CN102384980B - Micro-fluid control device and operation method thereof - Google Patents

Micro-fluid control device and operation method thereof Download PDF

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Publication number
CN102384980B
CN102384980B CN201010269521.9A CN201010269521A CN102384980B CN 102384980 B CN102384980 B CN 102384980B CN 201010269521 A CN201010269521 A CN 201010269521A CN 102384980 B CN102384980 B CN 102384980B
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dummy electrodes
light
microfluid
material layer
guide material
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CN102384980A (en
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刘承贤
王威
徐琅
杨裕雄
张晃猷
杨士模
周忠诚
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Crystalvue Medical Corp
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Crystalvue Medical Corp
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Abstract

The invention discloses a micro-fluid control device and an operation method thereof. The micro-fluid control device comprises a light guide material layer and a runner. When light ray with specific light patterns are irradiated to the light guide material layer, the light guide material layer forms at least three virtual electrodes according to the specific light patterns. At least three visual electrodes comprise a first virtual electrode, a second virtual electrode and a third virtual electrode, wherein the second virtual electrode and the third virtual electrode are arranged on two sides of the first virtual electrode. Specific proportions exist in the gap between the first visual electrode and the third visual electrode, the width of the first visual electrode, the gap between the first visual electrode and the second visual electrode and the width of the second visual electrode. When the specific light patterns change, at least three visual electrodes change along with the change of the specific light patterns and generate an electric seepage force, and accordingly the movement state of the micro-fluid in the runner can be controlled.

Description

Microfluid actuation means and method of operating thereof
Technical field
The present invention controls relevant with microfluid, particularly about a kind of, can by the position of optical pattern (optical pattern), change to be adjusted at arrangement and the shaping ratio of formed each dummy electrodes on light-guide material layer, control thus microfluid actuation means and the method for operating thereof of the motion state of microfluid in runner.
Background technology
In recent years, along with biotechnology is constantly progressive and flourish, the importance in biochemistry detection field also promotes day by day, therefore, has also occurred on the market quite a lot of various instruments relevant to biochemistry detection.For example, adopt various raw doctor's wafer of microfluid system to can be widely used in different purposes, such as: capture controlling of the cell of rare kind, the mixing of pharmaceutical agent or fine particle etc.
In the microfluid system adopting at present common raw doctor's wafer, all electro-osmosis streams (Electro-Osmotic Flow, EOF) are by the flow direction that arranges to control microfluid of the electrode of various different size sizes.Yet, when those raw doctor's wafers of user's practice, the maximum puzzlement that meets with is: outside under the fixing prerequisite of alive frequency, the flow direction of microfluid also cannot change, thereby cause user to be difficult to freely adjust or change the flow direction of microfluid, therefore control convenience and the flexibility ratio of microfluid, just can be subject to quite serious restriction.Unless user can go to change always various sizes electrode position or continue to change impressed voltage and frequency thereof, just can make the flow direction of microfluid comparatively easily be controlled, but in fact these practices are also infeasible, can cause on the contrary user more inconvenient, even other bad impacts.
Therefore, the present invention proposes a kind of microfluid actuation means and method of operating thereof, to address the above problem.
Summary of the invention
A category of the present invention is to propose a kind of microfluid actuation means.Be different from electro-osmosis stream (the Electro-Osmotic Flow that traditional microfluid actuation means adopts, EOF) mechanism, this microfluid actuation means adopts photoelectricity osmotic flow (Opto-Electro-Osmotic Flow, OEOF) mechanism, by the position of optical pattern (optical pattern), change to be adjusted at arrangement and the shaping ratio of formed each dummy electrodes on light-guide material layer, control thus the motion state of microfluid.
The first specific embodiment according to the present invention is a kind of microfluid actuation means.In this embodiment, microfluid actuation means comprises light-guide material layer and runner.When having the light directive light-guide material layer of specific light pattern, light-guide material layer is according to specific light pattern formation at least three dummy electrodes.At least three dummy electrodes comprise the first dummy electrodes and are positioned at the second dummy electrodes and the 3rd dummy electrodes of the first dummy electrodes both sides.The spacing of the width of the spacing of the first dummy electrodes and the 3rd dummy electrodes, the first dummy electrodes, the first dummy electrodes and the second dummy electrodes and the width of the second dummy electrodes have special ratios.When one variation occurs specific light pattern, at least three dummy electrodes also change change with this and produce an electro-osmotic force, control thus the motion state of microfluid in runner.
