CN102359860B - Clean vacuum system for engine plume test study and vacuum pumping repressing method thereof - Google Patents
Clean vacuum system for engine plume test study and vacuum pumping repressing method thereof Download PDFInfo
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- CN102359860B CN102359860B CN 201110201372 CN201110201372A CN102359860B CN 102359860 B CN102359860 B CN 102359860B CN 201110201372 CN201110201372 CN 201110201372 CN 201110201372 A CN201110201372 A CN 201110201372A CN 102359860 B CN102359860 B CN 102359860B
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Abstract
The invention provides a clean vacuum system for engine plume test study and a vacuum pumping repressing method thereof, which belong to the technical field of engine vacuum science. The clean vacuum system comprises a low vacuum system, a low vacuum liquid nitrogen cold trap system, a high vacuum system, a high vacuum liquid nitrogen cold trap system, a low temperature pump liquid nitrogen supply system, an air repressing system, a nitrogen gas repressing system, a container vacuum measuring system, a residue gas analysis system and a liquid helium hot sinking liquid nitrogen hot sinking andplume absorption pump. The vacuum obtaining is mainly completed through the clean low vacuum system, the high vacuum system and the liquid helium hot sinking liquid nitrogen hot sinking and plume absorption pump, which are used for obtaining various clean vacuum degrees required by the plume test, the highest ultra-high dynamic vacuum degree capable of being obtained is 10 to 6Pa, wherein the lowvacuum system and the high vacuum system are respectively provided with the liquid nitrogen cold trap system and are used for absorbing oil steam generated when a mechanical pump works, and the cleanness of a vacuum container is ensured.
Description
Technical field
The invention belongs to engine vacuum science technical field, the present invention relates to a kind of Vacuum System Design for vacuum tank, specifically be a kind of clean vacuum system for engine plume testing research and vacuumize multiple pressure method.
Background technology
An important prerequisite of plume effect problem research is the quick absorption that guarantees plume gas, makes environment vacuum tightness to reach the set quota.
At present, the domestic vacuum environment analog machine that also is not specifically designed to the research of engine plume testing, space environment simulation such as KM4, KM6 equipment is mainly used in studying thermal vacuum tests such as the satellite research of static state or low velocity gas, static state or low velocity gas there is pumping speed preferably, and the engine plume testing is mainly used in characteristics such as the Flow Field Distribution, measuring contamination of high temperature, the high speed plume gas of research trends, thereby environmental simulation equipment such as KM4, KM6 can't effectively carry out the ground experiment research of engine plume effect.What be specifically designed in this respect research abroad only has (Deutsches Zentrum f ü r Luft-und a Raumfahrt of German Aerospace Center, abbreviation DLR) STG vacuum plume testing system, its tank diameter is 3.3m, length is 7.6m, can guarantee 0.5N engine (mass rate 0.2g/s, test(ing) medium normal temperature nitrogen) running hours is kept pressure less than 10
-3Pa.
There is the shortcoming of self in STG vacuum plume testing system, and namely little, the plume testing of cabin body volume is limited in scope, and for the engine plume testing more than the flow 2g/s, can't keep 10
-3The following high dynamic vacuum degree of Pa can not effectively be simulated the engine real work situation in a vacuum of various flows.Because its system's pumping speed size can't be regulated, can not obtain the various vacuum tightnesss that satisfy the requirement of engine plume testing by changing the pumping speed size simultaneously.
Summary of the invention
At problems of the prior art, the invention provides a kind of novel clean vacuum system that is specifically designed to the research of engine plume testing, be used for the clean vacuum system of engine plume testing research and vacuumize multiple pressure method, this clean vacuum system can obtain the various vacuum tightnesss of plume testing requirement according to engine flow size, system's cleanliness without any pollution, system's pumping speed adjustable size, the system works pattern is various, the container vacuum reaches presses process safe and reliable again, cryopump liquid nitrogen supply system flow can be regulated automatically, cryopump is taken out in advance, precooling and regenerate convenient and swiftly, the solution of above-mentioned technical matters has increased the spatter property of vacuum plume effect test system operation, reliability, practicality and economy.
The clean vacuum system that is used for the research of engine plume testing that the present invention proposes comprises low vacuum system, low vacuum liquid-nitrogen cooled trap system, high vacuum system, high vacuum liquid-nitrogen cooled trap system, cryopump liquid nitrogen supply system, the multiple pressing system of air, the multiple pressing system of nitrogen, liquid helium is heat sink, liquid nitrogen heat sink and plume adsorption pump.
The low vacuum system is the lobe pump unit; The lobe pump unit comprises screw pump, butterfly valve A, Pirani gauge A, solenoid valve A, lobe pump, butterfly valve C and push-pull valve A; The low vacuum system also comprises solenoid valve C, Pirani gauge C and push-pull valve C; Screw pump is connected with push-pull valve A by butterfly valve A, Pirani gauge A, solenoid valve A, lobe pump in turn; Push-pull valve A is connected by the entrance of threeway with the liquid nitrogen cold trap A of low vacuum liquid-nitrogen cooled trap system, and liquid nitrogen cold trap A outlet is connected with vacuum tank after connecting push-pull valve C by pipeline, is connected with Pirani gauge C between the outlet of push-pull valve C and liquid nitrogen cold trap A; And between the entrance of push-pull valve A and liquid nitrogen cold trap, be provided with solenoid valve C; Lobe pump is furnished with bypass duct, and butterfly valve C is installed on the bypass duct, makes the gas lobe pump of not flowing through when screw pump works independently.
