CN102340091B - He-Ne laser tube with flat inner cavity and manufacturing method thereof - Google Patents

He-Ne laser tube with flat inner cavity and manufacturing method thereof Download PDF

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CN102340091B
CN102340091B CN 201110301866 CN201110301866A CN102340091B CN 102340091 B CN102340091 B CN 102340091B CN 201110301866 CN201110301866 CN 201110301866 CN 201110301866 A CN201110301866 A CN 201110301866A CN 102340091 B CN102340091 B CN 102340091B
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laser
deielectric
negative electrode
tube
discharge tube
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CN102340091A (en
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王兆军
凌一鸣
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NANJING LEXIANG TECHNOLOGY DEVELOPMENT Co Ltd
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NANJING LEXIANG TECHNOLOGY DEVELOPMENT Co Ltd
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Abstract

The invention discloses a He-Ne laser tube with a flat inner cavity. The He-Ne laser pipe comprises a flat discharge tube, mirrored tubes, dielectric film reflecting mirrors, a cathode bulb and an anode bulb, wherein an oxide cathode filament and a cathode lateral rod are arranged inside the cathode bulb, an anode is arranged in the anode bulb, the round mirrored tubes are respectively arranged at two ends of the flat discharge tube, and the dielectric film reflecting mirrors are respectively stuck to the two ends of each mirrored tube. The He-Ne laser tube disclosed by the invention has the advantages of high output laser power, convenience for user usage, long service life and the like. The perpendicularity of the reflecting mirrors serving as an optical cavity and a tube axis of the flat discharge tube is detected by adopting an He-Ne laser intra-cavity oscillation method, a spherical concave-surface reflecting mirror is rotated around the tube axis so as to make an intra-cavity oscillation mode filed in a long strip shape, the length-to-width ratio of the long strip shape is more than 3:1, and thus, the position of the spherical concave-surface reflecting mirror is determined. By utilizing the detecting method, the yield of manufacture is obviously increased.

Description

A kind of He-Ne laser tube with flat inner cavity and preparation method thereof
Technical field
The present invention relates to a kind of Gas LASER Tube and preparation method thereof, especially relate to a kind of he-ne laser tube with flat discharge cross section and preparation method thereof.
Background technology
Patent of invention " high power He-Ne laser " (China Patent No.: 85100563) proposed with flat discharge tube art designs, made he-ne laser tube, can suitably increase the lateral cross section of discharge tube and obviously improve the laser output power of laser, thereby obtain high-power helium-neon laser output.And become the he-ne laser tube shell with soft glass through the sealing-in of low melting point sealing technology.This patent is typical exocoel gas laser tubular construction, be that laser tube is the gas-tight container that is made of discharge tube, two electrode bubbles, two Bu Shi windows, and the two deielectric-coating speculums that consist of optical resonator are to be placed in outside laser tube, be contained on miniature adjusting bracket, regulate that they are vertical with the laser tubular axis, make optical resonator resonance and obtain Laser output.Because two Bu Shi windows insert in the optical resonator of two deielectric-coating speculums formations, increased optical loss in the chamber like this, be unfavorable for improving laser power, also increased the complexity of laser structure and improved cost.Although this structure concerning laser manufacturer, is convenient to adjust optical resonator.But concerning the user who is unfamiliar with laser technology, use just very inconvenient.
Utility model patent " flat gas laser tube for multitube gas laser " (Chinese utility model patent number: ZL00221758.9) for a kind of improvement of the laser tube structure in above-mentioned laser, its structure is to paste with a deielectric-coating speculum at the left end of laser, and its right-hand member pastes with a Bu Shi window, this is typical half exocoel gas laser tubular construction, be that laser tube is by flat discharge tube, the gas-tight container that two electrode bubbles, a deielectric-coating speculum and a Bu Shi window consist of.Another deielectric-coating speculum that consists of optical resonator is placed in laser tube outer (right-hand member), is contained on miniature adjusting bracket, regulates this speculum and makes vertically with tubular axis, makes optical resonator resonance and obtains Laser output.Compare with patent of invention " high power He-Ne laser ", this structure is for the producer, really reduced the complexity of laser structure and reduced costs, also be convenient to safeguard and make laser structure compact, but for the user who is unfamiliar with laser technology, still use inconvenience, often must depend on producer and adjust, keep in repair.
