CN102386801B - Large-displacement accurate driving mechanism for built-in sensor - Google Patents
Large-displacement accurate driving mechanism for built-in sensor Download PDFInfo
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Abstract
A large-displacement accurate driving mechanism for a built-in sensor comprises a shell, a driving device, a displacement transmitting amplification part, a built-in sensor, a displacement output rod, a horizontal flexible connecting piece and a fulcrum bracket, wherein the built-in sensor is connected with the driving device and is installed in the shell, and the displacement transmitting amplification part is installed outside the shell and is connected with the shell through the fulcrum bracket; and the displacement output rod is arranged on the shell, the inner end surface of the displacement output rod is connected with the built-in sensor, and the outer end surface of the displacement output rod is connected with the displacement transmitting amplification part through the horizontal flexible connecting piece. With the large-displacement accurate driving mechanism, a smaller scale machine body can realize accurate large-stroke linear displacement and angular displacement driving within a certain range or can realize larger amplitude vibration driving, has the function of driving displacement or automatic amplitude sensing, and can be manufactured into a full-closed accurate driving control system.
Description
Technical field
The present invention relates to a kind of drive unit, specifically the large displacement accurate driving mechanism of a kind of built-in sensing device.
Background technology
Drive location at optical precision, the fields such as micro-nano Active Vibration Control, precise driving device is critical component.To the performance of drive unit, especially more and more higher to the performance requirement of the aspects such as accessible driving stroke, amplitude, actuating force and driving accuracy in small size space.But, current drive unit, especially intellectual material drive unit, it conventionally exists and drives precision high, but drives the little defect of stroke.Automatically be starved of a kind of drive unit that possesses small size, large stroke, accurate displacement or vibratory drive in the field such as control and precision vibration driving in space optics.
Through the retrieval of prior art is found, on May 28th, 2008 disclosed Chinese patent, application number is 200710125011, it discloses a kind of intellectual material-magnetic telescopic driver, comprise housing, magnetostrictive rod, coil brace and drive coil, be provided with a transmission lever along the flexible direction of magnetostrictive rod, one end of this transmission lever contacts with this magnetostrictive rod, and the other end contacts with a follower stretching out outside described housing; Between transmission lever and housing, be provided with elastomeric element; Described coil brace is partly or entirely made up of magnetic material, and provides bias magnetic field to described magnetostrictive rod.This invention is integrated permanent magnet and coil brace that bias magnetic field is provided, make structure more compact, can reduce the volume of driver, such structure is not only conducive to heat radiation, and by adopting the floating simplified way driving of magnetic to drive magnetostrictive rod, reduce magnetic circuit reluctance, made the telescopic variation of magnetostrictive rod sensitiveer.In addition, adopt the mode of direct output, reduced the problem of phase place variation and distortion, further simplified and optimized structure.But this driver existent defect, is that its drive displacement is less, based on magnetostriction constant, if obtaining large stroke, this structure driver drives, its magnetostrictive material body, whole driver size will be quite large.Be not suitable for the field of miniature scale space or lightweight drive unit application demand.
Summary of the invention
The present invention is directed to above shortcomings in prior art, provide a kind of built-in sensing device large displacement accurate driving mechanism.
The present invention is achieved by the following technical solutions.
The large displacement accurate driving mechanism of a kind of built-in sensing device, comprise housing, drive unit, displacement transmission amplifier unit, built-in sensing device, displacement take-off lever, horizontal flexibility connector and fulcrum support, wherein, built-in sensors is connected with drive unit and is arranged on enclosure interior, and displacement is transmitted amplifier unit and is arranged on outside and is connected with housing by fulcrum support; Displacement take-off lever is arranged on housing, and its inner face is connected with built-in sensors, and its outer face is transmitted amplifier unit by horizontal flexibility connector and displacement and is connected.
One end that described housing transmits amplifier unit near displacement is left end cap, and described left end cap is provided with through hole, and displacement take-off lever is arranged in this through hole; One end that described housing transmits amplifier unit away from displacement is housing bottom, and described housing bottom has screwed hole, is provided with bottom regulating part in this screwed hole; Between drive unit and bottom regulating part, be provided with bottom transducer; Inner walls is provided with screw thread.
