CN102348321B - Thin-wall vacuum pipeline and method for manufacturing vacuum chamber by thin-wall vacuum pipeline - Google Patents
Thin-wall vacuum pipeline and method for manufacturing vacuum chamber by thin-wall vacuum pipeline Download PDFInfo
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- CN102348321B CN102348321B CN 201110292099 CN201110292099A CN102348321B CN 102348321 B CN102348321 B CN 102348321B CN 201110292099 CN201110292099 CN 201110292099 CN 201110292099 A CN201110292099 A CN 201110292099A CN 102348321 B CN102348321 B CN 102348321B
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Abstract
The invention mainly relates to a method for manufacturing electric vacuum equipment, in particular to a method for manufacturing a vacuum pipeline which can be used in a high-frequency alternating-current electric field or an alternating magnetic field. The method for manufacturing the thin-wall vacuum pipeline comprises a plurality of steps of manufacturing pipes, curling, arranging reinforcing ribs and the like. The invention also provides a method for manufacturing a vacuum chamber by the manufactured thin-wall vacuum pipeline, which comprises the processes of welding pipes, manufacturing a hydraulic bellows device and the like. The thin-wall vacuum pipeline is manufactured by matching of the process procedures, parameters and the method, the size of the whole vacuum pipeline is large, the whole wall is thin in the whole body, and the thin-wall vacuum pipeline can meet the use requirements in the high-frequency alternating-current electric field or the alternating magnetic field.
Description
Technical field
The present invention relates generally to the manufacture method of electrovacuum equipment, relates in particular to a kind of manufacture method of the vacuum pipe that can use under high-frequency ac electric field or alternating magnetic field.
Background technology
Build Lanzhou Heavy Ion Cancer Therapy isolated plant (HITFiL), need a kind of large-scale noncircular cross section thin wall vacuum vessel, not only can satisfy instructions for use under high-frequency ac electric field or alternating magnetic field, and reduce the engineering-built cost greatly by reducing the electromagnet pole gap as much as possible.Under above-mentioned operating mode, because vacuum chamber can produce the current vortex effect, can not adopt the manufacturing of large volume metal.At present, for the small size vacuum chamber, employing thin-walled circle cross section stainless steel tube is made, and can satisfy to overcome the current vortex influence and bear the atmospheric pressure requirement.And to the large-scale vacuum chamber, if only amplify in proportion, for the line of ellipse in the vacuum chamber or runway shape envelope section, not only increased the wasted space of circular section pipeline, and increased the magnetic pole gap of electromagnet greatly, make the manufacturing of accelerator integral body and operating cost increase considerably.In addition, the stainless steel tube wall thickness of Fang Daing can not be too thick in proportion, can produce big current vortex effect; Another problem is the circularity control difficulty of large diameter thin wall stainless steel tube, and part not circle will be caused and be vacuumized the back collapse-deformation, make after the chain reaction that whole vacuum chamber is destroyed.Before this, the domestic like of not making.For this reason, explore a kind of coming of new technology and seem very meaningful, can reduce project cost greatly when satisfying instructions for use.
Summary of the invention
The objective of the invention is to avoid the deficiencies in the prior art that a kind of manufacture method of the large-scale noncircular cross section thin wall vacuum vessel that can use under high-frequency ac electric field or alternating magnetic field is provided, thereby efficiently solve the problems of the prior art.
