CN102288135A - Optical system for measuring minimum rotating angle - Google Patents

Optical system for measuring minimum rotating angle Download PDF

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Publication number
CN102288135A
CN102288135A CN2011101911376A CN201110191137A CN102288135A CN 102288135 A CN102288135 A CN 102288135A CN 2011101911376 A CN2011101911376 A CN 2011101911376A CN 201110191137 A CN201110191137 A CN 201110191137A CN 102288135 A CN102288135 A CN 102288135A
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China
Prior art keywords
catoptron
rotary
optical system
rotation
optical receiver
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CN2011101911376A
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Chinese (zh)
Inventor
彭晖
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INVENLUX PHOTOELECTRONICS (CHINA) CO Ltd
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INVENLUX PHOTOELECTRONICS (CHINA) CO Ltd
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Priority to CN2011101911376A priority Critical patent/CN102288135A/en
Publication of CN102288135A publication Critical patent/CN102288135A/en
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Abstract

The invention provides an optical system for measuring a minimum rotating angle, which comprises a rotatable reflecting mirror, a fixed reflecting mirror, an optical source and an optical receiver, wherein the fixed reflecting mirror and the rotatable reflecting mirror can form a waveguide system, before the rotation, the fixed reflecting mirror and the rotatable reflecting mirror are mutually parallel, the optical source and the optical receiver are arranged at the back of the fixed reflecting mirror, so that the light beams of the optical source can enter from one end of the waveguide system by an incident angle alpha and irradiate on the rotatable reflecting mirror, and the light beams are reflected for many times in the waveguide, after the rotatable reflecting mirror rotates an angle, the incident angle can be increased when the light beam are reflected at each time, the common rotation angle of the rotatable mirror and a object to be measured can be amplified, finally, the light beams are reflected out from other end of the waveguide system to reach the optical receiver, so that the displacement of the image of the optical source on the optical receiver is amplified into many times, and the resolution ratio and the accuracy of the optical system for measuring the minimum rotating angle can be improved.