Described built-in sensing device comprises sensing prestressing force adjusting nut, sensing prestressed spring, transducer pad, built-in sensors, compressive pre-stress nut, compressive pre-stress spring and shaft shoulder type take-off lever, wherein, the shaft shoulder inner face of shaft shoulder type take-off lever and the end contact of drive unit, on shaft shoulder type take-off lever, cover has compressive pre-stress nut, compressive pre-stress nut can also can be fixed on housing on inner walls screw thread in precession, between the shaft shoulder of compressive pre-stress nut and shaft shoulder type take-off lever, be provided with compressive pre-stress spring, on shaft shoulder type take-off lever, be set with built-in sensors, the outer face of built-in sensors is provided with transducer pad and sensing prestressed spring successively, sensing prestressing force adjusting nut is fixed on shaft shoulder type take-off lever, and contact with displacement take-off lever.
Described drive unit comprises: drive material bodies and drive excitation body, wherein, drive material bodies to be arranged on and drive in the middle of excitation body; Described driving material bodies is to be subject to can produce flexible material bodies after electricity or electromagnetic excitation, and described to produce flexible material bodies be magnetostrictive material body, and described driving excitation body is solenoid or voltage drive body.
Described drive unit can also be the piezoelectric heap block of multiple piezoelectric compositions, and the both sides of described piezoelectric heap block are provided with positive pole and negative pole.
Described drive unit also comprises auxiliary excitation body, and wherein, auxiliary excitation body is arranged on to drive material bodies and drive between excitation body or be arranged on and drives the external side of excitation; Described auxiliary excitation body is permanent magnet.
It is following any structure that amplifier unit is transmitted in described displacement:
It is L-type that amplifier unit is transmitted in-displacement, comprise long arm end and galianconism end, fulcrum support is arranged on the junction of long arm end and its galianconism end, long arm end is provided with to amplify and regulates chute, described long arm end is positioned at top or the below of housing, and described fulcrum support is bearing-type fulcrum support or flexible type fulcrum support; Or
It is T-shaped that amplifier unit is transmitted in-displacement, comprise galianconism end and the plane with galianconism end symmetry, fulcrum support is arranged on the junction of galianconism end and plane, and described plane is positioned at top or the below of housing, and described fulcrum support is bearing-type fulcrum support or flexible type fulcrum support.When displacement is transmitted amplifier unit while being T-shaped, plane can be in the reciprocal telescopic process of shaft shoulder type take-off lever the direct reciprocal beat drive actions of generation angle.
In the time that displacement transmission amplifier unit is L-type, the large displacement accurate driving mechanism of built-in sensing device also comprises slide block, terminal installation and vertical flexible connecting member, described slide block is arranged on L-type displacement and transmits on the amplification adjusting chute of amplifier unit long arm end, and terminal installation is connected with slide block by vertical flexible connecting member.
Described terminal installation comprises take-off lever and guide way, and wherein, guide way is arranged on take-off lever outside; Described take-off lever is terminal take-off lever or perforation take-off lever, and take-off lever is connected with slide block by vertical flexible connecting member.
Described terminal installation also comprises output transducer, output displacement connecting rod and displacement force spring, wherein, output transducer is fixed on guide way, and output displacement connecting rod is connected on take-off lever and through output transducer, is provided with displacement force spring between output transducer and take-off lever.
The large displacement accurate driving mechanism of the built-in sensing device of combination that utilizes the large displacement accurate driving mechanism of above-mentioned built-in sensing device to form, adopts stalloy formula hinge by series, parallel, plane or the combination of three-dimensional compound mode.