High vacuum system comprises cryopump, accessory molecule pump, prime molecular pump and sliding vane rotary pump; The prime molecular pump is furnished with bypass duct, and electromagnetic valve I is installed on the bypass duct, makes the gas prime molecular pump of not flowing through when sliding vane rotary pump works independently; Pre-extraction before cryopump starts is served as forepump with prime molecular pump, sliding vane rotary pump and is finished; Safety valve A is arranged on the connecting line between cryopump and the cryopump liquid nitrogen supply system, sliding vane rotary pump is connected with push-pull valve J front end by solenoid valve J, the liquid nitrogen cold trap B of high vacuum liquid-nitrogen cooled trap system, prime molecular pump in turn by pipeline, push-pull valve J rear end is equipped with the two siphunculus road: first via pipeline is connected with vacuum tank by push-pull valve E, cryopump, push-pull valve D in turn, forms the cryopump road of bleeding; The second road pipeline is connected with vacuum tank by solenoid valve E, accessory molecule pump, push-pull valve F in turn, forms the accessory molecule pump road of bleeding; Two-way is bled and also is provided with solenoid valve H between road and the push-pull valve J; Be provided with cold rule A between cryopump and the push-pull valve D; Be provided with cold rule B between accessory molecule pump and the push-pull valve F; Be provided with Pirani gauge D between push-pull valve J and the prime molecular pump, manually air release is connected between the liquid nitrogen cold trap B of prime molecular pump and high vacuum liquid-nitrogen cooled trap system.
The low vacuum liquid-nitrogen cooled trap system comprises liquid nitrogen container A, liquid nitrogen supply valve A, pipeline safety valve A, cold-trap feed liquor valve A, liquid nitrogen cold trap A, electronic level meter A and atmospheric valve A, and the high vacuum liquid-nitrogen cooled trap system comprises liquid nitrogen container B, liquid nitrogen supply valve B, pipeline safety valve B, cold-trap feed liquor valve B, liquid nitrogen cold trap B, electronic level meter B and atmospheric valve B; The low vacuum liquid-nitrogen cooled trap system is used to the oil removing of low vacuum system; The high vacuum liquid-nitrogen cooled trap system is used to the high vacuum system oil removing; Electronic level meter A, electronic level meter B are connected with liquid nitrogen cold trap A, liquid nitrogen cold trap B respectively; The push-pull valve A of low vacuum system is connected by the entrance of threeway with liquid nitrogen cold trap A, and is provided with solenoid valve C between the entrance of push-pull valve A and liquid nitrogen cold trap A; Liquid nitrogen cold trap B is installed between prime molecular pump and the solenoid valve J; Liquid nitrogen container A connects liquid nitrogen supply valve A, cold-trap feed liquor valve A, liquid nitrogen cold trap A, atmospheric valve A in turn by pipeline; Liquid nitrogen container B connects liquid nitrogen supply valve B, cold-trap feed liquor valve B, liquid nitrogen cold trap B, atmospheric valve B in turn by pipeline.
Cryopump liquid nitrogen supply system comprises that liquid nitrogen container C, liquid nitrogen supply valve C, pipeline safety valve C, low temperature bypass valve A, low-temperature solenoid valve A, pipeline safety valve D, gas-liquid separator feed liquor valve A, gas-liquid separator A, safety valve C, electronic level meter C, atmospheric valve C, cryogenic valve A, safety valve D, gas-liquid separator liquid valve A, gas-liquid separator return liquid valve A, safety valve E and cryogenic valve B; Gas-liquid separator A is furnished with electronic level meter C, be used for monitoring gas-liquid separator A liquid nitrogen liquid level, the other end of electronic level meter C is connected to form the closed-loop path with low-temperature solenoid valve A respectively, cryopump liquid nitrogen export pipeline one end extends to the gas-liquid separator top always, liquid nitrogen container C is connected with liquid nitrogen supply valve C, low-temperature solenoid valve A, gas-liquid separator feed liquor valve A, gas-liquid separator A in turn by pipeline, and also is connected with pipeline safety valve D on the pipeline between low-temperature solenoid valve A and the gas-liquid separator feed liquor valve A; Gas-liquid separator A returns liquid valve A by cryogenic valve B, gas-liquid separator and is connected with the liquid nitrogen inlet of cryopump, cryopump liquid mouth is connected with gas-liquid separator A by cryogenic valve A, gas-liquid separator liquid valve A, atmospheric valve C is installed in gas-liquid separator A top by pipeline, liquid nitrogen container D is connected with liquid nitrogen supply valve D, low-temperature solenoid valve B, gas-liquid separator feed liquor valve B, gas-liquid separator B in turn by pipeline, and the pipeline between low-temperature solenoid valve B and gas-liquid separator feed liquor valve B is connected with pipeline safety valve F.
The multiple pressing system of air comprises that air strainer, air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C and nitrogen insert solenoid valve, air strainer one end is direct and atmosphere connection by pipeline, the other end walks abreast respectively by three-way pipeline and connects air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C, and the other end of air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C all finally is connected to vacuum tank; The end that nitrogen inserts solenoid valve is installed between air solenoid supply valve C and the vacuum tank by pipeline, and the other end that nitrogen inserts solenoid valve is connected by the pipeline safety valve G of pipeline with the multiple pressing system of nitrogen.