In actual applications, the spacing (G1) of the first dummy electrodes and the 3rd dummy electrodes is, the special ratios between the spacing (G2) of width (W1), the first dummy electrodes and second dummy electrodes of the first dummy electrodes and the width (W2) of the second dummy electrodes is 1: 5: 1: 3.Light-guide material layer is that the material being changed with light by resistance value forms, light-guide material layer can be charge generation layer material TiOPc (Titanium Oxide Phthalocyanine), amorphous silicon (amorphous silicon, a-Si) or polymkeric substance (polymer).
In this embodiment, microfluid actuation means adopts a photoelectricity osmotic flow (Opto-Electro-Osmotic Flow, OEOF) mechanism, is adjusted at the shaping ratio of formed this at least three dummy electrodes on light-guide material layer, to control this microfluid by changing the position of optical pattern.Do not changing under the condition of voltage and frequency, microfluid actuation means is controlled direction of motion or the sense of rotation of the particle in this microfluid, causes this microfluid to form to tend to act, mixes, concentrates, the motion state of separation and whirlpool.
The second specific embodiment according to the present invention is a kind of microfluid actuation means method of operating.In this embodiment, this microfluidic manipulations device method of operating is applied to a microfluidic manipulations device, and this microfluidic manipulations device comprises a runner and a light-guide material layer.
This microfluidic manipulations device method of operating comprises the following step: (a), when having this light-guide material layer of a light directive of a specific light pattern, this light-guide material layer is according to these specific light pattern formation at least three dummy electrodes; (b), when one variation occurs this specific light pattern, this at least three dummy electrodes also changes change with this and produces an electro-osmotic force, controls thus the motion state of a microfluid in this runner.
Wherein, this at least three dummy electrodes comprises one first dummy electrodes, one second dummy electrodes and one the 3rd dummy electrodes, this second dummy electrodes and the 3rd dummy electrodes are positioned at the both sides of this first dummy electrodes, and in the spacing of this first dummy electrodes and the 3rd dummy electrodes, between the width of this first dummy electrodes, this first dummy electrodes and the spacing of this second dummy electrodes and the width of this second dummy electrodes, there is a special ratios.
In actual applications, the spacing (G1) of the first dummy electrodes and the 3rd dummy electrodes is, the special ratios between the spacing (G2) of width (W1), the first dummy electrodes and second dummy electrodes of the first dummy electrodes and the width (W2) of the second dummy electrodes is 1: 5: 1: 3.Light-guide material layer is that the material being changed with light by resistance value forms, light-guide material layer can be charge generation layer material TiOPc (Titanium Oxide Phthalocyanine), amorphous silicon (amorphous silicon, a-Si) or polymkeric substance (polymer).
In this embodiment, microfluid actuation means adopts a photoelectricity osmotic flow mechanism, by changing the position of optical pattern, be adjusted at arrangement and the shaping ratio of formed those virtual positive electrodes and virtual negative electrode on light-guide material layer, do not changing under the condition of voltage and frequency thus, microfluid actuation means can be controlled direction of motion or the sense of rotation of the particle in microfluid, causes microfluid to form to tend to act, mixes, concentrates, the motion state of separation and whirlpool.
Electro-osmosis stream (EOF) mechanism adopting compared to traditional microfluid actuation means in prior art, according to the mechanism of microfluid actuation means of the present invention and method of operating employing photoelectricity osmotic flow (OEOF) thereof, do not changing under the condition of voltage and frequency, by the position of optical pattern (optical pattern), change to be adjusted at arrangement and the shaping ratio of formed each dummy electrodes on light-guide material layer, control thus the various motion states of microfluid.
Thus, according to microfluid actuation means of the present invention and method of operating thereof, can effectively promote convenience and the dirigibility of user on handling, needn't go troublesomely to change various sizes electrode position or continue to change impressed voltage and frequency thereof, therefore can be widely used in various microfluid systems, such as raw doctor's wafer, pharmaceutical agent mixing, cell or fine particle manipulation etc., has market potential and future development.
Can be by following detailed Description Of The Invention and appended graphic being further understood about the advantages and spirit of the present invention.
Accompanying drawing explanation
Fig. 1 is the schematic appearance illustrating according to the microfluid actuation means of the first specific embodiment of the present invention.