Above-mentioned patent has solved helium neon laser and has obtained the high-power output problem, and this helium neon laser is compared with the general helium neon laser of same length, and its power output can significantly improve really, and its structure is also initiated really both at home and abroad.for improving cavity loss and easy to use, also attempted at first the employing inner-cavity structure, the two deielectric-coating speculums that namely consist of optical resonator directly are affixed on the two ends of laser tube, its result is unexpected, the power output of the laser tube made from same manufacturing process differs greatly, in the laser tube manufacture process, require two deielectric-coating speculums strictly vertical with the laser tubular axis, press the speculum of general circular section inner chamber he-ne laser tube to the optical check method, the probability that the flat cross section inner chamber he-ne laser tube of making can obtain the maximum laser power output is not high, that is to say, the power output of the laser tube that same manufacturing process is made differs greatly, in general, can go out laser, but power output is little, so that the laser tube fabrication yield is very low.Once manufactured experimently like this 18 the 1.5 meters flat discharge of long inner-cavity structure cross section he-ne laser tubes, wherein approximately there is 60 ~ 70% laser tube power output to only have 30 ~ 80 milliwatts, approximately have 30 ~ 40% laser tube power output also to only have 80 ~ 135 milliwatts, and extremely indivedual laser tube power output can reach 214 milliwatts.The power output maximum reaches 7 times of left and right unexpectedly with the ratio of minimum, be sure about that to make high-power output be almost impossible, let alone qualification rate.
Exploration through nearly 3 years, find that the laser tube power output is relevant around the orientation that tubular axis rotates with the concave surface sphere deielectric-coating speculum that consists of optical resonator, but this orientation is unknown, therefore deielectric-coating speculum in inner-cavity structure is changeless, and will being sure about, to make the flat discharge tube helium neon laser of interior cavity high power be almost impossible.Flat discharge tube helium neon laser can only adopt exocoel or half outer-cavity structure, because this structure can be adjusted concave surface sphere deielectric-coating speculum again around the orientation that tubular axis rotates after laser tube obtains Laser output, thus the maximum laser that obtains output.
But this exocoel or half outer-cavity structure increase complexity and the cost of laser structure to the producer, though be convenient to adjust, for the user who is unfamiliar with laser technology, it is very inconvenient to use, and often must depend on producer and adjust and keep in repair.And owing to inserting the Bu Shi window in the chamber and having one section light path to be exposed to atmosphere, having increased cavity loss, impact improves laser output power.Especially the pollution of air-borne dust to Bu Shi window and concave surface sphere deielectric-coating speculum, can have a strong impact on laser output power, although take various dust preventions (or super-clean environment), generally also will clean a Ci Bushi window and concave surface sphere deielectric-coating speculum (these problems are non-existent) concerning lumen tube every 3 ~ 6 months, these problems clearly affect application and the popularization of the flat discharge tube helium neon laser of this high power greatly.
Summary of the invention
Technical problem:The invention provides a kind of He-Ne laser tube with flat inner cavity of adjusting that workload is little, cavity loss is little, being conducive to improve laser power.The present invention also provides a kind of He-Ne laser tube with flat inner cavity preparation method of the present invention that is used for that can effectively obtain larger laser output power, raising rate of finished products.
Technical scheme:A kind of He-Ne laser tube with flat inner cavity of the present invention comprises flat discharge tube, negative electrode bubble, anode bulb, and described negative electrode bubble and the welding of anode bulb difference are in the same side at two ends, flat discharge tube left and right; Be provided with anode in described anode bulb, be sealed with long negative electrode side rod and short negative electrode side rod in described negative electrode bubble, be welded with the oxide coated cathode filament that connects both between described long negative electrode side rod and short negative electrode side rod; There are left subsides mirror pipe and right subsides mirror pipe in the two ends of described flat discharge tube welding respectively, be respectively arranged with the deielectric-coating speculum on the end face of the end face of described left subsides mirror pipe and right subsides mirror pipe, two deielectric-coating speculums are respectively planar medium film speculum and concave surface sphere deielectric-coating speculum.