Purpose of the present invention can be by realizing by the following technical solutions, and a kind of Heavy Ion Cancer Therapy special equipment includes following step with the manufacture method of thin-walled vacuum pipe:
(1), be that circular thin-wall stainless steel flattens with section, make described thin-wall stainless steel tube wall section linearly, section is that the both sides tube wall of straight line tube wall is the semicircle camber line; Thin-wall stainless steel height after the described flattening is 10～90mm, Guan Kuanwei 10～250mm, and its pipe thickness is 0.3～1mm;
(2), intercept the both ends of the surface of the thin-wall stainless steel in the step 1) with the line cutting, and the length that guarantees the thin-wall stainless steel center line is the angle of 5～45 ° of 200～800mm and thin-wall stainless steel both ends of the surface, reserves thin-wall stainless steel both ends of the surface flange length 2～8mm simultaneously;
(3), the end section to thin-wall stainless steel carries out crimping, the manual finished edge in volume back;
(4), according to the cross sectional dimensions of thin-wall stainless steel, cut out the preformed hole of first reinforcement and second reinforcement in the outer surface line of thin-wall stainless steel; Also reserved the gap of inserting the vacuum brazing scolder between thin-wall stainless steel and first reinforcement or second reinforcement;
(5), according to runway shape preformed hole, with reinforcement and fixedly reinforcement be installed on the thin-wall stainless steel;
(6), the other end section to thin-wall stainless steel carries out crimping, the manual finished edge in volume back;
(7), adjustment reinforcement and fixedly position and the spacing of reinforcement: the setting of described first reinforcement is spaced apart 5～30mm, and the setting of described second reinforcement is spaced apart 300～1000mm, and the thickness of described first reinforcement and second reinforcement is 0.5～3mm; Thin-wall stainless steel and reinforcement or fixedly between the reinforcement slit insert the vacuum brazing scolder, carry out the vacuum brazing welding, the manufacturing of described thin-walled vacuum pipe is finished.
The thin-walled vacuum pipe of also include step (8), manufacturing being finished carries out helium mass spectrum leak detection, and leak rate should be higher than 1 * 10
-9PaL/s.
The present invention also provides a kind of thin-walled vacuum pipe of being made by the above method to make the Heavy Ion Cancer Therapy special equipment with the method for thin wall vacuum vessel: comprise the steps:
1), the requirement 1 produced thin-walled vacuum pipe weldering of section having the right of the airtight welding number of argon arc welding is one by hand, forms thin wall vacuum vessel;
2), make the hydraulic-formed bellows device: the transition rings at airtight welding bellows and two ends is distinguished in argon arc welding by hand; Airtight welding transition ring and first is taken over and second adapter; Airtight welding second is taken over and vacuum edge of a knife flange
3), vacuum edge of a knife flange and Connection Block are welded in argon arc welding respectively by hand; Welding first is taken over and lug;
4), machinery joins repeatedly between joint chair and the lug and locks pull bar, and fixing and locking is made the hydraulic-formed bellows device;
5), at the thin-walled vacuum pipe two ends that described step 1) is welded as a whole the hydraulic-formed bellows device is installed, i.e. argon arc welding first adapter and thin-walled vacuum pipe two ends of airtight welding hydraulic-formed bellows device respectively by hand, described thin wall vacuum vessel manufacturing is finished.
First of described thin-walled vacuum pipe end face and hydraulic-formed bellows device taken over and carried out argon arc welding by hand, and an end of taking over, being connected with the thin-walled vacuum pipe first is provided with the anti-welding deformation groove.
Also include manual argon arc pressure-tight weld welding seam in the step 1) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.
Also include manual argon arc pressure-tight weld welding seam in the step 3) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.
Also include the manual argon arc pressure-tight weld welding seam in the step 5) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s, and actual measurement thin-walled vacuum pipe straightway place vacuumizes the front and back deformation quantity.
The invention has the beneficial effects as follows: by maturation and the extensive use of advanced manufacturing technology in recent years, program, parameter and the method coupling of adopting new technology produced a kind of large-scale noncircular cross section thin-walled electromagnet vacuum pipe, whole vacuum pipe size is big, the entire body thin-walled, can satisfy instructions for use under high-frequency ac electric field or alternating magnetic field; Adopt noncircular cross section, reduce the electromagnet pole gap to greatest extent, thereby reduce the engineering-built cost greatly; Calculate by accurate Theory, the described vacuum pipe of strict control vacuumizes back deformation, guarantees safe handling.Through detecting described large-scale noncircular cross section thin-walled electromagnet vacuum pipe vacuum degree index, vacuumizing deformation situation, current vortex heating situation etc. and all reach instructions for use, have stronger anti-current vortex heating, high vacuum, advantages of compact and light structure, service-strong characteristics.
