CN105783739A - Novel alternative incremental sensor for measuring micrometric displacement and measuring method - Google Patents
Novel alternative incremental sensor for measuring micrometric displacement and measuring method Download PDFInfo
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- CN105783739A CN105783739A CN201610335155.XA CN201610335155A CN105783739A CN 105783739 A CN105783739 A CN 105783739A CN 201610335155 A CN201610335155 A CN 201610335155A CN 105783739 A CN105783739 A CN 105783739A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a novel alternative incremental sensor for measuring the micrometric displacement. The novel alternative incremental sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a detection reflecting mirror, a photoelectric detector I, a photoelectric detector II and a processing system. In operation of the sensor, the laser beam is continuously reflected to the reflecting mirrors in the fixed reflecting mirror and the movable reflecting mirror which are parallel, and finally irradiates onto the two groups of photoelectric detectors, and the reflecting path of the laser beam can be changed when the distance between the fixed reflecting mirror and the movable reflecting mirror is changed; the laser beam is induced for multiple times by three detection parts on each group of photoelectric detector, the processing system obtains a detection distance value according to the laser-beam induction times and the laser induction sequence of each group of detection parts and the distance processing among the detection parts, and then can calculate out a real change value of the distance between the fixed reflecting mirror and the mobile reflecting mirror by the detection distance value; the novel alternative incremental sensor is simple in structure, reliable in measurement, higher in accuracy and easy in implementation of batch manufacture.
Description
Technical field
The present invention relates to Technology of Precision Measurement and instrument field, measure micro-displacement sensor and measuring method particularly to the novel alternately increment type of one.
Background technology
Displacement transducer is a kind of conventional geometric sense sensor, has and use widely in a lot of field such as Aero-Space, commercial production, machine-building and military science.The metering system of displacement has a variety of, relatively thin tail sheep (as less than 1cm) detects typically by strain-type, inductance type, differential transformer type, eddy current type, Hall element, and bigger displacement (as more than 1cm) is commonly used the sensing technologies such as inductosyn, grating, appearance grid, magnetic grid and measured.Wherein grating sensor because of have easily realize digitized, precision high (the reached nanoscale that current resolution is the highest), capacity of resisting disturbance is strong, do not have artificial error in reading, easy for installation, use the advantages such as reliable, the industry such as machine tooling, instrumentation obtains increasingly extensive application.
Grating sensor refers to the sensor adopting grating Moire fringe principle to measure displacement.Grating is intensive equidistantly parallel groove on the optical glass chi or metal scale of a block length bar shaped, and incisure density is 10～100 lines per millimeters.The Moire fringe formed by grating has optical amplifier effect and error average effect, thus can improve certainty of measurement.
Grating sensor limits due to the physical arrangement of photoetching process, causes its certainty of measurement to be difficult to there is lifting again, it is impossible to meet the demand of increasingly higher certainty of measurement, in the urgent need to developing a kind of simple in construction, the sensor that precision is higher.
Summary of the invention
It is an object of the invention to: the existing grating sensor existed for prior art limits due to the physical arrangement of photoetching process, its certainty of measurement is caused to be difficult to there is lifting again, the above-mentioned deficiency of demand of increasingly higher certainty of measurement cannot be met, a kind of novel alternately increment type is provided to measure micro-displacement sensor and measuring method, this sensor construction is simple, it is adaptable to the measurement of testee change in displacement, measures reliable, precision is higher, it is easy to accomplish batch micro operations.
To achieve these goals, the technical solution used in the present invention is:
nullA kind of novel alternately increment type measures micro-displacement sensor，Including laser beam、Stationary mirror、Mobile mirror、Detection reflecting mirror、Photodetector one、Photodetector two and the system of process，Described photodetector one is provided with the exploring block one of constant spacing、Exploring block two and exploring block three，Described exploring block three is located at the optional position between described exploring block one and the straight line line of exploring block two，Described photodetector two is provided with the exploring block four of constant spacing、Exploring block five and exploring block six，Described exploring block six is located at the optional position between described exploring block four and the straight line line of exploring block five，Described stationary mirror and mobile mirror be arranged in parallel and can relative movements，One end of described stationary mirror and mobile mirror arranges described detection reflecting mirror、Photodetector one and photodetector two，The other end arranges described laser beam，Described detection reflecting mirror both sides are located at by described photodetector one and photodetector two，Described laser beam incides on described stationary mirror，Described detection reflecting mirror is incided after described stationary mirror with mobile mirror alternating reflex，Described laser beam is reflexed to described photodetector one or photodetector two by described detection reflecting mirror，And by described exploring block one、Exploring block two、Exploring block three、Exploring block four、Exploring block five or exploring block six sense，Described process system communicates to connect described photodetector one and photodetector two，And be used for adding up described exploring block one、Exploring block two、Exploring block three、Exploring block four、Exploring block five and exploring block six sense the number of times of described laser beam and photosensitive order.