In the present invention, described flat discharge tube, negative electrode bubble, anode bulb and subsides mirror pipe are made by hard glass.
In the present invention, described flat discharge tube is made by flat glass tube, and described subsides mirror pipe, negative electrode bubble and anode bulb are made by the Circular glass pipe.
In the present invention, what arrange on described left subsides mirror pipe is planar medium film speculum, and what arrange on described right subsides mirror pipe is concave surface sphere deielectric-coating speculum.
In the present invention, the reflection kernel wavelength of described planar medium film speculum and concave surface sphere deielectric-coating speculum is 632.8 nanometers.
In the present invention, described planar medium film speculum and concave surface sphere deielectric-coating speculum stick on respectively on left subsides mirror pipe and right subsides mirror pipe with vacuum compound.
In the present invention, described long negative electrode side rod one end is connected with negative electrode bubble body, and the other end is provided with the evaporable getter.
A kind of He-Ne laser tube with flat inner cavity preparation method of the present invention, the first step is founded negative electrode bubble and anode bulb with the Circular glass pipe, and anode is set in anode bulb, the long negative electrode side rod of sealing-in and short negative electrode side rod in the negative electrode bubble, welding oxide coated cathode filament between long negative electrode side rod and short negative electrode side rod; The Circular glass pipe is made in welding respectively at the two ends of flat discharge tube left subsides mirror pipe and right subsides mirror pipe, negative electrode bubble and anode bulb are distinguished welding in the same side at two ends, flat discharge tube left and right, make negative electrode bubble, anode bulb and flat discharge tube consist of air passage connecting structure; The end face of left subsides mirror pipe and the end face of right subsides mirror pipe are cut flat and reconditioning, make these two end faces vertical with the geometrical axis of flat discharge tube;
second step, first pass smallcolumn diaphragm with helium neon laser beam, make helium neon laser beam coaxial with the geometrical axis of flat discharge tube, then place corresponding deielectric-coating speculum at one end subsides mirror pipe, vacant on the subsides mirror pipe of the other end, whether observe the folded light beam of deielectric-coating speculum gets back on the aperture of smallcolumn diaphragm, if not, continue reconditioning and paste the mirror end surfaces until folded light beam can be got back on the aperture of smallcolumn diaphragm, if, adopt same method to check the perpendicularity of another deielectric-coating speculum, when the perpendicularity of two deielectric-coating speculums all reaches on the aperture that can make folded light beam get back to smallcolumn diaphragm, carried out for the 3rd step,
The 3rd step, place simultaneously corresponding deielectric-coating speculum on the end face of the end face of left subsides mirror pipe and right subsides mirror pipe, then observe the oscillation mode field pattern that whether occurs glimmering on the minute surface of deielectric-coating speculum; After the oscillation mode field pattern that flicker occurs, planar medium film speculum is fixed on corresponding subsides mirror pipe, then also observe around flat discharge tube geometrical axis rotation concave surface sphere deielectric-coating speculum the oscillation mode field pattern that produces on the deielectric-coating speculum, when the oscillation mode field pattern was length-width ratio greater than the strip of 3:1, concave surface sphere deielectric-coating speculum and being fixed on corresponding subsides mirror pipe stopped the rotation.
Beneficial effect:He-Ne laser tube with flat inner cavity of the present invention adopts inner-cavity structure, the two deielectric-coating speculums that consist of optical resonator directly are attached to the two ends of laser tube, greatly reduced cavity loss (comprising the cavity loss that Bu Shi window and air-borne dust bring), avoid the pollution of air-borne dust to Bu Shi window and concave surface sphere deielectric-coating speculum, greatly improved laser output power.Save simultaneously original Bu Shi window and be used for micro-actuator and the subsidiary body of accommodation reflex mirror perpendicularity, greatly reduced the complete machine cost.Shorten the chamber long, reduced machine volume.Laser tube of the present invention is after manufacturer's Installation and Debugging, and the user can directly use and need not adjust again, and is easy to use.Shell of the present invention is formed by the hard glass melting, and negative electrode bubble with in be provided with getter, can extend the life-span of laser tube.