When work, the shaft shoulder inner face of shaft shoulder type take-off lever and driving material bodies end contact, on shaft shoulder type take-off lever, cover has a compressive pre-stress nut, and screw thread has been attacked in this nut outside, and endoporus is through hole, and compressive pre-stress nut can move relative to shaft shoulder type take-off lever.Compressive pre-stress nut by and the internal thread rotation entrance pressure of housing be tightly located at the compressive pre-stress spring between the shaft shoulder of it and shaft shoulder type take-off lever, drive material bodies apply prestressing force thereby can give.In compressive pre-stress nut outside, on shaft shoulder type displacement take-off lever, also cover has a built-in sensors.Built-in sensors has through hole, can move relative to shaft shoulder type take-off lever.Built-in sensors outer face is provided with transducer pad and sensing prestressed spring successively.The thread segment precession that sensing prestressing force adjusting nut can be provided with on shaft shoulder type displacement take-off lever, compresses sensing prestressed spring, transducer pad and the built-in sensors be located between compressive pre-stress nut and sensing prestressing force adjusting nut.Sensing prestressing force adjusting nut and shaft shoulder type take-off lever are fixed by screw thread and are servo-actuated.Like this, the displacement that drives material bodies to produce can be delivered on sensing prestressing force adjusting nut by shaft shoulder type displacement take-off lever, thereby the compressive pre-stress on change built-in sensors, thereby make the compressive pre-stress change amount signal of built-in sensors and the output displacement that drives material bodies there is corresponding relation.By demarcating, can know that corresponding driving material bodies acts on the output displacement of shaft shoulder type take-off lever by the compressive pre-stress signal that detects built-in sensors.
The invention provides a kind of built-in large displacement accurate driving mechanism, the angular displacement that can realize accurate large stroke straight-line displacement, certain limit compared with small scale body drives, or drive compared with large-amplitude vibration, and there is drive displacement or amplitude self-sensing function, can be made into the accurate driving control system of closed-loop.
Compared with prior art, the present invention includes following advantage: compact conformation, can realize the accurate large travel displacement that drives, can form displacement multiplication factor adjustable, realize simultaneously and drive sensing integrated intelligent drives device characteristic.Simple in structure, compact, easy for installation, be particularly suitable for vertical direction size restrictions strict, but require to realize the large application scenario that drives stroke.The present invention is base unit formula intelligent drives parts with sensing function, and being used in combination of above this intelligent parts, can conveniently make multiple degrees of freedom drive unit or system.There is extensive use field.
Brief description of the drawings
Fig. 1 is structural representation of the present invention,
Wherein, (a) transmit amplifier unit for displacement and be placed in housing upside schematic diagram; (b) transmit amplifier unit for displacement and be placed in housing downside schematic diagram;
Fig. 2 is the driving mechanism structure schematic diagram that piezoelectric of the present invention, many sensings drive;
Fig. 3 is the structural representation of angled drive mechanisms of the present invention;
Fig. 4 is that the present invention combines driving mechanism form schematic diagram;
Fig. 5 is hinge arrangement form schematic diagram,
Wherein, (a) being plane hinge version schematic diagram, is (b) three-dimensional hinge arrangement form schematic diagram.
Embodiment
embodiment 1
As shown in (a) in Fig. 1, the present embodiment comprises housing 1, drive unit, displacement transmission amplifier unit 9, built-in sensing device, displacement take-off lever 7, horizontal flexibility connector 6 and fulcrum support 10, wherein, built-in sensors is connected with drive unit and is arranged on housing 1 inside, and displacement is transmitted amplifier unit 9 and is arranged on housing 1 outside and is connected with housing 1 by fulcrum support 10; Displacement take-off lever 7 is arranged on housing 1, in its inner face with put transducer and be connected, its outer face is connected by horizontal flexibility connector 6 and displacement transmission amplifier unit 9.
One end that housing 1 transmits amplifier unit 9 near displacement is left end cap 2, and described left end cap 2 is provided with through hole, and displacement take-off lever 7 is arranged in this through hole; One end that described housing 1 transmits amplifier unit 9 away from displacement is housing bottom, and described housing bottom has screwed hole, is provided with bottom regulating part 15 in this screwed hole; Between drive unit and bottom regulating part 15, be provided with bottom transducer 24; Housing 1 inwall is provided with screw thread.