Fig. 2 illustrates the spacing of indium- tin oxide electrode 13 and 14 and the proportionate relationship of width.
Fig. 3 A is the side schematic view that illustrates the light-guide material layer 11 of the light directive microfluid actuation means 1 with specific light pattern 12.
Fig. 3 B be illustrate due to the specific light pattern 12 in Fig. 3 A be moved to specific light pattern 12 ', cause forming on light-guide material layer 11 side schematic view of different dummy electrodes.
Fig. 4 A and Fig. 4 B illustrate an example that adopts above-mentioned photoelectricity osmotic flow mechanism to control the motion state of microfluid.
Fig. 5 A and Fig. 5 B illustrate another example that adopts above-mentioned photoelectricity osmotic flow mechanism to control the motion state of microfluid.
Fig. 6 illustrates another example of controlling the motion state of microfluid by photoelectricity osmotic flow mechanism.
Fig. 7 is the process flow diagram illustrating according to the microfluid actuation means method of operating of the second specific embodiment of the present invention.
Main element symbol description
S10~S12: process step 16: runner
1,1 ': microfluid actuation means 15: AC power
11: light-guide material layer 13,14: indium-tin oxide electrode
W1, W2: the width of indium-tin oxide electrode
G1, G2: the spacing of indium tin oxide
12,12 ': specific light pattern 110,110 ': virtual positive electrode
112,112 ': virtual negative electrode
Embodiment
The first specific embodiment according to the present invention is a kind of microfluid actuation means.In this embodiment, this microfluid actuation means is a motion state of controlling a microfluid.In fact, this microfluid can be a biological corpse or other object for laboratory examination and chemical testing or a chemical corpse or other object for laboratory examination and chemical testing for any kind or pattern, there is no specific restriction.Please refer to Fig. 1, Fig. 1 is the schematic appearance that illustrates this microfluid actuation means.
As shown in Figure 1, microfluid actuation means 1 comprises light-guide material layer 11.In fact, light-guide material layer 11 is that the material being changed with light by resistance value forms, for example, light-guide material layer 11 can be charge generation layer material TiOPc (Titanium Oxide Phthalocyanine), amorphous silicon (amorphous silicon, a-Si) or polymkeric substance (polymer), but not as limit.
In this embodiment, light-guide material layer 11 comprises positive electrode and negative electrode, for example the indium tin oxide of positively charged (Indium Tin Oxide, ITO) electrode 13 and electronegative indium tin oxide (ITO) electrode 14.Wherein, indium-tin oxide electrode 13 couples with the positive pole of AC power 15, and indium-tin oxide electrode 14 couples with the negative pole of AC power 15.As shown in Figure 2, indium-tin oxide electrode 14 is respectively G1 and G2 with the spacing of the indium-tin oxide electrode 13 of both sides, and indium-tin oxide electrode 14 is respectively W1 and W2 with the width of indium-tin oxide electrode 13.In fact, G1: W1: G2: W2 can be 1: 5: 1: 3, and the positive electrode that light-guide material layer 11 comprises and negative electrode can also be metal electrodes, as long as change from wafer top polishing, but not as limit.
Then, get back to Fig. 1, when having the light directive light-guide material layer 11 of specific light pattern 12, light-guide material layer 11 will form virtual positive electrode 110 and virtual negative electrode 112 according to specific light pattern 12.Wherein, virtual positive electrode 110 is 1: 5 with the width ratio of virtual negative electrode 112, and virtual negative electrode 112 is 1: 3 with the gap ratio of the virtual positive electrode 110 of both sides.
In actual applications, the light with specific light pattern 12 can be launched by the light source emitter of any pattern, such as traditional bulb, fluorescent lamp or light-emittingdiode (LED) etc., and the number of these light source emitters and the position of setting thereof are all determined by actual demand, there is no specific restriction.In addition, the pattern of specific light pattern 12 is also determined by actual demand.
Please refer to Fig. 3 A, Fig. 3 A is the side schematic view that illustrates the light-guide material layer 11 of the light directive microfluid actuation means 1 with specific light pattern 12.As shown in Figure 3A, owing to having formed virtual positive electrode 110 on light-guide material layer 11, produce photoelectricity driving effect with virtual negative electrode 112, cause the interior mobile microfluid of runner 16 above light-guide material layer 11 to flow from left to right, and some the local whirlpool shape that produces clockwise direction rotation in runner 16 flow.In actual applications, this photoelectricity driving effect can be electrophoresis (electrophoresis, EP) mechanism, dielectrophoresis (dielectrophoresis, DEP) mechanism or other any mechanism that electric field and/or changes of magnetic field are provided by electrode.