The multiple pressing system of nitrogen comprises gas nitrogen jar, gas nitrogen supply valve and pipeline safety valve, for pressing again the early stage that is used for vacuum tank after the off-test; Gas nitrogen jar inserts solenoid valve by gas nitrogen supply valve and nitrogen and is connected, and is furnished with safety valve G on the connecting line between gas nitrogen supply valve and the nitrogen access solenoid valve;
Liquid helium is heat sink, liquid nitrogen heat sink, plume adsorption pump all are positioned at vacuum tank inside, and liquid helium is heat sink to be positioned at liquid nitrogen heat sink 3000 inside, and by the liquid nitrogen heat sink protection, the plume adsorption pump is positioned at a side of the heat sink inside of liquid helium, is convenient to adsorb plume testing gas.
The clean vacuum system that is used for the research of engine plume testing that the present invention proposes also comprises container vacuum measurement system, is used for measuring the vacuum tightness of vacuum tank, and this container vacuum measurement system comprises Pirani gauge E, Pirani gauge F, ionization gauge A and ionization gauge B; Pirani gauge E, Pirani gauge F, ionization gauge A and ionization gauge B directly are connected with vacuum tank by vessel flange respectively.
The clean vacuum system that is used for the research of engine plume testing that the present invention proposes also comprises the rga system, is used for vacuum tank internal gas composition measurement; The rga system comprises residual gas analyzer, push-pull valve K; Residual gas analyzer is connected to vacuum tank by push-pull valve K.
Use above-mentioned equipment, the present invention also proposes the multiple pressure method that vacuumizes for the clean vacuum system of engine plume testing research, is specially to comprise following step:
(1) start container vacuum measurement system, implement to measure the vacuum tank internal pressure, vacuumize and press again and finish until container, entire test is finished;
(2) before low vacuum system and high vacuum system work, start low vacuum liquid-nitrogen cooled trap system, high vacuum liquid-nitrogen cooled trap system earlier, respectively to liquid nitrogen cold trap A, liquid nitrogen cold trap B feed flow, liquid nitrogen cold trap A, liquid nitrogen cold trap B are chilled to liquid nitrogen temperature in advance, the oil vapour that produces when being used for absorbing lobe pump and sliding vane rotary pump work;
(3) start the low vacuum system, the work of lobe pump unit is evacuated to 1Pa with the vacuum tightness of vacuum tank;
(4) start cryopump liquid nitrogen supply system, carry liquid nitrogen refrigerating system to cryopump respectively, make cryopump inside reach liquid nitrogen temperature, finish the precooling of cryopump;
(5) start high vacuum system, cryopump is started working, and vacuum tank vacuum tightness is evacuated to 10
-4Pa;
(6) start that liquid helium is heat sink, liquid nitrogen heat sink, plume adsorption pump, realize ULTRA-HIGH VACUUM PUMPING, vacuum tank vacuum tightness is evacuated to 10
-6Pa;
(7) begin to carry out the engine plume testing, start remaining analytic system, the internal tank gas ingredients is analyzed;
(8) after the off-test, start the multiple pressing system of nitrogen, the multiple pressing system of air, finish the multiple pressure to vacuum tank, the multiple pressing system of nitrogen is depressed into 1000Pa again with vacuum tank, and the multiple pressing system of air is depressed into normal pressure with vacuum tank again from 1000Pa.
The advantage that the present invention has is:
(1) the clean vacuum system for the research of engine plume testing provided by the invention belongs to a kind of brand-new test field, and ring mould equipment different from the past is specifically designed to the research of engine plume effect test.
(2) the clean vacuum system for the research of engine plume testing provided by the invention, low vacuum system and high vacuum system all are furnished with liquid-nitrogen cooled trap system, and the oil vapour that produces when being used for absorbing working machine pump guarantees the vacuum tank cleaning.
(3) the clean vacuum system for the research of engine plume testing provided by the invention, vacuum is obtained main, liquid nitrogen heat sink heat sink by clean low vacuum system, high vacuum system and liquid helium and the plume adsorption pump is finished, be used for obtaining the various clean vacuum tightness that plume testing needs, high energy obtains 10
-6The superelevation dynamic vacuum degree of Pa.
(4) the clean vacuum system for the research of engine plume testing provided by the invention, multiple pressing system is made up of the multiple pressing system of nitrogen and the multiple pressing system of air.The multiple pressing system of nitrogen is used for pressing again the early stage of vacuum tank, avoids in the multiple pressure process airborne steam, carbon dioxide condensing in heat sink surface, influence multiple pressure the in early stage; The later stage that the multiple pressing system of air is used for vacuum tank presses again, and is furnished with filtrator, and can be vacuum tank provides pure air to press again.
(5) the clean vacuum system for engine plume testing research provided by the invention, the vacuum measurement system is furnished with Pirani gauge and ionization gauge, and two kinds of rule have measurement range separately, can realize the gamut high-acruracy survey of vacuum tank.
(6) the novel clean vacuum system that is specifically designed to the research of engine plume testing provided by the invention is furnished with the rga system, is used for vacuum tank gas inside composition measurement.
(7) the clean vacuum system for the research of engine plume testing provided by the invention is furnished with cryopump liquid nitrogen supply system, is used for continuing feed flow to cryopump.