Drive unit comprises: drive material bodies 3 and drive excitation body 4, wherein, drive material bodies 3 to be arranged on and drive in the middle of excitation body 4; Described driving material bodies 3 is to be subject to after electricity or electromagnetic excitation to produce flexible material bodies for driving material bodies, and as magnetostrictive material body, described driving excitation body 4 is solenoid or voltage drive body.Drive unit can also arrange auxiliary excitation body 5, and wherein, auxiliary excitation body 5 is arranged on to drive material bodies 3 and drive between excitation body 4 or be arranged on and drives excitation body 4 outsides; Described auxiliary excitation body 5 is permanent magnet.
The present embodiment is provided with built-in sensing device between displacement take-off lever 7 and drive unit, this built-in sensing device comprises: sensing prestressing force adjusting nut 25, sensing prestressed spring 26, transducer pad 27, built-in sensors 28, compressive pre-stress nut 29, compressive pre-stress spring 30, shaft shoulder type take-off lever 31.The shaft shoulder inner face of shaft shoulder type take-off lever 31 and the end contact of drive unit, on shaft shoulder type take-off lever 31, cover has compressive pre-stress nut 29, compressive pre-stress nut 29 can also can be fixed on housing on housing 1 inner thread in precession, between the shaft shoulder of compressive pre-stress nut 29 and shaft shoulder type take-off lever 31, be provided with compressive pre-stress spring 26, on shaft shoulder type take-off lever 31, be set with built-in sensors 28, the outer face of built-in sensors 28 is provided with transducer pad 27 and sensing prestressed spring 26 successively, sensing prestressing force adjusting nut 25 is fixed on shaft shoulder type take-off lever 31, and contact with displacement take-off lever 7.
It is L-type that amplifier unit is transmitted in displacement, comprise long arm end and galianconism end, fulcrum support 10 is arranged on the junction of long arm end and galianconism end, and long arm end is provided with to amplify and regulates chute, described long arm end is positioned at the top of housing, and described fulcrum support is bearing-type fulcrum support or flexible type fulcrum support.
The large displacement accurate driving mechanism of built-in sensing device also comprises slide block 17, terminal installation and vertical flexible connecting member 19, described slide block is arranged on L-type displacement and transmits on the amplification adjusting chute of amplifier unit long arm end, and terminal installation is connected with slide block by vertical flexible connecting member.
Terminal installation comprises take-off lever and guide way, and wherein, guide way is arranged on take-off lever outside; Described take-off lever 20 is terminal take-off lever or perforation take-off lever, and take-off lever is connected with slide block by vertical flexible connecting member.
Terminal installation also comprises output transducer, output displacement connecting rod and displacement force spring, wherein, output transducer is fixed on guide way, and output displacement connecting rod is connected on take-off lever 20 and through output transducer, between output transducer and take-off lever 20, is provided with displacement force spring.
When work, the shaft shoulder inner face of shaft shoulder type take-off lever 31 and driving material bodies 3 end contacts, on shaft shoulder type take-off lever 31, cover has a compressive pre-stress nut 29, and screw thread has been attacked in this nut outside, and endoporus is through hole (compressive pre-stress nut 29 can move relative to shaft shoulder type take-off lever 31).Compressive pre-stress nut 29 by and the internal thread rotation entrance pressure of housing 1 be tightly located at the compressive pre-stress spring 30 between the shaft shoulder of it and shaft shoulder type take-off lever 31, drive material bodies 3 apply prestressing force thereby can give.In compressive pre-stress nut 29 outsides, on shaft shoulder type displacement take-off lever 31, also cover has a built-in sensors 28.Built-in sensors 28 has through hole, can move relative to shaft shoulder type take-off lever 31.Built-in sensors 28 outer faces are provided with transducer pad 27 and sensing prestressed spring 26 successively.The thread segment precession that sensing prestressing force adjusting nut 25 can be provided with on shaft shoulder type displacement take-off lever 31, compresses sensing prestressed spring 26, transducer pad 27 and the built-in sensors 28 be located between compressive pre-stress nut 29 and sensing prestressing force adjusting nut 25.Sensing prestressing force adjusting nut 25 is fixed by screw thread with shaft shoulder type take-off lever 31 and is servo-actuated.Like this, the displacement that drives material bodies 3 to produce can be delivered on sensing prestressing force adjusting nut 25 by shaft shoulder type displacement take-off lever 31, thereby change the compressive pre-stress on built-in sensors 28, thereby make the compressive pre-stress change amount signal of built-in sensors 28 and the output displacement that drives material bodies 3 there is corresponding relation.By demarcating, can know that corresponding driving material bodies 3 acts on the output displacement of shaft shoulder type take-off lever 31 by the compressive pre-stress signal that detects built-in sensors 28.