Owing to described exploring block one, exploring block two and exploring block three have fixing spacing, described exploring block four, exploring block five and exploring block six have fixing spacing, the number of times of described laser beam is sensed by described exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six, and judge the described mobile mirror direction of motion relative to described stationary mirror according to the photosensitive order of exploring block, according to the direction of motion, institute's metering number is carried out plus-minus process.
nullAs a kind of increment type displacement transducer，Described exploring block on described photodetector one (or photodetector two) one (or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six) first senses described laser beam，So described laser beam is sensed be designated as an increment number by described exploring block one (or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six) correspondence next time，Described process system calculates, according to the sensing number of times of described increment number and described exploring block one (or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six), the probe value principal part obtaining described stationary mirror with mobile mirror relative displacement，Simultaneously described process system using described photodetector one (or photodetector two) as host computer detector，Described photodetector two (or photodetector one) is as auxiliary calculating detector，Described laser beam is detected parts sensing finally，The distance of this exploring block and described exploring block one (or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six) is as the auxiliary portion of probe value，Described probe value principal part and the auxiliary portion of probe value constitute the probe value of described stationary mirror and mobile mirror relative displacement，The described process system true relative shift according to the corresponding described stationary mirror of described probe value with mobile mirror.
nullThe novel alternately increment type of one of the present invention is adopted to measure micro-displacement sensor，Constantly reflected among one group of described stationary mirror be arrangeding in parallel with mobile mirror by described laser beam，Finally it is irradiated on two groups of photodetectors，Change the spacing of described stationary mirror and mobile mirror，Namely the reflection path of described laser beam can be changed，Often three exploring blocks on group photodetector repeatedly sense described laser beam，According to often group exploring block, described process system senses that the spacing between the number of times of described laser beam and photosensitive order and exploring block processes and obtains a detection range value，This detection range value is far longer than the true change value of described stationary mirror and mobile mirror spacing，Described process system can calculate the true change value of described stationary mirror and mobile mirror spacing by this detection range value，This sensor construction is simple，During measurement，After fixing to described mobile mirror and testee connection，When described testee is subjected to displacement change，The spacing generation change of described stationary mirror and mobile mirror can be made accordingly，By measuring the spacing changing value of described stationary mirror and mobile mirror，The shift value of described testee can be back-calculated to obtain，It is applicable to the measurement of described testee change in displacement，Measure reliable，Precision is higher，It is easily achieved batch micro operations.
Preferably, described exploring block three is located at the midpoint of the straight line line of described exploring block one and exploring block two, and described exploring block six is located at the midpoint of the straight line line of described exploring block four and exploring block five.
Preferably, described mobile mirror is provided with the rigid connector for connecting testee, mobile described testee, drive described mobile mirror, change the reflection path of described laser beam, described process system is according to described exploring block one, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense the number of times of described laser beam and photosensitive order, and described exploring block one, exploring block two, exploring block three, exploring block four, the relevant spacing of exploring block five and exploring block six draws a probe value, and calculate the displacement of corresponding described testee.
This structure is adopted to arrange, when described testee moves, drive connected described mobile mirror to produce mobile simultaneously, change the spacing of described mobile mirror and stationary mirror, described mobile mirror be subjected to displacement before and after described laser beam first time be irradiated to the reflection path on described stationary mirror and will not change, the shift value of final described testee and the shift value of described mobile mirror are reflected on photodetector, this the frame mode changing described mobile mirror displacement can make the Processing Algorithm of described process system simplify, simplify sensor construction simultaneously, easily fabricated with use.
Preferably, described laser beam reflexes on described detection reflecting mirror through described stationary mirror, described laser beam is reflexed on described photodetector one by described detection reflecting mirror, described laser beam reflexes on described detection reflecting mirror through described mobile mirror, and described laser beam is reflexed on described photodetector two by described detection reflecting mirror.
This structure is adopted to arrange, can make described mobile mirror in being subjected to displacement process, the described laser beam of described stationary mirror reflection only measured by described photodetector one, the described laser beam of described mobile mirror reflection only measured by described photodetector two, it is to avoid described laser beam occurs reflection and direct projection to there is the measurement interference caused at edge simultaneously.
Preferably, the lasing light emitter for launching described laser beam is also included.
As it is further preferred that also include housing, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photodetector two are respectively positioned in described housing, form read head, and described read head is provided with installing hole or stickers.
Adopting this structure to arrange, described read head is easy to and described testee or the members fits of geo-stationary, clamping or stickup, easy disassembly.
Preferably, described mobile mirror is rigidly connected at least one connector, and described connector is rigid member, and described connector stretches out outside described read head.