Description

Measure the optical system of the minimum anglec of rotation
Technical field
The present invention discloses a kind of optical system of measuring the minimum anglec of rotation, belongs to field of measuring technique.
Background technology
The instrument of measuring the minimum anglec of rotation comprises torsion balance, and still, the resolution of torsion balance and accuracy need further to improve.
Summary of the invention
The invention provides a kind of optical system of measuring the minimum anglec of rotation, its structure comprises, a rotary catoptron, a fixing catoptron, a light source, an optical receiver.Fixing catoptron and rotary catoptron form a Wave guide system; Before rotation, fixing catoptron and rotary catoptron are parallel to each other.Light source and optical receiver are arranged on fixing catoptron with the opposed one side of rotary catoptron, promptly, the back of fixing catoptron, make the light beam of light source enter waveguide and shine on the rotary catoptron from an end of Wave guide system with incident angle α, light beam through repeatedly reflection, finally penetrates and reaches optical receiver from the other end of waveguide in the waveguide that rotary catoptron and fixing catoptron form.Described fixing catoptron is arranged on one independently on the back-up system.
Rotary catoptron is fixed on the article for rotation that needs to measure, when rotary catoptron and the minimum angle of article for rotation co-rotation that needs to measure
Figure BSA00000534489700011
After, the incident angle that the light beam of light source shines on the rotary catoptron for the first time becomes
Figure BSA00000534489700021
Light beam by rotary catoptron first reflection to fixing catoptron and with
Figure BSA00000534489700022
Incident angle incident, the mirror reflects that light beam is fixed and with
Figure BSA00000534489700023
The incident angle rotary catoptron of incident for the second time, so many secondary reflection is reflected at every turn, its incident angle increases
Figure BSA00000534489700024
Therefore, rotary catoptron and the co-rotational angle of article for rotation that needs to measure
Figure BSA00000534489700025
Be exaggerated, and the displacement that is formed on the image of the light source on the optical receiver is exaggerated many times especially, therefore, has improved the resolution and the accuracy of the optical system of measuring the minimum anglec of rotation.
Rotary catoptron has several set-up modes: (1) rotary catoptron is fixed on the tested rotating object, makes the identical angle of rotary catoptron and tested rotating object rotation.(2) rotary catoptron is fixed on the suspension that hangs tested object, makes rotary catoptron rotate identical angle with tested rotating object.(3) rotary catoptron is one deck reflectance coating that is plated on the tested object surfaces, and the one side that is coated with reflectance coating is relative with fixing catoptron to form waveguide.
Description of drawings
Fig. 1 a displaying Cavan enlightening is formerly permitted torsion balance.
Fig. 1 b displaying Cavan enlightening is formerly permitted the principle of work of the optical system of torsion balance.
Fig. 2 a shows the sectional view of an embodiment of the optical system of the minimum anglec of rotation of measurement of the present invention.
Fig. 2 b shows the sectional view of an embodiment of the optical system of the minimum anglec of rotation of measurement of the present invention.
Fig. 2 c shows the sectional view of an embodiment of the optical system of the minimum anglec of rotation of measurement of the present invention.
Fig. 3 shows that the optical system of using the minimum anglec of rotation of measurement of the present invention permitted the synoptic diagram of torsion balance in the Cavan enlightening.
Specific embodiment
Though embodiments of the invention will be described below, following description just illustrates principle of the present invention, rather than limits the invention to the description of following embodiment.
Advantage of the present invention is as follows:
1. simple in structure, volume is little, is easy to use.
2. the displacement of the image that is formed on the light source on the optical receiver is amplified many times.
3. the resolution and the accuracy of the optical system of measuring the minimum anglec of rotation have been improved.
Fig. 1 a and Fig. 1 b displaying Cavan enlightening are formerly permitted the synoptic diagram of the structure and the principle of work of torsion balance.The structure that the Cavan enlightening is permitted torsion balance comprises: rod 103, be separately fixed at the spheroid 111a and the spheroid 111b at rod 103 two ends, and the suspension 102 of hanger rod 103 is fixed on the catoptron on the suspension 102, light source 107, optical receiver 108 and two big ball 112a and 112b.For convenience, the catoptron before the rotation is labeled as catoptron 106b, postrotational catoptron is labeled as catoptron 106a.
Before introducing two big ball 112a and 112b, the light beam 120c that light source 107 sends is reflected becomes light beam 120b after mirror 106b reflects, and is radiated on the optical receiver 108, forms image B.Introduce big ball 112a and 112b, its universal gravitation attracts spheroid 111a and spheroid 111b respectively, make rod 103, suspension 102 and catoptron rotate, up to the torque of suspension 102 and big ball 112a and 112b the torque that the universal gravitation of spheroid 111a and spheroid 111b produces is equated, the rotation of rod 103, suspension 102 and catoptron 106a stops, and has turned over a minimum angle