(8) the clean vacuum system for the research of engine plume testing provided by the invention, cryopump liquid nitrogen supply system is furnished with gas-liquid separator, be equipped with the electronic level meter on the gas-liquid separator, realize the automatic control of gas-liquid separator liquid level, guarantee the automatic liquid supply of cryopump liquid nitrogen and effectively save the liquid nitrogen consumption.
Description of drawings
Fig. 1: the clean vacuum system construction drawing that is used for the research of engine plume testing that the present invention proposes;
Fig. 2: the clean vacuum system that is used for the research of engine plume testing that the present invention proposes vacuumizes multiple pressure method flow diagram.
Among the figure:
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
A kind of clean vacuum system for the research of engine plume testing of the present invention, as shown in Figure 1, comprise the multiple pressing system 700 of low vacuum system 100, low vacuum liquid-nitrogen cooled trap system 200, high vacuum system 300, high vacuum liquid-nitrogen cooled trap system 400, cryopump liquid nitrogen supply system 500, air, nitrogen multiple pressing system 800, container vacuum measurement system 900, rga system 1000, liquid helium is heat sink 2000, liquid nitrogen heat sink 3000, plume adsorption pump 4000.
Low vacuum liquid-nitrogen cooled trap system 200 comprises liquid nitrogen container A201, liquid nitrogen supply valve A202, pipeline safety valve A203, cold-trap feed liquor valve A204, liquid nitrogen cold trap A205, electronic level meter A206, atmospheric valve A207.High vacuum liquid-nitrogen cooled trap system 400 comprises liquid nitrogen container B401, liquid nitrogen supply valve B402, pipeline safety valve B403, cold-trap feed liquor valve B404, liquid nitrogen cold trap B405, electronic level meter B406, atmospheric valve B407.Wherein low vacuum liquid-nitrogen cooled trap system 200 is used to 100 oil removings of low vacuum system; High vacuum liquid-nitrogen cooled trap system 400 is used to high vacuum system 300 oil removings.Lobe pump 109 in the low vacuum system 100 can produce oil vapour for oily mechanical pump is arranged during work, and low vacuum liquid-nitrogen cooled trap system 200 fully adsorbed oil steam prevents that oil vapour from entering vacuum tank along pipeline; Sliding vane rotary pump 328 in the high vacuum system 300 can produce oil vapour for oily mechanical pump is arranged during work, and high vacuum liquid-nitrogen cooled trap system 400 fully adsorbed oil steam prevents that oil vapour from entering vacuum tank along pipeline.Wherein liquid nitrogen supply valve A202 and liquid nitrogen supply valve B402 are for delivery of liquid nitrogen; Pipeline safety valve A203 and pipeline safety valve B403 are used for preventing that system pressure is too high; Cold-trap feed liquor valve A204 and cold-trap feed liquor valve B404 are used for the feed liquor amount of control liquid nitrogen cold trap, and be manually adjustable; Electronic level meter A206, electronic level meter B406 are connected with liquid nitrogen cold trap A205, liquid nitrogen cold trap B405 respectively, are used for the liquid level of monitoring liquid nitrogen cold trap, guarantee liquid nitrogen abundance in the liquid nitrogen cold trap, guarantee the abundant absorption to oil vapour; The nitrogen discharge that atmospheric valve A207 and atmospheric valve B407 are used for liquid nitrogen cold trap is produced is to atmosphere.The push-pull valve A113 of low vacuum system 100 is connected by the entrance of threeway with the liquid nitrogen cold trap A205 of low vacuum liquid-nitrogen cooled trap system 200, and is provided with solenoid valve C115 between the entrance of the liquid nitrogen cold trap A205 of push-pull valve A113 and low vacuum liquid-nitrogen cooled trap system 200.Liquid nitrogen cold trap B405 is installed between the prime molecular pump 324 and solenoid valve J327 of high vacuum system 300.Liquid nitrogen container A201 connects liquid nitrogen supply valve A202, cold-trap feed liquor valve A204, liquid nitrogen cold trap A205, atmospheric valve A207 in turn by pipeline, forms liquid-nitrogen cooled trap system 200; Liquid nitrogen container B401 connects liquid nitrogen supply valve B402, cold-trap feed liquor valve B404, liquid nitrogen cold trap B405, atmospheric valve B407 in turn by pipeline, forms liquid-nitrogen cooled trap system 400.