The output displacement that drives material bodies 3 to act on shaft shoulder type take-off lever 31 will promote the horizontal flexibility connector 6 of displacement take-off lever 7 and then promotion employing stalloy.Transmitting amplifier unit due to horizontal flexibility connector 6 other ends and displacement is that the galianconism end of rigid rod 9 is connected, it is rigid rod that amplifier unit 9 is transmitted in displacement, displacement is transmitted amplifier unit 9 and is pushed a little displacement, the long arm end of displacement amplifier unit 9 is transmitted the galianconism end of amplifier unit 9 and is delivered in this displacement through displacement, then by adopting the vertical flexible connecting member 19 of vertical steel disc to connect the most at last displacement be delivered on take-off lever 20.Due to the effect of displacement transmission amplifier unit 9, drive the micro-displacement that produces of material bodies 3 can on take-off lever 20, produce one larger to bottom offset, and its multiplication factor is that to transmit amplifier unit be the ratio of rigid rod 9 in bearing fulcrum support 10 both sides length arm end length in displacement.
It is rigid rod that amplifier unit 9 is transmitted in displacement, because slide block 17 can carry out position adjustments on the long arm end of displacement transmission amplifier unit 9, so the output displacement value of drive unit of the present invention can regulate by slide block 17.
In addition, it should be noted that, the horizontal flexibility connector 6 of this device and vertically flexible connecting member 19 adopt horizontal or vertical steel disc, because it has the high rigidity on displacement direction of transfer, and in the direction vertical with displacement direction of transfer, there is good soft elasticity, although have a unitary rotation along bearing fulcrum support 10 so rigid displacement transmits amplifier unit 9 in the time transmitting displacement, due to the soft elastic reaction of steel disc, rigid displacement transmission amplifier unit 9 can not be directed to body 18 and displacement take-off lever 7 rigid constraints are stuck, the displacement of take-off lever 20 in guide way 18 can realize.
Otherwise, to when driving excitation body 4 to produce for solenoid applies current signal the permanent magnet bias reverse of excitation that magnetic field and auxiliary excitation body 5 is permanent magnet, drive material bodies 3 to shorten.Due to the effect of the prestrain elastic force of flexible adjustment part 13 and/or displacement force spring 23, resilient force is transmitted amplifier unit 9 and horizontal flexibility connector 6 and then promote displacement take-off lever 7 servo-actuated with the driving material bodies 3 shortening in displacement.On take-off lever 20, produce like this one to top offset.
So far, institute's contrive equipment can be realized the driving that pumps of take-off lever 20 as shown in (b) in Fig. 1.
Meanwhile, this version can also be the form that displacement transmission amplifier unit 9 is placed in housing 1 downside, and building block and type of drive are completely the same, but this mode can make take-off lever 20 produce contrary displacement drive effect.
Embodiment 2
The present embodiment is using piezoelectric as drive unit and the large displacement accurate driving mechanism of built-in sensing device of many sensings driving
Embodiment 2 is the variation example of embodiment 1, and in this embodiment, the magnetostriction described in embodiment 1 drives material bodies, solenoid excitation body and all corresponding removals of auxiliary permanent-magnet-field body, and drive unit is replaced by multiple piezoelectrics heap blocks 34.And the both sides at piezoelectric heap block 34 are provided with positive electrode 35 and negative electrode 36.
In the present embodiment, terminal installation also comprises output transducer 21, output displacement connecting rod 22 and displacement force spring 23, wherein, output transducer 21 is fixed on guide way 18, output displacement connecting rod 22 is connected on take-off lever 20 and through output transducer 21, between output transducer 21 and take-off lever 20, be provided with displacement force spring 23, like this, output transducer 21 can perception displacement force spring 23 its distortional stress variable quantity in driving process, thereby can know the displacement of take-off lever 20 or output displacement connecting rod 22 according to the coefficient of elasticity of demarcating of perception displacement force spring 23.