Preferably, described photodetector one also includes at least one exploring block seven, described exploring block seven is located at the optional position between described exploring block one and the straight line line of exploring block two, described electric explorer two also includes at least one exploring block eight, and described exploring block eight is located at the optional position between described exploring block four and the straight line line of exploring block five.
nullThis structure is adopted to arrange，Since it is desired that judge the direction of displacement of described testee，Photodetector at least needs three exploring blocks could distinguish the direction of displacement of described testee in measurement process，Described laser beam eventually settles in described exploring block one and this closed interval of exploring block two or described exploring block four and this closed interval of exploring block five simultaneously，After described exploring block one or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six sense described laser beam for the last time，The small quantity inspection that described laser beam moves again does not measure needs and ignores，At least one complementary described exploring block seven is set between described exploring block one and the straight line line of exploring block two，At least one complementary described exploring block eight is set between described exploring block four and the straight line line of exploring block five，The surveying range of described exploring block one and exploring block two and the surveying range of described exploring block four and exploring block five can be refined，The final negligible amount of described laser beam will be less，The certainty of measurement of institute's displacement sensors can be improved further.
Preferably, described exploring block one, exploring block two, exploring block three, exploring block four, exploring block five, exploring block six, exploring block seven and exploring block eight are a kind of photosensitive photoelectric device, it is possible to measure and whether there is light.
Preferably, the position of described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photodetector two is all adjustable.
Preferably, the range of institute's displacement sensors is 0-1mm.
Present invention also offers a kind of novel alternately increment type and measure the measuring method of micro-displacement sensor, including the displacement transducer as described in any of the above, its measuring method comprises the following steps:
A, testee is fixedly connected on described mobile mirror；
B, transmitting one laser beam, described laser beam is incident on described stationary mirror at a certain angle, assume that described angle of incidence is θ, described laser beam is irradiated on described detection reflecting mirror after the continuous reflection of described stationary mirror and mobile mirror, and is reflected on described photodetector one or photodetector two；
C, mobile described testee, drive described mobile mirror to move simultaneously, the reflection path change of described laser beam simultaneously, described laser beam is by the described exploring block one on described photodetector one, exploring block two and exploring block three sense or by the described exploring block four on described photodetector two, exploring block five and exploring block six sense, when described testee stops mobile, exploring block one described in described process system statistics, exploring block two, exploring block three, exploring block four, exploring block five and exploring block six sense the spacing between the number of times of described laser beam and photosensitive order and each exploring block, draw shift value and the direction of displacement of described testee.
nullA kind of novel alternately increment type of the present invention is adopted to measure the measuring method of micro-displacement sensor，Described mobile mirror is fixing connects described testee，The position relationship of remaining part remains unchanged，Described laser beam with angle θ on described stationary mirror，Then pass through multiple reflections to be finally irradiated on described photodetector one or photodetector two，Mobile described testee，The reflection path change of described laser beam，When described testee stops mobile，Described process system is according to described exploring block one、Exploring block two、Exploring block three、Exploring block four、Exploring block five and exploring block six sense that the spacing between the number of times of described laser beam and photosensitive order and each exploring block draws the direction of displacement of a detection range value and described testee，This detection range value is far longer than the true change value of described stationary mirror and mobile mirror spacing，Described process system can calculate the true change value of described stationary mirror and mobile mirror spacing by this detection range value，This measuring method is simple、Reliably，Easy to operate，And displacement measurement accuracy can be improved，Can be used for the increment type change in displacement to described testee to measure.
Preferably, counting sequence according to described exploring block one, exploring block two and exploring block three carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block one, exploring block three and exploring block two, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is followed successively by described exploring block two, exploring block three and exploring block one, then measured displacement direction is the direction away from described stationary mirror.
Preferably, counting sequence according to described exploring block four, exploring block five and exploring block six carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block four, exploring block six and exploring block five, then measured displacement direction is the direction close to described stationary mirror, if counting sequence is followed successively by described exploring block five, exploring block six and exploring block four, then measured displacement direction is the direction away from described stationary mirror.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
null1、The novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Constantly reflected among one group of described stationary mirror be arrangeding in parallel with mobile mirror by described laser beam，Finally it is irradiated on two groups of photodetectors，Change the spacing of described stationary mirror and mobile mirror，Namely the reflection path of described laser beam can be changed，Often three exploring blocks on group photodetector repeatedly sense described laser beam，According to often group exploring block, described process system senses that the spacing between the number of times of described laser beam and photosensitive order and exploring block processes and obtains a detection range value，This detection range value is far longer than the true change value of described stationary mirror and mobile mirror spacing，Described process system can calculate the true change value of described stationary mirror and mobile mirror spacing by this detection range value，This sensor construction is simple，During measurement，After fixing to described mobile mirror and testee connection，When described testee is subjected to displacement change，The spacing generation change of described stationary mirror and mobile mirror can be made accordingly，By measuring the spacing changing value of described stationary mirror and mobile mirror，The shift value of described testee can be back-calculated to obtain，It is applicable to the measurement of described testee change in displacement，Measure reliable，Precision is higher，It is easily achieved batch micro operations；
