CN102323490A - Rectilinear vibration modulation minitype electrostatic field sensor - Google Patents
Rectilinear vibration modulation minitype electrostatic field sensor Download PDFInfo
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- CN102323490A CN102323490A CN201110309911A CN201110309911A CN102323490A CN 102323490 A CN102323490 A CN 102323490A CN 201110309911 A CN201110309911 A CN 201110309911A CN 201110309911 A CN201110309911 A CN 201110309911A CN 102323490 A CN102323490 A CN 102323490A
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Abstract
The invention provides a rectilinear vibration modulation minitype electrostatic field sensor, which aims to solve the problem of mechanical abrasion of a field grinding type electric field instrument. The rectilinear vibration modulation minitype electrostatic field sensor comprises a shielding electrode, an induction electrode, a piezoelectric stack, a piezoelectric stack mounting plate, a position adjustment thread and a mounting base, wherein the shielding electrode is arranged on the mounting base and is grounded; the induction electrode is arranged parallel to the shielding electrode; the lower part of the induction electrode is connected with the piezoelectric stack; the piezoelectric stack is fixed on the piezoelectric stack mounting plate; the piezoelectric stack mounting plate is connected with the mounting base through the position adjustment thread; and a plurality of circular holes or a plurality of elongated slot-shaped slits are formed in the shielding electrode.
Description
Technical field:
The present invention relates to a kind of straight-line oscillation and modulate miniature electrostatic field sensor, belong to electricity field, specifically belong to the measurement of sensor technology and electrostatic field.
Background technology:
In commercial production; Static has certain harm; The monitoring of static is an important job that is related to product quality, production safety, and on meteorology, the atmospheric static electric field is again the key characterization parameter of thunderstorm, lightning monitoring; At earthquake pre-warning, industry electrostatic monitorings such as oil mine also all are important process.At present; An induction type electrostatic tester and a mill formula electrostatic tester are mainly adopted in the monitoring of electrostatic field, and the induction type electrostatic tester adopts the electrostatic induction principle, on the measuring distance of regulation, induces electric charge and measures; (like 25mm) measures electrified body current potential or electric charge but this method requires closely; And exist electric charge to leak, the electric charge that induces is decayed in time, makes measured value reduce in time; Mill formula electric field instrument does not receive distance limit not have electric charge to leak yet, but its drive motor influences its long time continuous working, and rotary speed unstabilization is fixed, have mechanical wear, system power dissipation is more greatly its shortcoming.Optical profile type electric-field sensor system complex, and the multiple physical influence of optical material influences each other and optical material self stability and reliability effect, and measuring method is also not really practical, still under test.
Goal of the invention:
Grind a formula electric field instrument for solving the field, the mechanical wear problem, the present invention has designed a kind of novel piezoelectric and has stacked the drive-type electric-field sensor.
The objective of the invention is to realize through following measure:
Miniature electrostatic field sensor is modulated in a kind of straight-line oscillation; It comprises guarded electrode, induction electrode, piezoelectric stack, piezoelectric stack installing plate, position adjustments screw thread and mounting seat; Guarded electrode is arranged on the mounting seat and ground connection, and induction electrode and guarded electrode opposing parallel are provided with, and the induction electrode bottom connects piezoelectric stack; Piezoelectric stack is fixed on the piezoelectric stack installing plate, and the piezoelectric stack installing plate is connected with mounting seat through the position adjustments screw thread; Have some circular holes on the said guarded electrode, perhaps have some trough type slits.
The diameter of the circular hole on the guarded electrode is the 0.2-2 millimeter, and the centre distance of adjacent circular holes is 1.1-1.2 times of Circularhole diameter.
Slit is a parallel slits on the guarded electrode, and slit width is the 0.2-2 millimeter, and the spacing of adjacent slots is 0.1-0.2 a times of slit width.
Distance between screening electrode electrode and induction electrode is designed to 0.3-0.5mm.
Guarded electrode is the circular metal diaphragm, and said induction electrode is the circular configuration suitable with the guarded electrode shape.
The present invention compares prior art and has following beneficial effect:
The present invention has designed a kind of novel piezoelectric and has stacked the drive-type electric-field sensor; This sensor adopts the electrostatic induction principle work; Induction electrode is done straight-line oscillation with respect to guarded electrode under the drive of piezoelectric stack; Through the relative vibration between induction electrode and the guarded electrode, cyclical variation appears in induced charge on the induction electrode, stablizes alternating current and is convenient to subsequent conditioning circuit and measures so form one.