The definition of so-called " electrophoresis mechanism " is: charged particle is under electric field action, towards moving with its electrically contrary electrode.For example, under electric field action, positive charge will move negative charge towards negative electrode and can move towards positive electrode.To referring to that in " dielectrophoresis mechanism " particle is subject to non-uniform electric field effect and produces mobile phenomenon.When particle is subject to polarizing in non-uniform electric field, owing to being subject to asymmetric electrical field attraction, thereby particle will move towards electric-field strength or weak direction.In fact, dielectrophoresis mechanism can be in order to control any charged or uncharged particle, small materials such as cell, bacterium, protein, DNA or CNT.
Then, please refer to Fig. 3 B, Fig. 3 B be illustrate due to the specific light pattern 12 in Fig. 3 A be moved to specific light pattern 12 ', cause forming on light-guide material layer 11 side schematic view of different dummy electrodes.As shown in Figure 3 B, due to specific light pattern 12 ' be to be obtained by original specific light pattern 12 displacement to the right, thereby cause on light-guide material layer 11 formed dummy electrodes arrangement mode also different from Fig. 3 A.
Now, due to the virtual negative electrode 112 in Fig. 3 B ' and virtual positive electrode 110 ' arrangement mode contrary with the arrangement mode of virtual negative electrode 112 in Fig. 3 A and virtual positive electrode 110, thereby cause above light-guide material layer 11 in runner mobile microfluid will be subject to photoelectricity driving effect and flow from right to left, and flow at some local whirlpool shape counterclockwise rotating that produces.Similarly, this photoelectricity driving effect can be electrophoresis (EP) mechanism, dielectrophoresis (DEP) mechanism or other any mechanism that electric field and/or changes of magnetic field are provided by electrode.
Thus, the present invention can adopt photoelectricity osmotic flow mechanism, by changing the position of optical pattern, be adjusted at the shaping ratio of formed virtual positive electrode and virtual negative electrode on light-guide material layer, do not changing under the condition of voltage and frequency, control direction of motion or the sense of rotation of the particle in microfluid, cause microfluid to form various motion state.
Next, by enumerating several, adopt above-mentioned photoelectricity osmotic flow mechanism to control the different examples of the motion state of microfluid.
First, please refer to Fig. 4 A and Fig. 4 B, Fig. 4 A and Fig. 4 B illustrate an example that adopts above-mentioned photoelectricity osmotic flow mechanism to control the motion state of microfluid.In this embodiment, user can be flowed by the opposite direction of two photoelectricity osmotic flows and be formed a microfluid whirlpool.As shown in Figure 4 A, when user is irradiated light-guide material layer to have the light of an optical pattern, when the photoelectricity osmotic flow that causes left flows downwards and right-hand photoelectricity osmotic flow flows upward, the microfluid that is positioned at both central authorities will produce the whirlpool shape motion being rotated counterclockwise.
For example, when user changes the position (moving to right bit) of this optical pattern, as shown in Figure 4 B, the photoelectricity osmotic flow of left will transfer to flow upward and right-hand photoelectricity osmotic flow transfers to flow downwards, now, the microfluid that is positioned at both central authorities will transfer to produce the whirlpool shape motion turning clockwise.
Then, please refer to Fig. 5 A and Fig. 5 B, Fig. 5 A and Fig. 5 B illustrate another example that adopts above-mentioned photoelectricity osmotic flow mechanism to control the motion state of microfluid.In this embodiment, user can form two microfluid whirlpools by three photoelectricity osmotic flows with different flow directions.
As shown in Figure 5A, when user is irradiated light-guide material layer to have the light of an optical pattern, cause left and right-hand photoelectricity osmotic flow all to flow downwards and when central photoelectricity osmotic flow flows upward, microfluid between the photoelectricity osmotic flow of left and central photoelectricity osmotic flow will produce the whirlpool shape motion being rotated counterclockwise, and will produce at right-hand photoelectricity osmotic flow and microfluid between central photoelectricity osmotic flow the whirlpool shape turning clockwise, moves.