null2、The novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Described mobile mirror is provided with the rigid connector for connecting testee，When the position relationship of remaining part，Described testee is made to be subjected to displacement，Described mobile mirror is driven to be subjected to displacement，This structure is adopted to arrange，When described testee moves，Drive connected described mobile mirror to produce mobile simultaneously，Change the spacing of described mobile mirror and stationary mirror，Described mobile mirror be subjected to displacement before and after described laser beam first time be irradiated to the reflection path on described stationary mirror and will not change，The shift value of final described testee and the shift value of described mobile mirror are reflected on photodetector，This frame mode changing described mobile mirror displacement can make the Processing Algorithm of described process system simplify，Simplify sensor construction simultaneously，Easily fabricated with use；
3, the novel alternately increment type of one of the present invention is used to measure micro-displacement sensor, also include housing, described lasing light emitter, stationary mirror, mobile mirror, detection reflecting mirror, photodetector one and photodetector two are respectively positioned in described housing, form read head, described read head is provided with installing hole or stickers, adopting this structure to arrange, described read head is easy to and described testee or the members fits of geo-stationary, clamping or stickup, easy disassembly；
null4、The novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Described photodetector one also includes at least one exploring block seven，Described exploring block seven is located at the optional position between described exploring block one and the straight line line of exploring block two，Described electric explorer two also includes at least one exploring block eight，Described exploring block eight is located at the optional position between described exploring block four and the straight line line of exploring block five，This structure is adopted to arrange，Since it is desired that judge the direction of displacement of described testee，Photodetector at least needs three exploring blocks could distinguish the direction of displacement of described testee in measurement process，Described laser beam eventually settles in described exploring block one and this closed interval of exploring block two or described exploring block four and this closed interval of exploring block five simultaneously，After described exploring block one or exploring block two or exploring block three or exploring block four or exploring block five or exploring block six sense described laser beam for the last time，The small quantity inspection that described laser beam moves again does not measure needs and ignores，At least one complementary described exploring block seven is set between described exploring block one and the straight line line of exploring block two，At least one complementary described exploring block eight is set between described exploring block four and the straight line line of exploring block five，The surveying range of described exploring block one and exploring block two and the surveying range of described exploring block four and exploring block five can be refined，The final negligible amount of described laser beam will be less，The certainty of measurement of institute's displacement sensors can be improved further；
null5、A kind of novel alternately increment type of the present invention is used to measure the measuring method of micro-displacement sensor，Described mobile mirror is fixing connects described testee，The position relationship of remaining part remains unchanged，Described laser beam with angle θ on described stationary mirror，Then pass through multiple reflections to be finally irradiated on described photodetector one or photodetector two，Mobile described testee，The reflection path change of described laser beam，When described testee stops mobile，Described process system is according to described exploring block one、Exploring block two、Exploring block three、Exploring block four、Exploring block five and exploring block six sense that the spacing between the number of times of described laser beam and photosensitive order and each exploring block draws the direction of displacement of a detection range value and described testee，This detection range value is far longer than the true change value of described stationary mirror and mobile mirror spacing，Described process system can calculate the true change value of described stationary mirror and mobile mirror spacing by this detection range value，This measuring method is simple、Reliably，Easy to operate，And displacement measurement accuracy can be improved，Can be used for the increment type change in displacement to described testee to measure.
Accompanying drawing explanation
Fig. 1 is that a kind of novel alternately increment type of the present invention measures the schematic side view of micro-displacement sensor；
Fig. 2 is that a kind of novel alternately increment type of the present invention measures the structural side view of micro-displacement sensor；
Fig. 3 is that a kind of novel alternately increment type of the present invention measures side view when micro-displacement sensor is measured.
Labelling in figure: 1-lasing light emitter, 11-laser beam, 2-stationary mirror, 3-mobile mirror, 31-connector, 4-detects reflecting mirror, 5-photodetector one, 51-exploring block one, 52-exploring block two, 53-exploring block three, 6-photodetector two, 61-exploring block four, 62-exploring block five, 63-exploring block six, 7-read head, 8-testee.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in detail.
In order to make the purpose of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the present invention, is not intended to limit the present invention.
Embodiment 1
As Figure 1-3, the novel alternately increment type of one of the present invention measures micro-displacement sensor, including laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and process system.
nullDescribed photodetector 1 is provided with the exploring block 1 of constant spacing、Exploring block 2 52 and exploring block 3 53，Described exploring block 3 53 is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52，Described photodetector 26 is provided with the exploring block 4 61 of constant spacing、Exploring block 5 62 and exploring block 6 63，Described exploring block 6 63 is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62，Described stationary mirror 2 be arranged in parallel with mobile mirror 3 and can relative movement，One end of described stationary mirror 2 and mobile mirror 3 arranges described detection reflecting mirror 4、Photodetector 1 and photodetector 26，The other end arranges described laser beam 11，Described detection reflecting mirror 4 both sides are located at by described photodetector 1 and photodetector 26，Described laser beam 11 incides on described stationary mirror 2，Described detection reflecting mirror 4 is incided after described stationary mirror 2 with mobile mirror 3 alternating reflex，Described laser beam 11 is reflexed to described photodetector 1 or photodetector 26 by described detection reflecting mirror 4，And by described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 or exploring block 6 63 sensing，Described process system communicates to connect described photodetector 1 and photodetector 26，And be used for adding up described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and photosensitive order.