Description of drawings
Fig. 1 is thin-walled vacuum pipe schematic top plan view of the present invention;
Fig. 2 is thin-walled vacuum pipe side-looking generalized section of the present invention;
Fig. 3 among the present invention when a plurality of thin-walled vacuum pipes connection, the welding schematic diagram of vacuum pipe end bead structure;
Fig. 4 is the schematic top plan view of the thin wall vacuum vessel of thin-walled vacuum pipe composition of the present invention;
Fig. 5 is the schematic side view of the thin wall vacuum vessel of thin-walled vacuum pipe composition of the present invention;
Fig. 6 is hydraulic-formed bellows device top cross-sectional view of the present invention;
Fig. 7 is hydraulic-formed bellows device schematic side view of the present invention;
Fig. 8 is the anti-welding deformation groove schematic diagram of long pipe 2-8 of the present invention and vacuum tube 1-1 weld.
Embodiment
Be described in further detail below in conjunction with the most preferred embodiment shown in the accompanying drawing:
Embodiment 1: as shown in Figure 1, 2, 3, a kind of manufacture method of thin-walled vacuum pipe includes following step:
(1), be that circular thin-wall stainless steel 1-1 flattens with section, make the section of described thin-wall stainless steel 1-1 be runway shape, namely near the tube wall section of magnetic pole linearly, section is that the both sides tube wall of straight line tube wall is the semicircle camber line; Described thin-wall stainless steel height is 10～90mm, Guan Kuanwei 10～250mm, and its pipe thickness is 0.3～1mm;
(2), the both ends of the surface that are the thin-wall stainless steel 1-1 of runway shape with line cutting intercepting step 1) middle section, and the length that guarantees the thin-wall stainless steel center line is the angle of 5～45 ° of 200～800mm and thin-wall stainless steel both ends of the surface, reserves thin-wall stainless steel 1-1 both ends of the surface flange length 2～8mm simultaneously;
(3), the end section to thin-wall stainless steel carries out crimping, the manual finished edge in volume back;
(4), according to the cross sectional dimensions of thin-wall stainless steel 1-1, cut out reinforcement and the fixing runway shape preformed hole of reinforcement in the outer surface line of thin-wall stainless steel; Thin-wall stainless steel and reinforcement or fixedly also reserved the gap of inserting the vacuum brazing scolder between the reinforcement;
(5), according to runway shape preformed hole, with reinforcement 1-2 and fixedly reinforcement 1-3 be installed on the thin-wall stainless steel;
(6), the other end section to thin-wall stainless steel 1-1 carries out crimping, the manual finished edge in volume back;
(7), adjust reinforcement and fixedly position and the spacing of reinforcement, thin-wall stainless steel and reinforcement or fixedly between the reinforcement slit insert the vacuum brazing scolder, carry out vacuum brazing and weld, the manufacturing of described thin-walled vacuum pipe is finished; Described reinforcement 1-2 and fixedly position and the spacing of reinforcement 1-3: the setting of described reinforcement is spaced apart 5～30mm, and the setting of described fixedly reinforcement is spaced apart 300～1000mm, described reinforcement and fixedly the thickness of reinforcement be 0.5～3mm;
(8), thin-walled vacuum pipe 1-1 that manufacturing is finished carries out helium mass spectrum leak detection, leak rate should be higher than 1 * 10
-9PaL/s.