In He-Ne laser tube with flat inner cavity preparation method of the present invention, before pasting mirror pipe stickup concave mirror, after the geometrical axis of reconditioning laser tube two ends subsides mirror end surfaces and flat discharge tube is perpendicular, rotate concave mirror around tubular axis, the corresponding orientation of concave mirror when in employing He-Ne Lasers chamber, succusion is identified the laser tube peak power output, the oscillation mode field pattern is elongated in the chamber, can make the laser output power after laser tube is made larger, can obviously improve fabrication yield.
Description of drawings
Fig. 1 represents the structural representation of He-Ne laser tube with flat inner cavity of the present invention.
Fig. 2 represents that He-Ne laser tube with flat inner cavity speculum of the present invention is to the optical check principle schematic.
Oscillation mode field pattern schematic diagram in chamber when Fig. 3 represents that He-Ne laser tube with flat inner cavity of the present invention is good to light.
Have in figure: flat discharge tube 1, left subsides mirror pipe 11, right subsides mirror pipe 12, negative electrode bubble 2, oxide coated cathode filament 21, evaporable getter 22, long negative electrode side rod 23, short negative electrode side rod 24, anode bulb 3, anode 31, planar medium film speculum 41, concave surface sphere deielectric-coating speculum 42, the laser beam 511 of left subsides mirror end surfaces 111, right subsides mirror end surfaces 121, inner chamber he-ne laser tube 51, inner chamber he-ne laser tube 51, smallcolumn diaphragm 52, to light frame 53, lifting platform 54.
Embodiment
A kind of He-Ne laser tube with flat inner cavity of the present invention comprises flat discharge tube 1, negative electrode bubble 2, anode bulb 3, and described negative electrode bubble 2 and anode bulb 3 difference weldings are in the same side at flat discharge tube 1 two ends, left and right; Be provided with anode 31 in described anode bulb 3, be sealed with long negative electrode side rod 23 and short negative electrode side rod 24 in described negative electrode bubble 2, be welded with the oxide coated cathode filament 21 that connects both between described long negative electrode side rod 23 and short negative electrode side rod 24; There are left subsides mirror pipe 11 and right subsides mirror pipe 12 in the two ends of described flat discharge tube 1 welding respectively, be respectively arranged with the deielectric-coating speculum on the end face of the end face of described left subsides mirror pipe 11 and right subsides mirror pipe 12, two deielectric-coating speculums are respectively planar medium film speculum 41 and concave surface sphere deielectric-coating speculum 42.
In the present invention, described flat discharge tube 1, negative electrode bubble 2, anode bulb 3 and subsides mirror pipe 11 are made by hard glass.
In the present invention, described flat discharge tube 1 is made by flat glass tube, and described subsides mirror pipe 11, negative electrode bubble 2 and anode bulb 3 are made by the Circular glass pipe.
In the present invention, what arrange on described left subsides mirror pipe 11 is planar medium film speculum 41, and what arrange on described right subsides mirror pipe 12 is concave surface sphere deielectric-coating speculum 42.
In the present invention, the reflection kernel wavelength of described planar medium film speculum 41 and concave surface sphere deielectric-coating speculum 42 is 632.8 nanometers.
In the present invention, described planar medium film speculum 41 and concave surface sphere deielectric-coating speculum 42 use vacuum compounds stick on respectively on left subsides mirror pipe 11 and right subsides mirror pipe 12.
In the present invention, described long negative electrode side rod 23 1 ends are connected with negative electrode bubble 2 bodies, and the other end is provided with evaporable getter 22.