Due to described exploring block 1, exploring block 2 52 and exploring block 3 53 have fixing spacing, described exploring block 4 61, exploring block 5 62 and exploring block 6 63 have fixing spacing, by described exploring block 1, exploring block 2 52 and exploring block 3 53 sense the number of times of described laser beam 11, or described exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11, and the direction of motion of the relatively described stationary mirror 2 of described mobile mirror 3 is judged according to the photosensitive order of exploring block, according to the direction of motion, institute's metering number is carried out plus-minus process.
nullAs a kind of increment type displacement transducer，Described exploring block on described photodetector 1 (or photodetector 2 6) 1 (or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63) first senses described laser beam 11，So described laser beam 11 is sensed be designated as an increment number by described exploring block 1 (or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63) correspondence next time，Described process system calculates, according to the sensing number of times of described increment number and described exploring block 1 (or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63), the probe value principal part obtaining described stationary mirror 2 with mobile mirror 3 relative displacement，Simultaneously described process system using described photodetector 1 (or photodetector 2 6) as host computer detector，Described photodetector 26 (or photodetector 1) is as auxiliary calculating detector，Described laser beam 11 is detected parts sensing finally，The distance of this exploring block and described exploring block 1 (or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63) is as the auxiliary portion of probe value，Described probe value principal part and the auxiliary portion of probe value constitute the probe value of described stationary mirror 2 and mobile mirror 3 relative displacement，The described process system true relative shift according to the corresponding described stationary mirror 2 of described probe value with mobile mirror 3.
nullThe novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Constantly reflected among one group of described stationary mirror be arrangeding in parallel 2 with mobile mirror 3 by described laser beam 11，Finally it is irradiated on two groups of photodetectors，Change the spacing of described stationary mirror 2 and mobile mirror 3，Namely the reflection path of described laser beam 11 can be changed，Often three exploring blocks on group photodetector repeatedly sense described laser beam 11，According to often group exploring block, described process system senses that the spacing between the number of times of described laser beam 11 and photosensitive order and exploring block processes and obtains a detection range value，This detection range value is far longer than the true change value of described stationary mirror 2 and mobile mirror 3 spacing，Described process system can calculate the true change value of described stationary mirror 2 and mobile mirror 3 spacing by this detection range value，This sensor construction is simple，During measurement，After fixing to described mobile mirror 3 and testee connection，When described testee is subjected to displacement change，The spacing generation change of described stationary mirror 2 and mobile mirror 3 can be made accordingly，By measuring the spacing changing value of described stationary mirror 2 and mobile mirror 3，The shift value of described testee can be back-calculated to obtain，It is applicable to the measurement of described testee change in displacement，Measure reliable，Precision is higher，It is easily achieved batch micro operations.
Embodiment 2
As Figure 1-3, the novel alternately increment type of one of the present invention measures micro-displacement sensor and testee 8, and described sensor includes laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and process system.
nullDescribed testee 8 is fixing connects described mobile mirror 3，Described photodetector 1 is provided with the exploring block 1 of constant spacing、Exploring block 2 52 and exploring block 3 53，Described exploring block 3 53 is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52，Described photodetector 26 is provided with the exploring block 4 61 of constant spacing、Exploring block 5 62 and exploring block 6 63，Described exploring block 6 63 is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62，Described stationary mirror 2 be arranged in parallel with mobile mirror 3 and can relative movement，One end of described stationary mirror 2 and mobile mirror 3 arranges described detection reflecting mirror 4、Photodetector 1 and photodetector 26，The other end arranges described laser beam 11，Described detection reflecting mirror 4 both sides are located at by described photodetector 1 and photodetector 26，Described laser beam 11 incides on described stationary mirror 2，Described detection reflecting mirror 4 is incided after described stationary mirror 2 with mobile mirror 3 alternating reflex，Described laser beam 11 is reflexed to described photodetector 1 or photodetector 26 by described detection reflecting mirror 4，And by described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 or exploring block 6 63 sensing，Described process system communicates to connect described photodetector 1 and photodetector 26，And be used for adding up described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and photosensitive order，Mobile described testee 8，Drive described mobile mirror 3，Change the reflection path of described laser beam 11，Described process system is according to described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense number of times and the described exploring block 1 of described laser beam 11、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、The relevant spacing of exploring block 5 62 and exploring block 6 63 draws a probe value，And calculate the displacement of corresponding described testee 8.
nullThe novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Described mobile mirror 3 is fixing connects described testee 8，When the position relationship of remaining part，Described testee 8 is made to be subjected to displacement，Described mobile mirror 3 is driven to be subjected to displacement，This structure is adopted to arrange，When described testee 8 moves，Drive connected described mobile mirror 3 to produce mobile simultaneously，Change the spacing of described mobile mirror 3 and stationary mirror 2，Described mobile mirror 3 be subjected to displacement before and after described laser beam 11 first time be irradiated on described stationary mirror 2 reflection path will not change，The shift value of final described testee 8 and the shift value of described mobile mirror 3 are reflected on photodetector，This frame mode changing the displacement of described mobile mirror 3 can make the Processing Algorithm of described process system simplify，Simplify sensor construction simultaneously，Easily fabricated with use.