As shown in Figure 2, driving process and embodiment 1 mode of the present embodiment are basic identical, and the magnetostrictive displacement that just electromagnetic excitation produces becomes the piezoelectric displacement that voltage drives.
embodiment 3
The present embodiment is the large displacement accurate driving mechanism of built-in sensing device that angle drives
Embodiment 3 is the variation example of embodiment 1, in this embodiment, and slide block, terminal installation and vertically all corresponding removals of flexible connecting member described in embodiment 1.As shown in Figure 3, the composition of the present embodiment and embodiment 1 mode are basic identical, just displacement being transmitted to amplifier unit 9 is designed to T-shaped, be specially, the long arm end of displacement transmission amplifier unit 9 becomes the plane 32 of relative displacement transmission amplifier unit 9 galianconism end symmetries, fulcrum support 10 is arranged on displacement and transmits the galianconism end of amplifier unit 9 and the junction of plane 32, fulcrum support 10 is bearing-type fulcrum support or flexible type fulcrum support, and plane 32 can directly produce the reciprocal beat drive actions of angle in the reciprocal telescopic process of shaft shoulder type take-off lever like this.
Displacement transmission amplifier unit 9 can be positioned at the top of housing, also can be positioned at the below of housing, and two kinds of mode building blocks are identical with type of drive, but can make take-off lever 20 produce contrary displacement drive effect.
embodiment 4
The large displacement accurate driving mechanism of the built-in sensing device of combination that the large displacement accurate driving mechanism of built-in sensing device that utilizes above-described embodiment to provide forms.
As (a) in Fig. 4 and Fig. 5 with (b), install for described in the present embodiment, can be by plane or three-dimensional stalloy formula hinge, the series, parallel and plane and the three-dimensional combination driving device that utilize above this device are made in link, drive effect thereby produce multidimensional.
Above embodiments of the invention being explained in detail, be to implement under taking technical solution of the present invention as prerequisite, but protection scope of the present invention is not limited to the above embodiments.
Claims (7)
1. the large displacement accurate driving mechanism of built-in sensing device, it is characterized in that, comprise housing, drive unit, displacement transmission amplifier unit, built-in sensing device, displacement take-off lever, horizontal flexibility connector and fulcrum support, wherein, built-in sensing device is connected with drive unit and is arranged on enclosure interior, and displacement is transmitted amplifier unit and is arranged on outside and is connected with housing by fulcrum support; Displacement take-off lever is arranged on housing, and its inner face is connected with built-in sensing device, and its outer face is transmitted amplifier unit by horizontal flexibility connector and displacement and is connected;
Described built-in sensing device comprises sensing prestressing force adjusting nut, sensing prestressed spring, transducer pad, built-in sensors, compressive pre-stress nut, compressive pre-stress spring and shaft shoulder type take-off lever, wherein, the shaft shoulder inner face of shaft shoulder type take-off lever and the end contact of drive unit, on shaft shoulder type take-off lever, cover has compressive pre-stress nut, compressive pre-stress nut can also can be fixed on housing on inner walls screw thread in precession, between the shaft shoulder of compressive pre-stress nut and shaft shoulder type take-off lever, be provided with compressive pre-stress spring, on shaft shoulder type take-off lever, be set with built-in sensors, the outer face of built-in sensors is provided with transducer pad and sensing prestressed spring successively, sensing prestressing force adjusting nut is fixed on shaft shoulder type take-off lever, and contact with displacement take-off lever,
Described drive unit comprises: drive material bodies and drive excitation body, wherein, drive material bodies to be arranged on and drive in the middle of excitation body; Described driving material bodies is to be subject to can produce flexible material bodies after electricity or electromagnetic excitation, and described to produce flexible material bodies be magnetostrictive material body, and described driving excitation body is solenoid or voltage drive body; Described drive unit also comprises auxiliary excitation body, and wherein, auxiliary excitation body is arranged on to drive material bodies and drive between excitation body or be arranged on and drives the external side of excitation; Described auxiliary excitation body is permanent magnet;
It is following any structure that amplifier unit is transmitted in described displacement:
It is L-type that amplifier unit is transmitted in-displacement, comprise long arm end and galianconism end, fulcrum support is arranged on the junction of long arm end and its galianconism end, long arm end is provided with to amplify and regulates chute, described long arm end is positioned at top or the below of housing, and described fulcrum support is bearing-type fulcrum support or flexible type fulcrum support; Or
It is T-shaped that amplifier unit is transmitted in-displacement, comprise galianconism end and the plane with galianconism end symmetry, fulcrum support is arranged on the junction of galianconism end and plane, and described plane is positioned at top or the below of housing, and described fulcrum support is bearing-type fulcrum support or flexible type fulcrum support.