Its guarded electrode is the ground-electrode of perforate or groove; The transmission of electric field part is crossed guarded electrode and is arrived on the induction electrode, and the electric field that arrives induction electrode becomes certain functional relation with two distance between electrodes, and the electric charge that induces on the induction electrode during electric-field strength is just many; Otherwise it is then few; Through the relative vibration between induction electrode and the guarded electrode, cyclical variation appears in induced charge on the induction electrode, stablizes alternating current and is convenient to subsequent conditioning circuit and measures so form one.
This sensor adopts the electrostatic induction principle work, and induction electrode is done straight-line oscillation with respect to guarded electrode under the drive of piezoelectric stack.
Have only microvibration in the system of the present invention, avoided the mechanical wear of a mill formula electric field instrument, help long-time steady operation.And size sensor is little, is convenient to realize the microminiaturization of instrument.
Description of drawings:
Fig. 1 is the electrostatic induction principle schematic.
Fig. 2 is one of shield electrode structure synoptic diagram.
Fig. 3 is two of a shield electrode structure synoptic diagram.
Fig. 4 is the position view of electrode with holes in electric field to be measured.
The transmission effect synoptic diagram that Fig. 5 forms after through guarded electrode for electric field to be measured.
Fig. 6 for electric field E1/10V/m through distribution map of the electric field behind the guarded electrode.
Fig. 7 is that mean charge amount and Z axle concern synoptic diagram on the tablet.
Fig. 8 is the electric-field sensor structural representation.
Embodiment
Below in conjunction with the detailed structure of sensor of the present invention, principle of work and theoretical derivation, and show this system measuring stationary electric field well through computational analysis.
Structure example:
As shown in Figure 8, straight-line oscillation of the present invention is modulated miniature electrostatic field sensor and mainly is made up of 6 parts:
1, guarded electrode, profile is circular, is made up of the metal polar plate of being with aperture or trough of belt, plays the partly shielding effect electric field action.
2, induction electrode is made up of the circular metal electrode, in order to the induction external electric field, produces induced charge.
3, piezoelectric stack; Form by the piezoelectric patches stacked in multi-layers; Piezoelectric patches thickness changes-electrostriction after adding voltage, and the change of piezoelectric stack thickness causes distance change between induction electrode and the guarded electrode, and the electric field intensity that therefore also causes sensing on the induction electrode changes; Thereby induced charge changes on the induction electrode, causes the change in electric in the subsequent conditioning circuit.If what add on the piezoelectric stack is the alternating voltage of fixed frequency, so, piezoelectric stack will drive induction electrode and do periodic vibration, will produce periodic stable current signal on the induction electrode.This signal can obtain the magnitude of voltage that is directly proportional with tested electric field after the processing of electronic circuit.Can measure through metering circuit.
4, piezoelectric stack installing plate is used for installing and fixing piezoelectric stack
5, position adjustments screw thread is used for regulating the distance of the induction electrode installed on the piezoelectric stack and guarded electrode and regulates the parallel of induction electrode and guarded electrode.
6, mounting seat should keep level during installation, so that can accurate measuring vertical electric field.
When guarded electrode was designed to circular hole, the diameter of circular hole can be designed to the 0.2-2 millimeter, and the centre distance of adjacent circular holes is 1.1-1.2 times of Circularhole diameter.The diameter of circular hole and the oscillation distances of vibrating electrode are proportional corresponding, and the diameter in hole increases, and then the oscillation distances of induction electrode also will increase, otherwise the signal that produces on the induction electrode is just little, are difficult for measuring.Like Fig. 6, shown in Figure 7, when 2 millimeters of Circularhole diameters, the distance that electric field change is bigger behind the hole is in 0.1-0.5 millimeter scope.And because the piezoelectric actuator displacement range is less, 0.02-0.2mm normally, so 0.2-2 millimeters of corresponding Circularhole diameter scopes of design, shielding pole plate and induction pole plate are apart from being designed to 0.3-0.5mm.
When guarded electrode is designed to slit, the width 0.2-2 millimeter of slit; The spacing of adjacent slots is 0.1-0.2 a times of slit width.Can regard slit by the compact arranged circular hole of a row as and form, slit width is corresponding with Circularhole diameter, and slit separation is corresponding with the circular hole spacing.