Cryopump liquid nitrogen supply system 500 comprises that liquid nitrogen container C501, liquid nitrogen supply valve C502, pipeline safety valve C503, low temperature bypass valve A504, low-temperature solenoid valve A505, pipeline safety valve D506, gas-liquid separator feed liquor valve A507, gas-liquid separator A508, safety valve C509, electronic level meter C510, atmospheric valve C511, cryogenic valve A512, safety valve D513, gas-liquid separator liquid valve A514, gas-liquid separator return liquid valve A515, safety valve E516, cryogenic valve B517.Gas-liquid separator A508 is furnished with electronic level meter C510, be used for monitoring gas-liquid separator A508 liquid nitrogen liquid level, the electronic level meter C510 other end is connected to form the closed-loop path with low-temperature solenoid valve A505 respectively, the liquid level numerical value of its monitoring can be transferred to low-temperature solenoid valve A505 automatically by simulating signal, control low-temperature solenoid valve A505 can open or close automatically according to the liquid level height, guarantee that the gas-liquid separator liquid level is constant, realize gas-liquid separator A508 automatic control of liquid level, reduced the trouble of manual operation.Gas-liquid separator A508 is mainly used in continuing to carry liquid nitrogen refrigerating to the cryopump 303 of high vacuum system 300, cryopump 303 liquid nitrogen export pipelines one end of high vacuum system 300 extends to gas-liquid separator A508 top always, the cold nitrogen (or gas-liquid two-phase) that produces in cryopump 303 process of refrigerastions is directly delivered to gas-liquid separator A508 top by export pipeline, be convenient to cryopump 303 exhausts and unnecessary liquid nitrogen is recycled to gas-liquid separator A508, effectively reduce liquid nitrogen consumption, reduce the experimentation cost of cryopump 303 operations.Liquid nitrogen container C501 is connected with liquid nitrogen supply valve C502, low-temperature solenoid valve A505, gas-liquid separator feed liquor valve A507, gas-liquid separator A508 in turn by pipeline, and also is connected with pipeline safety valve D506 on the pipeline between low-temperature solenoid valve A505 and the gas-liquid separator feed liquor valve A507; Gas-liquid separator A508 returns liquid valve A515 by cryogenic valve B517, gas-liquid separator and is connected with the liquid nitrogen inlet of cryopump 303, cryopump 303 liquid outlets are connected with gas-liquid separator A508 by cryogenic valve A512, gas-liquid separator liquid valve A514, atmospheric valve C511 is installed in gas-liquid separator A508 top by pipeline, and exhaust is used.Cryopump A303 and gas-liquid separator return between the liquid valve A515 safety valve A306 are installed, and safety valve A306 is used for preventing that system pressure is too high.
The multiple pressing system 700 of air comprises that air strainer 701, air solenoid supply valve A702, air solenoid supply valve B703, air solenoid supply valve C704 and nitrogen insert solenoid valve 705, be used for providing pure air, the later stage that is used for vacuum tank after the off-test presses again, is depressed into normal pressure again from 1000Pa.Air solenoid supply valve A702, air solenoid supply valve B703, the air solenoid supply valve C704 of the multiple pressing system 700 of air, can select the quantity of the air solenoid supply valve of need unlatching as required, realize the flow regulation of air supply, flow minimum when only opening 1 air solenoid supply valve, flow maximum during 3 air solenoid supply valve standard-sized sheets.The multiple pressing system 700 of air is furnished with 1 air strainer 701, is used for removing impurity such as airborne dust, guarantees to be delivered to the air cleaning of vacuum tank inside.Air strainer 701 1 ends are direct and atmosphere connection by pipeline, the other end walks abreast respectively by three-way pipeline and connects air solenoid supply valve A702, air solenoid supply valve B703, air solenoid supply valve C704, and the other end of air solenoid supply valve A702, air solenoid supply valve B703, air solenoid supply valve C704 all finally is connected to vacuum tank.The end that nitrogen inserts solenoid valve 705 is installed between air solenoid supply valve C704 and the vacuum tank by pipeline, and the other end that nitrogen inserts solenoid valve 705 is connected by the pipeline safety valve G803 of pipeline with the multiple pressing system 800 of nitrogen.
The multiple pressing system 800 of nitrogen comprises gas nitrogen jar 801, gas nitrogen supply valve 802 and pipeline safety valve G803, can provide high pure nitrogen to vacuum tank, and press the early stage that is used for vacuum tank after the off-test again, and the vacuum tank inflation is depressed into 1000Pa again.Gas nitrogen jar 801 inserts solenoid valve 705 by gas nitrogen supply valve 802 with the nitrogen of the multiple pressing system 700 of air and is connected.Be furnished with safety valve G803 on the connecting line between gas nitrogen supply valve 802 and the nitrogen access solenoid valve 705, be used for preventing that system pressure is too high.
Container vacuum measurement system 900 comprises Pirani gauge E901, Pirani gauge F903, ionization gauge A902 and ionization gauge B904.Be mainly used in measuring the vacuum tightness of vacuum tank, realize 10
-8Pa to 10
5The gamut of Pa is measured.Each 2 of Pirani gauge and ionization gauges have been realized double copies, improve measuring reliability.The measuring range in high accuracy 10 of Pirani gauge E901, Pirani gauge F 903
5Pa to 10
-1Pa, the measuring range in high accuracy 10 of ionization gauge A902 and ionization gauge B 904
-1Pa to 10
-8Pa, two kinds of rule cooperatively interact, and realize the high-acruracy survey of gamut.Pirani gauge E901, Pirani gauge F903, ionization gauge A902 and ionization gauge B904 directly are connected with vacuum tank by vessel flange respectively.
Liquid helium is heat sink 2000, liquid nitrogen heat sink 3000, plume adsorption pump 4000 all are positioned at vacuum tank inside, belongs to the low-temperature deep pump, and pumping speed can reach 1,000,000 grades even millions, can realize the ULTRA-HIGH VACUUM PUMPING of vacuum tank.Liquid helium is heat sink 2000 and the equal logical liquid helium refrigeration of plume adsorption pump 4000, and pumping speed reaches millions; Liquid nitrogen heat sink 3000 logical liquid nitrogen refrigeratings, pumping speed reaches 1,000,000 grades.Liquid helium is heat sink 2000 to be positioned at liquid nitrogen heat sink 3000 inside, and by liquid nitrogen heat sink 3000 protections, plume adsorption pump 4000 is positioned at liquid helium heat sink 2000 inner sides, is convenient to effectively adsorb plume testing gas.