A kind of He-Ne laser tube with flat inner cavity preparation method of the present invention, the first step, found negative electrode bubble 2 and anode bulb 3 with the Circular glass pipe, at the interior anode 31 that arranges of anode bulb 3, at the negative electrode bubble 2 long negative electrode side rod 23 of interior sealing-in and short negative electrode side rods 24, welding oxide coated cathode filament 21 between long negative electrode side rod 23 and short negative electrode side rod 24; The Circular glass pipe is made in welding respectively at the two ends of flat discharge tube 1 left subsides mirror pipe 11 and right subsides mirror pipe 12, negative electrode bubble 2 and anode bulb 3 are distinguished weldings in the same side at flat discharge tube 1 two ends, left and right, make negative electrode bubble 2, anode bulb 3 and flat discharge tube 1 consist of air passage connecting structure; The end face of left subsides mirror pipe 11 and the end face of right subsides mirror pipe 12 are cut flat and reconditioning, make these two end faces vertical with the geometrical axis of flat discharge tube 1;
second step, first pass smallcolumn diaphragm 52 with helium neon laser beam 511, make helium neon laser beam 511 coaxial with the geometrical axis of flat discharge tube 1, then place corresponding deielectric-coating speculum at one end subsides mirror pipe, vacant on the subsides mirror pipe of the other end, whether observe the folded light beam of deielectric-coating speculum gets back on the aperture of smallcolumn diaphragm 52, if not, folded light beam continues reconditioning deielectric-coating speculum until can be got back on the aperture of smallcolumn diaphragm 52, if, adopt same method to check the perpendicularity of another deielectric-coating speculum, when the perpendicularity of two deielectric-coating speculums all reaches on the aperture that can make folded light beam get back to smallcolumn diaphragm 52, carried out for the 3rd step,
The 3rd step, place simultaneously corresponding deielectric-coating speculum on the end face 121 of the end face 111 of left subsides mirror pipe 11 and right subsides mirror pipe 12, then observe the oscillation mode field pattern that whether occurs glimmering on the minute surface of deielectric-coating speculum; After the oscillation mode field pattern that flicker occurs, planar medium film speculum 41 is fixed on corresponding subsides mirror pipe, then also observe around flat discharge tube 1 geometrical axis rotation concave surface sphere deielectric-coating speculum 42 the oscillation mode field pattern that produces on the deielectric-coating speculum, when the oscillation mode field pattern was length-width ratio greater than the strip of 3:1, concave surface sphere deielectric-coating speculum 42 and being fixed on corresponding subsides mirror pipe stopped the rotation.
Below in conjunction with accompanying drawing, the present invention will be further described.
The structure of He-Ne laser tube with flat inner cavity of the present invention as shown in Figure 1, its shell is melting into negative electrode bubble 2 and anode bulb 3 with common circular section horminess glass tube, include the anode 31 that the tungsten bar is made in anode bulb 3, be sealed with long negative electrode side rod 23 and short negative electrode side rod 24 in described negative electrode bubble 2, be welded with oxide coated cathode filament 21 between long negative electrode side rod 23 and short negative electrode side rod 24, be welded with evaporable getter 22 on long negative electrode side rod 23.With the two ends of flat discharge tube 1 respectively in welding two sections circular section horminess glass tubes as left subsides mirror pipe 11 and right subsides mirror pipe 12, then with negative electrode bubble 2 and the anode bulb 3 weldings intersection at flat discharge tube 1 and left subsides mirror pipe 11, right subsides mirror pipe 12, negative electrode bubble 2, anode bulb 3 and flat discharge tube 1 consist of air passage connecting structure.Cut left subsides mirror end surfaces 111, right subsides mirror end surfaces 121 flat, and these both ends of the surface of reconditioning make the geometrical axis of itself and flat discharge tube 1 perpendicular, be planar medium film speculum 41 and the concave surface sphere deielectric-coating speculum 42 of 632.8 nanometers with vacuum seal glue centre wavelength respectively on these both ends of the surface, thereby consist of the shell of this laser tube.The reflectivity of planar medium film speculum 41 is about 98%, and as laser output mirror, the curvature of concave surface sphere deielectric-coating speculum 42 half is through being 3 meters, and its reflectivity is more than 99.98%.
check that geometrical axis that described reconditioning laser tube two ends paste mirror end surfaces and flat discharge tube 1 is whether perpendicular to be checked succusion in light method employing He-Ne Lasers chamber: flat he-ne laser tube shell 1 to be processed is placed on light frame 53, to be placed on two lifting platforms 54 light frame 53, the laser beam 511 of small-sized commercially available inner chamber he-ne laser tube 51 passes the aperture of smallcolumn diaphragm 52, enter in flat discharge tube 1, and regulate light frame 53 and lifting platform 54, make the geometrical axis of the laser beam 511 of he-ne laser tube 51 and laser tube shell 1 coaxial, as shown in Figure 2.In Fig. 2, for simplicity, the schematic diagram of laser tube 1 has omitted negative electrode bubble 2 and anode bulb 3.