Slit is parallel, can be parallel linear pattern slit, also can be parallel circular slit.Be designed to the parallel surface area that can make full use of guarded electrode, can also modulate, it is produced through the effect of electric field behind the slit with variable in distance tested electric field.
Piezoelectric stack can adopt existing procucts, also can be customized.As adopt core scientific & technical corporation's tomorrow piezoelectric ceramics, and model 200vs15,0.2 millimeter of maximum displacement, piezoelectric ceramic actuator can adopt XE-500/501 series controller.
Guarded electrode is circular or other shape metallic membrane, but better circular, the distortion that causes electric field is axisymmetric.Be evenly distributed with many circular holes on it, or the trough type slit.Can know by theoretical analysis, after electric field passes aperture, as shown in Figure 6; After radially greater than the aperture radius, direction of an electric field has occurred oppositely, if place sensing chip herein; The opposite polarity that electric charge that induces and electric field induction to be measured go out plays a part to weaken total induced charge, therefore; Spacing between the hole should be as far as possible little, to reduce this part electric charge.In addition, owing to adopt piezoelectric stack, its displacement is very little, so the size of hole or seam is corresponding also less, so that when sensing chip vibrates, can obtain bigger electric charge change amount, and general, the diameter in hole or the width of seam are advisable less than 2 millimeters.
Principle of work of the present invention is as shown in Figure 1, guarded electrode ground connection, perforate or seam on it; Induction electrode is responded to the electric field that electric field to be measured produces through guarded electrode hole or seam back, this electric field with from the hole or seam apart from becoming certain funtcional relationship, induction electrode is done microvibration under the piezoelectric stack effect; As in Fig. 1, double vibrations between a, b position, the distance between change and the guarded electrode; Thereby make the electric charge cyclical variation of sensing on the induction electrode; And becoming the funtcional relationship of a direct ratio with measured electric field E1, induction electrode inserts metering circuit and detects the change in electrical charge on it, send subsequent conditioning circuit to continue to handle again.
Fig. 2, shown in Figure 3 be shield electrode structure figure, guarded electrode is a metallic membrane as thin as a wafer, evenly has many circular holes on it, or the trough type slit, like Fig. 2, shown in Figure 3.
The explanation of principle of work of the present invention:
Tested electric field is through behind the guarded electrode, and the current potential expression formula is following:
Wherein:
Change with radial distance and axial distance by the visible current potential of formula.
Work as E2=0, and V
0=0 o'clock, formula 1 became:
φ (r z) ask partial derivative just can obtain electric field in the axial situation of change of z to z, but μ also is the function of z, and directly differentiate is very difficult, therefore, representes electric field with current potential in the difference of z direction:
E
i,j=φ(r
j,z
i+1)-?φ(r
j,z
i) ……………………（2）
R wherein
j=0.1R, 0.2R, 0.3R ... 2R
z
i=0.05R,0.1R,0.15R……R
The synoptic diagram of electric field situation is seen Fig. 6, and the vertical electric field of the z direction of having drawn adopts external electric field E1=10v/m among the figure, pore radius 1mm, and z value 0.05R-R, the r value is from 0-2R, (the z positive dirction is downward, sees Fig. 4).By finding out among the figure, electric field increases with axial distance z and sharply reduces, and when distance arrived 0.9R, electric field intensity was about 10% of external electric field; In addition, electric field changes with the radial dimension in hole, begins gentlyer, when near the edge in hole, sharply reduces; After surpassing the marginal dimension in hole, electric field even inverse change, so; During design, the distance between guarded electrode hole and the hole can not be big, should be as far as possible little.
When z confirms, because r is radially parameter of circular hole,, but be to think all approximately equals of electric field on the small annulus of r at radius so electric field also changes with r, the electric flux on tablet when constant with the product representation z of electric field and tablet area,
Δ r value 0.1mm obtains Fig. 5 during calculating.
Induced charge is:
Q=ES/ε=ψ/ε
This electric charge is seen Fig. 7 with z changes in coordinates synoptic diagram, and by visible among the figure, mean charge reduces from increasing with the z wheelbase gradually on the induction electrode, and inhomogeneous variation, and variation in z hour is quicker, and when z was big, variation eased up.
For example: have design parameter following:
Aperture R=1mm, hole centre distance 2.2mm,
When 50 millimeters of guarded electrode diameters, can be about 500 of (3.14*25*25)/(3.14*1.1*1.1) ≈ by number of aperture.