Use above-mentioned equipment, the present invention also proposes the multiple pressure method that vacuumizes for the clean vacuum system of engine plume testing research, as shown in Figure 2, is specially and comprises following step:
(1) start container vacuum measurement system 900, implement to measure the vacuum tank internal pressure, vacuumize and press again and finish until container, entire test is finished;
(2) before low vacuum system 100 and high vacuum system 300 work, start low vacuum liquid-nitrogen cooled trap system 200, high vacuum liquid-nitrogen cooled trap system 400 earlier, respectively to liquid nitrogen cold trap A205, liquid nitrogen cold trap B405 feed flow, liquid nitrogen cold trap A205, liquid nitrogen cold trap B405 are chilled to liquid nitrogen temperature in advance, the oil vapour that produces when being used for absorbing lobe pump 109 and sliding vane rotary pump 328 work;
(3) start low vacuum system 100, the work of lobe pump unit is evacuated to 1Pa with the vacuum tightness of vacuum tank;
(4) start cryopump liquid nitrogen supply system 500, carry liquid nitrogen refrigerating system to cryopump 303, make cryopump 303 inside reach liquid nitrogen temperature, finish the precooling of cryopump 303;
(5) start high vacuum system 300, cryopump 303 is started working, and vacuum tank vacuum tightness is evacuated to 10
-4Pa;
(6) start that liquid helium is heat sink 2000, liquid nitrogen heat sink 3000, plume adsorption pump 4000, realize ULTRA-HIGH VACUUM PUMPING, vacuum tank vacuum tightness is evacuated to 10
-6Pa;
(7) begin to carry out the engine plume testing, start remaining analytic system 1000, vacuum tank internal gas composition is analyzed;
(8) after the off-test, start the multiple pressing system 800 of nitrogen, the multiple pressing system 700 of air, finish the multiple pressure to vacuum tank, the multiple pressing system 800 of nitrogen is depressed into 1000Pa again with vacuum tank, and the multiple pressing system 700 of air is depressed into normal pressure with vacuum tank again from 1000Pa.
The preliminary work that need do during cryopump 303 work is taken out and precooling in advance: 1. start prime molecular pump 324 and sliding vane rotary pump 328 and finish taking out in advance of cryopump 303 cavitys, cryopump 303 cavitys are evacuated to 10 in advance
-2Pa; 2. work as cryopump 303 cavitys and reach 10
-2During Pa, start cryopump liquid nitrogen supply system 500, to cryopump 303 one-level cold drawing feed flow nitrogen, cryopump 303 one-level cold drawing temperature are chilled to liquid nitrogen temperature in advance; 3. when cryopump 303 one-level cold drawings reach liquid nitrogen temperature, start the cryopump helium compressor, cryopump 303 secondary cold drawings are chilled to 12K in advance.
The multiple baric flow journey of vacuum tank is specially: need after the off-test vacuum tank is depressed into normal pressure again, start the multiple pressing system 800 of nitrogen earlier, vacuum tank is depressed into 1000Pa again, close nitrogen then and insert solenoid valve 705, open air solenoid supply valve A702, air solenoid supply valve B703, air solenoid supply valve C704, fill clean air to vacuum tank, vacuum tank is depressed into normal pressure (1 standard atmospheric pressure) again from 1000Pa.
Claims (7)
1. be used for the clean vacuum system of engine plume testing research, it is characterized in that: comprise low vacuum system, low vacuum liquid-nitrogen cooled trap system, high vacuum system, high vacuum liquid-nitrogen cooled trap system, cryopump liquid nitrogen supply system, the multiple pressing system of air, the multiple pressing system of nitrogen, liquid helium is heat sink, liquid nitrogen heat sink and plume adsorption pump;
The low vacuum system is the lobe pump unit; The lobe pump unit comprises screw pump, butterfly valve A, Pirani gauge A, solenoid valve A, lobe pump, butterfly valve C and push-pull valve A; The low vacuum system also comprises solenoid valve C, Pirani gauge C and push-pull valve C; Screw pump is connected with push-pull valve A by butterfly valve A, Pirani gauge A, solenoid valve A, lobe pump in turn; Push-pull valve A is connected by the entrance of threeway with the liquid nitrogen cold trap A of low vacuum liquid-nitrogen cooled trap system, and liquid nitrogen cold trap A outlet is connected with vacuum tank after connecting push-pull valve C by pipeline, is connected with Pirani gauge C between the outlet of push-pull valve C and liquid nitrogen cold trap A; And between the entrance of push-pull valve A and liquid nitrogen cold trap, be provided with solenoid valve C; Lobe pump is furnished with bypass duct, and butterfly valve C is installed on the bypass duct, makes the gas lobe pump of not flowing through when screw pump works independently;
High vacuum system comprises cryopump, accessory molecule pump, prime molecular pump and sliding vane rotary pump; The prime molecular pump is furnished with bypass duct, and electromagnetic valve I is installed on the bypass duct, makes the gas prime molecular pump of not flowing through when sliding vane rotary pump works independently; Pre-extraction before cryopump starts is served as forepump with prime molecular pump, sliding vane rotary pump and is finished; Safety valve A is arranged on the connecting line between cryopump and the cryopump liquid nitrogen supply system, sliding vane rotary pump is connected with push-pull valve J front end by solenoid valve J, the liquid nitrogen cold trap B of high vacuum liquid-nitrogen cooled trap system, prime molecular pump in turn by pipeline, push-pull valve J rear end is equipped with the two siphunculus road: first via pipeline is connected with vacuum tank by push-pull valve E, cryopump, push-pull valve D in turn, forms the cryopump road of bleeding; The second road pipeline is connected with vacuum tank by solenoid valve E, accessory molecule pump, push-pull valve F in turn, forms the accessory molecule pump road of bleeding; Two-way is bled and also is provided with solenoid valve H between road and the push-pull valve J; Be provided with cold rule A between cryopump and the push-pull valve D; Be provided with cold rule B between accessory molecule pump and the push-pull valve F; Be provided with Pirani gauge D between push-pull valve J and the prime molecular pump, manually air release is connected between the liquid nitrogen cold trap B of prime molecular pump and high vacuum liquid-nitrogen cooled trap system;
