CN102323646A - 光栅耦合器及其制作方法 - Google Patents
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102692682A (zh) * | 2012-06-12 | 2012-09-26 | 中国科学院上海微系统与信息技术研究所 | 一种光栅耦合器及其制作方法 |
CN102749680A (zh) * | 2012-07-26 | 2012-10-24 | 上海宏力半导体制造有限公司 | 光栅耦合器制造方法以及半导体器件装置方法 |
US20140193115A1 (en) * | 2013-01-10 | 2014-07-10 | The Regents Of The University Of Colorado, A Body Corporate | Method and Apparatus for Optical Waveguide-to-Semiconductor Coupling and Optical Vias for Monolithically Integrated Electronic and Photonic Circuits |
WO2017147773A1 (zh) * | 2016-03-01 | 2017-09-08 | 华为技术有限公司 | 一种光耦合器及光处理方法 |
CN108490539A (zh) * | 2018-01-27 | 2018-09-04 | 天津大学 | 一种用于激发少模光纤高阶模式的光栅耦合器 |
CN109541743A (zh) * | 2017-09-22 | 2019-03-29 | 北京万集科技股份有限公司 | 一种硅基光学天线及制备方法 |
US10983275B2 (en) | 2016-03-21 | 2021-04-20 | The Regents Of The University Of Colorado, A Body Corporate | Method and apparatus for optical waveguide-to-semiconductor coupling for integrated photonic circuits |
CN114815057A (zh) * | 2022-05-05 | 2022-07-29 | 武汉大学 | 一种聚焦型垂直光栅耦合器及其制备方法 |
CN115842241A (zh) * | 2022-12-23 | 2023-03-24 | 上海铭锟半导体有限公司 | 基于倏逝波调控的波导光栅天线及制造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106873076B (zh) * | 2017-02-16 | 2019-07-12 | 中山大学 | 一种光栅耦合器 |
Citations (2)
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CN1225177A (zh) * | 1996-05-16 | 1999-08-04 | 布克哈姆技术有限公司 | 一种光学元件和光波导的组件 |
CN102141650A (zh) * | 2009-12-03 | 2011-08-03 | 三星电子株式会社 | 光学器件及其制造方法 |
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2011
- 2011-09-29 CN CN201110294691.7A patent/CN102323646B/zh active Active
Patent Citations (2)
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CN1225177A (zh) * | 1996-05-16 | 1999-08-04 | 布克哈姆技术有限公司 | 一种光学元件和光波导的组件 |
CN102141650A (zh) * | 2009-12-03 | 2011-08-03 | 三星电子株式会社 | 光学器件及其制造方法 |
Non-Patent Citations (4)
Title |
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D.VERMEULEN,S.SELVARAJA,P.VERHEYEN,G.LEPAGE,ET AL: "High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform", 《OPTICS EXPRESS》 * |
GÜNTHER ROELKENS, DRIES VAN THOURHOUT, ROEL BAETS: "High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay", 《OPTICS EXPRESS》 * |
关旭东: "《硅集成电路工艺基础》", 31 October 2003, 北京大学出版社 * |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102692682A (zh) * | 2012-06-12 | 2012-09-26 | 中国科学院上海微系统与信息技术研究所 | 一种光栅耦合器及其制作方法 |
CN102749680A (zh) * | 2012-07-26 | 2012-10-24 | 上海宏力半导体制造有限公司 | 光栅耦合器制造方法以及半导体器件装置方法 |
US20140193115A1 (en) * | 2013-01-10 | 2014-07-10 | The Regents Of The University Of Colorado, A Body Corporate | Method and Apparatus for Optical Waveguide-to-Semiconductor Coupling and Optical Vias for Monolithically Integrated Electronic and Photonic Circuits |
US10514509B2 (en) * | 2013-01-10 | 2019-12-24 | The Regents Of The University Of Colorado, A Body Corporate | Method and apparatus for optical waveguide-to-semiconductor coupling and optical vias for monolithically integrated electronic and photonic circuits |
CN108603985B (zh) * | 2016-03-01 | 2020-02-21 | 华为技术有限公司 | 一种光耦合器及光处理方法 |
WO2017147773A1 (zh) * | 2016-03-01 | 2017-09-08 | 华为技术有限公司 | 一种光耦合器及光处理方法 |
CN108603985A (zh) * | 2016-03-01 | 2018-09-28 | 华为技术有限公司 | 一种光耦合器及光处理方法 |
US10983275B2 (en) | 2016-03-21 | 2021-04-20 | The Regents Of The University Of Colorado, A Body Corporate | Method and apparatus for optical waveguide-to-semiconductor coupling for integrated photonic circuits |
CN109541743A (zh) * | 2017-09-22 | 2019-03-29 | 北京万集科技股份有限公司 | 一种硅基光学天线及制备方法 |
CN109541743B (zh) * | 2017-09-22 | 2020-06-23 | 北京万集科技股份有限公司 | 一种硅基光学天线及制备方法 |
CN108490539A (zh) * | 2018-01-27 | 2018-09-04 | 天津大学 | 一种用于激发少模光纤高阶模式的光栅耦合器 |
CN114815057A (zh) * | 2022-05-05 | 2022-07-29 | 武汉大学 | 一种聚焦型垂直光栅耦合器及其制备方法 |
CN115842241A (zh) * | 2022-12-23 | 2023-03-24 | 上海铭锟半导体有限公司 | 基于倏逝波调控的波导光栅天线及制造方法 |
CN115842241B (zh) * | 2022-12-23 | 2024-04-02 | 上海铭锟半导体有限公司 | 基于倏逝波调控的波导光栅天线及制造方法 |
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