Embodiment 2: shown in Fig. 4-8, the above-described method of a kind of usefulness is made the manufacture method of a kind of thin wall vacuum vessel of thin-walled vacuum pipe manufacturing, comprises the steps:
1), the airtight welding number of argon arc welding section has as mentioned above that the produced thin-walled vacuum pipe of method 1-1 weldering is one by hand, forms thin wall vacuum vessel 1; And manual argon arc pressure-tight weld welding seam carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s;
2), make the hydraulic-formed bellows device: the transition rings 2-4 at the airtight welding bellows 2-5 of argon arc welding and two ends by hand; Airtight welding transition ring 2-4 and long pipe 2-8 and nipple 2-3; Airtight welded nipple 2-3 and vacuum edge of a knife flange 2-1;
3), vacuum edge of a knife flange 2-1 and Connection Block 2-2 are welded in argon arc welding respectively by hand; Welding long pipe 2-8 and lug 2-7; And manual argon arc pressure-tight weld welding seam carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.
4), machinery joins repeatedly between joint chair 2-2 and the lug 2-7 locking pull bar 2-6, and fixing and locking is made the hydraulic-formed bellows device;
5), at the thin-walled vacuum pipe two ends that described step 1) is welded as a whole the hydraulic-formed bellows device is installed, i.e. respectively long pipe 2-8 and the thin-walled vacuum pipe 1-1 of airtight welding hydraulic-formed bellows device of argon arc welding by hand, be thin wall vacuum vessel 1 two ends, the long pipe 2-8 of described thin-walled vacuum pipe end face and hydraulic-formed bellows device carries out argon arc welding by hand, the end processing anti-welding deformation groove that is connected on long pipe, with the thin-walled vacuum pipe; And manual argon arc pressure-tight weld welding seam carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s, and actual measurement thin-walled vacuum pipe straightway place vacuumizes the front and back deformation quantity.Described thin wall vacuum vessel manufacturing is finished.
Below be the whole process of thin-walled vacuum pipe and vacuum chamber:
Embodiment 3: the manufacture method of described thin-walled vacuum pipe and vacuum chamber includes following steps:
(1), girth 378mm, wall thickness 1mm circular section stainless steel tube are flattened to section is runway shape, the section of whole vacuum pipe 1-1 is the both sides tube wall semicircular in shape camber line of straight line tube wall, presses back Guan Gaowei 62mm, Guan Kuanwei 153mm;
(2), with line cutting intercepting vacuum pipe 1-1 both ends of the surface, need to guarantee 9 ° of the length 629mm of vacuum pipe 1-1 center line and vacuum pipe 1-1 both ends of the surface angles, and reserve vacuum pipe 1-1 both ends of the surface crimping Len req 6mm;
(3), vacuum pipe 1-1 one end is carried out crimping, the manual finished edge in volume back;
(4), according to real side runway shape vacuum pipe 1-1 cross sectional dimensions, line cuts out reinforcement 1-2 and the fixing long and wide equidimension of runway shape hole and profile in the middle of the reinforcement 1-3, vacuum pipe 1-1 and reinforcement 1-2 or fixedly should reserve between the reinforcement 1-3 and insert the required gap 0.08 ~ 0.12mm of vacuum brazing scolder;
(5), on demand with reinforcement 1-2 and fixedly reinforcement 1-3 be through on the runway shape vacuum pipe 1-1;
(6), the vacuum pipe 1-1 other end is carried out crimping, the manual finished edge in volume back;
(7), adjust reinforcement 1-2 and fixedly position and the spacing of reinforcement 1-3, reinforcement 1-2 is spaced apart 32mm, fixedly reinforcement 1-3 be spaced apart 638mm, reinforcement and fixedly the thickness of reinforcement be 2mm.Vacuum pipe 1-1 and reinforcement 1-2 or fixedly between the reinforcement 1-3 slit insert the vacuum brazing scolder, carry out the vacuum brazing welding: adopt money base vacuum brazing scolder, 880 ~ 950 ℃ of welding temperatures, vacuum degree 1 * 10 in the stove in the welding process
-3~ 1 * 10
-4Pa, 10 ~ 15 hours welding cycle;
(8), the vacuum brazing part is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s;