2. the large displacement accurate driving mechanism of built-in sensing device according to claim 1, is characterized in that, one end that described housing transmits amplifier unit near displacement is left end cap, and described left end cap is provided with through hole, and displacement take-off lever is arranged in this through hole; One end that described housing transmits amplifier unit away from displacement is housing bottom, and described housing bottom has screwed hole, is provided with bottom regulating part in this screwed hole; Between drive unit and bottom regulating part, be provided with bottom transducer; Inner walls is provided with screw thread.
3. the large displacement accurate driving mechanism of built-in sensing device according to claim 1, is characterized in that, described drive unit comprises: the piezoelectric heap block being made up of piezoelectric, the both sides of described piezoelectric heap block are respectively equipped with positive pole and negative pole.
4. the large displacement accurate driving mechanism of built-in sensing device according to claim 1, it is characterized in that, also comprise slide block, terminal installation and vertical flexible connecting member, described slide block is arranged on L-type displacement and transmits on the amplification adjusting chute of amplifier unit long arm end, and terminal installation is connected with slide block by vertical flexible connecting member.
5. the large displacement accurate driving mechanism of built-in sensing device according to claim 4, is characterized in that, described terminal installation comprises take-off lever and guide way, and wherein, guide way is arranged on take-off lever outside, and take-off lever is connected with slide block by vertical flexible connecting member; Described take-off lever is terminal take-off lever or connects take-off lever.
6. the large displacement accurate driving mechanism of built-in sensing device according to claim 5, it is characterized in that, described terminal installation also comprises output transducer, output displacement connecting rod and displacement force spring, wherein, output transducer is fixed on guide way, output displacement connecting rod is connected on take-off lever and through output transducer, is provided with displacement force spring between output transducer and take-off lever.
7. the large displacement accurate driving mechanism of the built-in sensing device of combination that utilizes the large displacement accurate driving mechanism of built-in sensing device as described in any one in claim 1 to 6 to form, it is characterized in that, adopt stalloy formula hinge by series, parallel, plane or the combination of three-dimensional compound mode.
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| CN104007770B (en) * | 2014-05-14 | 2017-09-08 | 上海交通大学 | From sensing driving material bodies and driving sensing device |
| CN104535056B (en) * | 2014-12-16 | 2017-09-05 | 上海交通大学 | Micro sensing device based on Coriolis force effect and combinations thereof structure |
| CN106014896B (en) * | 2016-05-23 | 2019-01-11 | 南京航空航天大学 | The swing type displacement conversion enlarger and its method of marmem driving |
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| CN101028702A (en) * | 2007-01-12 | 2007-09-05 | 东华大学 | Microfeeding system for precisive grinding |
| CN101145742A (en) * | 2007-10-19 | 2008-03-19 | 北京工业大学 | A dual-phase set ultra-magnetism flexible driver and its implementation method |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
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|---|---|---|---|---|
| CN101028702A (en) * | 2007-01-12 | 2007-09-05 | 东华大学 | Microfeeding system for precisive grinding |
| CN101145742A (en) * | 2007-10-19 | 2008-03-19 | 北京工业大学 | A dual-phase set ultra-magnetism flexible driver and its implementation method |
| CN102122900A (en) * | 2010-12-10 | 2011-07-13 | 上海交通大学 | Self-sensing driving device |
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