Figure BSA00000534489700041
The light beam 120c that light source 107 sends is reflected becomes light beam 120a after mirror 106a reflects, and is radiated on the optical receiver 108, forms image A.The light beam of catoptron rotation front-reflection can be released the angle of rotation at displacement AB of image A formation that the light beam of image B that forms on the optical receiver 108 and catoptron rotation back reflection forms according to the length of AB on optical receiver 108.But because the angle of rotation is very little, displacement AB is also very little, and therefore, the resolution and the accuracy of measurement are lower.
Fig. 2 a, Fig. 2 b and Fig. 2 c show the embodiment of structure of optical system of the minimum anglec of rotation of measurement of the present invention and the synoptic diagram of principle of work.The structure of the optical system of the minimum anglec of rotation of measurement of the present invention comprises: a rotary catoptron, for convenience, be called catoptron 206b before the rotation, be called catoptron 206a after the rotation, a fixing catoptron 206c, 207, one optical receiver 208a of a light source.It is parallel to each other that fixing catoptron 206c and rotary catoptron are set, and forms the waveguide of an opening.Light source 207 and optical receiver 208a are arranged on the back of fixing catoptron 206c, make the light beam 220c of light source 207 shine on the rotary catoptron with incident angle α, light beam before rotatable rotary catoptron 206b or the waveguide that forms of postrotational rotary catoptron 206a and fixing catoptron 206c in through repeatedly reflection, finally from waveguide, penetrate and reach optical receiver 208a or optical receiver 208.
Rotary catoptron is fixed on the article for rotation that needs to measure, when rotary catoptron and the minimum angle of article for rotation co-rotation that needs to measure After, the incident angle that the light beam 220c of light source shines on the postrotational rotary catoptron 206a for the first time becomes
Figure BSA00000534489700051
Rotary catoptron 206a first reflection after light beam 220c is rotated to fixing catoptron 206c and with
Figure BSA00000534489700052
Incident angle incident, catoptron 206c that light beam is fixed reflection and with
Figure BSA00000534489700053
The incident angle postrotational rotary catoptron 206a of incident for the second time, so many secondary reflection, each reflection, its incident angle increases
Figure BSA00000534489700054
At last, light beam 220a injects to optical receiver 208 or optical receiver 208a formation image A ' from waveguide.Therefore, rotary catoptron and the co-rotational angle of article for rotation that needs to measure
Figure BSA00000534489700055
Be exaggerated.And the displacement A ' B ' that is formed on the image of the light source on optical receiver 208 or the optical receiver 208a is exaggerated many times especially, therefore, has improved the resolution and the accuracy of the optical system of measuring the minimum anglec of rotation.
In the embodiment of Fig. 2 a, in order to show advantage of the present invention, suppose if there is not fixing catoptron 206c, rotary catoptron 206b before the rotation reflexes to optical receiver 208b to light beam 220c, form image B, postrotational rotary catoptron 206a reflexes to optical receiver 208b to light beam 220c, forms image A.AB is less than A ' B '.
Under the situation that fixing catoptron 206c is arranged, rotary catoptron 206b before the rotation and fixing catoptron 206c light beam 220c through repeatedly reflection, become light beam 220a, on optical receiver 208, form image B ', postrotational rotary catoptron 206a and fixing catoptron 206c light beam 220c through repeatedly reflection, become light beam 220a, on optical receiver 208, form image A '.AB is less than A ' B '.
In the embodiment of Fig. 2 b, on fixing catoptron 206c, a window 210 is arranged, rotary catoptron 206b before the feasible rotation and fixing catoptron 206c through repeatedly reflecting, become light beam 220a to light beam 220c, form image B ' on optical receiver 208.Postrotational rotary catoptron 206a and fixing catoptron 206c through repeatedly reflection, become light beam 220a to light beam 220c, form image A ' on optical receiver 208.
In the embodiment of Fig. 2 c, light beam 220c is radiated at the position of the turning axle of rotary catoptron 206a.
Fig. 3 shows that the optical system of the minimum anglec of rotation of measurement of the present invention is applied to the Cavan enlightening and is permitted torsion balance.Rotary catoptron is fixed on the suspension 102.Postrotational rotary catoptron 406a and fixing catoptron 406c through repeatedly reflection, shine the light beam of light source 107 on the optical receiver 108, form image.
Top concrete description does not limit the scope of the invention, and only provides some specific illustrations of the present invention.Therefore covering scope of the present invention should be determined by claim and their legal equivalents, rather than by above-mentioned specific detailed description and embodiment decision.