(9), the weldering of 5 sections vacuum brazing parts of the airtight welding of argon arc welding is one by hand, namely the noncircular cross section thin wall vacuum vessel 1;
(10), manual argon arc pressure-tight weld welding seam is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s;
(11), the argon arc welding transition rings 2-4 at airtight welding bellows 2-5 and two ends respectively by hand; Transition rings 2-4 and long pipe 2-8 or nipple 2-3; Nipple 2-3 and vacuum edge of a knife flange 2-1;
(12), manual argon arc pressure-tight weld welding seam is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s;
(13), vacuum edge of a knife flange 2-1 and Connection Block 2-2 are welded in argon arc welding respectively by hand; Long pipe 2-8 and lug 2-7;
(14), machinery joins repeatedly between joint chair 2-2 and the lug 2-7 locking pull bar 2-6, and fixing and locking;
(15), at noncircular cross section thin wall vacuum vessel 1 two ends, the argon arc welding long pipe 2-8 of airtight welding bellows arrangement 2 respectively by hand, the end face angle of vacuum pipe two ends vacuum edge of a knife flange 2-1 is 45 °;
(16), manual argon arc pressure-tight weld welding seam is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.And actual measurement runway shape vacuum pipe 1-1 and bellows 2-5 straightway place vacuumize before and after deformation quantity: be 1 * 10 in vacuum degree
-5~ 2 * 10
-5Under the Pa condition, actual measurement vacuum pipe 1-1 deformation is 0.2 millimeter; Bellows 2-5 deformation is 0.3 millimeter, and recovers fully after amplifying gas, is elastic deformation, all coincide better with result of calculation.
Described thin-walled circular section stainless steel tube flattens and is runway shape thin-walled vacuum pipe 1-1, needs to make simple and easy moulding and shaping frock.Described thin-walled vacuum pipe 1-1 carries out crimping and finished edge in two ends, needs to make simple and easy moulding frock and model.Described thin-walled vacuum pipe 1-1 and reinforcement 1-2 and when fixedly carrying out vacuum brazing between the reinforcement 1-3 need to make the hot frock that enough rigidity are arranged down.When section vacuum brazing part weldering of the airtight welding number of described argon arc welding by hand becomes thin wall vacuum vessel 1 for one, should make welding tooling.Described helium mass spectrum leak detection all needs to make corresponding leak detection tool equipment.Described vacuum pipe 1-1 end face and long pipe 2-8 carry out argon arc welding by hand, and an end that is connected on long pipe 2-8, with vacuum pipe 1-1 is provided with the anti-welding deformation groove.
Embodiment 4: identical with embodiment 1, different is: in the step (1), described thin-wall stainless steel height is 10mm, Guan Kuanwei 10mm, and its pipe thickness is 0.3mm; The both ends of the surface that are the thin-wall stainless steel 1-1 of runway shape in the step (2) with line cutting intercepting step (1) middle section, and the length that guarantees the thin-wall stainless steel center line is the angle of 5 ° of 200mm and thin-wall stainless steel both ends of the surface, reserves thin-wall stainless steel 1-1 both ends of the surface flange length 2mm simultaneously; In the step (7), the setting of described reinforcement is spaced apart 5mm, and the setting of described fixedly reinforcement is spaced apart 300mm, described reinforcement and fixedly the thickness of reinforcement be 0.5mm.
Embodiment 5: identical with embodiment 1, different is: in the step (1), described thin-wall stainless steel height is 90mm, Guan Kuanwei 250mm, and its pipe thickness is 1mm; The both ends of the surface that are the thin-wall stainless steel 1-1 of runway shape in the step (2) with line cutting intercepting step (1) middle section, and the length that guarantees the thin-wall stainless steel center line is the angle of 45 ° of 800mm and thin-wall stainless steel both ends of the surface, reserves thin-wall stainless steel 1-1 both ends of the surface flange length 8mm simultaneously; In the step (7), the setting of described reinforcement is spaced apart 30mm, and the setting of described fixedly reinforcement is spaced apart 1000mm, described reinforcement and fixedly the thickness of reinforcement be 3mm.