Embodiment 3
As Figure 1-3, the novel alternately increment type of one of the present invention measures micro-displacement sensor and testee 8, described sensor includes lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and process system, also includes housing and connector 31.
nullDescribed laser beam 11 is obtained by lasing light emitter 1 transmitting，Described lasing light emitter 1、Stationary mirror 2、Mobile mirror 3、Detection reflecting mirror 4、Photodetector 1 and photodetector 26 are respectively positioned in described housing，Form read head 7，Described read head 7 is provided with installing hole or stickers，Described mobile mirror 3 connects described connector 31，Described connector 31 is rigid member，Described connector 31 stretches out testee 8 described in described read head 7 external connection，Described photodetector 1 is provided with the exploring block 1 of constant spacing、Exploring block 2 52 and exploring block 3 53，Described exploring block 3 53 is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52，Described photodetector 26 is provided with the exploring block 4 61 of constant spacing、Exploring block 5 62 and exploring block 6 63，Described exploring block 6 63 is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62，Described stationary mirror 2 be arranged in parallel with mobile mirror 3 and can relative movement，One end of described stationary mirror 2 and mobile mirror 3 arranges described detection reflecting mirror 4、Photodetector 1 and photodetector 26，The other end arranges described laser beam 11，Described detection reflecting mirror 4 both sides are located at by described photodetector 1 and photodetector 26，Described laser beam 11 incides on described stationary mirror 2，Described detection reflecting mirror 4 is incided after described stationary mirror 2 with mobile mirror 3 alternating reflex，Described laser beam 11 is reflexed to described photodetector 1 or photodetector 26 by described detection reflecting mirror 4，And by described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 or exploring block 6 63 sensing，Described process system communicates to connect described photodetector 1 and photodetector 26，And be used for adding up described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense the number of times of described laser beam 11 and photosensitive order，Mobile described testee 8，Drive described mobile mirror 3，Change the reflection path of described laser beam 11，Described process system is according to described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense number of times and the described exploring block 1 of described laser beam 11、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、The relevant spacing of exploring block 5 62 and exploring block 6 63 draws a probe value，And calculate the displacement of corresponding described testee 8.
The novel alternately increment type of one of the present invention is used to measure micro-displacement sensor, also include housing, described lasing light emitter 1, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1 and photodetector 26 are respectively positioned in described housing, form read head 7, described read head 7 is provided with installing hole or stickers, adopting this structure to arrange, described read head 7 is easy to and described testee 8 or the members fits of geo-stationary, clamping or stickup, easy disassembly；Described detection reflecting mirror 4 is set simultaneously, can make described mobile mirror 3 in being subjected to displacement process, the described laser beam 11 of described stationary mirror 2 reflection only measured by described photodetector 1, the described laser beam 11 of described mobile mirror 3 reflection only measured by described photodetector 26, it is to avoid described laser beam 11 occurs reflection and direct projection to there is the measurement interference caused at edge simultaneously.
Embodiment 4
As Figure 1-3, the novel alternately increment type of one of the present invention measures micro-displacement sensor and testee 8, described sensor includes lasing light emitter 1, laser beam 11, stationary mirror 2, mobile mirror 3, detection reflecting mirror 4, photodetector 1, photodetector 26 and process system, also includes housing and connector 31.
Difference from Example 3 is in that, described photodetector 1 also includes at least one exploring block seven, described exploring block seven is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52, described electric explorer 26 also includes at least one exploring block eight, and described exploring block eight is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62.
As a kind of preferred version of the present embodiment, between described exploring block 3 53 and exploring block 1, it is provided with a described exploring block seven, between described exploring block 3 53 and exploring block 2 52, is provided with another described exploring block seven；It is provided with a described exploring block eight between described exploring block 6 63 and exploring block 4 61, between described exploring block 6 63 and exploring block 5 62, is provided with another described exploring block eight.
nullThe novel alternately increment type of one of the present invention is used to measure micro-displacement sensor，Described photodetector 1 also includes at least one exploring block seven，Described exploring block seven is located at the optional position between described exploring block 1 and the straight line line of exploring block 2 52，Described electric explorer 26 also includes at least one exploring block eight，Described exploring block eight is located at the optional position between described exploring block 4 61 and the straight line line of exploring block 5 62，This structure is adopted to arrange，Since it is desired that judge the direction of displacement of described testee 8，Photodetector at least needs three exploring blocks could distinguish the direction of displacement of described testee 8 in measurement process，Described laser beam 11 eventually settles in described exploring block 1 and this closed interval of exploring block 2 52 or described exploring block 4 61 and this closed interval of exploring block 5 62 simultaneously，After described exploring block 1 or exploring block 2 52 or exploring block 3 53 or exploring block 4 61 or exploring block 5 62 or exploring block 6 63 sense described laser beam 11 for the last time，The small quantity inspection that described laser beam 11 moves again does not measure needs and ignores，At least one complementary described exploring block seven is set between described exploring block 1 and the straight line line of exploring block 2 52，At least one complementary described exploring block eight is set between described exploring block 4 61 and the straight line line of exploring block 5 62，The surveying range of described exploring block 1 and exploring block 2 52 and the surveying range of described exploring block 4 61 and exploring block 5 62 can be refined，The final negligible amount of described laser beam 11 will be less，The certainty of measurement of institute's displacement sensors can be improved further.