Claims (5)

1. optical system of measuring the minimum anglec of rotation is characterized in that described optical system comprises:
A rotary catoptron,
A fixing catoptron,
A light source,
An optical receiver,
Wherein, described fixing catoptron and described rotary catoptron form a Wave guide system;
Before rotation, described fixing catoptron and described rotary catoptron are parallel to each other; Described fixing catoptron is arranged on one independently on the back-up system; Make light that described light source sent enter,, penetrate, arrive described optical receiver from the other end of described Wave guide system through reflection for several times from an end of described Wave guide system.
2. the optical system of claim 1 is characterized in that, described rotary catoptron is fixed on the tested rotating object, makes described rotary catoptron and described tested rotating object rotate identical angle.
3. the optical system of claim 1 is characterized in that, described rotary catoptron is fixed on the suspension that hangs tested object, makes described rotary catoptron and described tested rotating object rotate identical angle.
4. the optical system of claim 1 is characterized in that, described rotary catoptron is one deck reflectance coating that is plated on the tested object surfaces.
5. the optical system of claim 1 is characterized in that, described light source and described optical receiver be arranged on described fixing catoptron with the relative one side of described rotary catoptron.
CN2011101911376A 2011-06-30 2011-06-30 Optical system for measuring minimum rotating angle Pending CN102288135A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091771A (en) * 2015-05-25 2015-11-25 合肥工业大学 Apparatus for measuring micro-deformation of connecting rod based on displacement amplification principle
CN105783739A (en) * 2016-05-19 2016-07-20 北方民族大学 Novel alternative incremental sensor for measuring micrometric displacement and measuring method
CN105783737A (en) * 2016-05-19 2016-07-20 北方民族大学 Novel small measuring range ultrahigh precision displacement sensor and measuring method
CN105783738A (en) * 2016-05-19 2016-07-20 北方民族大学 Incremental type small-measurement-range displacement sensor and measurement method
CN105910537A (en) * 2016-07-04 2016-08-31 北方民族大学 Novel symmetric small measurement range displacement sensor and measuring method
CN107907062A (en) * 2017-11-13 2018-04-13 中国计量大学 Bearing bore diameter measuring method based on the sensitive lever principle of double optics
CN114088017A (en) * 2021-11-02 2022-02-25 武汉联胜光电技术有限公司 Device and method for detecting angle and flatness of customized optical fiber end face
CN114509026A (en) * 2022-04-19 2022-05-17 中国科学院西安光学精密机械研究所 Sub-arc second-level angle measurement system and method and relative deformation angle measurement method
CN114705138A (en) * 2022-04-29 2022-07-05 北方民族大学 Multi-reflection type angle measurement system and measurement method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0869384A1 (en) * 1995-12-04 1998-10-07 Komatsu Ltd. Mirror angle detector and detection method
CN2667457Y (en) * 2003-12-22 2004-12-29 中国船舶重工集团公司第七一一研究所 Micro-angle displacement measuring instrument
CN1963384A (en) * 2006-11-21 2007-05-16 暨南大学 Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
CN202166408U (en) * 2011-06-30 2012-03-14 亚威朗光电(中国)有限公司 Optical system measuring minimum rotation angle

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0869384A1 (en) * 1995-12-04 1998-10-07 Komatsu Ltd. Mirror angle detector and detection method
CN2667457Y (en) * 2003-12-22 2004-12-29 中国船舶重工集团公司第七一一研究所 Micro-angle displacement measuring instrument
CN1963384A (en) * 2006-11-21 2007-05-16 暨南大学 Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
CN202166408U (en) * 2011-06-30 2012-03-14 亚威朗光电(中国)有限公司 Optical system measuring minimum rotation angle

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105091771A (en) * 2015-05-25 2015-11-25 合肥工业大学 Apparatus for measuring micro-deformation of connecting rod based on displacement amplification principle
CN105783738B (en) * 2016-05-19 2019-02-15 北方民族大学 A kind of measurement method of increment type small-range displacement sensor
CN105783737A (en) * 2016-05-19 2016-07-20 北方民族大学 Novel small measuring range ultrahigh precision displacement sensor and measuring method
CN105783738A (en) * 2016-05-19 2016-07-20 北方民族大学 Incremental type small-measurement-range displacement sensor and measurement method
CN105783739A (en) * 2016-05-19 2016-07-20 北方民族大学 Novel alternative incremental sensor for measuring micrometric displacement and measuring method
CN105783739B (en) * 2016-05-19 2019-02-26 北方民族大学 A kind of measurement method of alternately increment type measurement micro-displacement sensor
CN105910537A (en) * 2016-07-04 2016-08-31 北方民族大学 Novel symmetric small measurement range displacement sensor and measuring method
CN107907062A (en) * 2017-11-13 2018-04-13 中国计量大学 Bearing bore diameter measuring method based on the sensitive lever principle of double optics
CN107907062B (en) * 2017-11-13 2019-11-29 中国计量大学 Bearing bore diameter measurement method based on the sensitive lever principle of double optics
CN114088017A (en) * 2021-11-02 2022-02-25 武汉联胜光电技术有限公司 Device and method for detecting angle and flatness of customized optical fiber end face
CN114509026A (en) * 2022-04-19 2022-05-17 中国科学院西安光学精密机械研究所 Sub-arc second-level angle measurement system and method and relative deformation angle measurement method
CN114509026B (en) * 2022-04-19 2022-08-19 中国科学院西安光学精密机械研究所 Sub-arc second-level angle measurement system and method and relative deformation angle measurement method
CN114705138A (en) * 2022-04-29 2022-07-05 北方民族大学 Multi-reflection type angle measurement system and measurement method
CN114705138B (en) * 2022-04-29 2024-04-12 天航长鹰(江苏)科技有限公司 Multi-reflection angle measurement system and measurement method

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Application publication date: 20111221