CN102345113A - Special air tube with detachable spray head - Google Patents
Special air tube with detachable spray head Download PDFInfo
- Publication number
- CN102345113A CN102345113A CN2011103375265A CN201110337526A CN102345113A CN 102345113 A CN102345113 A CN 102345113A CN 2011103375265 A CN2011103375265 A CN 2011103375265A CN 201110337526 A CN201110337526 A CN 201110337526A CN 102345113 A CN102345113 A CN 102345113A
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- China
- Prior art keywords
- air tube
- special air
- spray head
- detachable
- guide pin
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Abstract
The invention relates to a special air tube, in particular to a special air tube with a detachable spray head, which belongs to the field of a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating technology. According to the technical scheme provided by the invention, the special air tube with the detachable spray head comprises a tube body and is characterized in that a guide sleeve is welded on the tube body and a detachable ventilation sleeve is arranged on the guide sleeve. A second ventilation hole is arranged on the detachable ventilation sleeve. According to the invention, the problem of the plug of the spray head can be solved without completely detaching the special air tube when a device is maintained; the spray head is connected with the special air tube by screw thread so that the spray head has good sealing performance and is convenient to change; and when plugged, the special air tube is not needed to be detached for cleaning so that the service life of the special air tube is not affected by the corrosion of acid clean. When the device is maintained, only the spray head of the special air tube is changed so that the purchase cost of the special air tube is greatly reduced.
Description
Technical field
The present invention relates to a kind of special tracheae, specifically a kind of special tracheae of removable shower nozzle belongs to PECVD coating technique field.
Background technology
Fast development along with the photovoltaic industry; Each battery sheet manufacturer is faced with increasing competitive pressure; And the maintenance time of equipment and maintenance cost have accounted for very greatly; Special tracheae is the important spare part of PECVD (Plasma Enhanced Chemical Vapor Deposition) above the plated film, because it is worked in the reaction cavate, the silicon nitride that reaction generates can be deposited on the place, air outlet of special tracheae and stop up tracheae.
The PECVD apparatus field with ROTH&RAU be the special tracheae of representative generally by an ammonia pipe, two left and right silane pipes are formed (being referred to as special tracheae).Special tracheae is responsible in cavity, providing ammonia and silane in process cavity; Under the exciting of microwave, generate plasma body then; Be deposited on the solar battery sheet, yet along with the lengthening of duration of service, the settling of generation can be attached to the tracheae gas orifice; Gas orifice just diminishes gradually like this, even gas orifice is blocked.Chamber can not obtain to influence than uniform plasma body the homogeneity of battery sheet plated film like this.
In order to protect normally carrying out of positive reaction, must regularly unpick and wash maintenance, and the silicon nitride that reaction generates also can be deposited on the mounting screw place to special tracheae; Make special tracheae unpick and wash, change loaded down with trivial details unusually, even might be in unpicking and washing replacing damage equipment, traditional silane pipe adopts monobloc(k)type; Body and mounting plate weld together, and with screw mounting plate are fixed on the equipment again, and be solid and reliable for guaranteeing the silane pipe; Retaining plate adopts 8 screw retention, when the silane pipe need be unpicked and washed, need 8 screws of the special tracheae on the silane pipe all be pulled down simultaneously; And being deposited on the difficulty that silicon nitride on the mounting screw also can increase dismounting, workload is very big; And along with use, when silane pipe body damaged, then the body portion of silane pipe all need be done together with mounting plate and scrap processing, very waste.
Summary of the invention
The objective of the invention is to overcome above-mentioned weak point; Provide a kind of shower nozzle removable special tracheae; When the silicon nitride that in use is deposited when special tracheae is blocked; The shower nozzle that on the basis that does not need the special tracheae of dismounting on the slave unit, is plugged through replacing is just realized the maintenance of equipment, has reduced the maintenance difficulties of equipment and the cost of the special tracheae of buying.
According to technical scheme provided by the invention, the removable special tracheae of said shower nozzle comprises body, it is characterized in that: be welded with guide pin bushing on the body, a dismountable ventilation cover is arranged on the guide pin bushing.
Said dismountable ventilation cover is provided with second ventilating pit.
Said guide pin bushing band outside screw, have on the guide pin bushing one with the concentric through hole of first ventilating pit that is arranged at body.
Said dismountable ventilation cover is connected with guide pin bushing through the outside screw on the guide pin bushing.
