coating and tool and mould surface.
6. the preparation method of tool and mould surface wearable coating according to claim 1; It is characterized in that; In the step (8), the velocity of rotation and the coating time of the work rest of adjustment non-balance magnetically controlled sputter ion plating equipment, 0～10 rev/min of velocity of rotation; 60～120 minutes coating time, the number of plies of the composite package of control TiN/Cr.
7. the preparation method of tool and mould surface wearable coating according to claim 6 is characterized in that, in the step (8), the number of plies of the composite package of tool and mould TiN/Cr is generally 2～1000 layers.
8. the preparation method of tool and mould surface wearable coating according to claim 1 is characterized in that, in the step (8), and the sputtering power of adjustment Ti, Cr metal, sputtering power is 0～30KW, the thickness of control superhard thin film TiN, CrN simple substance membrane.
9. the preparation method of tool and mould surface wearable coating according to claim 8 is characterized in that, in the step (8), the thickness of superhard thin film TiN, CrN simple substance membrane is 1～70 nanometer.
10. the preparation method of tool and mould surface wearable coating according to claim 9 is characterized in that, in the step (8), the composite package of TiN/Cr thickness be generally 3～15 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2011103485585A CN102392223A (en) | 2011-11-07 | 2011-11-07 | Preparation method of wear-resistant coatings on surfaces of tools and dies |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103485585A CN102392223A (en) | 2011-11-07 | 2011-11-07 | Preparation method of wear-resistant coatings on surfaces of tools and dies |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104195553A (en) * | 2014-08-15 | 2014-12-10 | 陕西天元智能再制造有限公司 | Surface strengthening method of extrusion die |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1740394A (en) * | 2005-09-26 | 2006-03-01 | 中国地质大学（北京） | Hard antiwear protecting film and its prepn |
| CN101736303A (en) * | 2009-12-11 | 2010-06-16 | 天津大学 | Preparation method of chromium-doped titanium nitride magnetic semiconductor polycrystal film |
-
2011
- 2011-11-07 CN CN2011103485585A patent/CN102392223A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1740394A (en) * | 2005-09-26 | 2006-03-01 | 中国地质大学（北京） | Hard antiwear protecting film and its prepn |
| CN101736303A (en) * | 2009-12-11 | 2010-06-16 | 天津大学 | Preparation method of chromium-doped titanium nitride magnetic semiconductor polycrystal film |
Non-Patent Citations (1)
| Title |
|---|
| 王辉等: "TiN-TiN/CrN-CrN薄膜的制备及应用研究", 《工具技术》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104195553A (en) * | 2014-08-15 | 2014-12-10 | 陕西天元智能再制造有限公司 | Surface strengthening method of extrusion die |
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Application publication date: 20120328 |