The low vacuum liquid-nitrogen cooled trap system comprises liquid nitrogen container A, liquid nitrogen supply valve A, pipeline safety valve A, cold-trap feed liquor valve A, liquid nitrogen cold trap A, electronic level meter A and atmospheric valve A, and the high vacuum liquid-nitrogen cooled trap system comprises liquid nitrogen container B, liquid nitrogen supply valve B, pipeline safety valve B, cold-trap feed liquor valve B, liquid nitrogen cold trap B, electronic level meter B and atmospheric valve B; The low vacuum liquid-nitrogen cooled trap system is used to the oil removing of low vacuum system; The high vacuum liquid-nitrogen cooled trap system is used to the high vacuum system oil removing; Electronic level meter A, electronic level meter B are connected with liquid nitrogen cold trap A, liquid nitrogen cold trap B respectively; The push-pull valve A of low vacuum system is connected by the entrance of threeway with the liquid nitrogen cold trap A of low vacuum liquid-nitrogen cooled trap system, and is provided with solenoid valve C between the entrance of push-pull valve A and liquid nitrogen cold trap A; Liquid nitrogen cold trap B is installed between the prime molecular pump and solenoid valve J of high vacuum system; Liquid nitrogen container A connects liquid nitrogen supply valve A, cold-trap feed liquor valve A, liquid nitrogen cold trap A, atmospheric valve A in turn by pipeline; Liquid nitrogen container B connects liquid nitrogen supply valve B, cold-trap feed liquor valve B, liquid nitrogen cold trap B, atmospheric valve B in turn by pipeline;
Cryopump liquid nitrogen supply system comprises that liquid nitrogen container C, liquid nitrogen supply valve C, pipeline safety valve C, low temperature bypass valve A, low-temperature solenoid valve A, pipeline safety valve D, gas-liquid separator feed liquor valve A, gas-liquid separator A, safety valve C, electronic level meter C, atmospheric valve C, cryogenic valve A, safety valve D, gas-liquid separator liquid valve A, gas-liquid separator return liquid valve A, safety valve E and cryogenic valve B; Gas-liquid separator A is furnished with electronic level meter C, be used for monitoring gas-liquid separator A liquid nitrogen liquid level, the other end of electronic level meter C is connected to form the closed-loop path with low-temperature solenoid valve A respectively, cryopump liquid nitrogen export pipeline one end extends to the gas-liquid separator top always, liquid nitrogen container C is connected with liquid nitrogen supply valve C, low-temperature solenoid valve A, gas-liquid separator feed liquor valve A, gas-liquid separator A in turn by pipeline, and also is connected with pipeline safety valve D on the pipeline between low-temperature solenoid valve A and the gas-liquid separator feed liquor valve A; Gas-liquid separator A returns liquid valve A by cryogenic valve B, gas-liquid separator and is connected with the liquid nitrogen inlet of the cryopump of high vacuum system, cryopump liquid mouth is connected with gas-liquid separator A by cryogenic valve A, gas-liquid separator liquid valve A, atmospheric valve C is installed in gas-liquid separator A top by pipeline, liquid nitrogen container D is connected with liquid nitrogen supply valve D, low-temperature solenoid valve B, gas-liquid separator feed liquor valve B, gas-liquid separator B in turn by pipeline, and the pipeline between low-temperature solenoid valve B and gas-liquid separator feed liquor valve B is connected with pipeline safety valve F;
The multiple pressing system of air comprises that air strainer, air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C and nitrogen insert solenoid valve, air strainer one end is direct and atmosphere connection by pipeline, the other end walks abreast respectively by three-way pipeline and connects air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C, and the other end of air solenoid supply valve A, air solenoid supply valve B, air solenoid supply valve C all finally is connected to vacuum tank; The end that nitrogen inserts solenoid valve is installed between air solenoid supply valve C and the vacuum tank by pipeline, and the other end that nitrogen inserts solenoid valve is connected by the pipeline safety valve G of pipeline with the multiple pressing system of nitrogen;
The multiple pressing system of nitrogen comprises gas nitrogen jar, gas nitrogen supply valve and pipeline safety valve, for pressing again the early stage that is used for vacuum tank after the off-test; Gas nitrogen jar inserts solenoid valve by gas nitrogen supply valve and nitrogen and is connected, and is furnished with safety valve G on the connecting line between gas nitrogen supply valve and the nitrogen access solenoid valve;
Liquid helium is heat sink, liquid nitrogen heat sink, plume adsorption pump all are positioned at vacuum tank inside, and liquid helium is heat sink to be positioned at liquid nitrogen heat sink inside, and by the liquid nitrogen heat sink protection, the plume adsorption pump is positioned at a side of the heat sink inside of liquid helium.