It is 0.2mm that piezoelectric stack drives the induction electrode oscillation distances, and the distance between screening electrode electrode and induction electrode is designed to 0.3mm.The change in electrical charge amount that each hole produces is as shown in Figure 7: (6.75-4.48) * 10
-17=2.27*10
-17The storehouse
As vibration frequency 10kHz, during 500 of hole counts, produce electric current I=2.27*10
-17* 500*10
4=1.135*10
-10A
This electric current inserts the IV translation circuit, and feedback resistance is got 10M ohm, produces voltage 1.135*10
-10A*10M=1.135 millivolt, as adopt 16 bit pads, the 2.5v voltage reference, the corresponding approximately 1.135mv*65536/2500mv=29bit data of this magnitude of voltage can be measured the electric field of 10v/m fully.
Claims (5)
1. miniature electrostatic field sensor is modulated in a straight-line oscillation; It comprises guarded electrode, induction electrode, piezoelectric stack, piezoelectric stack installing plate, position adjustments screw thread and mounting seat; Guarded electrode is arranged on the mounting seat and ground connection, and induction electrode and guarded electrode opposing parallel are provided with, and the induction electrode bottom connects piezoelectric stack; Piezoelectric stack is fixed on the piezoelectric stack installing plate, and the piezoelectric stack installing plate is connected with mounting seat through the position adjustments screw thread; Have some circular holes on the said guarded electrode, perhaps have some trough type slits.
2. miniature electrostatic field sensor is modulated in straight-line oscillation according to claim 1, it is characterized in that: the diameter of the circular hole on the said guarded electrode is the 0.2-2 millimeter, and the centre distance of adjacent circular holes is 1.1-1.2 times of Circularhole diameter.
3. miniature electrostatic field sensor is modulated in straight-line oscillation according to claim 1, it is characterized in that: slit is a parallel slits on the said guarded electrode, and slit width is the 0.2-2 millimeter, and the spacing of adjacent slots is 0.1-0.2 a times of slit width.
4. miniature electrostatic field sensor is modulated in straight-line oscillation according to claim 1, it is characterized in that: the distance between screening electrode electrode and induction electrode is designed to 0.3-0.5mm.
5. modulate miniature electrostatic field sensor according to claim 1,2,3 or 4 described straight-line oscillations, it is characterized in that: said guarded electrode is the circular metal diaphragm, and said induction electrode is the circular configuration suitable with the guarded electrode shape.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459351A (en) * | 2014-12-15 | 2015-03-25 | 中国科学院电子学研究所 | Pendulous microelectric field sensor |
| CN105277769A (en) * | 2014-06-25 | 2016-01-27 | 中国科学院空间科学与应用研究中心 | Vibrating-type satellite surface floating potential detection device |
| CN104237652B (en) * | 2014-09-03 | 2016-08-24 | 西安交通大学 | A kind of beam diaphragm structure high-voltage electrostatic field based on pressure-sensitive principle sensor chip |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN107907749A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院电子学研究所 | A kind of three-dimensional electric field sensor of low inter-axis coupling |
| CN114527336A (en) * | 2022-01-14 | 2022-05-24 | 深圳市中明科技股份有限公司 | Non-contact electrostatic field detection sensing probe device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105277769A (en) * | 2014-06-25 | 2016-01-27 | 中国科学院空间科学与应用研究中心 | Vibrating-type satellite surface floating potential detection device |
| CN104237652B (en) * | 2014-09-03 | 2016-08-24 | 西安交通大学 | A kind of beam diaphragm structure high-voltage electrostatic field based on pressure-sensitive principle sensor chip |
| CN104459351A (en) * | 2014-12-15 | 2015-03-25 | 中国科学院电子学研究所 | Pendulous microelectric field sensor |
| CN106767406A (en) * | 2016-12-20 | 2017-05-31 | 华南理工大学 | Micro-nano alignment system and its closed-loop On-Line Control Method to compliant mechanism platform |
| CN106767406B (en) * | 2016-12-20 | 2022-08-16 | 华南理工大学 | Micro-nano positioning system and full closed-loop online control method for compliant mechanism platform by micro-nano positioning system |
| CN107907749A (en) * | 2017-11-24 | 2018-04-13 | 中国科学院电子学研究所 | A kind of three-dimensional electric field sensor of low inter-axis coupling |
| CN114527336A (en) * | 2022-01-14 | 2022-05-24 | 深圳市中明科技股份有限公司 | Non-contact electrostatic field detection sensing probe device |
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Application publication date: 20120118 |