CN102332393B - 太阳能电池制造过程中提高电池片少子寿命的扩散方法 - Google Patents
太阳能电池制造过程中提高电池片少子寿命的扩散方法 Download PDFInfo
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- CN102332393B CN102332393B CN2011103020978A CN201110302097A CN102332393B CN 102332393 B CN102332393 B CN 102332393B CN 2011103020978 A CN2011103020978 A CN 2011103020978A CN 201110302097 A CN201110302097 A CN 201110302097A CN 102332393 B CN102332393 B CN 102332393B
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- metal impurities
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- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000009792 diffusion process Methods 0.000 title claims abstract description 14
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000012535 impurity Substances 0.000 claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 25
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 19
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 14
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 8
- 239000011574 phosphorus Substances 0.000 claims abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000005247 gettering Methods 0.000 claims abstract description 6
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 239000010703 silicon Substances 0.000 claims abstract description 6
- 239000011521 glass Substances 0.000 claims description 10
- 238000010792 warming Methods 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 239000000969 carrier Substances 0.000 abstract 2
- 239000005360 phosphosilicate glass Substances 0.000 abstract 2
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 4
- 239000007789 gas Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN2011103020978A CN102332393B (zh) | 2011-09-28 | 2011-09-28 | 太阳能电池制造过程中提高电池片少子寿命的扩散方法 |
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CN2011103020978A CN102332393B (zh) | 2011-09-28 | 2011-09-28 | 太阳能电池制造过程中提高电池片少子寿命的扩散方法 |
Publications (2)
Publication Number | Publication Date |
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CN102332393A CN102332393A (zh) | 2012-01-25 |
CN102332393B true CN102332393B (zh) | 2013-08-14 |
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CN2011103020978A Expired - Fee Related CN102332393B (zh) | 2011-09-28 | 2011-09-28 | 太阳能电池制造过程中提高电池片少子寿命的扩散方法 |
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CN (1) | CN102332393B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102703987B (zh) * | 2012-06-08 | 2015-03-11 | 天威新能源控股有限公司 | 基于多晶硅中金属杂质去除的低温磷吸杂扩散工艺 |
CN103871871A (zh) * | 2014-02-21 | 2014-06-18 | 上海华力微电子有限公司 | 一种去除硅片金属杂质的方法 |
CN104538487B (zh) * | 2014-11-21 | 2017-02-22 | 广东爱康太阳能科技有限公司 | 一种低杂质含量的太阳能电池制备方法 |
CN114457410B (zh) * | 2021-12-31 | 2023-11-28 | 隆基绿能科技股份有限公司 | 一种硅片处理方法和硅片处理装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101730941A (zh) * | 2007-07-09 | 2010-06-09 | 费罗公司 | 含铝、和硼、钛、镍、锡、银、镓、锌、铟及铜中的至少一种的太阳能电池接触层 |
CN101794845A (zh) * | 2010-03-15 | 2010-08-04 | 常州天合光能有限公司 | 一种一次扩散制备选择性发射极的方法 |
CN102064216A (zh) * | 2010-11-22 | 2011-05-18 | 晶澳(扬州)太阳能科技有限公司 | 一种新型晶体硅太阳电池及其制作方法 |
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- 2011-09-28 CN CN2011103020978A patent/CN102332393B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101730941A (zh) * | 2007-07-09 | 2010-06-09 | 费罗公司 | 含铝、和硼、钛、镍、锡、银、镓、锌、铟及铜中的至少一种的太阳能电池接触层 |
CN101794845A (zh) * | 2010-03-15 | 2010-08-04 | 常州天合光能有限公司 | 一种一次扩散制备选择性发射极的方法 |
CN102064216A (zh) * | 2010-11-22 | 2011-05-18 | 晶澳(扬州)太阳能科技有限公司 | 一种新型晶体硅太阳电池及其制作方法 |
Non-Patent Citations (4)
Title |
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"磷吸杂工艺研究";唐穗生;《名企产品推介》;20071231;第9卷(第5期);正文引言部分第4-10行,第1页左栏第2段至右栏第1段、附图1 * |
"铸造多晶硅杂质和缺陷处理工艺研究进展";许子寒等;《第十届中国太阳能光伏会议论文集》;20081231;正文第2页第11-15页 * |
唐穗生."磷吸杂工艺研究".《名企产品推介》.2007,第9卷(第5期),正文引言部分第4-10行,第1页左栏第2段至右栏第1段、附图1. |
许子寒等."铸造多晶硅杂质和缺陷处理工艺研究进展".《第十届中国太阳能光伏会议论文集》.2008,正文第2页第11-15页. |
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Inventor after: Chen Bitao Inventor after: Liang Chuan Inventor after: OUYANG QIUPING Inventor after: Zhou Bailin Inventor before: Sun Liangxin Inventor before: Guo Yulin Inventor before: Liang Zhixin |
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