Embodiment 5
As Figure 1-3, a kind of novel alternately increment type of the present invention measures the measuring method of micro-displacement sensor, and including the displacement transducer in such as embodiment 4, its measuring method comprises the following steps:
A, testee 8 is fixedly connected on described mobile mirror 3；
B, transmitting one laser beam 11, described laser beam 11 is incident on described stationary mirror 2 at a certain angle, assuming that described angle of incidence is θ, described laser beam 11 is irradiated on described photodetector 1 or photodetector 26 after the continuous reflection of described stationary mirror 2 and mobile mirror 3；
C, mobile described testee 8, drive described mobile mirror 3 to move simultaneously, the reflection path change of described laser beam 11 simultaneously, described laser beam 11 is by the described exploring block 1 on described photodetector 1, exploring block 2 52 and exploring block 3 53 sense or by the described exploring block 4 61 on described photodetector 26, exploring block 5 62 and exploring block 6 63 sensing, when described testee 8 stops mobile, exploring block 1 described in described process system statistics, exploring block 2 52, exploring block 3 53, exploring block 4 61, exploring block 5 62 and exploring block 6 63 sense the spacing between the number of times of described laser beam 11 and photosensitive order and each exploring block, draw shift value and the direction of displacement of described testee 8.
nullA kind of novel alternately increment type of the present invention is used to measure the measuring method of micro-displacement sensor，Described mobile mirror 3 is fixing connects described testee 8，The position relationship of remaining part remains unchanged，Described laser beam 11 with angle θ on described stationary mirror 2，Then pass through multiple reflections to be finally irradiated on described photodetector 1 or photodetector 26，Mobile described testee 8，The reflection path change of described laser beam 11，When described testee 8 stops mobile，Described process system is according to described exploring block 1、Exploring block 2 52、Exploring block 3 53、Exploring block 4 61、Exploring block 5 62 and exploring block 6 63 sense that the spacing between the number of times of described laser beam 11 and photosensitive order and each exploring block draws the direction of displacement of a detection range value and described testee 8，This detection range value is far longer than the true change value of described stationary mirror 2 and mobile mirror 3 spacing，Described process system can calculate the true change value of described stationary mirror 2 and mobile mirror 3 spacing by this detection range value，This measuring method is simple、Reliably，Easy to operate，And displacement measurement accuracy can be improved，Can be used for the increment type change in displacement to described testee 8 to measure.
A kind of preferred version as the present embodiment, counting sequence according to described exploring block 1, exploring block 2 52 and exploring block 3 53 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block 1, exploring block 3 53 and exploring block 2 52, then measured displacement direction is the direction close to described stationary mirror 2, if counting sequence is followed successively by described exploring block 2 52, exploring block 3 53 and exploring block 1, then measured displacement direction is the direction away from described stationary mirror 2.
A kind of preferred version as the present embodiment, counting sequence according to described exploring block 4 61, exploring block 5 62 and exploring block 6 63 carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block 4 61, exploring block 6 63 and exploring block 5 62, then measured displacement direction is the direction close to described stationary mirror 2, if counting sequence is followed successively by described exploring block 5 62, exploring block 6 63 and exploring block 4 61, then measured displacement direction is the direction away from described stationary mirror 2.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all any amendment, equivalent replacement and improvement etc. made within the spirit and principles in the present invention, should be included within protection scope of the present invention.
Claims (10)
- null1. a novel alternately increment type measures micro-displacement sensor，It is characterized in that，Including laser beam (11)、Stationary mirror (2)、Mobile mirror (3)、Detection reflecting mirror (4)、Photodetector one (5)、Photodetector two (6) and the system of process，Described photodetector one (5) is provided with the exploring block one (51) of constant spacing、Exploring block two (52) and exploring block three (53)，Described exploring block three (53) is located at the optional position between described exploring block one (51) and the straight line line of exploring block two (52)，Described photodetector two (6) is provided with the exploring block four (61) of constant spacing、Exploring block five (62) and exploring block six (63)，Described exploring block six (63) is located at the optional position between described exploring block four (61) and the straight line line of exploring block five (62)，Described stationary mirror (2) and mobile mirror (3) be arranged in parallel and can relative movements，One end of described stationary mirror (2) and mobile mirror (3) arranges described detection reflecting mirror (4)、Photodetector one (5) and photodetector two (6)，The other end arranges described laser beam (11)，Described detection reflecting mirror (4) both sides are located at by described photodetector one (5) and photodetector two (6)，Described laser beam (11) incides on described stationary mirror (2)，Described detection reflecting mirror (4) is incided after described stationary mirror (2) with mobile mirror (3) alternating reflex，Described laser beam (11) is reflexed to described photodetector one (5) or photodetector two (6) by described detection reflecting mirror (4)，And by described exploring block one (51)、Exploring block two (52)、Exploring block three (53)、Exploring block four (61)、Exploring block five (62) or exploring block six (63) sensing，Described process system communicates to connect described photodetector one (5) and photodetector two (6)，And be used for adding up described exploring block one (51)、Exploring block two (52)、Exploring block three (53)、Exploring block four (61)、Exploring block five (62) and exploring block six (63) sense the number of times of described laser beam (11) and photosensitive order.