During check, plane mirror 41 is placed in left subsides mirror pipe 11 end face 111 places, if laser beam 511 is just in time beaten center at the aperture of smallcolumn diaphragm 52 through the folded light beam of plane mirror 41, illustrated planar speculum 41 is perpendicular with the geometrical axis of flat discharge tube 1, if laser beam 511 is not beaten center position at the aperture of smallcolumn diaphragm 52 through the folded light beam of plane mirror 41, continue this end face 111 of reconditioning, until perpendicular with the geometrical axis of flat discharge tube 1.Equally, concave surface spherical reflector 42 is placed in right subsides mirror pipe 12 end face 121 places, if laser beam 511 is just in time beaten center at the aperture of smallcolumn diaphragm 52 through the folded light beam of concave mirror 42, illustrate that concave surface spherical reflector 42 and the geometrical axis of flat discharge tube 1 are perpendicular, be that plane mirror 41 is parallel to each other with concave surface spherical reflector 42, the optical resonator that is made of plane mirror 41 and concave surface spherical reflector 42 can reach resonance condition.
Then, plane mirror 41 is placed in left subsides mirror end surfaces 111 places, sphere concave mirror 42 is placed in right subsides mirror end surfaces 121 places, because laser beam 511 can see through plane mirror 41 on a small quantity, the light beam that sees through can produce vibration between plane mirror 41 and concave surface spherical reflector 42, at this moment just can see the oscillation mode field pattern of flicker on two minute surfaces of plane mirror 41 and concave surface spherical reflector 42, its shape is various, has enumerated oscillation mode field pattern in several chambeies when good to light in Fig. 3.A large number of experiments show that, with concave surface spherical reflector 42 when the geometrical axis of flat discharge tube 1 slowly rotates, its oscillation mode field pattern is also in continuous variation, when the oscillation mode field pattern elongated, and the length-width ratio of this strip greater than three ratios for the moment, namely during the shape as shown in a, b, c, d, e etc. in Fig. 3, be coated with vacuum compound in concave surface spherical reflector 42 surroundings, laser tube after making after solidifying can be exported larger laser power, can determine to obtain the orientation of the concave surface spherical reflector 42 of larger laser output power with this.Otherwise, when the oscillation mode field pattern less, be circle, side or rhombus, or the length-width ratio of this oscillation mode field pattern less than three ratios for the moment, shape as shown in f, g, h, i, j etc. in Fig. 3, be coated with vacuum compound in sphere concave mirror 42 surroundings, the laser tube energy Output of laser power after making after solidifying is less.Because the strip of oscillation mode field pattern in the present invention is irregular figure, therefore the width in said length-width ratio is the width of this strip the widest part.
If the length of flat discharge tube 1 is 900 millimeters, the inwall size is about 23 * 4.5 millimeters, the length that the mirror pipe is pasted at two ends is about 45 millimeters, its external diameter is about 25 millimeters, its wall thickness is about 1.5 millimeters, and negative electrode bubble 2 and anode bulb 3 all are about by external diameter the hard Circular glass pipe that 30 millimeters, wall thickness are about 1.5 millimeters and make.Optical resonator is flat-concave cavity, namely consisted of by a plane mirror and a concave surface spherical reflector, and be all the deielectric-coating speculum, centre wavelength is 632.8 nanometers, and the mirror diameter is 25 millimeters, and filming diameter is 22 millimeters, and the reflectivity of plane mirror is about 98%.The radius of curvature of concave surface spherical reflector is 3 meters, its reflectivity is about more than 99.98%, and laser tube fills the mixture that is about 7:1 with the He-Ne mixing ratio after the PROCESS FOR TREATMENT such as fine cleaning, exhaust, total gas is being about 0.8mmHg, can obtain the above laser output power of 70 milliwatts.The results showed, the laser output power of He-Ne laser tube with flat inner cavity of the present invention is with same discharge length, the discharge half flat he-ne laser tube of exocoel in cross section is compared equally, and its power output can improve 20 ~ 30%.