As shown in Figure 5 B, when user changes the position of this optical pattern, cause left and right-hand photoelectricity osmotic flow all then flow upward and central photoelectricity osmotic flow then while flowing downwards, microfluid between the photoelectricity osmotic flow of left and central photoelectricity osmotic flow will then produce the whirlpool shape motion turning clockwise, and microfluid between right-hand photoelectricity osmotic flow and central photoelectricity osmotic flow will then produce the whirlpool shape being rotated counterclockwise and move.
As for Fig. 6, be to illustrate another example of controlling the motion state of microfluid by photoelectricity osmotic flow mechanism.As shown in Figure 6, owing to being positioned at the photoelectricity osmotic flow of below, be by the right-hand left that flows to, make the microfluid that is positioned at photoelectricity osmotic flow top will be affected and produce the whirlpool shape motion turning clockwise.
The second specific embodiment according to the present invention is a kind of microfluid actuation means method of operating.In this embodiment, this microfluidic manipulations device method of operating is to be applied to a microfluidic manipulations device, and this microfluidic manipulations device comprises a runner and a light-guide material layer.Please refer to Fig. 7, Fig. 7 is the process flow diagram that illustrates this microfluidic manipulations device method of operating.
As shown in Figure 7, this microfluidic manipulations device method of operating comprises the following step: first, in step S10, when having this light-guide material layer of a light directive of a specific light pattern, this light-guide material layer is according to these specific light pattern formation at least three dummy electrodes.This light can be launched by the light source emitter of any pattern, such as traditional bulb, fluorescent lamp or light-emittingdiode (LED) etc., and the number of these light source emitters and the position of setting thereof are all determined by actual demand, there is no specific restriction.In addition, the pattern of this specific light pattern is also determined by actual demand.
Wherein, this at least three dummy electrodes comprises one first dummy electrodes, one second dummy electrodes and one the 3rd dummy electrodes, this second dummy electrodes and the 3rd dummy electrodes are the both sides that are positioned at this first dummy electrodes, and in the spacing of this first dummy electrodes and the 3rd dummy electrodes, between the width of this first dummy electrodes, this first dummy electrodes and the spacing of this second dummy electrodes and the width of this second dummy electrodes, there is a special ratios.
In actual applications, the spacing (G1) of the first dummy electrodes and the 3rd dummy electrodes is, the special ratios between the spacing (G2) of width (W1), the first dummy electrodes and second dummy electrodes of the first dummy electrodes and the width (W2) of the second dummy electrodes can be 1: 5: 1: 3.In addition, light-guide material layer is that the material being changed with light by resistance value forms, light-guide material layer can be charge generation layer material TiOPc (Titanium Oxide Phthalocyanine), amorphous silicon (amorphous silicon, a-Si) or polymkeric substance (polymer), but not as limit.
Then,, in step S12, for example, when one variation (producing a displacement) occurs this specific light pattern, this at least three dummy electrodes also changes change with this and produces an electro-osmotic force, controls thus the motion state of a microfluid in this runner.That is to say, this microfluid actuation means method of operating is to adopt a photoelectricity osmotic flow mechanism, is adjusted at the shaping ratio of formed this at least three dummy electrodes on light-guide material layer, to control microfluid by changing the position of optical pattern.
Thus, do not changing under the condition of voltage and frequency, this microfluid actuation means method of operating can be controlled direction of motion or the sense of rotation of the particle in microfluid easily, causes microfluid to form to tend to act, mixes, concentrates, the motion state of separation and whirlpool.
Electro-osmosis stream (the Electro-Osmotic Flow adopting compared to traditional microfluid actuation means in prior art, EOF) mechanism, according to microfluid actuation means of the present invention and method of operating thereof, adopt photoelectricity osmotic flow (Electro-Osmotic Flow, EOF) mechanism, do not changing under the condition of voltage and frequency, by the position of optical pattern (optical pattern), change to be adjusted at the shaping ratio of formed each dummy electrodes on light-guide material layer, control thus the various motion states of microfluid.
Thus, according to microfluid actuation means of the present invention and method of operating thereof, can effectively promote convenience and the dirigibility of user on handling, needn't go troublesomely to change various sizes electrode position or continue to change impressed voltage and frequency thereof, therefore can be widely used in various microfluid systems, such as raw doctor's wafer, pharmaceutical agent mixing, cell or fine particle manipulation etc., has market potential and future development.