2. the clean vacuum system for engine plume testing research according to claim 1, it is characterized in that: described clean vacuum system also comprises container vacuum measurement system, be used for measuring the vacuum tightness of vacuum tank, this container vacuum measurement system comprises Pirani gauge E, Pirani gauge F, ionization gauge A and ionization gauge B; Pirani gauge E, Pirani gauge F, ionization gauge A and ionization gauge B directly are connected with vacuum tank by vessel flange respectively.
3. the clean vacuum system for engine plume testing research according to claim 1 and 2 is characterized in that: described clean vacuum system also comprises the rga system, is used for vacuum tank internal gas composition measurement; The rga system comprises residual gas analyzer, push-pull valve K; Residual gas analyzer is connected to vacuum tank by push-pull valve K.
4. the clean vacuum system for engine plume testing research according to claim 1, it is characterized in that: described push-pull valve A, push-pull valve C, push-pull valve D, push-pull valve E, push-pull valve F, push-pull valve J place pipe diameter are all greater than lobe pump place pipe diameter, and cross-sectional area is long-pending greater than lobe pump place cross-section of pipeline.
5. the clean vacuum system for engine plume testing research according to claim 1, it is characterized in that: described low-temperature pumping speed is greater than accessory molecule pump pumping speed, accessory molecule pump pumping speed is greater than prime molecular pump pumping speed, and prime molecular pump pumping speed is greater than the sliding vane rotary pump pumping speed.
6. the clean vacuum system for engine plume testing research according to claim 5, it is characterized in that: described accessory molecule pump pumping speed is about 5:1 with the ratio of prime molecular pump pumping speed, and prime molecular pump pumping speed is about 20:1 with the ratio of sliding vane rotary pump pumping speed.
7. application rights requires the multiple pressure method that vacuumizes of 1 described clean vacuum system for engine plume testing research, it is characterized in that: be specially and comprise following step:
(1) start container vacuum measurement system, implement to measure the vacuum tank internal pressure, vacuumize and press again and finish until container, entire test is finished;
(2) before low vacuum system and high vacuum system work, start low vacuum liquid-nitrogen cooled trap system, high vacuum liquid-nitrogen cooled trap system earlier, respectively to liquid nitrogen cold trap A, liquid nitrogen cold trap B feed flow, liquid nitrogen cold trap A, liquid nitrogen cold trap B are chilled to liquid nitrogen temperature in advance, the oil vapour that produces when being used for absorbing lobe pump and sliding vane rotary pump work;
(3) start the low vacuum system, the work of lobe pump unit is evacuated to 1Pa with the vacuum tightness of vacuum tank;
(4) start cryopump liquid nitrogen supply system, carry liquid nitrogen refrigerating system to cryopump respectively, make cryopump inside reach liquid nitrogen temperature, finish the precooling of cryopump;
(5) start high vacuum system, cryopump is started working, and vacuum tank vacuum tightness is evacuated to 10
-4Pa;
(6) start that liquid helium is heat sink, liquid nitrogen heat sink, plume adsorption pump, realize ULTRA-HIGH VACUUM PUMPING, vacuum tank vacuum tightness is evacuated to 10
-6Pa;
(7) begin to carry out the engine plume testing, start remaining analytic system, the internal tank gas ingredients is analyzed;
(8) after the off-test, start the multiple pressing system of nitrogen, the multiple pressing system of air, finish the multiple pressure to vacuum tank, the multiple pressing system of nitrogen is depressed into 1000Pa again with vacuum tank, and the multiple pressing system of air is depressed into normal pressure with vacuum tank again from 1000Pa.
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| CN102359860B true CN102359860B (en) | 2013-09-18 |
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| CN104236846B (en) * | 2014-08-29 | 2017-06-09 | 北京卫星环境工程研究所 | Built-in vacuum presses air diffuser again |
| CN106527331B (en) * | 2016-10-18 | 2018-05-22 | 中国原子能科学研究院 | A kind of control system for Electromagnetic isotope separator vacuum system |
| CN108896125B (en) * | 2018-05-08 | 2020-02-28 | 浙江大学 | Method for measuring volume of two interacting gravity flows |
| CN114893389B (en) * | 2022-06-10 | 2023-06-30 | 中国科学院上海高等研究院 | System and method for testing room temperature performance of helium pressure-reducing cooling pump set |
| CN116171018B (en) * | 2023-02-24 | 2023-08-18 | 北京航天试验技术研究所 | Heat sink cooling system and method |
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| CN102359859A (en) * | 2011-07-18 | 2012-02-22 | 北京航空航天大学 | Clean vacuum system used for engine plume test research and vacuumizing and repressing method thereof |
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| US3930410A (en) * | 1975-02-28 | 1976-01-06 | The United States Of America As Represented By The Secretary Of The Army | Wind tunnel model engine plume simulator with internal mass flow |
| CN101539481A (en) * | 2009-04-17 | 2009-09-23 | 北京航空航天大学 | Plume diagnosis device of electric propulsion engine |
| CN101876586A (en) * | 2010-04-09 | 2010-11-03 | 中国科学院上海技术物理研究所 | System and method for testing influence of plume field of engine in air to laser transmission |
| CN102359859A (en) * | 2011-07-18 | 2012-02-22 | 北京航空航天大学 | Clean vacuum system used for engine plume test research and vacuumizing and repressing method thereof |
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