Embodiment 6: identical with embodiment 1, different is: in the step (1), described thin-wall stainless steel height is 50mm, Guan Kuanwei 150mm, and its pipe thickness is 0.5mm; The both ends of the surface that are the thin-wall stainless steel 1-1 of runway shape in the step (2) with line cutting intercepting step (1) middle section, and the length that guarantees the thin-wall stainless steel center line is the angle of 35 ° of 500mm and thin-wall stainless steel both ends of the surface, reserves thin-wall stainless steel 1-1 both ends of the surface flange length 5mm simultaneously; : in the step (7), the setting of described reinforcement is spaced apart 20mm, and the setting of described fixedly reinforcement is spaced apart 500mm, described reinforcement and fixedly the thickness of reinforcement be 1.5mm.
The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. a Heavy Ion Cancer Therapy special equipment is characterized in that including following step with the manufacture method of thin-walled vacuum pipe:
(1), be that circular thin-wall stainless steel flattens with section, make described thin-wall stainless steel tube wall section be runway shape namely near the tube wall section of magnetic pole linearly, section is that the both sides tube wall of straight line tube wall is the semicircle camber line; Thin-wall stainless steel height after the described flattening is 10～90mm, Guan Kuanwei 10～250mm, and its pipe thickness is 0.3～1mm;
(2), the both ends of the surface that are the thin-wall stainless steel of runway shape with the cross section in the line cutting intercepting step (1), and the length that guarantees the thin-wall stainless steel center line is that 200～800mm and thin-wall stainless steel both ends of the surface are provided with 5～45 ° angle, reserves thin-wall stainless steel both ends of the surface flange length 2～8mm simultaneously;
(3), the end section to thin-wall stainless steel carries out crimping, the manual finished edge in volume back;
(4), according to the cross sectional dimensions of thin-wall stainless steel, cut out the runway shape preformed hole of first reinforcement and second reinforcement on the thin-wall stainless steel tube outer surface of thin-wall stainless steel outer surface line; Also reserved the gap of inserting the vacuum brazing scolder between thin-wall stainless steel and first reinforcement or second reinforcement;
(5), according to runway shape preformed hole, first reinforcement and second reinforcement are installed on the thin-wall stainless steel;
(6), the other end section to thin-wall stainless steel carries out crimping, the manual finished edge in volume back;
(7), adjust position and the spacing of first reinforcement and second reinforcement: the setting of described first reinforcement is spaced apart 5～30mm, the setting of described second reinforcement is spaced apart 300～1000mm, and the thickness of described first reinforcement and second reinforcement is 0.5～3mm; The vacuum brazing scolder is inserted in the slit between thin-wall stainless steel and first reinforcement or second reinforcement, carries out the vacuum brazing welding, and the manufacturing of described thin-walled vacuum pipe is finished;
(8), thin-walled vacuum pipe that manufacturing is finished carries out helium mass spectrum leak detection, leak rate should be higher than 1 * 10
-9PaL/s.
2. a thin-walled vacuum pipe of being made by the manufacture method of claim 1 is made the Heavy Ion Cancer Therapy special equipment with the method for thin wall vacuum vessel: it is characterized in that, comprise the steps:
1), the airtight welding number of argon arc welding section is one by the produced thin-walled vacuum pipe weldering of the manufacture method of claim 1 by hand, forms thin wall vacuum vessel;
2), make the hydraulic-formed bellows device: the transition rings at airtight welding bellows and two ends is distinguished in argon arc welding by hand; Airtight welding transition ring and first is taken over and second adapter; Airtight welding second is taken over and vacuum edge of a knife flange;
3), vacuum edge of a knife flange and Connection Block are welded in argon arc welding respectively by hand; Welding first is taken over and lug;
4), machinery joins repeatedly between joint chair and the lug and locks pull bar, and fixing and locking is made the hydraulic-formed bellows device;
5), at the thin-walled vacuum pipe two ends that described step 1) is welded as a whole the hydraulic-formed bellows device is installed, i.e. argon arc welding first adapter and thin-walled vacuum pipe two ends of airtight welding hydraulic-formed bellows device respectively by hand, described thin wall vacuum vessel manufacturing is finished.