By the above detailed description of preferred embodiments, feature of the present invention and spirit can be more clearly described in hope, and not with above-mentioned disclosed preferred embodiment, category of the present invention are limited.On the contrary, its objective is that hope can contain in the category of the scope of the claims of being arranged in of various changes and tool equality institute of the present invention wish application.

Claims (10)

1. a microfluidic manipulations device, comprises:
One runner; And
One light-guide material layer, when thering is this light-guide material layer of a light directive of a specific light pattern, this light-guide material layer is according to these specific light pattern formation at least three dummy electrodes, wherein this at least three dummy electrodes comprises one first dummy electrodes, one second dummy electrodes and one the 3rd dummy electrodes, this second dummy electrodes and the 3rd dummy electrodes are positioned at the both sides of this first dummy electrodes, and the spacing at this first dummy electrodes and the 3rd dummy electrodes, the width of this first dummy electrodes, between the spacing of this first dummy electrodes and this second dummy electrodes and the width of this second dummy electrodes, there is a special ratios,
Wherein, this special ratios is 1: 5: 1: 3, and when one variation occurs this specific light pattern, this at least three dummy electrodes also changes change with this and produces an electro-osmotic force, controls thus the motion state of a microfluid in this runner.
2. microfluidic manipulations device as claimed in claim 1, adopts a photoelectricity osmotic flow mechanism, is adjusted at the shaping ratio of formed this at least three dummy electrodes on this light-guide material layer, to control this microfluid by changing the position of optical pattern.
3. microfluidic manipulations device as claimed in claim 1, do not changing under the condition of voltage and frequency, this microfluidic manipulations device is controlled direction of motion or the sense of rotation of the particle in this microfluid, causes this microfluid to form to tend to act, mixes, concentrates, the motion state of separation and whirlpool.
4. microfluidic manipulations device as claimed in claim 1, the material that wherein this light-guide material layer is changed with light by resistance value forms.
5. microfluidic manipulations device as claimed in claim 1, wherein this light-guide material layer can be charge generation layer material TiOPc, amorphous silicon or polymkeric substance.
6. a microfluidic manipulations device method of operating, is applied to a microfluidic manipulations device, and this microfluidic manipulations device comprises a runner and a light-guide material layer, and this microfluidic manipulations device method of operating comprises the following step:
(a) when having this light-guide material layer of a light directive of a specific light pattern, this light-guide material layer is according to these specific light pattern formation at least three dummy electrodes; And
(b), when one variation occurs this specific light pattern, this at least three dummy electrodes also changes change with this and produces an electro-osmotic force, controls thus the motion state of a microfluid in this runner;
Wherein, this at least three dummy electrodes comprises one first dummy electrodes, one second dummy electrodes and one the 3rd dummy electrodes, this second dummy electrodes and the 3rd dummy electrodes are positioned at the both sides of this first dummy electrodes, and in the spacing of this first dummy electrodes and the 3rd dummy electrodes, between the width of this first dummy electrodes, this first dummy electrodes and the spacing of this second dummy electrodes and the width of this second dummy electrodes, have a special ratios, this special ratios is 1: 5: 1: 3.
7. microfluidic manipulations device method of operating as claimed in claim 6, adopts a photoelectricity osmotic flow mechanism, is adjusted at the shaping ratio of formed this at least three dummy electrodes on this light-guide material layer, to control this microfluid by changing the position of optical pattern.
8. microfluidic manipulations device method of operating as claimed in claim 6, do not changing under the condition of voltage and frequency, this microfluidic manipulations device is controlled direction of motion or the sense of rotation of the particle in this microfluid, causes this microfluid to form to tend to act, mixes, concentrates, the motion state of separation and whirlpool.
9. microfluidic manipulations device method of operating as claimed in claim 6, the material that wherein this light-guide material layer is changed with light by resistance value forms.
10. microfluidic manipulations device method of operating as claimed in claim 6, wherein this light-guide material layer can be charge generation layer material TiOPc, amorphous silicon or polymkeric substance.
CN201010269521.9A 2010-08-30 2010-08-30 Micro-fluid control device and operation method thereof Expired - Fee Related CN102384980B (en)

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CN101403742A (en) * 2008-10-29 2009-04-08 东南大学 Method for dielectric characterization of micro-nano biological particle by optoelectronic forceps
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