The present invention has following advantage:
3. because application of the present invention need not be removed cleaning when special tracheae stops up, therefore can not influence the life-span because of clean the special tracheae of corrosion with acid; The removable shower nozzle that only need change this invention during maintenance of the equipment gets final product, so greatly reduce the purchase cost of special tracheae.
Description of drawings
Fig. 1 is user mode figure of the present invention.
Fig. 2 is this pipe structure figure.
Fig. 3 is the structure iron after the body mounting guide sleeve.
Fig. 4 is a ventilation noose composition.
Embodiment
Shown in Fig. 1-2, on body 1, be welded with guide pin bushing 3, a dismountable ventilation cover 4 is arranged on the guide pin bushing 3.
Said dismountable ventilation cover 4 is provided with second ventilating pit 5.
Said guide pin bushing 3 band outside screws, have on the guide pin bushing 3 one with first ventilating pit, the 2 concentric through holes that are arranged at body 1.
Said dismountable ventilation cover 4 is connected with guide pin bushing 3 through the outside screw on the guide pin bushing 3.
Employed in the market special tracheae is very inconvenience when removing, cleaning; And the present invention in use or in the maintenance of the equipment process if the silicon nitride that removable ventilation cover 4 is deposited stops up; Only need unload this ventilation cover 4; And do not need fully more to change whole special tracheae, shortened cost of equipment maintenance and time.
Claims (4)
1. the removable special tracheae of shower nozzle comprises body (1), it is characterized in that: be welded with guide pin bushing (3) on the body (1), a dismountable ventilation cover (4) is arranged on the guide pin bushing (3).
2. according to the removable special tracheae of the said shower nozzle of claim 1, it is characterized in that: said dismountable ventilation cover (4) is provided with second ventilating pit (5).
3. the removable special tracheae of shower nozzle according to claim 1 and 2 is characterized in that: said guide pin bushing (3) band outside screw, have on the guide pin bushing (3) one with the concentric through hole of first ventilating pit (2) that is arranged at body (1).
4. according to the removable special tracheae of the said shower nozzle of claim 3, it is characterized in that: said dismountable ventilation cover (4) is connected with guide pin bushing (3) through the outside screw on the guide pin bushing (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103375265A CN102345113A (en) | 2011-10-31 | 2011-10-31 | Special air tube with detachable spray head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103375265A CN102345113A (en) | 2011-10-31 | 2011-10-31 | Special air tube with detachable spray head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102345113A true CN102345113A (en) | 2012-02-08 |
Family
ID=45544177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103375265A Pending CN102345113A (en) | 2011-10-31 | 2011-10-31 | Special air tube with detachable spray head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102345113A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050189441A1 (en) * | 2004-02-27 | 2005-09-01 | Southern Philip W. | Water spray assembly |
| US6983899B2 (en) * | 2002-12-31 | 2006-01-10 | Melendez Henry D | Handheld paint spraying apparatus with anti-sputter spray nozzle |
| CN101693227A (en) * | 2009-10-14 | 2010-04-14 | 江苏南方涂装环保股份有限公司 | Spray head structure of spray pipe in cleaning section of cold-roll steel sheet coating line |
| CN202017048U (en) * | 2011-03-04 | 2011-10-26 | 苏州阿特斯阳光电力科技有限公司 | Maintenance tool for PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| CN202297769U (en) * | 2011-10-31 | 2012-07-04 | 无锡绿波新能源设备有限公司 | Special gas pipe with detachable nozzle |
-
2011
- 2011-10-31 CN CN2011103375265A patent/CN102345113A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6983899B2 (en) * | 2002-12-31 | 2006-01-10 | Melendez Henry D | Handheld paint spraying apparatus with anti-sputter spray nozzle |
| US20050189441A1 (en) * | 2004-02-27 | 2005-09-01 | Southern Philip W. | Water spray assembly |
| CN101693227A (en) * | 2009-10-14 | 2010-04-14 | 江苏南方涂装环保股份有限公司 | Spray head structure of spray pipe in cleaning section of cold-roll steel sheet coating line |
| CN202017048U (en) * | 2011-03-04 | 2011-10-26 | 苏州阿特斯阳光电力科技有限公司 | Maintenance tool for PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment |
| CN202297769U (en) * | 2011-10-31 | 2012-07-04 | 无锡绿波新能源设备有限公司 | Special gas pipe with detachable nozzle |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120208 |