3. as claimed in claim 2 a kind of by the method for thin-walled vacuum pipe manufacturing Heavy Ion Cancer Therapy special equipment with thin wall vacuum vessel, it is characterized in that, first of described thin-walled vacuum pipe end face and hydraulic-formed bellows device taken over and carried out argon arc welding by hand, and an end of taking over, being connected with the thin-walled vacuum pipe first is provided with the anti-welding deformation groove.
4. as claimed in claim 2 a kind of by the method for thin-walled vacuum pipe manufacturing Heavy Ion Cancer Therapy special equipment with thin wall vacuum vessel, it is characterized in that, also include manual argon arc pressure-tight weld welding seam in the step 1) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.
5. as claimed in claim 2 a kind of by the method for thin-walled vacuum pipe manufacturing Heavy Ion Cancer Therapy special equipment with thin wall vacuum vessel, it is characterized in that, also include manual argon arc pressure-tight weld welding seam in the step 3) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s.
6. as claimed in claim 2 a kind of by the method for thin-walled vacuum pipe manufacturing Heavy Ion Cancer Therapy special equipment with thin wall vacuum vessel, it is characterized in that, also include the manual argon arc pressure-tight weld welding seam in the step 5) is carried out helium mass spectrum leak detection, leak rate should be better than 1 * 10
-9PaL/s, and actual measurement thin-walled vacuum pipe straightway place vacuumizes the front and back deformation quantity.
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| CN 201110292099 CN102348321B (en) | 2011-10-01 | 2011-10-01 | Thin-wall vacuum pipeline and method for manufacturing vacuum chamber by thin-wall vacuum pipeline |
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| CN108024437A (en) * | 2017-12-13 | 2018-05-11 | 北京鑫智能技术股份有限公司 | Petal accelerator with integral vacuum box |
| CN108150730B (en) * | 2018-02-05 | 2023-10-03 | 中国科学院近代物理研究所 | Vacuum pipeline structure of synchrotron and synchrotron |
| CN110349742B (en) * | 2019-07-12 | 2021-04-09 | 兰州科近泰基新技术有限责任公司 | Method for manufacturing multi-seal-head slender high-frequency water jacket |
| CN116133225B (en) * | 2022-09-08 | 2023-08-04 | 中国科学院近代物理研究所 | Manufacturing method of ultrathin-wall metal lining vacuum chamber |
| CN115921899B (en) * | 2023-03-09 | 2023-05-26 | 中国科学院近代物理研究所 | Manufacturing method of titanium alloy thin-wall reinforcing rib extremely-high vacuum chamber |
| CN117066822B (en) * | 2023-08-10 | 2024-04-09 | 中国科学院近代物理研究所 | Manufacturing method of ultrathin-wall vacuum chamber with reinforcing rib structure |
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| US3887832A (en) * | 1973-06-25 | 1975-06-03 | Aralco | Auto-resonant acceleration of ions |
| US4812775A (en) * | 1986-04-30 | 1989-03-14 | Science Research Laboratory, Inc. | Electrostatic ion accelerator |
| JPH11273581A (en) * | 1998-03-26 | 1999-10-08 | Sumitomo Heavy Ind Ltd | Ecr ion source |
| CN101093037A (en) * | 2007-08-01 | 2007-12-26 | 中国科学院近代物理研究所 | Conduit in use for vacuum system |
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