In the laser tube manufacture process, as shown in the table to one group of experimental data that laser oscillation mode field pattern and this laser tube of light time appearance are made rear laser output power:
Pattern field pattern (Fig. 3) a b c d e f g h i j
Laser power (milliwatt) 86 75 68 64 92 33 38 31 24 28
The basic functional principle of gas laser is: have the gas medium that can produce population inversion, under the condition of power supply excitation, form gas discharge, population inversion in discharge comes back reflective in the optical resonator that a pair of speculum parallel to each other consists of, and obtain light quantum and amplify, during greater than the loss of light quantum, light quantum produces vibration in optical resonator, and obtains Laser output when the gain amplifier of light quantum.
Various transparent optical elements (as the Bu Shi window) are arranged on the light path in optical resonator, all can increase the loss (when the Bu Shi window became the Brest angle with the tubular axis line, loss was minimum) of light quantum, thereby affect laser generation and Laser output.For making this loss minimum, wishing does not have these optical elements on optical cavity vibration light path.
due to the concave surface spherical reflector in the cold worked process of optics, the centre of sphere of sphere concave mirror can not strictly be positioned on the axis of round mirror, after the circle mirror sticks the mirror pipe, the basic geometrical axis with flat discharge tube of the axis of circle mirror is harmonious, if the centre of sphere of sphere concave mirror is at the long axis direction of flat discharge tube flat cross section, at long axis direction, larger mode volume (reflection direction on minute surface is substantially along normal direction) is just arranged when vibrating in the chamber so, therefore the oscillation mode field pattern is elongated, power output is also larger, Here it is speculum of the present invention is to the optical check Method And Principle.

Claims (1)

1. the preparation method of a He-Ne laser tube with flat inner cavity, it is characterized in that, the first step, found negative electrode bubble (2) and anode bulb (3) with the Circular glass pipe, anode (31) is set in anode bulb (3), the long negative electrode side rod of sealing-in (23) and short negative electrode side rod (24) in negative electrode bubble (2), welding oxide coated cathode filament (21) between long negative electrode side rod (23) and short negative electrode side rod (24); The Circular glass pipe is made in welding respectively at the two ends of flat discharge tube (1) left subsides mirror pipe (11) and right subsides mirror pipe (12), negative electrode bubble (2) and anode bulb (3) are distinguished welding in the same side at flat discharge tube (1) two ends, left and right, make negative electrode bubble (2), anode bulb (3) and flat discharge tube (1) consist of air passage connecting structure; The end face of left subsides mirror pipe (11) and the end face of right subsides mirror pipe (12) are cut flat and reconditioning, make these two end faces vertical with the geometrical axis of flat discharge tube (1);
second step, first use helium neon laser beam (511) to pass smallcolumn diaphragm (52), make helium neon laser beam (511) coaxial with the geometrical axis of flat discharge tube (1), then place corresponding deielectric-coating speculum at one end subsides mirror pipe, vacant on the subsides mirror pipe of the other end, whether observe the folded light beam of deielectric-coating speculum gets back on the aperture of smallcolumn diaphragm (52), if not, continue reconditioning and paste the mirror end surfaces until folded light beam can be got back on the aperture of smallcolumn diaphragm (52), if, adopt same method to check the perpendicularity of another deielectric-coating speculum, when the perpendicularity of two deielectric-coating speculums all reaches on the aperture that can make folded light beam get back to smallcolumn diaphragm (52), carried out for the 3rd step,
The 3rd step, place simultaneously corresponding deielectric-coating speculum on left subsides mirror end surfaces (111) and right subsides mirror end surfaces (121), then observe the oscillation mode field pattern that whether occurs glimmering on the minute surface of deielectric-coating speculum; After the oscillation mode field pattern that flicker occurs, planar medium film speculum (41) is fixed on corresponding subsides mirror pipe, then also observe around flat discharge tube (1) geometrical axis rotation concave surface sphere deielectric-coating speculum (42) the oscillation mode field pattern that produces on the deielectric-coating speculum, when the oscillation mode field pattern was length-width ratio greater than the strip of 3:1, concave surface sphere deielectric-coating speculum (42) and being fixed on corresponding subsides mirror pipe stopped the rotation.
CN 201110301866 2011-09-30 2011-09-30 He-Ne laser tube with flat inner cavity and manufacturing method thereof Expired - Fee Related CN102340091B (en)

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