- null2. displacement transducer according to claim 1，It is characterized in that，Described mobile mirror (3) is provided with the rigid connector for connecting testee (8)，Mobile described testee (8)，Drive described mobile mirror (3)，Change the reflection path of described laser beam (11)，Described process system is according to described exploring block one (51)、Exploring block two (52)、Exploring block three (53)、Exploring block four (61)、Exploring block five (62) and exploring block six (63) sense the number of times of described laser beam (11) and photosensitive order，And described exploring block one (51)、Exploring block two (52)、Exploring block three (53)、Exploring block four (61)、The relevant spacing of exploring block five (62) and exploring block six (63) draws a probe value，And calculate the displacement of corresponding described testee (8).
- 3. displacement transducer according to claim 2, it is characterized in that, described laser beam (11) reflexes on described detection reflecting mirror (4) through described stationary mirror (2), described laser beam (11) is reflexed on described photodetector one (5) by described detection reflecting mirror (4), described laser beam (11) reflexes on described detection reflecting mirror (4) through described mobile mirror (3), and described laser beam (11) is reflexed on described photodetector two (6) by described detection reflecting mirror (4).
- 4. displacement transducer according to claim 2, it is characterised in that also include the lasing light emitter (1) for launching described laser beam (11).
- 5. displacement transducer according to claim 4, it is characterized in that, also include housing, described lasing light emitter (1), stationary mirror (2), mobile mirror (3), detection reflecting mirror (4), photodetector one (5) and photodetector two (6) are respectively positioned in described housing, form read head (7).
- 6. displacement transducer according to claim 5, it is characterized in that, described mobile mirror (3) is rigidly connected at least one connector (31), described connector (31) is rigid member, and it is outside that described connector (31) stretches out described read head (7).
- 7. displacement transducer according to claim 1, it is characterized in that, described photodetector one (5) also includes at least one exploring block seven, described exploring block seven is located at the optional position between described exploring block one (51) and the straight line line of exploring block two (52), described electric explorer two (6) also includes at least one exploring block eight, and described exploring block eight is located at the optional position between described exploring block four (61) and the straight line line of exploring block five (62).
- 8. novel alternately increment type measures a measuring method for micro-displacement sensor, including the displacement transducer as described in as arbitrary in claim 2-7, it is characterised in that its measuring method comprises the following steps:A, testee (8) is fixedly connected on described mobile mirror (3)；B, transmitting one laser beam (11), described laser beam (11) is incident on described stationary mirror (2) at a certain angle, assuming that described angle of incidence is θ, described laser beam (11) is irradiated on described photodetector one (5) or photodetector two (6) after the continuous reflection of described stationary mirror (2) and mobile mirror (3)；nullc、Mobile described testee (8)，Drive described mobile mirror (3) to move simultaneously，The reflection path change of described laser beam (11) simultaneously，Described laser beam (11) is by the described exploring block one (51) on described photodetector one (5)、Exploring block two (52) and exploring block three (53) sense or by the described exploring block four (61) on described photodetector two (6)、Exploring block five (62) and exploring block six (63) sensing，When described testee (8) stops mobile，Exploring block one (51) described in described process system statistics、Exploring block two (52)、Exploring block three (53)、Exploring block four (61)、Exploring block five (62) and exploring block six (63) sense the spacing between the number of times of described laser beam (11) and photosensitive order and each exploring block，Draw shift value and the direction of displacement of described testee (8).
- 9. the measuring method of displacement transducer according to claim 8, it is characterized in that, according to described exploring block one (51), the counting sequence of exploring block two (52) and exploring block three (53) carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block one (51), exploring block three (53) and exploring block two (52), then measured displacement direction is the direction close to described stationary mirror (2), if counting sequence is followed successively by described exploring block two (52), exploring block three (53) and exploring block one (51), then measured displacement direction is the direction away from described stationary mirror (2).
- 10. the measuring method of displacement transducer according to claim 8, it is characterized in that, according to described exploring block four (61), the counting sequence of exploring block five (62) and exploring block six (63) carries out the judgement in measured displacement direction, if counting sequence is followed successively by described exploring block four (61), exploring block six (63) and exploring block five (62), then measured displacement direction is the direction close to described stationary mirror (2), if counting sequence is followed successively by described exploring block five (62), exploring block six (63) and exploring block four (61), then measured displacement direction is the direction away from described stationary mirror (2).
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